close

Вход

Забыли?

вход по аккаунту

?

JP2005203976

код для вставкиСкачать
Patent Translate
Powered by EPO and Google
Notice
This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
financial decisions, should not be based on machine-translation output.
DESCRIPTION JP2005203976
The present invention provides a nondestructive inspection device, a diagnostic device for
medical use, and an ultrasonic linear array transducer which can be used in an image forming
device and can achieve good ultrasound focusing. A support (10) is formed in a shape in which a
plurality of supports (11) for supporting individual ultrasonic piezoelectric elements are
arranged at a predetermined pitch in the X direction. The support portion 11 is formed to have a
surface having a convex curvature in the X direction, and the longitudinal central portion of the
support portion 11 is formed to have a surface having a concave curvature in the Y direction. A
wiring electrode 12 is formed, a piezoelectric polymer film 13 is disposed thereon, and a
common electrode is further covered thereon. The ultrasonic waves emitted from the individual
ultrasonic piezoelectric elements 14 are focused on one point (one line in the X direction) in the
Y direction by the concave surface in the Y direction on the one hand, and a convex surface in
the X direction on the other The light is diffused at a wide angle in the X direction, and focused at
a target point in the X direction by delayed drive control. [Selected figure] Figure 1
Ultrasonic linear array transducer
[0001]
The present invention relates to a nondestructive inspection device, a diagnostic device for
medical use, an ultrasonic transducer used in an image forming device, in particular, an
ultrasonic linear array transducer.
[0002]
In recent years, ultrasonic waves have a high frequency, a short wavelength and excellent
directivity, making it easy to detect reflected waves, etc., so various fields such as nondestructive
03-05-2019
1
inspection devices, medical diagnostic devices, image forming devices, etc. It is used by
[0003]
For example, for an array-type ultrasonic transducer (transducer: transducer, transducer,
transducer), a configuration of an array-type ultrasonic transducer with high sensitivity, high
spatial resolution, and high contrast resolution has been proposed.
(See, for example, Patent Document 1).
A method of producing an ultrasonic transducer, which is optimal for medical diagnosis of a
living tissue, is also proposed, which receives received ultrasonic waves generated at the time of
contrast agent bubble destruction with transmitted ultrasonic waves with high sensitivity and
high selectivity. (For example, see Patent Document 2). Furthermore, as an example of using
ultrasonic waves in the image forming apparatus, the line recording head of an ink jet printer is
constituted by an ultrasonic transducer, and an acoustic lens is used to move the ink column by
ultrasonic waves. A method has been proposed to fly drops to form an image. (For example, see
Patent Document 3). It has also been proposed to use an ultrasonic wave of an ultrasonic linear
array transducer to destroy the color material contained in the microcapsule toner to form an
image.
[0004]
FIG. 13 (a) is a view showing an example of the constitution of a microcapsule toner containing a
coloring material before color development before such destruction, and FIGS. 13 (b) and (c)
show that the capsule toner is an ultrasonic wave. It is a figure explaining the principle which
receives irradiation and selectively colors.
[0005]
First, as shown in FIG. 6A, the capsule toner T contains three types of small diameter
microcapsules 2 (2M, 2C) of magenta (M), cyan (C) and yellow (Y) in the large diameter
microcapsules 1. , 2Y), and the small diameter capsule wall 3 is formed in each of the small
diameter microcapsules 2M, 2C, 2Y.
[0006]
03-05-2019
2
The diameter of the large diameter microcapsules 1 is, for example, 15 μm, and the diameter of
the small diameter microcapsules 2 is, for example, 1 to 4 μm, depending on the color.
Then, a plurality of small diameter microcapsules 2M, 2C, and 2Y are contained in one large
diameter microcapsule 1 so that the amount of pigment for each color is the same.
[0007]
As described above, the diameter of the small-diameter microcapsule 2 or the small-diameter
capsule wall 3 is different for each color in order to make the resonance frequency different for
each color.
These small diameter microcapsules 2M, 2C, and 2Y are enclosed in the large diameter
microcapsule 1 and dispersed randomly in the gel-like holding layer 5 in which the color
developing agent 4 is mixed. Incidentally, the small diameter microcapsule 2 'shown in the figure
shows the colored small diameter microcapsule.
[0008]
FIGS. 7B and 7C are views showing a state in which the capsule toner T is irradiated with
ultrasonic waves in the coloring portion of the image forming apparatus main body. As described
above, the capsule toner T contains three types of small diameter microcapsules 2M, 2C, 2Y of
magenta (M), cyan (C), and yellow (Y) in the large diameter capsule 1, and has a resonance
frequency of The small diameter capsule wall 3 of the small diameter microcapsule which has
received the ultrasonic waves is destroyed, and the color former 4 inside mixes with the
developer 5 and reacts to develop color.
[0009]
For example, FIG. 7B shows that the capsule toner T is irradiated with the ultrasonic wave S of a
single resonance frequency from an ultrasonic linear array transducer (not shown). In this case,
03-05-2019
3
only the small diameter microcapsules vibrating at this resonance frequency are broken to
develop color. Also, FIG. 6C shows a state in which the capsule toner T is irradiated with the
ultrasonic waves S1 and S2 of two resonance frequencies from the ultrasonic linear array
transducer. In this case, the small diameter capsules vibrating at these resonance frequencies S1
or S2 are broken and respectively colored.
[0010]
For example, when only the small diameter capsule wall 3 of the small diameter microcapsule 2M
is broken, the magenta (M) color is developed. When only the small diameter capsule wall 3 of
the small diameter microcapsule 2C is broken, the cyan (C) color is developed. Further, when the
small diameter capsule wall 3 of the small diameter microcapsule 2M and the small diameter
capsule wall 3 of the small diameter microcapsule 2C are broken, red color is developed, and the
small diameter capsule wall 3 of the small diameter microcapsule 2C and the small diameter
capsule wall of the small diameter microcapsule 2Y When 3 is destroyed, blue color is developed.
[0011]
FIG. 14 is an external perspective view of an ultrasonic linear array transducer that emits an
ultrasonic wave that breaks the small diameter capsule wall 3 of the small diameter microcapsule
2 described above. In the ultrasonic linear array transducer 6 shown in the same drawing, an
ultrasonic element is formed in the longitudinal direction.
[0012]
FIG. 15 is a diagram specifically explaining the configuration of the ultrasonic linear array
transducer 6 described above, and FIG. 15 (a) is a top view of the ultrasonic linear array
transducer 6, and FIG. A top view of the electrode, (c) of the same is a cross-sectional view taken
along the line A-A 'in (b) of the same, and (d) is a cross-sectional view taken along the line B-B' of
the same (c).
