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JP2008167231

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This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
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DESCRIPTION JP2008167231
An electrostatic induction power generation device capable of improving power generation
efficiency is provided. An electrostatic induction type power generation device 1 includes a fixed
substrate 21 provided with a current collector 22a, and a movable substrate 11 disposed so as to
face the fixed substrate 21 and provided with an electret member 16. And a wire 12 movably
supporting the movable substrate 11 with respect to the fixed substrate 21. Then, when the
movable substrate 11 moves in the horizontal direction (X direction) relative to the fixed
substrate 21, the wire 12 also moves in the vertical direction (Z direction) relative to the fixed
substrate 21. , And the movable substrate 11 is supported. [Selected figure] Figure 6
Static induction generator
[0001]
The present invention relates to an electrostatic induction power generator, and more
particularly to an electrostatic induction power generator provided with an electret member.
[0002]
DESCRIPTION OF RELATED ART Conventionally, the electrostatic induction type electric power
generating apparatus provided with the electret member is known (for example, refer nonpatent
literature 1).
[0003]
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1
Non-Patent Document 1 includes a generator (electrostatic induction) including an electret
member which is a charge holding material, and a counter electrode (collecting electrode)
arranged to face the electret member at a predetermined distance. Type power generator) is
disclosed.
This generator changes the distance between the counter electrode and the electret member by
moving the counter electrode in the horizontal direction with respect to the electret member,
thereby changing the potential of the area where the counter electrode is located by the electret
member. Is configured as.
Therefore, in this generator, it is possible to change the amount of charge induced in the counter
electrode by changing the potential of the region where the counter electrode is located, and to
output (generate) the amount of change as a current. .
[0004]
Yukiko Tsurumi, Takumi Tsumino, Yuji Suzuki, Nobuhiro Tochigi, Yoshihiko Sakane,
"Development of Micro-Electret Generator Using Amorphous Fluorine Resin," Proceedings of the
11th Symposium on Power and Energy Technology, pp. 23-24 ( 2006)
[0005]
However, in the conventional power generator disclosed in Non-Patent Document 1, the distance
between the counter electrode and the electret member is changed only by the horizontal
movement of the counter electrode, so that the counter electrode and the electret member It is
difficult to greatly change the distance between them.
Therefore, it is difficult to increase the amount of change in the potential of the region in which
the counter electrode is located, and therefore, it is difficult to largely change the amount of
charge induced in the counter electrode. Therefore, there is a problem that it is difficult to
improve the power generation efficiency of the generator.
[0006]
This invention was made in order to solve the above subjects, and one objective of this invention
is to provide the electrostatic induction type electric power generating apparatus which can aim
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2
at improvement of electric power generation efficiency. .
Means for Solving the Problems and Effects of the Invention
[0007]
In order to achieve the above object, an electrostatic induction generator according to one aspect
of the present invention comprises a fixed substrate provided with either a collector electrode or
an electret member capable of storing electric charge, and a fixed substrate The movable
substrate is disposed to face the substrate, and is provided with a movable substrate provided
with the other of the current collecting electrode and the electret member, and a support
member that supports the movable substrate so as to be able to swing relative to the fixed
substrate.
In addition, being able to swing means that it is movable so that the position in the horizontal
direction and the position in the vertical direction change.
[0008]
In the electrostatic induction generator according to one aspect of the present invention, as
described above, by providing the support member that supports the movable substrate in a
swingable manner, the horizontal position of the movable substrate relative to the fixed substrate
by the support member And swinging the movable substrate so that the position in the vertical
direction changes, the amount of change in the distance between the movable substrate and the
fixed substrate is increased as compared with the case where the movable substrate moves only
in the horizontal direction. Can. That is, the amount of change in the distance between any one of
the current collecting electrode and the electret member provided on the fixed substrate and the
other of the current collecting electrode and the electret member provided on the movable
substrate can be increased. As a result, the amount of change in potential of the region where the
collecting electrode is located by the electret member can be increased, so that the amount of
charge induced in the collecting electrode can be largely changed. As a result, the power
generation efficiency of the electrostatic induction power generation device can be improved.
[0009]
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In the electrostatic induction generator according to the above aspect, preferably, the support
member has a predetermined length and supports the movable substrate opposite to the fixed
substrate side, and in the extension and compression direction. Is difficult to deform, and is
configured to be easily elastically deformed in the bending direction. According to this structure,
since the movable substrate can be moved in a pendulum shape by the support member, the
movable substrate can be easily moved so that the horizontal position and the vertical position of
the movable substrate with respect to the fixed substrate change. It can be rocked. Further, by
forming the support member so as not to be easily deformed in the extension and compression
direction, the support member can suppress rattling of the movable substrate in the vertical
direction (extension and compression direction) with respect to the fixed substrate. The movable
substrate can be suppressed from coming into contact with the fixed substrate. Thereby, damage
to the movable substrate and the fixed substrate can be suppressed.
[0010]
In this case, preferably, the support member includes a wire having a spring property that can be
elastically deformed in the bending direction. According to this structure, the movable substrate
can be easily moved in a pendulum shape by the wire.
