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BY (11) 8979
(13) C1
(46) 2007.02.28
(19)
(12)
7
(51) H 01L 21/28, 21/31
(54)
(21)
(22) 2004.11.12
(43) 2005.06.30
(71)
:
"
(72)
:
: a 20041031
(73)
:
"
" (BY)
;
;
(BY)
"
(BY)
(56)
.
.
2002. - .31, 3. - . 201-210.
SU 1577617 A1, 1995.
RU 2019548 C1, 1994.
JP 58135639 A, 1983.
US 4152195, 1979.
US 3700497, 1972.
US 3179634, 1965.
.-
(57)
-
,
,
,
,
,
BY 8979 C1 2007.02.28
,
5-20
,
,
BY 8979 C1 2007.02.28
160 °
15
,
250 °
.
,
,
-
.
-
,
.
.
(
)
.
(
(
).
)
-
,
.
,
.
-
[1].
50-185 °
15
,
,
.
400 °
2-180
,
,
.
150.
,
( .
.),
.
,
,
(
),
,
,
.
[2].
,
.
-
–
,
.
.
-
,
.
2
-
BY 8979 C1 2007.02.28
.
(
,
, –
.),
3
,
.
,
,
,
.
[1]
-
,
,
.
.
-
,
,
,
.
,
~250 ° ,
-
~300 ° ,
-
,
~400 ° ,
.
.
185 °
15
.
,
,
,
.
-
–
.
,
,
.
,
.
[2].
-
,
.
250 ° .
,
,
,
-
.
,
.
,
.
-
,
,
.
,
.
,
.
3
BY 8979 C1 2007.02.28
.
,
400 ° ,
,
(
-
),
.
-
.
,
,
-
,
,
,
,
-
350 °
90
[3].
.
,
.
-
,
.
,
.
.
.
,
Al–F
,
,
-
.
.
.
,
,
,
-
,
,
,
,
5-20
160 °
,
15
,
250 °
-
.
,
.
.
,
,
4
.
-
BY 8979 C1 2007.02.28
.
,
.
.
(
.
5 %)
20
.
5-
,
(
)
,
.
(
5
,
.
)
,
,
-
.
.
,
,
.
,
-
,
.
.
(
)
),
(1-2
)
,
-
.
(
,
.
-
5-20
.
-
.
5
,
,
2
,
.
.
20
,
40
,
-
,
-
,
,
.
.
.
,
.
,
,
,
.
,
-
,
.
(
,
,
.).
.
.
,
.
,
.
5
.
BY 8979 C1 2007.02.28
,
,
.
.
.
,
.
,
.
.
,
15
,
170 °
160 ° .
20
,
.
.
10 °
,
,
.,
[4],
2-4
.
-
,
(
250 ° ),
,
.
,
,
.
,
250 ° .
,
.
,
220 ° ,
,
.
-
250 °
(
)
,
.
.
-
l2 3 + 3 4 →
l + 2 → l2 3 +
:
+
2↑.
4
2
,
,
-
-
.
.
O= C
H
HOOC
N
CH3
CH3
COOH
NH
CO
O
NH
CO
n
6
BY 8979 C1 2007.02.28
HOOC
COOH
NH
CO
O
+
NH
CO
n
+
O =C
H
N
CH3
CH3
:
HOOC
COOH
NH
CO
O
NH
CO
n
CO
CO
N
N
CO
+ H2O
O
CO
n
:
HOOC
COOH
NH
CO
O
NH
+ Al
CO
n
AlOOC
COOAl
NH
CO
O
+ H2
NH
CO
n
,
:
7
,
-
BY 8979 C1 2007.02.28
HOOC
COOH
NH
CO
O
NH
+ Al2O3
CO
n
AlOOC
COOAl
NH
CO
O
NH
+ H2O
CO
n
HOOC
COOH
NH
CO
O
NH
+ Al2O3 + H2O
CO
n
AlOOC
COOAl
H
H
+O=Al O H:N
AlOOC
COOAl
N:H O Al=O
O
H
H
~300 ° .