[0013]
The ultrasonic linear array transducer 6 is constructed by laminating five layers of members in a
03-05-2019
4
carrier 7 as shown in FIGS.
The common electrode 8-5 (earth) is disposed in the lowermost layer (fifth layer), the ultrasonic
element 8-4 which is a piezoelectric element is disposed in the fourth layer, and the main
scanning direction is disposed in the third layer. In the second layer, an acoustic impedance
matching layer 8-for reducing the difference in acoustic impedance between the ultrasonic
element 8-4 and the ultrasonic wave propagation medium is disposed. 2 is disposed, and an
acoustic lens 8-1 is disposed in the first layer.
[0014]
The individual application electrode 8-3 and the common electrode (earth) 8-5 are connected to
the ultrasonic element 8-4, and the individual wiring 8-3-1 is drawn out from the individual
individual application electrode 8-3. ing. From these electrodes, an ultrasonic output signal for
oscillating ultrasonic waves that destroys the aforementioned desired small diameter capsule wall
3 is supplied. The ultrasonic element 8-4 is distorted when the above signal is applied, and
ultrasonic vibration is excited at a predetermined frequency.
[0015]
The ultrasonic vibration excited by the ultrasonic element 8-4 is refracted by the acoustic lens 81 through the acoustic impedance matching layer 8-2 and focused to a designated position
(designated distance). As described above, the acoustic impedance matching layer 8-2 has a
function of reducing the difference in acoustic impedance between the ultrasonic element 8-4
and the ultrasonic wave propagation medium.
[0016]
Generally, in order to focus the ultrasonic beam of the pixel size to the designated position where
the microcapsule toner T is disposed, it is difficult to process the ultrasonic element 8-4 into a
fine size, and the above-mentioned small diameter capsule Since it is difficult to obtain the sound
pressure of the ultrasonic wave necessary to destroy the wall 3 with one ultrasonic element 8-4,
a plurality of ultrasonic elements 8- consisting of a plurality in the main scanning direction and
the sub scanning direction The ultrasound beam of pixel size is focused on the designated
position by focusing the ultrasound beam of 4.
03-05-2019
5
[0017]
FIG. 16 is a view showing the relationship between the ultrasonic element 8-4 disposed in the
main scanning direction (X direction) and the focusing position of the ultrasonic wave output
from the ultrasonic element 8-4.
In the figure, for the sake of explanation, element numbers 1, 2, 3,... Are given to the ultrasonic
element 8-4 from the left side of the drawing. In addition, pixel numbers (for example, 1 to
17168) are assigned to the focusing positions shown in FIG. The focusing position is, for
example, a position facing the ultrasonic linear array transducer 6 while the capsule toner T is
electrostatically adhered and conveyed on the photosensitive drum or the intermediate transfer
member of the electrophotographic image forming apparatus is there.
[0018]
FIG. 17 is a diagram showing a part of the arrangement configuration of the ultrasonic element
8-4 in an enlarged manner, for example, showing the ultrasonic elements "1" to "6" in an
enlarged manner. The ultrasonic elements 8-4 adjacent to each other are disposed with a gap d,
and at the same time, the m ultrasonic elements 8-4 are driven with a time delay.
[0019]
For example, considering point A shown in the same figure, at the same time, m (for example, 5)
ultrasonic elements 8-4 are delayed in time to be strong at the centers (point A) of Apply
ultrasound. For example, the distance between the ultrasonic element 8-4 of "1" and the point A,
the distance between the ultrasonic element 8-4 of "2" and the point A, and the distance between
the ultrasonic element 8-4 of "3" and the point A are The output timing of each of the ultrasonic
elements 8-4 is shifted from this distance difference and the propagation speed of the ultrasonic
wave, and ultrasonic output is performed at a predetermined timing. By controlling in this
manner, it is possible to simultaneously irradiate strong ultrasonic waves to the point A.
[0020]
03-05-2019
6
In addition, by adjusting the timing of the ultrasonic wave output from the ultrasonic element 8-4
as well as the point A, a position narrower than the arrangement pitch of the ultrasonic elements
8-4 (for example, a position of 1 / 2d, It is also possible to focus the ultrasonic beams output
from the plurality of ultrasonic elements 8-4 at point B). Therefore, for example, by controlling
the focus position of the ultrasonic beam in the main scanning direction at one pixel interval (at
pitch d), the strong ultrasonic beam is focused on the capsule toner T at one pixel interval. It is
possible to destroy the small diameter capsule wall 3 and perform desired color development at
an interval of one pixel.
[0021]
In addition, in the sub-scanning direction, the focusing size of the ultrasonic beam can be
reduced by utilizing the refraction of the acoustic lens 8-1. Therefore, it is possible to form a
higher resolution image by configuring the focusing pixel size to be smaller in the sub-scanning
direction. For example, by setting the pixel size to 1/4, an ultrasonic beam can be supplied four
times to one pixel, and color control of four gradations can be performed. JP 2003-310608 A
([abstract], [0031] to [0040], FIGS. 1 to 5) JP 2003-325526 A ([abstract], [0006], [0031] to
[0036], 1 to 4) Japanese Patent Application Laid-Open No. 2002-029052 ([Abstract], FIG. 1, FIG.
9)
[0022]
Generally, an ultrasonic beam irradiated by an ultrasonic linear array transducer can be
narrowed down by delay control of ultrasonic irradiation as described above with respect to
ultrasonic focusing in the array direction (x direction) of ultrasonic elements. Then, in the
longitudinal direction (Y direction) of the ultrasonic element, the acoustic lens narrows and
focuses.
[0023]
The ultrasonic transducers disclosed in Patent Documents 1 to 4 described above are, for
example, concave in the Y direction in order to focus ultrasonic waves in the longitudinal
direction (Y direction) of the above-mentioned elements which intersect with the arrangement
direction of the ultrasonic elements. An acoustic lens is used which has a shape or a convex
shape.
03-05-2019
7
[0024]
Such a method is widely used in medical echo devices etc. However, since a relatively low
frequency is used even for ultrasonic waves in medical echo devices, the focused beam has a
certain size And therefore there is a limit to improving resolution.
[0025]
In order to increase the resolution, the ultrasonic wave must be further increased in frequency.
When the frequency is increased, the directivity is further enhanced.
