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JP2010068446

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DESCRIPTION JP2010068446
The present invention provides an acoustic transducer unit which can be easily reduced in size
and height and reduced in manufacturing cost. SOLUTION: (a) a first member 30 having a recess
34, (b) a flat plate-like second member 20 having a pair of main surfaces, and (c) a recess 34
connected to the first member 30; A housing formed so as to cover the member 20, (d) a
microphone element 2 which is an acoustic transducer housed in the internal space 38 of the
housing, (e) an acoustic wave which communicates the internal space 38 with the external space
of the housing And a path 16. In the first member 30, the electromagnetic shielding member 40
having conductivity and the terminal member 50 for electrically connecting the microphone
element 2 and the external circuit are embedded in the resin main body 32 by the insert molding
method. The electromagnetic shield layer 26 of the second member 20 is electrically connected
to the electromagnetic shield member 40. [Selected figure] Figure 2
Acoustic transducer unit
[0001]
The present invention relates to an acoustic transducer unit, and more particularly to an acoustic
transducer unit in which an acoustic transducer element such as a microphone or a speaker is
housed in a housing.
[0002]
Conventionally, as shown in the cross-sectional view of FIG. 17 for example, the configuration of
an acoustic transducer unit 110 is known in which an element 112 such as a microphone is
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mounted on a substrate 114 and the element 112 is covered with a lid member 120 coupled
onto the substrate 114. (See, for example, Patent Document 1).
U.S. Pat. No. 6,781,231
[0003]
In the case where the electromagnetic shield is formed around the element based on the
configuration in which the element is disposed on the substrate and covered with the lid
member, for example, the configuration of the comparative example shown in the cross-sectional
view of FIG. That is, the microphone element 2 is mounted on the multilayer substrate 30 x
having the conductive layer 30 y for electromagnetic sealing inside, and is bonded by the wire 3.
Then, the lid member 20x on which the conductive layer 20y for electromagnetic sealing is
formed by plating or the like is bonded to the multilayer substrate 30x, and the microphone
element 2 is covered with the lid member 20x. An acoustic path 80 communicating between the
outside of the housing and the microphone element 2 is formed inside the multilayer substrate
30x.
[0004]
However, when configured as shown in FIG. 16, there are the following problems.
[0005]
First, since the elements are mounted in a face-up structure, a wire wiring space is required, and
the size and height can not be reduced.
In addition, since the unnecessary volume is large, the acoustic optimum design can not be
performed.
[0006]
Second, since the electromagnetic shielding function is provided to the multilayer substrate and
the lid member, the structure of the multilayer substrate becomes complicated, and a treatment
such as plating is required to impart conductivity to the lid member. There are factors such as
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cost increase.
[0007]
Third, since the acoustic path is formed on the multilayer substrate, the method of manufacturing
the multilayer substrate is complicated and difficult, which causes the cost of the substrate to be
increased.
In addition, if the adhesive protrudes into the acoustic path or the acoustic path is deformed
during the manufacturing process of the substrate, it becomes a factor of the variation of the
performance, so that it takes time for manufacturing and causes a cost increase.
[0008]
An object of the present invention is to provide an acoustic transducer unit which can be easily
reduced in size and height and reduced in manufacturing cost.
[0009]
The present invention provides an acoustic transducer unit configured as follows to solve the
above problems.
[0010]
The acoustic transducer unit includes (a) a first member having a recess, (b) a plate-like second
member having a pair of main surfaces, and (c) the first member coupled to the first member. A
housing is formed to cover the member, (d) an acoustic transducer housed in a partial space of
the housing, and (e) an acoustic path communicating the internal space with the external space
of the housing.
The first member includes (i) a main body forming the recess, (ii) an electromagnetic shield
member disposed inside the main body and having conductivity, and (iii) extending to the inner
space of the main body A terminal including an internal terminal portion electrically connected
to an acoustic transducer, an external terminal portion extending to the external space of the
internal space, and a connection portion connecting the internal terminal portion and the
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external terminal portion And a member.
The second member has conductivity and is electrically connected to the electromagnetic shield
member.
[0011]
According to the above configuration, it is possible to easily miniaturize and reduce the height of
the acoustic transducer unit by minimizing the internal space in which the acoustic transducer is
accommodated. In addition, the first member in which the electromagnetic shield member and
the terminal member are embedded in the main body can be manufactured by, for example, the
insert molding method, and the manufacturing cost can be reduced as compared with the case of
using a multilayer substrate with a complicated structure.