[0011]
In the electrostatic induction generator according to the aforementioned aspect, preferably, the
support member has a predetermined length and supports the movable substrate opposite to the
fixed substrate side and has a hinge portion. . According to this structure, since the movable
substrate can be moved in a pendulum shape by the support member, the movable substrate can
be easily moved so that the horizontal position and the vertical position of the movable substrate
with respect to the fixed substrate change. It can be rocked.
[0012]
The electrostatic induction generator according to the above aspect preferably further comprises
a biasing member that biases at least one of the movable substrate and the support member so
that the movable substrate is directed to the reference position. According to this structure, the
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movable substrate can be disposed so as to be capable of vibrating about the reference position
by the biasing member.
[0013]
In the electrostatic induction generator according to the aforementioned aspect, preferably, a
plurality of support members are provided. According to this structure, the movable substrate
can be supported at a plurality of locations by the support member, so that the movable
substrate can be easily moved in a horizontal state with respect to the fixed substrate.
[0014]
Hereinafter, embodiments of the present invention will be described based on the drawings.
[0015]
First Embodiment FIG. 1 is a cross-sectional view showing a structure of an electrostatic
induction generator according to a first embodiment of the present invention.
2 to 6 are diagrams for explaining the structure of the electrostatic induction power generating
device according to the first embodiment shown in FIG. First, the structure of an electrostatic
induction power generating device 1 according to a first embodiment of the present invention
will be described with reference to FIGS.
[0016]
As shown in FIG. 1, the electrostatic induction power generation device 1 according to the first
embodiment has a lower housing 10 in which a housing portion 10 a is formed, and an upper
surface of the lower housing 10 so as to close the housing portion 10 a. And a rectifier circuit 30
(see FIG. 4). In addition, a load 2 (see FIG. 4) driven by the electrostatic induction power
generation device 1 is connected to the electrostatic induction power generation device 1.
[0017]
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5
Here, in the first embodiment, as shown in FIG. 2, in the storage portion 10 a of the lower
housing 10, the movable substrate 11 made of glass or silicon substrate and the movable
substrate 11 are movably supported. A plurality of wires 12 (see FIG. 1), a pair of spacers 13 for
restricting the position of the movable substrate 11 in the Y direction, and a pair for restricting
the amount of movement of the movable substrate 11 in the X direction. Spring member 14 is
provided. The wire 12 is an example of the “support member” in the present invention.
[0018]
On the surface (upper surface) 11 a of the movable substrate 11, an electrode 15 having a comb
shape in plan view and made of Al or Ti is formed. The electrodes 15 connect a plurality of
electrode portions 15a formed to extend in the Y direction at predetermined intervals in the X
direction, and one end portions of the plurality of electrode portions 15a, and extend in the X
direction. And a connecting portion 15b formed on the In addition, as shown in FIG. 4, the
electrode portion 15 a has a width of about 100 μm to about 1000 μm and a thickness of
about 3 μm to about 10 μm.
[0019]
As shown in FIGS. 2 and 4, an electret member 16 made of SiO 2 is formed on the electrode
portion 15 a of the electrode 15. Specifically, as shown in FIG. 2, a plurality of electret members
16 are formed so as to extend in the Y direction at predetermined intervals in the X direction.
Further, as shown in FIG. 4, the electret member 16 has a negative charge accumulated therein
and a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 10
μm.
[0020]
Further, in the first embodiment, the wire 12 is made of a piano wire and provided so as to
project upward (in the Z direction) from the bottom surface 10 b of the storage portion 10 a.
Specifically, as shown in FIG. 5, the bottom surface 10 b has a tapered portion 10 d and an
attachment hole 10 c into which the wire 12 is inserted. The wire 12 is inserted into the metal
ring 17a and the screw 17b, and the ring 17a is pushed into the tapered portion 10d by the
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screw 17b. For this reason, the wire 17 is attached to the bottom surface 10 b by the ring 17 a
pressed by the screw 17 b and the tapered portion 10 d tightening the wire 12.
[0021]
Further, in the first embodiment, the wire 12 has a predetermined length, and is formed to
support the surface (lower surface) 11 b of the movable substrate 11. Specifically, the surface
(lower surface) 11b has a tapered portion 11d and an attachment hole 11c into which the wire
12 is inserted. The wire 12 is inserted into the metal ring 18a and the screw 18b, and the ring
18a is pushed into the tapered portion 11d by the screw 18b. Therefore, the wire 12 is attached
to the surface (lower surface) 11 b of the movable substrate 11 by tightening the wire 12 by the
ring 18 a pressed by the screw 18 b and the tapered portion 11 d.
[0022]
Further, in the first embodiment, the wire 12 made of piano wire as a spring material is hard to
be deformed in the extension and compression direction (Z direction) and is easily elastically
deformed in the bending direction (X direction and Y direction). It is configured. Specifically, the
wire 12 has a spring property that can be elastically deformed in the bending direction. As a
result, as shown in FIG. 6, the wire substrate 12 moves in the R1 direction (R2 direction) due to
the vibration in the horizontal direction (X direction) being applied to the electrostatic induction
generator 1 as shown in FIG. To support the movable substrate 11. That is, the wire 12 is
configured to swingably support the movable substrate 11 so that the position in the horizontal
direction (X direction) and the position in the vertical direction (Z direction) of the movable
substrate 11 with respect to the fixed substrate 21 change. ing.