Here, in order to obtain a minute focused beam in the x direction using delay control, it is
necessary to collect ultrasonic waves from the respective ultrasonic elements arranged in a wide
range (wide angle).
[0026]
This is contrary to the increase in directivity due to the increase in frequency, and in order to
realize this, the width of the ultrasonic element must be further reduced (narrowed) in order to
widen the directivity.
[0027]
However, if the width of the ultrasonic element is reduced, not only the problem that the
ultrasonic energy that can be generated decreases but also the processing becomes difficult and
the number of wires also increases, so the circuit scale increases and the cost increases. turn into.
[0028]
The subject of the present invention is, in view of the above-mentioned conventional
circumstances, each ultrasonic element can generate a large sound pressure with high energy,
can generate a wide angle ultrasonic wave, it is easy to process the shape, as a whole An
ultrasonic linear array transducer capable of obtaining focused ultrasonic waves with high
resolution in both X and Y directions with a small number of ultrasonic elements.
03-05-2019
8
[0029]
First, the ultrasonic linear array transducer of the first invention is an ultrasonic linear array
transducer in which a plurality of ultrasonic piezoelectric elements are juxtaposed on the support
along the longitudinal direction of the long support. The shape in the longitudinal direction of
each of the ultrasonic piezoelectric elements in the lateral direction of the support is concave,
and the shape in the lateral direction of each of the ultrasonic piezoelectric elements in the
longitudinal direction of the support is convex It is comprised so that it may be formed.
[0030]
In this case, each of the ultrasonic piezoelectric elements focuses ultrasonic waves at a desired
position in the space along the lateral direction of the support, for example, by the shape of the
concave formed in the longitudinal direction, and makes the convex shape The formed latitudinal
shape is configured to diffuse the ultrasonic wave to a desired position in the space along the
longitudinal direction of the support.
[0031]
In addition, the plurality of ultrasonic piezoelectric elements are formed, for example, by a
holding portion by the individual wiring electrodes in a sheet of piezoelectric polymer film held
between the common ground electrode and the plurality of individual wiring electrodes on the
support. .
Further, the support is formed by, for example, forming a large number of air inlets for adsorbing
and attaching the piezoelectric polymer film.
[0032]
Next, an ultrasonic linear array transducer according to a second aspect of the present invention
is an ultrasonic piezoelectric element formed by arranging a plurality of juxtaposed on the
support along the longitudinal direction of the long support, and irradiation from the ultrasonic
piezoelectric element An ultrasonic linear array transducer comprising: an ultrasonic reflection
plate disposed in the direction of an irradiation center direction of ultrasonic waves and
reflecting the ultrasonic waves in a direction substantially perpendicular to the irradiation center
direction, the ultrasonic wave reflection plate comprising Each of the ultrasonic piezoelectric
elements has a reflecting surface corresponding to the ultrasonic piezoelectric element, and each
of the reflecting surfaces is formed in a concave shape corresponding to the short direction of
03-05-2019
9
the support to obtain a desired space along the short direction of the support And the shape
corresponding to the longitudinal direction of the support is formed in a convex shape for each
reflection surface corresponding to each ultrasonic piezoelectric element, along the longitudinal
direction of the support Reflected ultrasound at a desired position in space Configured to cause
dispersion.
[0033]
In this case, the ultrasound reflection plate further includes, for example, an ultrasonic flat
reflection plate disposed in the irradiation path of the ultrasonic wave between the support and
the ultrasonic reflection plate, and the ultrasonic reflection plate is for focusing and diffusing the
reflected ultrasonic waves. The direction may be reflected in a direction parallel to the irradiation
center deviated from the irradiation center from each of the ultrasonic piezoelectric elements.
[0034]
Subsequently, an ultrasonic linear array transducer according to a third aspect of the present
invention is an ultrasonic piezoelectric element formed by arranging a plurality of juxtaposed on
the support along the longitudinal direction of the long support; An ultrasonic linear array
transducer comprising an acoustic lens disposed on a sound wave irradiation surface, wherein
the acoustic lens has a concave shape in the self-longitudinal direction which is the width
direction of the support, and the support is The shape of the self-transverse direction which
becomes the longitudinal direction of is formed in convex shape.
[0035]
In the ultrasonic linear array transducers of the first to third inventions, for example, the
longitudinal direction of the support is the X direction of the ultrasonic irradiation, and the
lateral direction of the support is the Y direction of the ultrasonic irradiation. Configured to be.
Further, for example, the ultrasonic waves radiated and diffused from the ultrasonic piezoelectric
elements in the space along the longitudinal direction of the support are at a desired position by
delay control of the irradiation start time for the ultrasonic piezoelectric elements. It is
configured to focus.
[0036]
Finally, a drive control method of an ultrasonic linear array transducer according to a fourth
03-05-2019
10
invention is a drive control method of an ultrasonic linear array transducer comprising a plurality
of ultrasonic piezoelectric elements along the longitudinal direction of the main body, It is
configured to generate high frequency ultrasonic waves of any multiple of the resonance
frequency of the sound wave piezoelectric element.
[0037]
In this case, for example, when the desired high-frequency ultrasonic wave is n times the
resonance frequency of the ultrasonic piezoelectric element, the ultrasonic piezoelectric element
is sequentially driven by applying a half-wave sinusoidal voltage every n−1 It is preferable to do.
[0038]
According to the first and second inventions, the shape of the ultrasonic piezoelectric element or
the element corresponding shape of the ultrasonic reflection plate is formed in a concave in the Y
direction and in a convex in the X direction. The ultrasonic waves can be focused in the Y
direction, and on the other hand the diffusion range of the irradiated ultrasonic waves in the X
direction can be broadened to a wide angle regardless of the frequency, thereby increasing the
focusing density in the X direction by time delay driving. High-resolution focused ultrasound can
be obtained.
[0039]
In addition, since a focused beam with high resolution can be obtained from a wide and large
ultrasonic piezoelectric element, the use of a wide and large ultrasonic piezoelectric element
becomes possible, and processing of the ultrasonic piezoelectric element becomes easy and
convenient.
Similarly, since a large ultrasonic piezoelectric element having a large width can be used, the
number of ultrasonic piezoelectric elements arranged in parallel can be reduced, and hence the
number of wires can be reduced, so that the manufacturing cost can be reduced.
[0040]
Further, according to the first aspect of the invention, since the generation angle of the ultrasonic
wave can be adjusted by the size of the individual wiring electrode patterned on the support
portion formed in a convex shape in the X direction on the support, Design of the sound diffusion
03-05-2019
11
angle is easy and convenient.