[0012]
Preferably, the internal terminal portion extends along the bottom of the recess. The acoustic
transducer is arranged face down so that the connection terminal of the acoustic transducer
faces the internal terminal portion.
[0013]
According to the above configuration, the acoustic transducer can be easily disposed as
compared with the case where the internal terminal portion of the terminal member of the first
member extends along the side surface of the recess of the first member, and the first The
reliability of the electrical connection between the member and the internal terminal portion of
the terminal member is high.
[0014]
In a preferable aspect, the second member has (a) a first opening communicating with the
external space on one main surface of the pair of main surfaces of the second member far from
the first member. A second opening communicating with the internal space is formed on the
other principal surface of the pair of principal surfaces of the second member closer to the first
member; An acoustic path communicating between the first opening and the second opening is
formed inside the two members, and (d) the first opening and the second opening are the second
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member. They are separated from each other when viewed in the normal direction of the pair of
main surfaces of
[0015]
In this case, an opening of an acoustic path communicating with the outside can be formed on
the main surface of the second member remote from the first member, that is, on the top surface
of the acoustic transducer unit.
The acoustic path communicating between the first opening and the second opening is bent, so
that foreign matter can be prevented from entering the internal space from the outside.
[0016]
In another preferable aspect, the first member has (a) a first opening communicating with the
external space formed on an outer surface of the first member other than a bonding surface of
the first member with the second member, (b) A second opening is formed in a coupling surface
of the first member with the second member, and (c) the first opening communicates with the
second opening in the first member. A first acoustic path is formed.
The second member is (i) formed with a third opening opposite to the second opening in the joint
surface of the second member with the first member, and (ii) the second member A fourth
opening communicating with the internal space is formed in the main surface closer to the first
member among the pair of main surfaces, and (iii) the third opening and the inside in the second
member A second acoustic path communicating with the fourth opening is formed.
[0017]
In this case, an opening of an acoustic path communicating with the outside can be formed on
the surface other than the surface in contact with the second member of the first member, that is,
the side surface or the bottom surface of the acoustic transducer unit. Since the first and second
sound paths are bent as a whole, it is possible to prevent foreign matter from entering the
interior from the outside.
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[0018]
Preferably, the internal terminal portion projects from the bottom surface of the recess, and a
portion of the internal terminal portion has elasticity, and the portion is elastically biased toward
the second member, and the acoustic transducer is And the second member press-fit and
support.
[0019]
In this case, it is possible to absorb some variations in component dimensions such as the height
of the acoustic transducer, the depth of the recess of the first member, and the protruding height
of the inner terminal of the terminal member of the first member. it can.
In addition, the acoustic transducer is energized and pressure-contacted along the second
member, the sealing performance is improved, and the sensitivity characteristic deterioration due
to the sound leakage can be eliminated.
[0020]
Preferably, it has a mesh area in which a plurality of through holes are formed.
[0021]
In this case, the mesh area can prevent foreign matter from entering the internal space from the
outer space, and the acoustic transducer can be prevented from being adversely affected by the
foreign matter.
[0022]
Preferably, said mesh area is arranged to traverse said acoustic path, said mesh area comprising
a mesh member.
[0023]
In this case, it is possible to prevent foreign matter from mixing in the internal space through the
acoustic path.
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[0024]
Preferably, the mesh area is formed by the acoustic path.
[0025]
In this case, a mesh area is formed by the acoustic path itself, and foreign matter can be
prevented from mixing into the internal space through the acoustic path.
[0026]
Preferably, the main body is formed of a resin.
[0027]
In this case, the first member can be integrally formed by the insert molding method.
[0028]
Preferably, the terminal member is formed of metal.
[0029]
In this case, the first member can be integrally formed by the insert molding method.
[0030]
Preferably, the electromagnetic shielding member is formed of metal.
[0031]
In this case, the first member can be integrally formed by the insert molding method.
[0032]
The acoustic transducer unit of the present invention is easy to miniaturize and reduce the
height, and can reduce the manufacturing cost.
[0033]
Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to
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15.
[0034]
EXAMPLE An acoustic transducer unit 10 according to an example will be described with
reference to FIGS.
[0035]
FIG. 1 is a perspective view showing the appearance of an acoustic transducer unit 10.
FIG. 2 is a cross-sectional view of acoustic transducer unit 10.
FIG. 3 is an exploded perspective view of the acoustic transducer unit 10.