[0023]
Further, as shown in FIG. 2, the pair of spacers 13 are provided so as to extend in the X direction
along the inner side surface of the storage portion 10 a in the Y direction. The pair of spring
members 14 are respectively disposed between the inner surface in the X direction of the storage
portion 10 a and the movable substrate 11. Specifically, the spring member 14 is disposed to be
adjacent to the inner surface in plan view, and is disposed at a predetermined distance from the
movable substrate 11.
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[0024]
As shown in FIG. 1, the upper housing 20 is provided with a fixed substrate 21 made of glass,
silicon or the like so as to face the movable substrate 11 in parallel. On the surface (lower
surface) 21a of the fixed substrate 21, as shown in FIG. 3, a collector electrode 22 having a comb
shape is formed in plan view and made of Al or Ti. The current collecting electrode 22 connects a
plurality of current collecting portions 22a formed to extend in the Y direction with a
predetermined interval in the X direction, and one end of the plurality of current collecting
portions 22a. And a connecting portion 22b formed to extend in the direction. As shown in FIG.
4, the current collector 22 a is disposed at a position facing the electret member 16 in a state
where the movable substrate 11 is disposed at the reference position. The reference position is a
position where the movable substrate 11 is disposed when the wire 12 is perpendicular to the
bottom surface 10 b. Further, the current collecting portion 22a has a width of about 100 μm to
about 1000 μm and a thickness of about 3 μm to about 10 μm. Moreover, the current
collection part 22a and the electret member 16 are provided at intervals of about 10 μm to
about 100 μm in a state where the movable substrate 11 shown in FIG. 4 is disposed at the
reference position.
[0025]
Further, as shown in FIG. 4, the rectifier circuit 30 is provided to rectify the generated electric
power and supply it to the load 2. Specifically, the rectifier circuit 30 is electrically connected to
the collecting electrode 22 and to the grounded electrode 15. A load 2 driven by the electric
power generated by the electrostatic induction power generation device 1 is connected to the
rectifier circuit 30. Also, the load 2 is grounded.
[0026]
FIG. 7 is a diagram for explaining the power generation operation of the electrostatic induction
power generation device according to the first embodiment of the present invention. Next, the
power generation operation of the electrostatic induction power generation device 1 according to
the first embodiment of the present invention will be described with reference to FIGS. 4, 6 and
7.
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8
[0027]
First, as shown in FIG. 4, the electret member 16 of the movable substrate 11 and the current
collecting portion 22a of the fixed substrate 21 are arranged opposite to each other (the movable
substrate 11 (electret member 16) is arranged at the reference position) In the above, positive
charges are induced in the current collecting portion 22 a of the fixed substrate 21.
[0028]
Next, by applying vibration in the X direction (horizontal direction) to the electrostatic induction
generator 1, as shown in FIG. 6, the movable substrate 11 reaches the position where the electret
member 16 and the current collector 22a do not face each other. Move in the R1 direction.
At this time, the potential of the region where the current collecting portion 22a is located is
increased due to an increase in the distance between the current collecting portion 22a and the
electret member 16, so that the positive current is induced to the current collecting portion 22a.
The charge is released and moves toward the rectifier circuit 30 via the connecting portion 22b.
As a result, when a current flows in the direction of arrow A1 in the rectifier circuit 30,
rectification is performed and a current in the direction of arrow B is output to the load 2.
[0029]
Thereafter, as shown in FIG. 7, the movable substrate 11 is moved in the R2 direction to the
reference position where the electret member 16 and the current collecting portion 22 a are
opposed by the restoring force of the wire 12. At this time, the electric potential of the region
where the current collecting portion 22a is located is lowered due to the decrease in the distance
between the current collecting portion 22a and the electret member 16, and therefore the
current collecting portion 22a is connected via the connecting portion 22b. Positive charge is
induced. As a result, current flows in the direction of arrow A2 in the rectifier circuit 30, whereby
rectification is performed and current in the direction of arrow B is output to the load 2.
[0030]
And power generation is continued and performed by repeating the above-mentioned operation.
[0031]
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9
In the first embodiment, as described above, the movable substrate 11 is supported so as to be
swingable so that the position in the horizontal direction (X direction) and the position in the
vertical direction (Z direction) of the movable substrate 11 with respect to the fixed substrate 21
change. By providing the wire 12 to be moved, the movable substrate 11 can be moved in the R1
direction (R2 direction) by the wire 12. Therefore, compared with the case where the movable
substrate moves only in the horizontal direction, the movable substrate 11 and the fixed
substrate The amount of change in the distance between the point 21 and the point 21 can be
increased.