[0041]
Next, according to the third invention, not only for focusing the acoustic lens only in the Y
direction, but also for each ultrasonic piezoelectric element so that the irradiation in the X
direction from each ultrasonic piezoelectric element is largely diffused. Since it is formed, it is
possible to increase focusing density in the X direction by time delay driving to obtain focused
ultrasonic waves with high resolution as a whole and to obtain focused beams with high
resolution from a wide, large ultrasonic piezoelectric element. Therefore, it is possible to use a
large ultrasonic piezoelectric element having a large width, and to reduce the manufacturing cost
in terms of easiness of processing and a small number of wires.
[0042]
Furthermore, according to the fourth invention, since n times high frequency ultrasonic waves
can be generated by driving every n−1, it is possible to use a low frequency transducer that is
easy to manufacture and use a higher frequency ultra high frequency. It is economical to be able
to generate sound waves.
In addition, since a low frequency transducer is used, the matching layer can be easily
manufactured, which also reduces the manufacturing cost.
Also, since a wide band can be secured, the degree of freedom in design is expanded and
convenient.
[0043]
Hereinafter, embodiments of the present invention will be described with reference to the
drawings.
Embodiment 1 FIGS. 1A, 1B, and 1C are diagrams showing a process of manufacturing an
ultrasonic linear array transducer according to a first embodiment.
03-05-2019
12
The figure (a) shows the support 10 which supports an ultrasonic piezoelectric element as a base
of an ultrasonic linear array transducer, and the longitudinal direction of the support 10 is an
ultrasonic linear array transducer finally formed. It becomes the X direction of the ultrasonic
wave irradiation, and the short side direction becomes the Y direction.
[0044]
As shown in FIG. 6A, the support portion 11 for supporting the individual ultrasonic piezoelectric
elements of the support body 10 is formed to have a surface having a convex curvature in the X
direction, and the support portion is further formed. A longitudinal central portion 11 is formed
to be concave with respect to the Y direction.
The support 10 is configured to have a shape in which a plurality of the support portions 11 as
described above are arranged at a predetermined pitch in the X direction.
[0045]
The material of the support 10 can be molded with a mold by using a resin or rubber-based
material, and the shape can be easily realized at low cost.
Next, as shown in FIG. 6B, the individual wiring electrodes 12 of the ultrasonic piezoelectric
element are formed on the upper surface of the support 10 with the convex curvature in the X
direction.
As described above, since each of the individual wiring electrodes 12 is electrically separated and
independent since it is formed on the upper surface of the convex curvature.
[0046]
This individual wiring electrode 12 can be formed on the surface having a convex curvature by
transfer printing, printing on a tape, etc., and the desired normal direction angle (the electrode
position formed on the upper side of the surface having a convex curvature) It is possible to
obtain the pointing angle).
03-05-2019
13
[0047]
Subsequently, on the upper surface of the electrode-formed support 10, as shown in FIG. 6C, the
piezoelectric polymer film 13 is made to conform to the surface having a convex curvature in the
X direction and the concave surface in the Y direction. Paste it.
In the drawing, the underlying individual wiring electrode 12 is illustrated as seen through the
piezoelectric polymer film 13 pasted thereon.
The piezoelectric polymer film 13 is made of, for example, a PVDF (vinylidene fluoride) film or
the like.
[0048]
When sticking the piezoelectric polymer film 13 to the support 10, the PVDF film is pressed
against the support 10 using, for example, a pressing member having a shape obtained when the
support 10 is used as a mold. paste.
At this time, the PVDF film is easily attached by heating to such an extent that the polarization
having the piezoelectric function does not disappear.
[0049]
A common electrode or a patterned upper electrode is formed in advance on the upper surface of
the piezoelectric polymer film 13 although it is not visible in the figure.
The portion sandwiched by the common electrode on the upper surface or the patterned upper
surface electrode and the individual wiring electrode on the lower surface constitutes the
ultrasonic piezoelectric element 14.
03-05-2019
14
[0050]
Second Embodiment In order to attach the PVDF film to the support 10 as described above, in
addition to the method using the pressing member as a jig, the same method as vacuum forming
can be used.
[0051]
2 (a), 2 (b) and 2 (c) are views showing a method of attaching a piezoelectric polymer film to a
support using the same method as vacuum forming, and FIG. 2 (a) is a top view 1 (b) is a crosssectional view taken along the line E-E 'in FIG. 1 (a) (corresponding to a cross-sectional view
taken along the line C-C' in FIG. 1 (c)); It is a F-F 'cross section arrow line view (it corresponds to
the DD' cross section arrow line view of FIG.1 (c)) of].
[0052]
As shown in FIGS. 2 (a) and 2 (b), the support 15 of this example is formed of a surface having a
convex curvature in the X direction, and the support 11 and support 11 An intake port 17 is
provided at the boundary portion 16.
As a result, the piezoelectric polymer film 13 is placed on the support 15 and suctioned by the
air inlet 17, as shown in FIG. 6C, in the same manner as vacuum forming of the film material. The
piezoelectric polymer film 13 can be in close contact with a shape having a convex curvature in
the X direction of each support portion 11 and with the central portion in the longitudinal
direction forming a concave surface in the Y direction.
[0053]
In this case, the piezoelectric polymer film 13 has a concave shape on the individual wiring
electrode 12 (see FIG. 1) provided on the support portion 11 and a central portion in the
longitudinal direction for focusing the irradiated ultrasonic wave in the Y direction. If pasting is
performed so that wrinkles and the like do not occur only in the portion that is formed, it is
possible to obtain focused ultrasonic waves in the X and Y directions, which is the objective of
the ultrasonic linear array transducer having the configuration of the present invention.
03-05-2019
15
In other words, the piezoelectric polymer film 13 causes no problem even if wrinkles or the like
occur in portions other than the individual wiring electrodes 12, and hence the ultrasonic
piezoelectric element 14 according to the above is easily manufactured.
[0054]
FIGS. 3 (a) to 3 (d) are diagrams showing the operating state of the ultrasonic linear array
transducer of the configuration of the first embodiment and the second embodiment. 3 (a) and 3
(b) show the ultrasonic waves from the ultrasonic piezoelectric element 14 in the DD 'section
arrow view of FIG. 1 (c) or the F-F' section arrow view of FIG. 2 (a). 18 (c) and 18 (d) are taken
along line C-C 'in FIG. 1 (c) or in line E-E' in FIG. 2 (a). The irradiation state of the ultrasonic wave
18 from the ultrasonic piezoelectric element 14 is shown.
