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JPS6281900

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DESCRIPTION JPS6281900
[0001]
[Summary] In an ultrasonic probe for an ultrasonic diagnostic apparatus in which two types of
ultrasonic transmitting and receiving elements having different frequencies are arranged, the
thickness of the piezoelectric material used for one ultrasonic transmitting and receiving element
is uniform. , Reduced the manufacturing cost. [Industrial field of application] The present
invention relates to an ultrasonic probe which is used as a probe of an ultrasonic diagnostic
apparatus, in particular, an ultrasonic probe which is constructed by alternately arranging
ultrasonic transmitting and receiving elements of two cages different in frequency. It relates to a
tentacle. The ultrasonic diagnostic apparatus transmits ultrasonic pulses from the outer surface
of the human body to the inside by sector scanning or linear scanning, receives the reflected
wave, and measures the distance to the reflection point. It is a device that observes the state and
movement of organs and the like on a certain plane. The sector scan sequentially transmits
ultrasonic waves from one point in a fan shape, and the linear scan sequentially transmits
ultrasonic waves in parallel from each point on a straight line. There are 1 mechanical and
electronic methods for both sector scan and linear scan, and the former has 9 mechanical
rotations or straight lines of the ultrasonic probe composed of a small number of, for example, 1
to 3 ultrasonic transmitting and receiving elements. The latter transmits and receives ultrasonic
waves while moving, and the latter electronically drives each element using an array-type
ultrasonic probe composed of a plurality of ultrasonic transmitting and receiving elements
linearly arranged. is there. Recently, electronic scanning has become the mainstream in both
sector scanning and linear scanning. For example, in linear scanning, 300 to 400 piezoelectric
elements are arranged at a pitch of 0.3 to 0.4 mm, and in sector scanning for example 32 to 40
What arranged 64 piezoelectric elements by the pitch of 0.2-0.3 mm is used. In the case of an
ultrasound probe for an ultrasound system. Usually, a piezoelectric material such as piezoelectric
ceramic is used as an ultrasonic transmitting / receiving element to constitute this, and a
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1
matching layer for matching with the acoustic impedance of 9 human bodies is used on one side
(surface) of the material. The side surface (rear surface) is provided with a rear surface absorber
for absorbing ultrasonic waves. By the way, as described above, in the ultrasonic diagnostic
apparatus, the distance to the reflection point is measured by the 1 reflection method using an
ultrasonic pulse, so the shorter the wavelength of the ultrasonic wave, the higher the resolution
and the longer the wavelength. There is a characteristic that the reach distance is long because
the attenuation in the human body is so small. For this reason, it is desirable that an ultrasonic
probe capable of transmitting and receiving two types of ultrasonic waves different in two
frequencies be provided inexpensively. [Prior Art] FIG. 4 is a block diagram of a conventional
example.
1 'is a first ultrasonic transmitting and receiving element. 2 'is a second ultrasonic transmitting
and receiving element for transmitting and receiving an ultrasonic wave of a higher frequency
than the ultrasonic wave transmitted and received by the first ultrasonic transmitting and
receiving element 1'. 11 'is a piezoelectric material for forming the first ultrasonic transmitting /
receiving element 10M. 13 'is a matching layer formed on the surface of the first ultrasonic
transmitting / receiving element. 21 'is a piezoelectric material constituting the second ultrasonic
wave transmitting / receiving element 2'. 23 'is a matching layer formed on the surface of the
second ultrasonic transducer 2'. Further, 3 'is a back surface absorber formed commonly to the
first ultrasonic transmitting and receiving element 1' and the second ultrasonic transmitting and
receiving element 2 '. That is, by arranging two types of ultrasonic transmitting and receiving
elements different in one frequency alternately in series and driving them by scanning, two types
of ultrasonic waves can be simultaneously transmitted and received. [Problems to be solved by
the invention] In the conventional example of the above configuration, the first ultrasonic
transmitting and receiving element 1 'and the second ultrasonic transmitting and receiving
element 2'. Each of them is formed by forming a matching layer of a predetermined thickness on
the surface of a piezoelectric material processed to a predetermined thickness, and then cut into
a predetermined size by a guising cuffter. These are alternately arranged to form an epoxy resin
and a filler. Manufactured by the method of integrating by the back surface absorber 3 'which
has as a main component. Although a piezoelectric ceramic is generally used as a piezoelectric
material which is a main component of an ultrasonic wave transmitting / receiving element, the
piezoelectric ceramic is fragile and requires special care in handling. Further, as described above,
there is a problem that it takes a lot of man-hours to arrange the piezoelectric materials of
different thicknesses having the matching layer formed on the surface by 1 (1I 1). Therefore, the
present invention aims to reduce the manufacturing cost by reducing the number of steps.