That is, the amount of change in the distance between the current collecting portion 22a
provided on the fixed substrate 21 and the electret member 16 provided on the movable
substrate 11 can be increased. As a result, the amount of change in potential of the region where
the current collection portion 22a is located by the electret member 16 can be increased, so the
amount of charge induced in the current collection portion 22a can be largely changed. As a
result, the power generation efficiency of the electrostatic induction power generation device 1
can be improved.
[0032]
In the first embodiment, the wire 12 has a predetermined length, supports the surface (lower
surface) 11 b of the movable substrate 11, and is not easily deformed in the extension and
compression direction (Z direction), Since the movable substrate 11 can be moved in the R1
direction (R2 direction) in a pendulum shape by the wire 12 by being configured so as to be
easily elastically deformed in the bending direction (X direction), the movable substrate 11 can
be easily formed. The movable substrate 11 can be rocked so that the position in the horizontal
direction (X direction) and the position in the vertical direction (Z direction) with respect to the
fixed substrate 21 change. Further, by forming the wire 12 so as not to be easily deformed in the
extension and compression direction (Z direction), the wire 12 suppresses the rattling of the
movable substrate 11 in the vertical direction (Z direction) with respect to the fixed substrate 21.
As a result, the movable substrate 11 can be prevented from coming into contact with the fixed
substrate 21. Thus, damage to the movable substrate 11 and the fixed substrate 21 can be
suppressed.
[0033]
Further, in the first embodiment, the movable substrate 11 is easily pendulum-shaped in the R1
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10
direction by the wire 12 by configuring the wire 12 to have a spring property that can be
elastically deformed in the bending direction (X direction). It can be moved in the (R2 direction).
[0034]
Further, in the first embodiment, by providing the plurality of wires 12, the movable substrate 11
can be supported at a plurality of places by the wires 12, so the movable substrate 11 can be
easily horizontal to the fixed substrate 21. Since the movable substrate 11 can be moved in the
state, the distance between the movable substrate 11 and the fixed substrate 21 can be reduced.
[0035]
FIG. 8 is a diagram for explaining the amount of power generation of the pair of electret
members and the current collector of the electrostatic induction power generation device
according to the first embodiment of the present invention, and FIG. 9 is a first embodiment of
the present invention It is a figure for demonstrating the electric power generation amount of a
pair of electret member of an electrostatic induction type electric power generating apparatus by
the comparative example of, and a current collection part.
With reference to FIGS. 8 and 9, the amounts of power generation of the pair of electret members
16 and the current collectors 22a of the electrostatic induction power generation device 1
according to the first embodiment will be described.
[0036]
First, in the electrostatic induction power generation device 1 according to the first embodiment,
as shown in FIG. 8, in the pair of current collectors 22 a and the electret members 16, a
pendulum from a reference position where the electret member 16 faces the current collectors
22 a The amount of power generation P1 when moving in the direction R1 can be expressed by
the following equation (1).
[0037]
P1 = {S1ε2ε0V <2> / 4 (ε2d1 + t) −S2ε2ε0V <2> / 4 (ε2d2 + t)} (1) Incidentally, S1 is a
current collecting portion 22a affected by the charge of the electret member 16 before
movement. S2 is the area of the current collecting portion 22a that is affected by the charge of
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the electret member 16 after movement.
Further, ε 0 is a dielectric constant of vacuum, and ε 2 is a relative dielectric constant of the
electret member 16.
Further, d1 is the distance between the electret member 16 before movement and the current
collector 22a, and d2 is the distance between the electret member 16 after movement and the
current collector 22a. V is a surface potential of the electret member 16, and t is a thickness of
the electret member 16.
[0038]
On the other hand, in the electrostatic induction type power generating device 500 according to
the comparative example in which the electret member 16 moves only in the X1 direction
(horizontal direction) in parallel from the reference position facing the current collecting portion
22a, as shown in FIG. The amount P2 of power generation when the electret member 16 moves
in the X1 direction (horizontal direction) in parallel from the reference position facing the
current collecting portion 22a in the current collecting portion 22a and the electret member 16
is expressed by the following equation (2) be able to.
[0039]
P2 = {S1ε2ε0V <2> / 4 (ε2d1 + t) −S2ε2ε0V <2> / 4 (ε2d1 + t)} (2) And, in the
electrostatic induction type power generating apparatus 1 according to the first embodiment, the
electret member 16 is R1. By moving in the direction, the relationship of d2> d1 holds, and it is
shown from the above formulas (1) and (2) that P1> P2.
That is, as compared with the case where the electret member 16 moves only in the X1 direction
(horizontal direction) from the reference position as in the electrostatic induction power
generation device 500 according to the comparative example, the electrostatic induction power
generation device 1 according to the first embodiment It has been shown that when the electret
member 16 moves in the R1 direction from the reference position as in the above, the power
generation amount is increased.
[0040]
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12
FIG. 10 is a perspective view showing a structure of an electrostatic induction power generating
device according to a modification of the first embodiment of the present invention. Referring to
FIG. 10, in the modification of the first embodiment, unlike the first embodiment shown in FIG. 1,
a plurality of leaf spring members 42 for movably supporting movable substrate 11 are formed.