[0055]
As described above, according to the shape of the element main body portion forming the
concave shape of the central portion in the longitudinal direction (Y direction of the entire
ultrasonic linear array transducer), each of the ultrasonic piezoelectric elements 14 is shown in
FIGS. As shown in), the irradiated ultrasonic waves 18 are focused at a point 19 in the Y
direction. Thus, the ultrasonic waves from the individual ultrasonic piezoelectric elements 14 can
be focused at one point in the Y direction (on one line in the X direction as a whole of the
ultrasonic linear array transducer) without using an acoustic lens.
[0056]
On the other hand, the shape of the lateral direction (the X direction of the entire ultrasonic
linear array transducer) of each ultrasonic piezoelectric element 14 forms a surface having a
convex curvature, as shown in FIG. As shown in the above, the irradiated ultrasonic waves 18
diffuse at a wide angle in the X direction. The ultrasonic wave diffused to a wide angle in the X
direction is subjected to the same delay drive control as described in FIGS. 16 and 17 to obtain a
target point 19 x in the X direction as shown in FIG. Can be focused on
[0057]
As described above, the ultrasonic linear array transducer of this example uses the ultrasonic
03-05-2019
16
piezoelectric element 14 of a special shape having a concave curvature in the Y direction and a
convex curvature in the X direction. Is focused at one point in the Y direction (one line in the X
direction), diffused at a wide angle in the X direction, and focused at one point by delay control,
thereby the X direction being the main scanning direction of the ultrasonic linear array
transducer The irradiation ultrasonic waves can be efficiently focused at one target point 19x.
[0058]
Third Embodiment FIGS. 4A to 4D are diagrams showing the configuration of an ultrasonic linear
array transducer according to a third embodiment and the operation state thereof.
4 (a) and 4 (b) are sectional views corresponding to arrows D-D 'in FIG. 1 (c) or F-F' in FIG. 2 (a);
The irradiation state of the ultrasonic wave 18 from the ultrasonic piezoelectric element 21 of
the structure in this example is shown, and FIGS. 4 (c) and 4 (d) are sectional views taken along
the line C-C 'in FIG. 2 (a) is a sectional arrow view corresponding to a sectional view taken along
line E-E 'of FIG. 2 (a), showing the irradiation state of the ultrasonic wave 18 from the ultrasonic
piezoelectric element 21 having the configuration in this example.
[0059]
The individual ultrasonic piezoelectric elements 21 in this example have a concave shape at the
central portion in the longitudinal direction (Y direction of the entire ultrasonic linear array
transducer), but the lateral direction (in the entire ultrasonic linear array transducer) The shape
in the X direction) forms a surface having a concave curvature.
[0060]
Thus, according to the shape of the element body portion of the ultrasonic linear array
transducer of this example, the ultrasonic waves 18 to be irradiated are one point in the Y
direction as shown in FIGS. 4 (a) and 4 (b) in the Y direction. Focused on 19
[0061]
On the other hand, as shown in FIGS. 4 (c) and 4 (d), the ultrasonic waves 18 irradiated in the X
direction of the individual ultrasonic piezoelectric elements 14 form a surface in which the shape
in the X direction has a concave curvature. By focusing, it once converges to one point p in the X
03-05-2019
17
direction and then diffuses to a wide angle.
The ultrasonic waves diffused to a wide angle in the X direction should be focused to a target
point 19x in the X direction as shown in FIG. 4 (d) by the same delay drive control as described
in FIGS. Can.
[0062]
In the configuration of the support of the ultrasonic linear array transducer in the present
example, the support, the individual wiring electrodes, the piezoelectric polymer film, the
common electrode, etc., the support in the X direction of the ultrasonic piezoelectric element has
a convex shape The other configuration is the same as in the case of the first and second
embodiments, except that it is changed into the concave shape.
[0063]
As described above in the first to third embodiments, according to the ultrasonic linear array
transducer of the present invention, focusing of the irradiated ultrasonic waves in the Y direction
can be easily performed without using an acoustic lens, while X Due to the wide irradiation angle
of the direction, focusing by a wide range of ultrasonic piezoelectric elements by delay control
makes it possible to narrow an ultrasonic beam with good directivity to a desired point in the X
direction.
[0064]
(Fourth Embodiment) FIGS. 5 (a), 5 (b) and 5 (c) are diagrams showing the configuration of an
ultrasonic linear array transducer according to a fourth embodiment and the operation thereof,
and FIG. 5 (a) is a front view, The figure (b) is a side view, and the figure (c) is a transparent top
view.
[0065]
As shown in FIG. 6A, the ultrasonic linear array transducer of this example comprises an
ultrasonic wave irradiation unit 22 and a reflection unit 23 disposed above the ultrasonic wave
irradiation unit 22.
The ultrasonic wave irradiation unit 22 includes a support 24 and a rectangular ultrasonic
03-05-2019
18
piezoelectric element 25 formed in a large number on the support 24.
Although each ultrasonic piezoelectric element 25 is shown by 1 structure in the figure, it is
actually comprised from the lower individual wiring electrode, the piezoelectric polymer film of
the middle part, and the upper common electrode.
[0066]
The individual wiring electrodes for each ultrasonic piezoelectric element 25 are formed on the
entire upper surface of the support 24 by vacuum evaporation, sputtering or the like as a whole,
followed by photolithography, etching, or sand blasting. By scraping out the unnecessary part, it
can be formed separately as each individual electrode.
[0067]
On the other hand, the reflection part 23 comprises a reflection plate support 26 and an
ultrasonic reflection plate 27 supported by the reflection plate support 26.
The ultrasonic reflecting plate 27 is formed of a set of individually independent reflecting
surfaces 28 which are concave in the Y direction corresponding to the ultrasonic piezoelectric
elements 25 and convex in the X direction.
[0068]
The ultrasonic waves 18 emitted from the ultrasonic piezoelectric element 25 shown in FIGS. 6A
and 6B become narrower directivity as the frequency becomes higher, and they go straight as
plane waves.
The ultrasonic wave 18 is reflected by the reflection surface 28 of the ultrasonic wave reflection
plate 27, and the shape of the reflection surface 28 is the same as that of the ultrasonic
piezoelectric element 14 shown in the first and second embodiments. 18 'is diffused in the X
direction as shown in FIG. 6A, and is converged to a point (one line in the X direction) 19 in the Y
direction.
