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2004
Chromium
I 5500
52- 018
A New Class of CVD Precursors to Metal Borides: Cr(B3H8)2 and Related Octahydrotriborate Complexes. — Compounds (III) and (IV) are characterized by IR and
EPR spectroscopy. The molecular structures of (IV) (triclinic, space group P1), (V)
(monoclinic, P21/c), (VI) (monoclinic, P2 1/n), and (VII) (orthorhombic, Pbca) are determined by single crystal XRD. The transition metal borides are hard, refractory, and
electrically conductive materials of interest as hard coatings and as barriers in ULSI
circuits. Passage of (IV) over substrates heated to >200 °C affords silvery metallic mirrors of highly pure CrB2. The successful use of (IV) to grow CrB2 thin films suggests
that other metal borides for which no suitable CVD precursor currently exists may be
accessible through the use of molecules containing the B3H8 ligand. — (GOEDDE, D.
M.; GIROLAMI*, G. S.; J. Am. Chem. Soc. 126 (2004) 39, 12230-12231; Sch.
Chem. Sci., Univ. Ill., Urbana, IL 61801, USA; Eng.) — W. Pewestorf
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