The structure of the electrostatic induction generator 41 will be described. The plate spring
member 42 is an example of the “support member” in the present invention.
[0041]
In the modification of the first embodiment, the leaf spring member 42 is provided to project
upward (in the Z direction) from the bottom surface 10b of the lower housing 10, as shown in
FIG. The plate spring member 42 is formed to have a predetermined length and to support the
surface (lower surface) 11 b of the movable substrate 11. Further, the plate spring member 42 is
configured so as not to be easily deformed in the extension and compression direction (Z
direction) and to be easily elastically deformed in the bending direction (X direction). Specifically,
the plate spring member 42 has a spring property that can be elastically deformed in the
bending direction. Thereby, in the case where the movable substrate 11 moves in the X direction
with respect to the fixed substrate 21 due to the vibration in the horizontal direction (X direction)
being applied to the electrostatic induction power generation device 41, the plate spring member
42 moves. The movable substrate 11 is configured to support the movable substrate 11 so that
the movable substrate 11 also moves in the Z direction with respect to the fixed substrate 21. On
the other hand, the flat spring member 42 prevents the movable substrate 11 from moving in the
Y direction with respect to the fixed substrate 21 when vibration in the horizontal direction (Y
direction) is applied to the electrostatic induction generator 41. 11 is configured to support.
[0042]
The remaining structure of the modification of the first embodiment is similar to that of the
aforementioned first embodiment.
[0043]
In the modification of the first embodiment, as described above, the first embodiment is provided
by providing the leaf spring member 42 which supports the movable substrate 11 so as to be
movable in the X direction and not to move in the Y direction. Unlike the above, it is not
necessary to provide a pair of spacers 13 for restricting the position of the movable substrate 11
in the Y direction, so it is possible to suppress an increase in the number of parts.
04-05-2019
13
[0044]
The remaining effects of the modification of the first embodiment are similar to those of the
aforementioned first embodiment.
[0045]
Second Embodiment FIG. 11 is a cross-sectional view showing a structure of an electrostatic
induction power generating device according to a second embodiment of the present invention.
12-15 is a figure for demonstrating the structure of the electrostatic induction type electric
power generating apparatus by 2nd Embodiment shown in FIG.
With reference to FIGS. 11 to 15, in the second embodiment, unlike the first embodiment, a
plurality of support members 52 for movably supporting the movable substrate 11 have two
hinge portions 52a. The structure of the electrostatic induction generator 50 formed in FIG.
[0046]
In the second embodiment, as shown in FIGS. 11 and 12, the storage portion 51a of the lower
housing 51 includes the movable substrate 11 and a support member 52 (see FIG. 11) having
two hinge portions 52a. A pair of spring members 53 are provided to bias the movable substrate
11 toward the reference position.
The reference position is a position where the movable substrate 11 is disposed when the
support member 52 is in a state perpendicular to the bottom surface 51b as shown in FIG.
Further, the pair of spring members 53 are respectively disposed between the inner surface in
the X direction of the storage portion 51 a and the movable substrate 11. Thus, the spring
member 53 is configured to bias the movable substrate 11 such that the movable substrate 11 is
directed to the reference position. The spring member 53 is an example of the "biasing member"
in the present invention.
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[0047]
Here, in the second embodiment, as shown in FIG. 13, the support member 52 has a
predetermined length and a U-shaped shaft portion formed on the surface (lower surface) 11 b of
the movable substrate 11. 54, a U-shaped shaft 55 formed on the bottom 51b of the lower
housing 51, and a plate 56 having a hole 56a into which the shafts 54 and 55 are inserted. The
shaft portions 54 and 55 are made of metal or the like, and the plate member 56 is made of
metal or resin or the like. The hinges 52a are formed by inserting the shafts 54 and 55 into the
holes 56a.
[0048]
Further, in the second embodiment, as shown in FIG. 15, in the support member 52, the movable
substrate 11 is in the R1 direction due to the vibration in the horizontal direction (X direction)
being applied to the electrostatic induction power generation device 50. The movable substrate
11 is supported to move in the (R2 direction). That is, when the movable substrate 11 moves in
the X direction with respect to the fixed substrate 21, the support member 52 moves the
movable substrate 11 in the Z direction (downward direction) with respect to the fixed substrate
21. Are configured to support. When the movable substrate 11 is positioned in the area shown in
FIG. 15, the movable substrate 11 is urged by the spring member 53 to move to the reference
position shown in FIG. On the other hand, when vibration in the horizontal direction (Y direction)
is applied to the electrostatic induction type power generation device 50, the support member 52
prevents the movable substrate 11 from moving in the Y direction with respect to the fixed
substrate 21. Are configured to support.
[0049]
The remaining structure of the second embodiment is similar to that of the aforementioned first
embodiment.
[0050]
The power generation operation of the second embodiment is the same as that of the first
embodiment.