03-05-2019
19
Then, the reflected ultrasonic wave 18 'diffused in the X direction is again focused to a target
point 19x by appropriate delay control, as shown in FIG.
[0069]
The configuration of the ultrasonic linear array transducer of this example is a reflecting plate
having a convex curvature in the X direction with a concave curvature in the Y direction with a
plane wave irradiated from an ultrasonic piezoelectric element having a flat ultrasonic wave
irradiated surface. It is possible to focus a sharp ultrasonic beam at a target point by reflecting,
focusing at a single point in the Y direction, diffusing at a wide angle in the X direction, and
focusing at a single point by delay control. .
[0070]
Further, in this ultrasonic linear array transducer, the formation of the ultrasonic piezoelectric
element 25 is easy, and the configuration shape of the reflection surface 28 of the ultrasonic
reflection plate 27 can not only replace the acoustic lens but also in the surrounding design
When the focusing point of the irradiated ultrasonic wave can not be arranged directly on the
ultrasonic piezoelectric element 25, that is, as shown in the figure, the direction of the ultrasonic
wave 18 irradiation in the X direction is the reflection part 23 This is effective in the case where
the final irradiation direction of the reflected ultrasonic wave 18 'reflected through the light
source must be disposed so that the center of the irradiation axis is at a right angle.
[0071]
FIG. 6 is a view showing a modification of the fourth embodiment.
5 (a), (b) and (c) are assigned the same reference numerals as those in FIGS. 5 (a), (b) and (c).
Show.
The configuration shown in FIG. 6 is different from that of FIG. 5 in that the intermediate
reflection plate 29 is disposed between the ultrasonic wave irradiation unit 22 and the reflection
unit 23, and the ultrasonic wave 18 from the ultrasonic wave irradiation unit 22 is The reflected
ultrasonic wave 18 'of the plane wave by the intermediate reflection plate 29 and further the
reflected ultrasonic wave 18' 'of the diffusion (X direction) and the focusing (Y direction) by the
reflection part 23 are finally delayed to a target point 19x by delay control. It is double reflected
03-05-2019
20
to focus.
[0072]
In other words, the irradiation direction of the ultrasonic wave 18 in the X direction is the final
irradiation direction and the irradiation axis of the reflected ultrasonic wave 18 ′ ′ to be
irradiated via the intermediate reflection plate 29 and the reflection part 23. The point in which
the centers are disposed parallel to one another is structurally different from the case of FIG.
[0073]
Fifth Embodiment FIGS. 7A and 7B are diagrams showing the configuration of an ultrasonic
linear array transducer according to a fifth embodiment and the operation state thereof.
7 (a) is a cross-sectional view corresponding to FIG. 3 (b), and FIG. 7 (b) is a cross-sectional view
corresponding to FIG. 3 (d).
[0074]
As shown in (a) of the figure, the ultrasonic linear array transducer of this example further
includes an acoustic lens on the ultrasonic piezoelectric element 25 disposed on the support 24
as in the case of FIG. 5 or 6. 31 is arranged. The acoustic lens 31 is not only configured such that
the speed of sound of ultrasonic waves transmitted therethrough is higher than the speed of
sound transmitted through air or water, but the shape is different from that of the conventional
acoustic lens, as shown in FIG. As shown in (b), each part of the acoustic lens 31 corresponding
to the arrangement position of each ultrasonic piezoelectric element 25 is formed with a concave
curvature in the Y direction and a convex curvature in the X direction. An ultrasound
transmission surface 32 is provided.
[0075]
As a result, as shown in FIG. 6A, the ultrasonic waves 18 emitted from the ultrasonic piezoelectric
elements 25 pass through the acoustic lens 31 and are then irradiated from the ultrasonic wave
transmission surface 32 of the acoustic lens 31 to the outside. In the case of this example, too, in
the Y direction, the refractive focused ultrasonic wave 18f forms a focusing point 19 in the Y
direction, and in the X direction, a refractive diffused ultrasonic wave 18d forms a wide angle,
03-05-2019
21
which causes delay Focusing on the focusing point 19x in the X direction by control.
[0076]
In the present example, the case where the sound velocity of the ultrasonic wave propagating
through the acoustic lens 31 is fast and the sound velocity traveling through the medium (air or
water) to be irradiated is slow is not limited thereto. Alternatively, an acoustic lens may be used
which is configured to have an acoustic velocity of ultrasonic waves propagating therethrough
slower than the acoustic velocity of the medium to be irradiated.
In that case, it is preferable that the shape of the ultrasonic wave transmitting surface
corresponding to the arrangement position of the ultrasonic piezoelectric element of the acoustic
lens be a shape having a convex curvature in the Y direction and a concave curvature in the X
direction. Even in this case, the same effect as described above can be obtained.
[0077]
Sixth Embodiment When driving an ultrasonic linear array transducer, ultrasonic waves are
generated in each ultrasonic piezoelectric element with a resonance frequency determined by the
shape, mass, etc. of the ultrasonic irradiation object as the central frequency. ing.
[0078]
In order to obtain high-frequency ultrasonic waves, it is necessary to increase the resonant
frequency of the ultrasonic piezoelectric element, and for that purpose, the ultrasonic
piezoelectric element must be made thin, and such thin processing is accompanied by difficulties
.
[0079]
Further, as the frequency becomes higher, the thickness of the matching layer for matching the
acoustic impedance needs to be made sufficiently small with respect to the wavelength, which
makes it difficult to produce the entire ultrasonic linear array transducer.
Furthermore, since the resonance frequency of the ultrasonic piezoelectric element is used, the
03-05-2019
22
band of the resonance frequency can not be broadened.
[0080]
Also, to drive each ultrasonic piezoelectric element at a high frequency, relatively strong power
requires driving energy.
Therefore, if possible, it can be said that it is more preferable if the ultrasonic piezoelectric
element can be driven at as low frequency as possible to obtain high frequency as a whole.
[0081]
As described in the first to fifth embodiments described above, since the focusing position can be
controlled by delay control in the X direction to focus the high frequency of small energy at one
point and increase the high frequency applied energy to one point, Similarly, high-frequency
ultrasonic waves can be obtained from low-frequency-driven ultrasonic piezoelectric elements by
controlling the driving of the ultrasonic piezoelectric elements by a specific method or
performing specific driving by forming the ultrasonic piezoelectric elements in a laminated
structure. It was found out that this is possible if we experimented whether it was possible.
Hereinafter, this will be described as a sixth embodiment.