[Means for Solving the Problems] FIG. 1 shows the principle of the present invention. 11 is a
piezoelectric material of thickness t which is a component of the first ultrasonic wave
transmitting / receiving element 1; A non-piezoelectric material 12 is a component of the first
ultrasonic transmitting and receiving element 1 and is fixed to the back surface of the
piezoelectric material 11. Reference numeral 21 denotes a piezoelectric material of thickness t
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2
which is a component of the second ultrasonic wave transmitting / receiving element 2.
[Operation] When a non-piezoelectric material such as a metal having a thickness and an acoustic
impedance substantially equal to that of the piezoelectric material is fixed by adhesion or the like,
the piezoelectric material is driven. Due to a phenomenon called so-called complex resonance,
there is a property of generating an ultrasonic wave of approximately half frequency at two
frequencies. Further, since the thickness of the piezoelectric material 11 and the thickness of the
piezoelectric material 21 are the same, they can be integrally processed from the common
material, and therefore, the yield can be improved and the number of steps can be reduced.
FIG. 2 is a block diagram of the embodiment, in addition to the reference numerals common to
FIG. 11 ′ ′ is a piezoelectric ceramic which is a piezoelectric material of the first ultrasonic
transmitting and receiving element 1. 21 ′ is a piezoelectric ceramic which is a piezoelectric
material of the second ultrasonic transmitting and receiving element 2. 12 "is a piezoelectric
ceramic as a non-piezoelectric material, copper fixed by an adhesive to the back surface of the
copper 11". 13 ′ ′ is a matching layer of the first ultrasonic transmitting and receiving element
1. 23 ′ ′ is a matching layer of the second ultrasonic transmitting and receiving element 2.
Reference numeral 3 ′ denotes a back side absorber formed commonly to the first ultrasonic
transmitting and receiving element 1 and the second ultrasonic transmitting and receiving
element 2. An ultrasound probe of such a configuration can be manufactured by the following
general procedure (see FIG. 3). The piezoelectric ceramic 10 with i9 width W and length L is
processed to a predetermined thickness t. ii, copper of width a and thickness L is alternately
bonded to the back surface (upper side in the figure) of the piezoelectric ceramic lO at a pitch of
2a in the longitudinal direction. iii. On the surface of the piezoelectric ceramic 10 (lower side in
the figure), the matching layers 13 ′ ′ and 23 ′ ′ having a width a and a predetermined
thickness are alternately formed in the longitudinal direction. iv. On the back surface of the
piezoelectric ceramic 10 to which copper 12 ′ is bonded, a layer (not shown) of a back surface
absorber of a predetermined thickness is formed. {Circle over (3)} Starting from the surface side
of the piezoelectric ceramic 10, the first ultrasonic wave transmitting / receiving element 1 and
the second ultrasonic wave transmitting / receiving element 2 are acoustically separated by
scoring with a dicing cutter as shown by dotted lines in FIG. ■ Fill in the notch by epoxy resin
with gishing resin. [Effects of the Invention] As described above, according to the present
invention 2, ultrasonic transmitting and receiving elements having different frequencies can be
integrally formed from a common piezoelectric material. For this reason, it is not necessary to
process and rearrange two types of ultrasonic transmitting and receiving elements having
different frequencies as in the conventional example one by one. Therefore, the yield can be
increased, the number of steps can be reduced, and the cost can be reduced.
[0002]
Brief description of the drawings
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[0003]
FIG. 1 is a principle diagram of the present invention.
FIG. 2 is a block diagram of an embodiment. FIG. 3 is an explanatory view of the embodiment.
FIG. 4 is a block diagram of a conventional example. In the figure. 1 is a first ultrasonic
transmitting and receiving element. 2 is a second ultrasonic transducer. 11 and 21 are
piezoelectric materials. Conventional 塘 T vortex
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