[0051]
In the second embodiment, as described above, the support member 52 has a predetermined
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length, supports the surface (lower surface) 11b of the movable substrate 11, and has the hinge
portion 52a. By this, the movable substrate 11 can be moved in the R1 direction (R2 direction) in
a pendulum shape by the support member 52, so that the position and vertical direction of the
movable substrate 11 with respect to the fixed substrate 21 in the horizontal direction (X
direction) can be easily The movable substrate 11 can be rocked so that the position in the
direction (Z direction) changes.
[0052]
Further, in the second embodiment, the spring member 53 that urges the movable substrate 11
so that the movable substrate 11 is directed to the reference position allows the spring member
53 to vibrate around the reference position. 11 can be arranged.
[0053]
Further, in the second embodiment, the movable substrate 11 can be easily moved in a horizontal
state with respect to the fixed substrate 21 by providing a plurality of support members 52
having two hinge portions 52a, so that the movable substrate The distance between the fixed
portion 11 and the fixed substrate 21 can be reduced.
[0054]
The remaining effects of the second embodiment are similar to those of the aforementioned first
embodiment.
[0055]
FIG. 16 is a cross-sectional view showing a structure of an electrostatic induction power
generating device according to a modification of the second embodiment of the present
invention.
Referring to FIG. 16, in the modification of the second embodiment, unlike the second
embodiment shown in FIG. 11, a pair of biasing members 62 for biasing movable substrate 11
toward the reference position. The structure of the electrostatic induction type power generator
61, which is constituted by the magnets 63 and 64, will be described.
[0056]
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16
In the modification of the second embodiment, as shown in FIG. 16, the biasing member 62 is
provided on the magnet 63 fixed to both ends of the movable substrate 11 in the X direction, and
on the inner side surface of the storage portion 51a in the X direction. It is comprised by the
magnet 64 fixed so that the magnet 63 might be opposed.
Moreover, the magnets 63 and 64 of the biasing member 62 are arrange | positioned so that the
same polarity side may oppose.
Thus, the biasing member 62 is configured to bias the movable substrate 11 such that the
movable substrate 11 is directed to the reference position.
[0057]
The remaining structure of the modification of the second embodiment is similar to that of the
aforementioned second embodiment.
[0058]
The effects of the modification of the second embodiment are similar to those of the second
embodiment.
[0059]
Third Embodiment FIG. 17 is a plan view showing the structure of the lower case of the
electrostatic induction power generating device according to a third embodiment of the present
invention.
FIG. 18 is a plan view showing the structure of the fixed substrate of the electrostatic induction
power generating device according to the third embodiment shown in FIG.
Referring to FIGS. 17 and 18, in the third embodiment, unlike the first embodiment, a movable
substrate 72 is configured to be movable in the Y direction in addition to the X direction. The
structure of the device 70 will be described.
04-05-2019
17
[0060]
In the third embodiment, as shown in FIG. 17, the storage portion 71a of the lower housing 71
includes a plurality of movable substrates 72 made of glass or silicon and the like, and a plurality
of movable substrates 72 for movably supporting the movable substrates 72. Of the wire 12 (not
shown), a pair of spring members 73 for restricting the amount of movement of the movable
substrate 72 in the Y direction, and the amount of movement of the movable substrate 72 in the
X direction A pair of spring members 14 are provided.
[0061]
An electrode 74 made of Al, Ti or the like is formed on the surface (upper surface) 72 a of the
movable substrate 72.
The electrodes 74 are formed so as to extend in a direction intersecting with the X direction and
the Y direction by alternately forming portions extending in the X direction and portions
extending in the Y direction in plan view. It has the electrode part 74a and the connection part
74b formed so that one end part of several electrode part 74a might be connected.
The electrode portion 74a has a width of about 100 μm to about 1000 μm and a thickness of
about 3 μm to about 10 μm.
[0062]
An electret member 75 made of SiO 2 is formed on the electrode portion 74 a of the electrode
74.
Specifically, a plurality of electret members 75 are formed so as to extend in the direction
intersecting with the X direction and the Y direction by alternately forming the portions
extending in the X direction and the portions extending in the Y direction.
Further, the electret member 75 has a negative charge accumulated therein, and has a width of
04-05-2019
18
about 100 μm to about 1000 μm and a thickness of about 3 μm to about 10 μm.
[0063]
The pair of spring members 73 are respectively disposed between the inner surface in the Y
direction of the storage portion 71 a and the movable substrate 72. Specifically, the spring
member 73 is disposed to be adjacent to the inner surface in a plan view, and is disposed at a
predetermined distance from the movable substrate 72.
[0064]
The upper case (not shown) is provided with a fixed substrate 76 made of glass, silicon or the
like so as to face the movable substrate 72. As shown in FIG. 18, on the surface (lower surface)
76a of the fixed substrate 76, a current collection electrode 77 made of Al or Ti is formed. The
collector electrode 77 is formed to extend in a direction intersecting with the X direction and the
Y direction by alternately forming a portion extending in the X direction and a portion extending
in the Y direction in plan view. A plurality of current collection units 77a and a connection unit
77b formed to connect one ends of the plurality of current collection units 77a are provided. The
current collector 77 a is disposed at a position facing the electret member 75 in a state where
the movable substrate 72 is disposed at the reference position. The current collector 77a has a
width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 10 μm. In
addition, the current collector 77a and the electret member 75 are provided at an interval of
about 10 μm to about 100 μm.