[0082]
8 (a) and 8 (b) are diagrams showing the operating state of the ultrasonic linear array transducer
according to the conventional control method for reference, and FIG. 8 (a) is a diagram showing
the generated ultrasonic waves, FIG. (b) is a figure which shows the applied voltage to the
ultrasonic piezoelectric element, and the waveform of the generated ultrasonic wave.
[0083]
As shown in FIG. 6A, when a voltage having the same frequency as the resonant frequency of the
element is simultaneously applied to all ultrasonic piezoelectric elements 34 of the ultrasonic
linear array transducer 33, ultrasonic waves of that frequency are applied. Are generated from
the ultrasonic piezoelectric elements 34, and go straight as ultrasonic waves 35 of plane waves.
03-05-2019
23
A waveform 36 of the frequency of the plane wave 35 is shown at the bottom of FIG. Also, the
lower part of the same figure (b) shows the waveform 36 of the same ultrasonic wave, on which
the alternating voltage applied to each ultrasonic piezoelectric element 34 is shown. As shown in
FIG. 6B, in the conventional method, ultrasonic waves 36 having the same frequency and the
same phase as the applied voltage 37 are generated.
[0084]
FIGS. 9 (a) to 9 (e) are diagrams showing a method of driving an ultrasonic linear array
transducer and a waveform of the generated ultrasonic wave in the sixth embodiment. In the
present embodiment, first, as shown in FIG. 6A, each of the odd-numbered ultrasonic
piezoelectric elements 34o of the ultrasonic linear array transducer 33 is driven by applying a
half-wave voltage. Each odd-numbered ultrasonic piezoelectric element 34o serves as a half-wave
vibration source to generate an ultrasonic wave 36o having a frequency formed by a half wave
shown in the lower part of FIG. It goes straight as a plane wave 35 o of the half wave shown
above.
[0085]
On the other hand, in synchronization with this, the even numbered ultrasonic piezoelectric
elements 34e of the ultrasonic linear array transducer 33 are driven by applying a half wave
voltage at a timing between the half waves and the half waves. Also in this case, each evennumbered ultrasonic piezoelectric element 34e serves as a half wave vibration source to generate
ultrasonic waves 36e of the frequency formed by the half wave shown in the lower part of FIG. b)
Go straight on as the plane wave 35e of the half wave shown above.
[0086]
The same figure (c) has shown the generation timing of the ultrasonic wave 36o of the frequency
formed by the said half wave, and the ultrasonic wave 36e. As described above, the half wave
ultrasonic wave 36e is generated at the timing between the half wave and the half wave of the
half wave ultrasonic wave 36o.
03-05-2019
24
[0087]
The figure (d) shows the synthetic waveform 36 oe when the half wave ultrasonic wave 36o and
the ultrasonic wave 36e go straight as the plane waves 35o and 35e as shown in the figures (a)
and (b). It shows. As the synthesized waveform 36oe propagates, it approaches the shape of the
sine wave 36 shown in FIGS. 8 (a) and 8 (b) without limit as shown in FIG. 8 (e).
[0088]
Compared with the conventional method, in the method of driving the ultrasonic linear array
transducer shown in FIGS. 9 (a) and 9 (b), the number of ultrasonic piezoelectric elements 34
(34o, 34e) simultaneously vibrating is 1/2 of the whole Therefore, the sound pressure is lowered,
but the necessary sound pressure can be secured by making the voltage value applied to the
ultrasonic piezoelectric element 34 variable.
[0089]
10 (a) and 10 (b) show simulation results for the case where the 5 MHz half-wave vibration
source is intermittently driven at odd and even numbers in the present method and for the case
where the 10 MHz sine wave vibration source is continuously driven for all numbers in the
conventional method. (A) shows a simulation of a plane wave, and (b) shows a simulation of a
focused wave.
[0090]
As shown in (a) of the figure, it can be seen that 10 MHz ultrasonic waves are formed despite the
control of 5 MHz in the driving method of this example.
Further, as shown in (b) of the figure, in the case of the focused wave, as the propagation
progresses, the waveform is equivalent to that of the ultrasonic wave generated by the
conventional method.
However, in the case of this example, the amplitude of the drive voltage is large.
03-05-2019
25
[0091]
11 (a) to 11 (e) are diagrams showing a modification of the method of driving an ultrasonic linear
array transducer according to the sixth embodiment and the waveform of the generated
ultrasonic wave. In the same figure (a), the applied voltage waveform to the “1 + 3n” -th (n = 0,
1, 2,...) Vibrator (ultrasonic piezoelectric element 34 (34o, 34e)) of the ultrasonic linear array
transducer The figure (b) shows the applied voltage waveform to the "2 + 3n" oscillator, and the
figure (c) shows the applied voltage waveform to the "3 + 3n" oscillator.
[0092]
And (d) of the same figure shows the synthetic waveform of the ultrasonic wave generated from
each vibrator by the above-mentioned voltage application method, and (e) of the same figure
shows the above-mentioned synthetic waveform as a sine wave according to the propagation of
the ultrasonic wave. It shows a state of approaching.
[0093]
As described above, if every two vibrators are controlled, triple frequency can be generated.
Similarly, by changing the control interval of the transducer, it is possible to generate an
ultrasonic wave having a frequency that is an arbitrary multiple of the frequency of the applied
voltage waveform.
[0094]
In addition, the method of generating a high frequency at a low frequency by half-wave driving in
this manner is the same as the method for generating ultrasonic piezoelectric elements 34
juxtaposed in the longitudinal direction on the support 24 as shown in FIGS. This can be achieved
by intermittently driving the ultrasonic piezoelectric elements 34 at regular intervals as in the
example, but can also be achieved by other methods.
[0095]
Seventh Embodiment FIG. 12 is a diagram showing a method of generating a high frequency at a
low frequency by half-wave driving of an ultrasonic transducer in a seventh embodiment.
03-05-2019
26
[0096]
As shown in the figure, the ultrasonic vibration element 40 formed on the support 38 has one of
the terminals a, b and c to which half-wave voltage is intermittently applied from the drive source
41 via the switch 42. Among the terminals a, b and c, ultrasonic piezoelectric elements 34-1u
and 34-1d connected to the common electrode connected to the ground 43 at the top and
bottom with the electrode connected to the terminal a at the top interposed therebetween
Ultrasonic piezoelectric elements 34-2 u and 34-2 d connected to the common electrode
connected to the ground 43 at the top and bottom with the electrode connected to the
intermediate terminal b in the middle, similarly among the terminals a, b and c The ultrasonic
piezoelectric elements 34-3 u and 34-3 d are connected to a common electrode connected to the
ground 43 at the top and bottom with the electrode connected to the terminal c at the bottom of
the panel interposed therebetween.
