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Выявление количественных соотношений трибологических свойств пленок ZrN с технологическими условиями их формирования методом магнетронного распыления..pdf

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539.234
.,
.,
.
ZrN
ZrN
-
.
,
,
.
,
ZrN,
,
,
.
The regularities of the change of tribological properties and wear ability of ZrN-based films during magnetron sputtering under the influence of technological conditions of their formation have been investigated. Diagrams of dependence of these parameters to optimize the
process of obtaining and predict the properties of the antifriction and wear-resistant films, to maximize their effectiveness were received.
Key words: technological conditions of formation, anti-friction and wear-resistant films based on ZrN, magnetron sputtering,
tribological tests of films, the optimal range of process parameters.
:
,
-
,
,
,
,
(
IV
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(V )
d
-
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Ultra 55.
ZrN
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ZrN
.
2.
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-
,
ZrN,
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;
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ZrN
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1.
,
ZrN
3
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8
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110
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):
(N),
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–
(U ),
( ),
.
(N2),
-
-
(L)
N 2,42
60
Zr.
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-
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N2 35%.
,
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–
-3.
:
I
m
(f)
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-
.
:
-
2,42
( m),
V
I ;
(
);
U
:
(d ),
-
:
;U
60
1,0
46 ———————————————————————————————————
60 ; 100
N2 35%.
; N2 35% U
140
N2 35%
N 2,42
;
60 .
. . .
. 2012.
2.
…
.,
.,
.
:
f=0,07;
=0,09
V
-4
3
I =1,02 10
I V =0,33 10-8
L=100
m
; I = 0,16 10-5
; m=0,42
-1 -1
3
-1
;
-3
; d =0,44
,
: =1,0
; U =80 ; N2=35%
; N=2,09
= 7,66
: ,
–
; ,
-1
; V =0,59 10
-1
ZrN
-1 -1
; ,
;
;
-
,
–
–
–
; ,
–
100
60
.
: 2,09
N
120 , 35% N2 50%, 0,8
U
80
,
: 2,09
35% N2
N 2,42
50%, 0,8
, 100
1,0 ; 60
:
f=0,08…0,11;
=0,10…0,13
m
-5
;
;
m=2,35…6,00
;
V
-1 -1
I = 0,90…2,29 10
d =0,48…0,88
;
I =8,62…15,8
V =0,65…1,19 10-3
I V =0,90…5,23 10-8
3
-1
-1
3
.
.
-1 -1
;
-1
.
-
,
,
,
.
-
,
,
: f=0,07;
I m = 0,16 10-5
.
-1
ZrN,
-
m,
,
Im
10-5
I v , 10-4 I v
10-8,
3
3
d,
V
f
3,62 3,55
1,35
8,62
1,32
0,62
0,84
0,08 0,10
0,16
1,02
0,33
0,44
0,59
0,07 0,09
2,13
13,73
3,68
0,78
1,05
0,10 0,12
2,42
3 7,66 0,42
3 3,12
5,60
8 14,48
3 4,73 5,25
2,00
12,77
2,22
0,63
0,85
0,08 0,10
3,23
3
4,53 5,90
2,25
14,62
2,56
0,75
1,01
0,10 0,13
40
3
3,62 6,50
2,80
17,90
4,78
0,86
1,16
0,22 0,27
60
3
7,56 6,00
2,29
15,80
5,23
0,88
1,19
0,11 0,13
120
3
3,21 2,35
0,90
8,62
2,74
0,71
0,96
0,08 0,10
140
3
3,03 5,30
2,02
13,60
4,49
0,81
1,09
0,08 0,10
160
3
2,83 7,60
2,90
18,50
1,00
0,58
0,78
0,24 0,30
30
3
3,42 11,90
4,53
18,90
7,78
0,97
1,31
0,25 0,31
40
3
3,58 4,60
1,75
11,20
0,90
0,48
0,65
0,08 0,10
50
3
3,18 5,65
2,15
14,40
1,26
0,61
0,82
0,10 0,12
,
3
1,0*
=1,0
; L=100
.
; N=2,09
.
. 2012.
;U
2.
L,
N2, %
;
m=0,42
3
-1
;
-1
:
,
; V =0,59 10-3
3
-1
-1
-1
.
,
,
0,8
1,2
=0,09
I V =1,02 10-4
I V =0,33 10-8
10-3,
N,
-
-1
d =0,44
,
-
-
ZrN,
ZrN,
,
,
;
,
-
,
140
,
U
80 ,
-
= 3,18…7,56
2,42
1,0
-
,
,
.
,
ZrN
-
.
,
.
.
.
.
.
=80 ; N2=35%.
——————————————————————————————————— 47
48 ———————————————————————————————————
. . .
. 2012.
2.
…
, –
; , –
, –
; , –
.,
ZrN
; , –
.,
.
:
;
Bibliography
1.
.,
«
2.
.
3.
.
.,
//
«
X
:
, 6-8
.
.,
. 2011.
.
.
-
//
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», 2011. . 298-293.
.,
.,
ZrN,
8 //
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11. . 35-41.
. 2012.
.:
».
», 2004. . 311-318.
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ZrN
.,
.(
,
.
2.
.
.,
,
(
1.
2.
)
.
3.
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the mechanical and tribological properties of functional surfaces // Materials of XI International conference High Technology in Russian Industry.
Moscow: CRTI «Technomash», 2004. p. 311-318.
Kameneva .L., Karavaev D. . Improvement of the tribological characteristics of the films on the basis of ZrN by optimizing the processing conditions of the process of magnetron sputtering // Mineral
resources of the North: problems and solutions: Proceedings of the
9th Int. scientific and practical. Conf. (Vorkuta, April 6-8, 2011).
Vorkuta: Branch SPGGI (TU) «Vorkuta Mining Institute», 2011.
p. 298-293.
Zamaletdinov I.I., Kichigin V.I., Kameneva .L., Onyanov
., Klochkov
.Y. The influence of coatings ZrN, deposited by magnetron sputtering, on
the corrosion of the alloy VC8 // Corrosion: materials protection. Univ:
«Science and technology», 2011. 11. p. 35-41.
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