[0065]
The remaining structure of the third embodiment is similar to that of the aforementioned first
embodiment.
[0066]
In the third embodiment, as described above, by providing the movable substrate 72 movable in
the Y direction in addition to the X direction, power is generated even in the case where vibration
in the Y direction is applied to the electrostatic induction generator 70. Therefore, it is possible
to improve the power generation efficiency with respect to the vibration applied to the
electrostatic induction power generation device 70.
04-05-2019
19
[0067]
The remaining effects of the third embodiment are similar to those of the aforementioned first
embodiment.
[0068]
FIG. 19 is a plan view showing the structure of the lower case of the electrostatic induction
power generating device according to a modification of the third embodiment of the present
invention.
FIG. 20 is a plan view showing a structure of a fixed substrate of an electrostatic induction power
generating device according to a modification of the third embodiment shown in FIG.
Referring to FIGS. 19 and 20, in the modification of the third embodiment, unlike the third
embodiment shown in FIG. 17, electret member 83 and current collector 84a are substantially
formed in an arc shape. The structure of the electrostatic induction generator 81 will be
described.
[0069]
In the modification of the third embodiment, as shown in FIG. 19, an electrode 82 made of Al or
Ti is formed on the surface (upper surface) 72a of the movable substrate 72.
The electrode 82 has a plurality of electrode portions 82 a substantially formed in an arc shape
in plan view, and a connection portion 82 b formed to connect the plurality of electrode portions
82 a. The electrode portion 82a has a width of about 100 μm to about 1000 μm and a
thickness of about 3 μm to about 10 μm.
[0070]
An electret member 83 made of SiO 2 is formed in a predetermined region on the electrode 82.
04-05-2019
20
Further, the electret member 83 has a negative charge accumulated therein, and has a width of
about 100 μm to about 1000 μm and a thickness of about 3 μm to about 10 μm.
[0071]
As shown in FIG. 20, on the surface (lower surface) 76a of the fixed substrate 76, a current
collection electrode 84 made of Al or Ti is formed. The current collecting electrode 84 has a
plurality of current collecting portions 84 a substantially formed in an arc shape in plan view,
and a connecting portion 84 b formed to connect the plurality of current collecting portions 84 a.
. The current collecting portion 84 a is disposed at a position facing the electret member 83 in a
state where the movable substrate 72 is disposed at the reference position. The current collector
84a has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about
10 μm. Further, the current collecting portion 84a and the electret member 83 are provided at
an interval of about 10 μm to about 100 μm.
[0072]
The remaining structure of the modification of the third embodiment is similar to that of the
aforementioned third embodiment.
[0073]
The effects of the modification of the third embodiment are similar to those of the third
embodiment.
[0074]
It should be understood that the embodiments disclosed herein are illustrative and nonrestrictive in every respect.
The scope of the present invention is indicated not by the description of the embodiments
described above but by the claims, and further includes all modifications within the meaning and
scope equivalent to the claims.
[0075]
04-05-2019
21
For example, although the example using the electret member which consists of SiO2 was shown
in the said 1st-3rd embodiment, this invention is not limited to this, and polytetrafluoroethylene
(PTFE), a polypropylene (PP), and polyethylene (PE) Alternatively, an electret member made of an
organic polymer compound such as, or a silicon compound such as SiN may be used.
Examples of polytetrafluoroethylene include Teflon (registered trademark) and Cytop (registered
trademark).
[0076]
In the first to third embodiments, while the fixed substrate is provided in the upper case and the
movable substrate is provided in the lower case, the present invention is not limited thereto, and
the movable case can be moved to the upper case. The fixed substrate may be provided on the
lower housing while providing the substrate.
[0077]
In the first to third embodiments, the fixed substrate is provided with the collecting electrode and
the movable substrate is provided with the electret member. However, the present invention is
not limited thereto, and the fixed substrate is provided with the electret member. In addition, the
collecting electrode may be provided on the movable substrate.
[0078]
In the first to third embodiments, an example using an electret member in which a negative
charge is stored is shown, but the present invention is not limited thereto, and an electret
member in which a positive charge is stored may be used. Good.
[0079]
In the first to third embodiments, although an example in which a rectifier circuit is provided is
described, the present invention is not limited thereto, and power is supplied to a load via a DCDC converter without providing a rectifier circuit. Alternatively, power may be supplied directly
to the load.
04-05-2019
22
Moreover, while providing a rectifier circuit, you may provide a DC-DC converter between a
rectifier circuit and load.
[0080]
In the first and second embodiments, an example in which a plurality of electret members are
formed on the electrode portion of the electrode of the movable substrate has been described.
However, the present invention is not limited thereto, and the electrode portion of the electrode
of the movable substrate and One comb-shaped electret member may be formed on the
connecting portion.