FIG. 4 is an exploded cross-sectional view of acoustic transducer unit 10.
[0036]
As shown in FIGS. 1 to 4, in the acoustic transducer unit 10, the microphone element 2, which is
an acoustic transducer, is accommodated in a housing generally constituted by the first member
30 and the second member 20. .
The microphone element 2 is, for example, a module component including a sensor unit and a
peripheral circuit.
Instead of the microphone element 2, another acoustic transducer element such as a speaker
element may be accommodated.
[0037]
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The first member 30 has a recess 34.
The second member 20 is coupled to the first member 30 so as to cover the recess 34 of the first
member 30.
The microphone element 2 is housed in an internal space 38 formed by the recess 34 of the first
member 30 and the second member 20, and is mounted on the bottom surface 35 of the recess
34 of the first member 30.
[0038]
The first member 30 is formed integrally with the resin main body 32, the metal electromagnetic
shield member 40 and the terminal member 50 by, for example, an insert molding method.
That is, as shown in FIGS. 3C and 4C, in the first member 30, the electromagnetic shielding
member 40 having conductivity is disposed inside the resin main body 32 in which the concave
portion 34 is formed. There is.
Also, a terminal member 50 extends through the body 32 between the interior space 38 and the
exterior space outside the housing.
[0039]
The electromagnetic shield member 40 has a substantially rectangular bottom portion 44 and
side portions 42 bent at right angles along the sides 43 of the bottom portion 44.
An opening 46 is formed in the electromagnetic shield member 40 so as not to interfere with the
terminal member 50.
[0040]
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The terminal member 50 connects the internal terminal portion 52 extending to the internal
space 38 inside the housing, the external terminal portion 56 extending to the external space
outside the housing, the internal terminal portion 52 and the external terminal portion 56 And a
connecting portion 54.
[0041]
As shown in FIG. 2, the internal terminal portion 52 is connected to the connection terminal 6 of
the microphone element 2.
As a connection method, an Au bump, a solder bump, a conductive paste, a nano paste, or the like
can be used.
[0042]
The external terminal unit 56 is electrically connected to an external circuit (not shown) when
the acoustic transducer unit 10 is mounted on the external circuit (not shown).
[0043]
The terminal member 50 is formed by bending a sheet material having plasticity, and a portion
of the main body 32 which protrudes from the bottom surface 35 of the recess 34 has elasticity.
[0044]
Preferably, the connection terminal 6 of the microphone element 2 is a terminal member even if
there are variations in component dimensions such as the height of the microphone element 2,
the depth of the recess 34, and the height of the projection of the terminal member 50 on the
internal terminal 52 side. The upper surface 2 a of the microphone element 2 is configured to
project more than the upper surface 33 of the main body 32 of the first member 30 when
connected to the internal terminal portion 52 of 50.
[0045]
With this configuration, as shown in FIG. 2, when the first member 20 is coupled to the upper
surface 33 of the main body 32 of the first member 30, the terminal member 50 protruding from
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the bottom surface 35 of the recess 34 of the main body 32. The microphone element 2 is
elastically urged toward the first member 20 by the elastic deformation of the portion on the side
of the internal terminal portion 52, and the upper surface 2 a of the microphone element 2 is in
pressure contact along the lower surface 21 of the first member 20.
By this, the sealing performance is improved, and the sensitivity characteristic deterioration due
to the sound leakage can be eliminated.
In addition, variations in part dimensions can be absorbed.
[0046]
As shown in FIGS. 3A and 4A, in the second member 20, the first sheet layer 22, the second sheet
layer 24, and the electromagnetic shield layer 26 are stacked in order from the top.
A through hole 22 a and a bottomed groove 22 b are formed in the first sheet layer 22.
The bottomed groove 22b is formed on the lower surface side facing the second sheet layer 24,
and one end of the bottomed groove 22b communicates with the through hole 22a.
A through hole 24 a is formed in the second sheet layer 24 so as to communicate with the other
end of the bottomed groove 22 b of the first sheet layer 22.
The electromagnetic shield layer 26 is formed by plating or metal foil, and a through hole 26 a
communicating with the through hole 24 a of the second sheet layer 24 is formed.
[0047]
As shown in FIG. 2, the opening 12 formed in the top surface 11 a of the acoustic transducer unit
10 by the through hole 22 a of the first sheet layer 22 and the through hole 26 a of the
electromagnetic shield layer 26 A communication is made between the lower surface 21 and the
opening 23 formed in the lower surface 21, and an acoustic path 16 whose cross section is
curved in a substantially S shape is formed.
