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FR2518325A1

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Molecule
(17/ 31)
[6][_]
titanium nitride
(6)
[7][_]
argon
(5)
[8][_]
titanium
(3)
[9][_]
copper
(3)
[10][_]
water
(2)
[11][_]
DES
(1)
[12][_]
gold
(1)
[13][_]
silver-copper
(1)
[14][_]
palladium
(1)
[15][_]
platinum
(1)
[16][_]
silver
(1)
[17][_]
iridium
(1)
[18][_]
phosphorus
(1)
[19][_]
solut
(1)
[20][_]
depo
(1)
[21][_]
acetone
(1)
[22][_]
ethanol
(1)
[23][_]
Physical
(7/ 7)
[24][_]
350 percent
(1)
[25][_]
10 minutes
(1)
[26][_]
3 d
(1)
[27][_]
de 40 m
(1)
[28][_]
de 10-6 torr
(1)
[29][_]
10-3 torr
(1)
[30][_]
de 300 watts
(1)
[31][_]
Gene Or Protein
(6/ 6)
[32][_]
Refractaire
(1)
[33][_]
Etre
(1)
[34][_]
Tre
(1)
[35][_]
Nitr
(1)
[36][_]
Ocl
(1)
[37][_]
Otpa
(1)
[38][_]
Generic
(3/ 5)
[39][_]
metals
(2)
[40][_]
nitride
(2)
[41][_]
acid
(1)
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Publication
_________________________________________________________________
Number FR2518325A1
Family ID 5182306
Probable Assignee Ramy Jean Pierre
Publication Year 1983
Title
_________________________________________________________________
FR Title PROCEDE DE PROTECTION D'UNE PIECE CONDUCTRICE ET PIECE
CONDUCTRICE OBTENUE PAR CE PROCEDE
Abstract
_________________________________________________________________
PROCEDE DE REVETEMENT D'UNE PIECE CONDUCTRICE ET PIECE OBTENUE PAR CE
PROCEDE.
SELON L'INVENTION LE REVETEMENT EST EN titanium nitride.
APPLICATION A LA PROTECTION DES CONTACTS ELECTRIQUES.
Description
_________________________________________________________________
La presente invention a pour objet un proce- cdede protection d'un
conducteur metallique et-'un con- ducteur metallique obtenu par ce
procedee Elle trouve une application notamment dans la protection des
con-
' tacts electriquesut'tilises dang-les relais,-les con- necteurs, etc
' ': Aotue 1 lement, les revetements protecteurs de conducteurs
utilisent des couches de metals pre-
-cieux tels que gold, l'silver-copper, l'gargent-palladium, le
platinum, l'silver, l'iridium, etc Ces re- vetements presentent deux
inconvenients: ils sont chers et presentent une faible durete - La
presente invention a justement pour but -d'eviter ces inconvenients Ce
but est atteint selon l'invention par l'utilisatipn, comme reve'tement
pro- tecteur, de titanium nitride Ce materiau est beau- coup moins
onereux que les metals utilises precedem- ment et il possede une
durete exceptionnelle De plus, il est refractaire, sa 'stabilite
chimique est tres grande, et il presente une conductivite electrique
sa- tisfaisante Enfin, ces proprietes sonE obtenues pour de tres
faibles epaisseur s *ra De facon plus precise, la presente: dnvention
a donc pour objet-un procede de protectior:d'une piece conductrice par
regtemen't procede-qui est'caracteri- se -en ce qu'il-consiste
a'deposer sur -ette;piece une couche de nitride de'titaiine:'-.
La presente inventioni" egalement pour objet une piece conductrice
obtenue pair ce procede, qui est caracterisee en ce qu'elle est
revetue d'uhe:couche en titanium nitride ' ";: -; t.
Le dept protecteur en -nitride' de titanium presente les proprietes
suivantes: i 1) une excellente adherence; (superieure a kg/cm 2) -'
:2) une excellente inertie chimique, (il satisfait no- tamment a
l'essai d'atmosph rez 4ndustrielle en 3) une excellente resistance
aybsq,, r 4), ure resistivite de il,'ordre de, 500 w C Xm qui peut
etre ajustee par le tqqx,ae - nitrur atibn.
Laltechnologi 2 de dep t,,du -nitrurede titanium peut faire Appel a-
la pulverisation- cathodiquei avec-
*:par exemple, l'argon comme gaz traceur Il est bien entendu que ceci
n'est pas limitatif t le depEt peut *.aussi s'obtenir par
pulverisation reactive de titanium, ou par evaporation thermique
-bronze phosphorus peut e@tre le-suivant:s -.,a) _preparation
cles-plots, et de,Jams:,
-decapage par imimers Lopn -ansE ur 4 e solution -sulfochro- q c 1 c 1
isag eetrohimiue pr 'e de,e d ',une iminersion? 251 'o and #x003E;g'ie
1 ans,:une, solut-ion g acidnitr 1 i-que a 350 percent,' peniiant 30
Jecnde,,i, c ag::leau d esionisee, froide pendant 10 minutes et d-1 un
sechage-par jet,d\argon; le: bain depo Jig;agcrest,onst-itu' d'un
melange de i 7 O,7 O cm 3 d-' acide,orthophosphorique (H 3 Ocl e
de;otpa-30,0-2 c M 1 d'water desionisee, la cathode, est en copper et
le courant est de 40 m Ac' -le polissage dure
-;,I 3 00 m'uee totse riu les pieces a po- lir, qui qonstituen t
l'fanode, sont retirees du bain, X --'-r-fncees a:l'ea Wl fdesionizee
puis sechees par J et d'argon. degraissage par immersion dans des
bains ultrasoni- ques d'acetone puis d'ethanol. rincage a l'water
desionisee sechage par jet d'argon. b) depot du materiau: la materiau
protecteur est depose par pulverisation cathodique en radiofrequence
dans une enceinte a vide, a l'aide d'une cible en titanium nitride; le
vide initial dans l'enceinte est de l'ordre de 10-6 torr.
La pression d'argon necessaire a la formation du plas- ma est de a
10-3 torr La puissance appliquee est de l'ordre de 300 watts.
2518325-
Claims
_________________________________________________________________
REVENDICATIONS
1 Procede de protection d'une piece conduc- trice par revetement,
caracterise en ce qu'il consiste a deposer sur cette piece une couche
de titanium nitride.
2 Procede selon la revendication 1, carac- terise en ce que la piece
est un contact electrique.
3 Piece conductrice obtenue par le procede de la revendication 1,
caracterisee-en ce qu'elle est revetue d'une couche de titanium
nitride.
4 Piece conductrice selon la revendica- tion 2, caracterisee en ce
qu'elle est en copper ou a base de copper.
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