[0081]
Further, in the first and third embodiments, an example is shown in which the wire is attached to
the movable substrate and the lower housing by pushing the ring into the tapered portion of the
attachment hole with a screw, but the present invention is limited thereto Alternatively, the wire
may be attached to the movable substrate and the lower housing by an adhesive or the like, or
the wire may be attached to the movable substrate and the lower housing by press-fitting the
wire to the movable substrate and the lower casing. Good.
[0082]
Moreover, although the example which uses the wire which consists of a piano wire was shown
in the said, 1st and 3rd embodiment, this invention may not be restricted to this, and may use
other wires other than a piano wire.
[0083]
In the second embodiment, an example is described in which the biasing member for biasing the
movable substrate is provided such that the movable substrate is directed to the reference
position. However, the present invention is not limited thereto. A biasing member may be
provided to bias the movable substrate and the supporting member, or a biasing member may be
provided to bias only the supporting member such that the movable substrate is directed to the
reference position.
[0084]
Moreover, although the example which arrange | positions the magnets 63 and 64 of the biasing
member 62 so that the same polarity side may oppose in the modification of the said 2nd
Embodiment, this invention is not limited to this, The biasing member 62 The magnets 63 and 64
may be disposed such that the different polarity sides face each other.
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23
[0085]
In the first and third embodiments, the spring member for restricting the amount of movement of
the movable substrate in the X direction is provided. However, the present invention is not
limited to this, and the movable substrate is not limited thereto. Instead of providing a spring
member for restricting the amount of movement when moving in the X direction, an urging
member is provided to urge the movable substrate and the wire (leaf spring member) so that the
movable substrate is directed to the reference position It is also good.
[0086]
In the second embodiment, the support member 52 having the two hinge portions 52a is used.
However, the present invention is not limited thereto, and a support member having three or
more hinge portions may be used. .
[0087]
BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing which showed the structure of
the electrostatic induction type electric power generating apparatus by 1st Embodiment of this
invention.
It is the top view which showed the structure of the lower side housing | casing of the
electrostatic induction type electric power generating apparatus by 1st Embodiment shown in
FIG.
It is the top view which showed the structure of the stationary substrate of the electrostatic
induction type electric power generating apparatus by 1st Embodiment shown in FIG.
It is the schematic which showed the structure of the electrostatic induction type electric power
generating apparatus by 1st Embodiment shown in FIG.
It is sectional drawing which showed the attachment structure of the wire of the electrostatic
induction type electric power generating apparatus by 1st Embodiment shown in FIG.
04-05-2019
24
It is the schematic which showed the structure of the electrostatic induction type electric power
generating apparatus by 1st Embodiment shown in FIG.
It is a figure for demonstrating the electric power generation operation of the electrostatic
induction type electric power generating apparatus by 1st Embodiment of this invention.
It is a figure for demonstrating the electric power generation amount of a pair of electret member
of an electrostatic induction type electric power generating apparatus by 1st Embodiment of this
invention, and a current collection part.
It is a figure for demonstrating the electric power generation amount of a pair of electret member
of an electrostatic induction type electric power generating apparatus by the comparative
example of 1st Embodiment of this invention, and a current collection part.
It is the perspective view which showed the structure of the electrostatic induction type electric
power generating apparatus by the modification of 1st Embodiment of this invention. It is
sectional drawing which showed the structure of the electrostatic induction type electric power
generating apparatus by 2nd Embodiment of this invention. It is the top view which showed the
structure of the lower side housing | casing of the electrostatic induction type electric power
generating apparatus by 2nd Embodiment shown in FIG. It is the perspective view which showed
the supporting member of the electrostatic induction type electric power generating apparatus
by 2nd Embodiment shown in FIG. It is the schematic which showed the structure of the
electrostatic induction type electric power generating apparatus by 2nd Embodiment shown in
FIG. It is the schematic which showed the structure of the electrostatic induction type electric
power generating apparatus by 2nd Embodiment shown in FIG. It is sectional drawing which
showed the structure of the electrostatic induction type electric power generating apparatus by
the modification of 2nd Embodiment of this invention. It is the top view which showed the
structure of the lower side housing | casing of the electrostatic induction type electric power
generating apparatus by 3rd Embodiment of this invention. It is the top view which showed the
structure of the fixed substrate of the electrostatic induction type electric power generating
apparatus by 3rd Embodiment shown in FIG. It is the top view which showed the structure of the
lower side housing | casing of the electrostatic induction type electric power generating
apparatus by the modification of 3rd Embodiment of this invention. It is the top view which
showed the structure of the fixed substrate of the electrostatic induction type electric power
generating apparatus by the modification of 3rd Embodiment shown in FIG.
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Explanation of sign
[0088]
DESCRIPTION OF SYMBOLS 1, 41, 50, 61, 70, 81 Electrostatic induction type generator 11, 72
Movable substrate 12 Wire material (support member) 16, 75, 83 Electret member 21, 76 Fixed
substrate 22, 77, 84 Current collection electrode 42 Plate Spring member (support member) 52
support member 52a hinge portion 53 spring member (bias member) 62 bias member
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