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[0048]
Instead of forming one through hole 26 a in the electromagnetic shield layer 26, a plurality of
through holes may be formed in the portion of the through hole 26 a.
In this case, the mesh structure with the plurality of through holes can prevent foreign matter
from entering the internal space 38 from the outside.
[0049]
A mesh member including a mesh region in which a plurality of through holes are formed
separately from the electromagnetic shield layer 26 is provided, and the mesh region crosses an
acoustic path communicating between the outer space and the inner space. Even if the mesh
member is disposed on the inside or the upper surface or the lower surface of the two members,
it is possible to prevent foreign matter mixing.
In this case, even if the sound path is not bent, it is possible to prevent foreign matter from being
mixed.
[0050]
For example, a straight through hole may be formed in the second member as an acoustic path,
and a sponge-like member may be packed in the through hole as a mesh member.
Alternatively, as the mesh member, a metal sheet or a mesh-like member in which a plurality of
through holes are formed may be disposed inside the upper surface or the lower surface of the
second member.
[0051]
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Alternatively, multiple acoustic paths may themselves form the mesh region. In this case, the
mesh area can be formed without using a separate member.
[0052]
The first member 30 and the second member 20 are coupled using a conductive adhesive, and
the upper edge 45 of the electromagnetic shield member 40 exposed on the upper surface 33 of
the first member 30 and the lower surface of the second member 20 The electromagnetic
shielding layer 26 formed on the substrate 21 is electrically connected.
[0053]
As described above, in the acoustic transducer unit 10, since the microphone element 2 is
connected face down inside the housing, a wire wiring space is unnecessary, and the size and
height can be reduced.
In addition, since it is possible to freely determine the surrounding volume, such as the upper
and lower sides of the microphone element 2 in the inner space 38, it is possible to perform an
acoustically optimum design by eliminating unnecessary volumes.
[0054]
By producing the first member 30 by the insert molding method, an electrode forming process
such as plating becomes unnecessary. The second member 20 can be used as a plate material on
which an electrode has been formed, a metal foil bonded plate material, or the like, and an
inexpensive configuration can be achieved.
[0055]
In addition, since the second member 20 has a flat plate shape, the acoustic path can be formed
by drilling, grooving, and bonding of the plate material, and a complicated method of forming the
path in the multilayer substrate is not necessary. In addition, it is easy to form an acoustic path
with high shape accuracy.
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[0056]
Next, a method of manufacturing the acoustic transducer unit 10 will be described with reference
to FIGS.
[0057]
First, the first member 30 and the second member 20 are manufactured.
[0058]
About the 2nd member 20, as shown in the sectional view of Drawing 5 (a), the 1st sheet layer
22 in which penetration hole 22a and bottomed slot 22b were formed is produced.
Even if the first sheet layer 22 is manufactured at one time by drilling and grooving plate
materials, as shown by the dashed line, the first sheet layer 22 is divided into an upper portion
22s and a lower portion 22t, and the through holes are formed in each plate member. It may be
produced by bonding after processing.
[0059]
Further, as shown in the cross-sectional view of FIG. 5B, after the electromagnetic shield layer 26
is formed on one side of the second sheet layer 24 by plating or the like, the through holes 24a,
By forming 26a, a laminate 28 is produced.
[0060]
Then, the first sheet layer 22 shown in FIG. 5 (a) and the laminate 28 shown in FIG. 5 (b) are
joined.
[0061]
As for the first member 30, first, a sheet member 40s for the electromagnetic shield member 40
and a sheet member 50s for the terminal member 50 are formed using a metal foil.
[0062]
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The sheet member 40s for the electromagnetic shield member 40 is formed by the steps shown
in FIGS.
[0063]
That is, as shown in the plan view of FIG. 6A, the portions to be the bottom surface portion 44
and the side surface portions 42 of the electromagnetic shield member 40 are connected to the
frame portion 41 through the support portions 49 by punching of metal foil. To form the sheet
member 40s.
An opening 46 is formed in a portion to be the bottom surface portion 44 and the side surface
portion 42 of the electromagnetic shield member 40.
At this time, as shown in FIG. 6 (b), which is a cross-sectional view of the main part taken along
line A-A of FIG. 6 (a), a portion to be the bottom 44 of the electromagnetic shield member 40;
The part to be is in the same plane.