[0097]
The above-described ultrasonic piezoelectric elements 34-1u and 34-1d have their oscillation
tendencies opposite to the applied voltage, and in the figure, the electric field of the applied
voltage is opposite to that of the applied voltage. Vibrate in the same direction.
The same applies to the ultrasonic piezoelectric elements 34-2u and 34-2d, 34-3u and 34-3d.
[0098]
In the above configuration, from the drive source 41, while switching the switch 42, the drive
voltage is sequentially applied one by one to the ultrasonic piezoelectric elements 34-1u and 341d, 34-2u and 34-2d, 34-3u and 34-3d. Repeatedly apply as in
[0099]
The ultrasonic piezoelectric element (vibrator) that vibrates by this is only a vibrator to which a
voltage is applied, but since it is stacked, the vibration propagates to the surface and vibrates the
surrounding medium, and the ultrasonic wave 36 Occurs.
[0100]
When a voltage is applied to each vibrator with a period T, in the example shown in the figure,
the voltage is the same as a voltage of period T / 3 as a whole, and each vibrator vibrates at
03-05-2019
27
frequency f, As a whole, it is vibrating at the frequency 3f.
[0101]
Thus, even if the frequency of the ultrasonic waves generated by each transducer is low, the
frequency of the generated ultrasonic waves can be increased according to the number of
transducers to be stacked.
The number of transducers to be stacked as the ultrasonic vibration element 40 is not limited to
three as shown in the drawing, and any number may be arbitrarily increased or decreased.
Of course, if the ultrasonic vibration elements 40 are arranged in the longitudinal direction of the
support, an ultrasonic linear array transducer can be configured.
[0102]
(a), (b), (c) is a figure which shows the manufacture process of the ultrasonic linear array
transducer in 1st Embodiment.
(a), (b), (c) is a figure which shows the method of affixing the piezoelectric polymer film of an
ultrasonic linear array transducer to a support body using the method similar to vacuum
forming.
(a)-(d) is a figure which shows the operation state of the ultrasonic linear array transducer of a
structure of Embodiment 1 and 2. FIG.
(a)-(d) is a figure which shows the structure of the ultrasonic linear array transducer in
Embodiment 3, and its operation state. (a), (b), (c) is a figure which shows a structure of the
ultrasonic linear array transducer in Embodiment 4, and its operation state. FIG. 18 is a view
showing a modification of the fourth embodiment. (a), (b) is a figure which shows the structure of
the ultrasonic linear array transducer in Embodiment 5, and its operation state. (a), (b) is a figure
which shows the operation state by the conventional control method of an ultrasonic linear array
03-05-2019
28
transducer for reference. (a)-(e) is a figure which shows the drive method of the ultrasonic linear
array transducer in Embodiment 6, and the waveform of the ultrasonic wave which generate |
occur | produced. (a) and (b) show simulation results for the case where the 5 MHz half wave
vibration source is intermittently driven at odd and even numbers in the method of the sixth
embodiment and the case where the 10 MHz sine wave vibration source is continuously driven
for all numbers in the conventional method. FIG. (a)-(e) is a figure which shows the modification
of the drive method of the ultrasonic linear array transducer in Embodiment 6, and the waveform
of the ultrasonic wave which generate | occur | produced. It is a figure which shows the method
of producing a high frequency by the low frequency by half wave drive of the ultrasonic vibration
element in Embodiment 7. FIG. (a) is a diagram showing a configuration example of a
microcapsule toner containing a coloring material before color development before destruction,
(b), (c) is a diagram showing the principle that the capsule toner is selectively irradiated by
ultrasonic wave irradiation It is a figure explaining. It is an external appearance perspective view
of the ultrasonic linear array transducer which oscillates the ultrasonic wave which destroys the
small diameter capsule wall of the conventional small diameter microcapsule. (A) is a top view,
(b) is a top view of the individual application electrode, (c) is an A-A 'arrow of (b). (D) is a crosssectional view taken along the line B-B 'of (c). It is a figure which shows the relationship between
the ultrasonic element arrange | positioned by the main scanning direction (X direction) in an
ultrasonic linear array transducer, and the focusing position of the ultrasonic wave output from
an ultrasonic element. It is a figure which expands and shows a part of arrangement
configuration of the ultrasonic element in an ultrasonic linear array transducer.
Explanation of sign
[0103]
T capsule toner 1 large diameter microcapsule 2 (2M, 2C, 2Y) small diameter microcapsule 2
'colored small diameter microcapsule 3 small diameter capsule wall 4 developer 5 holding layer
S, S1, S2 ultrasonic wave 6 ultrasonic linear array transducer 7 Carrier 8-1 Acoustic lens 8-2
Acoustic impedance matching layer 8-3 Individual application electrode 8-4 Ultrasonic element
8-5 Common electrode 10 Support 11 Support 12 Individual wiring electrode 13 Piezoelectric
polymer film 14 Ultrasonic Piezoelectric element 15 Support 16 Boundary part 17 Intake port
18 Ultrasonic wave 18 'Reflected ultrasonic wave 18f Refraction focused ultrasonic wave 18d
Refractive diffusion ultrasonic wave 19 Focusing point in Y direction (focusing line in X
direction) 19x Delay control focusing point 21 Ultrasonic wave Piezoelectric element 22
ultrasonic wave irradiation unit 23 reflection unit 24 support 25 ultrasonic piezoelectric element
26 reflection mirror support unit 27 Ultrasonic reflecting plate 28 Reflecting surface 29
Intermediate reflecting plate 31 Acoustic lens 32 Ultrasonic transmitting surface 33 Ultrasonic
linear array transducer 34 Ultrasonic piezoelectric element 34o odd numbered ultrasonic
piezoelectric element 34e Even numbered ultrasonic piezoelectric element 34-1u , 34-1d, 34-2u,
03-05-2019
29
34-2d, 34-3u, 34-3d ultrasonic piezoelectric element 35 plane wave ultrasonic wave 36
ultrasonic waveform 37 applied voltage 38 support 40 ultrasonic vibration element 41 driving
source 42 switch
03-05-2019
30
Документ
Категория
Без категории
Просмотров
0
Размер файла
46 Кб
Теги
jp2005203976
1/--страниц
Пожаловаться на содержимое документа