Patent Translate Powered by EPO and Google Notice This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate, complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or financial decisions, should not be based on machine-translation output. DESCRIPTION JP2018023103 Abstract: An acoustic spectrum analyzer and a method of arranging resonators provided therein are provided. A spectrum analyzer 100 includes a support substrate 110, and a plurality of resonators R arranged with one end fixed to the support substrate 110 and having different center frequencies from one another. The plurality of resonators R are arranged such that the distance between the adjacent resonators with the center frequency is maintained at a predetermined value or more, coupling is reduced, and analysis accuracy is enhanced. [Selected figure] Figure 1 Acoustic spectrum analyzer and arrangement method of resonators provided therein [0001] The present invention relates to an acoustic spectrum analyzer and a method of arranging resonators provided therein. [0002] Spectrum analyzers that analyze the spectrum of sound or vibration are used for situation recognition, speech recognition, speaker recognition, etc. in mobile phones (computers), computers, home appliances, automobiles or smart home environments, etc., home appliances, It is installed in cars, buildings, etc. and used for vibration information analysis. [0003] 04-05-2019 1 In general, frequency domain information of an acoustic signal is obtained by subjecting an acoustic signal input to a microphone having a wideband characteristic to an analog digital converter (ADC) to Fourier transform. can get. Such a frequency information acquisition method has a large computational load due to Fourier transform, has a trade-off relationship between frequency resolution and time resolution, and it is difficult to simultaneously improve resolution of time information and frequency information . [0004] U.S. Patent Application Publication No. 2010/0033058 [0005] The problem to be solved by the present invention is to provide an acoustic spectrum analyzer with improved resolution. [0006] The problem to be solved by the present invention is also to provide a resonator arrangement method that reduces coupling between resonators having different center frequencies. [0007] According to one type, a spectrum analyzer is provided that includes a support substrate and a plurality of resonators arranged with one end fixed to the support substrate and having different center frequencies. [0008] Each of the plurality of resonators may include a fixed unit fixed to the support substrate, a movable unit movable in response to an acoustic signal, and a sensing unit sensing a movement of the movable unit. [0009] The support substrate may be provided with a through hole, and the plurality of resonators may be arranged such that the movable portion of each of the plurality of resonators faces the through hole. 04-05-2019 2 [0010] The plurality of resonators may be planarly arranged without overlapping each other. [0011] A locus on which the fixed parts of the plurality of resonators are arranged may be formed along the cross-sectional shape of the through hole. [0012] The cross-sectional shape of the through hole may be rectangular, and a locus on which the fixing portion of the plurality of resonators is disposed may be formed along two parallel sides of the rectangle. [0013] In the plurality of resonators, the plurality of resonators are arranged such that the separation distance between two resonators whose center frequency is immediately adjacent is longer than the shortest distance among the separation distances between the plurality of resonators. It may be done. [0014] In the plurality of resonators, the plurality of resonators are configured such that a center frequency difference between two resonators immediately adjacent in space is larger than a smallest value of center frequency differences between the plurality of resonators. May be arranged. [0015] The number of the plurality of resonators is N, and when the plurality of resonators are named Rk (k is a natural number from 1 to N) in the order of center frequency, the plurality of resonators Rk Are grouped into m subgroups SG_j (j is a natural number from 1 to m), m is any one of N divisors excluding 1 and N, and the subgroup SG_j Is composed of a resonator Rk satisfying (k mod m) = j when j ≠ m, and is composed of a resonator Rk satisfying (k mod m) = 0 when j = m, The resonators Rk belonging to the same subgroup SG_j may be adjacent to each other and arranged in order of center frequency. [0016] 04-05-2019 3 The subgroups SG_j may be arranged in order of j values. [0017] m may be any one of a middle one value or a middle binary value when N divisors are arranged in order. [0018] m is a natural number greater than 2, and a locus on which the fixed part of each of the plurality of resonators is disposed may form a polygonal, circular or closed curve shape. [0019] The locus on which the fixing portion of each of