[0064]
7A is a plan view of FIG. 7A, FIG. 7B is a cross-sectional view of the main part taken along line AA of FIG. 7A, and FIG. 8 is a perspective view of the main part As described above, the portions to
be the side portions 42 of the electromagnetic shield member 40 are bent at right angles along
the portions to be the sides 43 of the bottom surface portion 44 of the electromagnetic shield
member 40.
[0065]
On the other hand, the sheet member 50s for the terminal member 50 is formed by the process
shown in FIG. 9 and FIG.
[0066]
That is, as shown in the plan view of FIG. 9A, the sheet members 50s are formed such that the
base end sides of the portions 59 to be the three terminal members 50 are respectively
connected to the frame 51 by punching of metal foil. .
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At this time, as shown in FIG. 9 (b) which is a cross-sectional view of the main part cut along line
A-A of FIG. 9 (a), all the portions 59 to be the terminal members 50 are in the same plane.
[0067]
Next, as shown in a plan view of FIG. 10 (a) and FIG. 10 (b) which is a cross-sectional view of the
main part taken along line A-A of FIG. 10 (a), a portion to be a terminal member 50. Bend the tip
59a side of 59.
That is, the portion to be the connection portion 54 is bent at a right angle to the portion to be
the external terminal portion 56 of the terminal member 50, and the portion to be the internal
terminal portion 52 is bent at a right angle to the portion to be the connection portion 54.
[0068]
Next, insert molding is performed using the sheet member 40 s for the electromagnetic shielding
member 40 and the sheet member 50 s for the terminal member 50.
[0069]
That is, as shown in the plan view of FIG. 11 (a) and FIG. 11 (b) which is a cross-sectional view of
the main part taken along line A-A of FIG. 11 (a), a sheet for the terminal member 50. A sheet
member 40s for the electromagnetic shield member 40 is superimposed on the member 50s at a
predetermined interval.
[0070]
Then, as shown in a plan view of FIG. 12 (a) and FIG. 12 (b) which is a cross-sectional view of the
main part taken along line A-A of FIG. 12 (a), a sheet for the terminal member 50. The member
50s and the sheet member 40s for the electromagnetic shield member 40 are put in a mold.
The dashed line indicates the space formed by the mold.
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[0071]
Then, as shown in the plan view of FIG. 13 (a) and FIG. 13 (b) which is a cross-sectional view of
the main part cut along the line A-A of FIG. 13 (a), The resin to be the main body 32 is injected
into the space.
[0072]
Then, as shown in the plan view of FIG. 14 (a) and FIG. 14 (b) which is a cross-sectional view of
the main part taken along line A-A of FIG. 14 (a), the sheet members 40s, 50s and The resin is cut
to remove unnecessary portions, and the portion to be the first member 30 is separated.
[0073]
Once the first member 30 and the second member 20 are produced, they are assembled.
[0074]
That is, the microphone element 2 is mounted in the recess 34 of the first member 30.
At this time, by appropriately selecting the size of the gap between the side surface 36 of the
recess 34 and the microphone element 2, the microphone element 2 can be accurately positioned
along the side surface 36 of the recess 34.
[0075]
After the microphone element 2 is mounted, the first member 20 is adhered to the upper surface
33 of the first member 30 using a conductive adhesive.
This completes the acoustic transducer unit 10.
[0076]
Alternatively, after the microphone element 2 is fixed to the lower surface 21 of the second
member 20 to form a combined body in which the second member 20 and the microphone
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element 2 are integrated, the microphone element 2 of the combined body is formed as a recess
in the first member 30 The first member 30 and the second member 20 may be coupled with
each other at 34.
[0077]
When the first member 30 manufactured by the insert molding method as described above is
used, the manufacturing cost of the acoustic transducer unit 10 can be reduced as compared
with the case where a multilayer substrate is used.
[0078]
<Modification> The acoustic transducer units 10a to 10c of the modification will be described
with reference to FIG.
The acoustic transducer units 10a to 10c of the modified example are different from the acoustic
transducer unit 10 of the embodiment in the configurations of the acoustic paths 16a and 17a;
16b and 17b; 16c and 17c.
[0079]
That is, in the acoustic transducer unit 10a shown in the cross-sectional view of FIG. 15A, the
opening 12a is formed in the bottom surface 11b of the acoustic transducer unit 10a.