(
-
400 ° )
,
[2],
.
-
.
72,3
∆m
2 -
,
,
,
3 - 53,7
.
1
+ 5,9
48,3
+8,9
-
.
.
,
3,
(
(
).
,
.
2)
,
,
100 ° ,
.
8
-
BY 8979 C1 2007.02.28
,
,
,
.
.
4,5
,
1%
1,1±0,1
1%
1%
-
.
.
.
.
-
3.240.212.
,
8,7
, 7,9
.
9,1
-
3.240.213.
(Rs)
Rs = N
0 028.108
08
-125.
125.
3/15.
(
-
Rs<N).
02
1,1±0,1
.
-
.
[5] (
.
-
l3 <l2 <l1).
.
-
,
,°
+
,
2,0
5,0
10,0
20,0
40,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
150
150
150
150
150
130
160
170
160
160
160
150
150
150
150
150
150
10
10
10
10
10
10
10
10
5
15
30
10
10
10
10
10
10
9
,°
350
350
350
350
350
350
350
350
350
350
350
200
250
450
350
350
450
-
,
30
30
30
30
30
30
30
30
30
30
30
30
30
30
10
60
30
l2
l1
l1
l1
l1
l1
l1
l3
l1
l1
l2
l3
l1
l1
l1
l1
l1
-
Rs<N
BY 8979 C1 2007.02.28
-
,
-
+
+
-
+
,°
,
2,0
5,0
10,0
20,0
40,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
2,0
5,0
10,0
20,0
40,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
2,0
5,0
10,0
20,0
40,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
150
150
150
150
150
130
160
170
160
160
160
150
150
150
150
150
150
150
150
130
160
170
160
160
160
150
150
150
150
150
150
150
150
150
150
150
130
160
170
160
160
160
150
150
150
10
10
10
10
10
10
10
10
5
15
30
10
10
10
10
10
10
10
10
10
10
10
5
15
30
10
10
10
10
10
10
10
10
10
10
10
10
10
10
5
15
30
10
10
10
10
,°
350
350
350
350
350
350
350
350
350
350
350
200
250
450
350
350
350
350
350
350
350
350
350
350
350
200
250
450
350
350
450
350
350
350
350
350
350
350
350
350
350
350
200
250
450
-
,
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
10
60
30
30
30
30
30
30
30
30
30
30
30
30
30
30
30
l2
l1
l1
l1
l1
l1
l1
l3
l1
l1
l2
l3
l1
l1
l2
l1
l1
l1
l1
l1
l1
l3
l1
l1
l2
l3
l1
l1
l1
l1
l1
l2
l1
l1
l1
l1
l1
l1
l3
l1
l1
l2
l3
l1
l1
-
Rs<N
Rs<N
Rs<N
BY 8979 C1 2007.02.28
-
,
+
-
-
,°
,
2,0
5,0
10,0
20,0
40,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
10,0
150
150
150
150
150
130
160
170
160
160
160
150
150
150
10
10
10
10
10
10
10
10
5
15
30
10
10
10
,°
350
350
350
350
350
350
350
350
350
350
350
200
250
450
-
,
30
30
30
30
30
30
30
30
30
30
30
30
30
30
l2
l1
l1
l1
l1
l1
l1
l3
l1
l1
l2
l3
l1
l1
l2
-
Rs<N
,
,
.
,
-
.
:
1. Yasoo Harada, Fumio Matsumoto, and Takashi Nakakado. A Novel Polyimide Film
Preparation and Its Preferential-Like Chemical Etching Techniques for GaAs Devices. Solid
State Science and Technology. January, 1983, vol. 130, N 1, p. 129-134.
2. Wilson A.M. Polyimide insulators for multilevel interconnections // Thin solid films. 1981. - V.83. 2. - P. 145-163.
3.
.,
.
//
. - 2002. 31,
3. . 201-210 (
).
4.
.
.
.
1. - .:
, 1988. - . 202.
5.
15140-78.
.
. - .:
, 1978.
.
220034, .
,
.
, 20.
11
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