the plurality of resonators is disposed may be a polygon in which the number of sides is m. [0020] m may be an even number, and a locus on which the fixed part of each of the plurality of resonators is disposed may be two straight lines parallel to each other. [0021] Among the subgroups SG_j, a locus on which the fixed part of the resonator belonging to the subgroup SG_j where j is 1 to m / 2 is arranged is a first straight line, and among the subgroups SG_j , J is from (m / 2) +1 to m, the locus on which the fixed portion of the resonator belonging to the subgroup SG_j is disposed is a second straight line parallel to the first straight line. May be [0022] In the subgroup SG_j, the fixed parts may be arranged in two different linear trajectories, and resonators in the two subgroups SG_j facing each other may be arranged in the opposite order according to the center frequency. [0023] The center frequencies of the plurality of resonators may be set at equal intervals. 04-05-2019 4 [0024] The center frequencies of the plurality of resonators may be set at equal ratio intervals. [0025] Further, according to one type, the range N of frequency f to be analyzed (F1 ≦ f ≦ F2), and the number N of a plurality of resonators Rk (k is a natural number from 1 to N) used for analysis The steps of setting, setting the center frequencies of the plurality of resonators Rk to different values within the range, and setting the arrangement period p of the resonators Rk, and the centers of the resonators Rk whose center frequencies are immediately adjacent to each other Arranging the plurality of resonators Rk such that the distance between them is twice or more of p, and the method of arranging the resonators of the spectrum analyzer is provided. [0026] The center frequencies of the plurality of resonators Rk are respectively set to F1 + (k-1) (F2-F1) / (N-1) (k is a natural number from 1 to N), and they are immediately adjacent spatially The plurality of resonators can be arranged such that the center frequency difference between the resonators Rk is twice or more of (F2−F1) / (N−1). [0027] Alternatively, the center frequencies of the plurality of resonators Rk may be set at equal ratio r intervals, and the ratio between the center frequencies between the resonators Rk immediately adjacent in space may be twice or more of r. Resonators can be arranged. [0028] The plurality of resonators Rk may be grouped into m subgroups SG_j (j is a natural number from 1 to m), and m is any one of N divisors except 1 and N. And the subgroup SG_j is composed of a resonator Rk satisfying (k mod m) = j when j ≠ m, and a resonance satisfying (k mod m) = 0 when j = m. The resonators Rk, which are composed of the sub-groups Rk and belong to the same sub-group SG_j, may be adjacent to each other and arranged in order of center frequency. [0029] According to the spectrum analyzer of the present invention, the frequency of the predetermined band is selectively sensed by the plurality of resonators having different center frequencies, and the frequency information analysis on the input signal is facilitated. 04-05-2019 5 [0030] The spectrum analyzer of the present invention does not require a Fourier transform, and can independently improve frequency resolution and time resolution. [0031] According to the resonator arrangement method of the spectrum analyzer of the present invention, the center frequency secures the spatial separation distance between the adjacent resonators and / or secures the central frequency separation between the spatially adjacent resonators Thereby, the coupling phenomenon between the resonators can be reduced. [0032] According to the resonator arrangement method of the spectrum analyzer of the present invention, when resonators are arranged in a sub-grouping system, coupling between adjacent resonators is reduced and the accuracy of spectrum analysis is improved. In addition, if necessary, it is also possible to selectively drive only a part of the subgroups, and to reduce power consumption. [0033] FIG. 1 is a perspective view showing a schematic structure of a spectrum analyzer according to one embodiment. FIG. 2 is a cross-sectional view showing in detail the structure of one resonator included in the spectrum analyzer of FIG. 1 in one cross section. FIG. 6 is a cross-sectional view showing in detail the structure of one resonator provided in the spectrum analyzer of FIG. 1 in another cross-section. It is the graph which showed the frequency response characteristic of one resonator illustratively. 04-05-2019 6 It is drawing which shows notion that the frequency component of an acoustic signal is analyzed by the spectrum analyzer of FIG. 5 is a graph illustrating frequency resolution and time resolution embodied by the spectrum analyzer of FIG. 1 in comparison with the case of using a Fourier transform method. It is a figure which shows notion that coupling effects differ according to the center frequency difference between the resonators arrange | positioned so as to be adjacent spatially. It is a figure which shows notion that coupling effects differ according to the separation distance between resonators which center frequency adjoins. 