Between the opening 12a and the opening 23 on the microphone element 2 side, a first acoustic
path 17a which is a through hole formed in the first member 30a, and a second through hole
formed in the second member 20a. It is in communication with the sound path 16a of
[0080]
In the acoustic transducer unit 10b shown in the cross-sectional view of FIG. 15 (b), an opening
12b is formed in the side surface 13 of the acoustic transducer unit 10b.
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Between the opening 12b and the opening 23 on the side of the microphone element 2, a first
acoustic path 17b, which is a through hole formed in the first member 30b, and a second
through hole, which is formed in the second member 20b. It communicates with the sound path
16 b of
[0081]
The acoustic transducer unit 10c shown in the cross-sectional view of FIG. 15 (c) has a plurality
of openings 12c formed on the side surface 13 of the acoustic transducer unit 10c.
A first acoustic path 17c, which is a through hole formed in the first member 30c, and a through
hole, which is a through hole formed in the second member 20c, are formed between the
respective openings 12c and the openings 23 on the microphone element 2 side. It is in
communication with the two acoustic paths 16c.
The first and second acoustic paths 17c and 16c are branched.
[0082]
The first members 30a, 30b and 30c of FIGS. 15 (a), (b) and (c) can be manufactured by the
insert molding method in the same manner as the embodiment, whereby the first acoustic path
with high shape accuracy is obtained. 17a, 17b, 17c can be formed.
The second members 20a, 20b and 20c in FIGS. 15 (a), (b) and (c) facilitate acoustic paths with
high shape accuracy by drilling, grooving, bonding, etc. of plate materials as in the embodiment.
Can be formed.
[0083]
<Summary> As described above, the microphone element 2 is accommodated in the recess 34 of
the main body 32 of the first member 30 in which the electromagnetic shield member 40 and the
terminal member 50 are embedded by insert molding or the like. The acoustic transducer units
10, 10a, 10b and 10c to be covered can be easily miniaturized and reduced in height, and the
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manufacturing cost can be reduced.
[0084]
The present invention is not limited to the above embodiment, and can be implemented with
various modifications.
[0085]
For example, the top and bottom of the acoustic transducer unit may be provided with a plurality
of openings communicating with the internal space.
[0086]
FIG. 1 is a perspective view of an acoustic transducer unit.
(Example) It is a sectional view of an acoustic transducer unit.
(Example) It is a disassembled perspective view of an acoustic transducer unit.
(Example) It is a disassembled sectional view of an acoustic transducer unit.
(Example) It is a disassembled sectional view of a cover member. (Example) (a) is a plan view
showing a manufacturing process, and (b) is a sectional view of an essential part. (Example) (a) is
a plan view showing a manufacturing process, and (b) is a sectional view of an essential part.
(Example) FIG. 7 is a perspective view of an essential part showing a manufacturing process.
(Example) (a) is a plan view showing a manufacturing process, and (b) is a sectional view of an
essential part. (Example) (a) is a plan view showing a manufacturing process, and (b) is a
sectional view of an essential part. (Example) (a) is a plan view showing a manufacturing process,
and (b) is a sectional view of an essential part. (Example) (a) is a plan view showing a
manufacturing process, and (b) is a sectional view of an essential part. (Example) (a) is a plan
view showing a manufacturing process, and (b) is a sectional view of an essential part. (Example)
(a) is a plan view showing a manufacturing process, and (b) is a sectional view of an essential
part. (Example) It is a sectional view of an acoustic transducer unit. (Modification) It is a sectional
view of an acoustic transducer unit. (Comparative example) It is a sectional view of an acoustic
04-05-2019
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transducer unit. (Conventional example)
Explanation of sign
[0087]
Reference Signs List 2 microphone element (acoustic transducer) 2a upper surface 2b lower
surface 6 connection terminal 10, 10a, 10b, 10c acoustic transducer unit 11a upper surface 11b
lower surface 12 opening 14 opening 16 acoustic path 16a, 16b, 16c second acoustic path 17a,
17b , 17c first acoustic path 20, 20a, 20b, 20c second member 21, 21a, 21b, 21c acoustic path
22 first sheet layer 24 second sheet layer 26 electromagnetic shield layer 30, 30a, 30b, 30c first
member 32 main body 34 recessed portion 35 bottom surface 36 side surface 38 internal space
40 electromagnetic shield member 42 bottom surface portion 44 side surface portion 46
opening 50 terminal member 52 internal terminal portion 54 connection portion 56 external
terminal portion
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