5 is a flow chart that schematically illustrates a resonator alignment method according to one embodiment. 5 is a flow chart that schematically illustrates a resonator alignment method according to one embodiment. When the number of resonators is 12, it is drawing which shows the example of a resonator arrangement at the time of making the number of subgroups into one. When the number of resonators is 12, it is drawing which shows the example of a resonator arrangement at the time of setting the number of subgroups to two. When the number of resonators is twelve, the number of subgroups is set to three, and it is drawing which shows the example of a resonator arrangement | sequence. When the number of resonators is 12 and the number of subgroups is 4, it is drawing which shows the example of a resonator arrangement | sequence in case. 04-05-2019 7 It is drawing which shows the example of a resonator arrangement | positioning example in case the number of sub-groups is set to 6, when the number of resonators is twelve. It is drawing which shows the example which divided | segmented several resonator into m sub groups and arrange | positioned each sub group circularly. FIG. 11 is a drawing showing an example in which resonators are arranged in order of center frequency in each sub group of FIG. 10. FIG. 7 is a perspective view showing a schematic structure of a spectrum analyzer according to another embodiment. It is a graph which shows the frequency response characteristic by three resonators arrange | positioned so as to be spatially adjacent in the spectrum analyzer of FIG. In the spectrum analyzer of FIG. 12, it is a graph which shows the frequency response characteristic by three resonators which center frequency adjoins. FIG. 10 is a drawing showing an example in which a plurality of resonators are divided into m subgroups and the subgroups are arranged in a rectangle in the spectrum analyzer according to another embodiment. FIG. 16 is a diagram showing an example in which resonators are arranged in order of center frequency in each subgroup in FIG. 15. FIG. 17 is a modified example of FIG. 16 and illustrates an example in which resonators of opposing subgroups are arranged in the opposite order with respect to the center frequency. FIG. 7 is a perspective view showing a schematic structure of a spectrum analyzer according to another embodiment. 04-05-2019 8 In the spectrum analyzer of FIG. 18, it is a graph which shows the frequency response characteristic by three resonators arrange | positioned so as to be spatially adjacent. In the spectrum analyzer of FIG. 18, it is a graph which shows the frequency response characteristic by two resonators which center frequency adjoins. FIG. 7 is a plan view showing an example of the resonator arrangement in the spectrum analyzer according to another embodiment. FIG. 7 is a plan view showing an example of the resonator arrangement in the spectrum analyzer according to another embodiment. 5 is a graph illustrating an example of a method of setting a center frequency of a resonator employed in a spectrum analyzer according to one embodiment. 5 is a graph illustrating an example of a method of setting a center frequency of a resonator employed in a spectrum analyzer according to one embodiment. 5 is a graph illustrating an example of a method of setting a center frequency of a resonator employed in a spectrum analyzer according to one embodiment. [0034] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. In the following drawings, the same reference numerals refer to the same components, and in the drawings, the size of each component is also exaggerated for the clarity and convenience of the description. On the other hand, the embodiments described below are merely exemplary, and various modifications can be made from such embodiments. [0035] In the following, what is described as “upper” or “upper” may include not only one directly above in contact but also one non-contact above. [0036] 04-05-2019 9 The singular expression also includes the plural, unless the context clearly indicates otherwise. In addition, when a part "includes" a certain component, it means that other components may be further included without excluding the other components unless specifically stated otherwise. Do. [0037] The use of the term "above" and similar descriptive terms apply both to the singular and the plural. [0038] For each step that constitutes the method, each step is performed in a suitable order, unless explicitly stated or contradicted. It is not necessarily limited to the description order of each step. The use of all examples or exemplary terms (e.g., etc.) is merely for the purpose of describing the technical concept in detail, and is not limited by the scope of the claims, the above example or exemplary terms The scope is not limited by the [0039] FIG. 1 is a perspective view showing a schematic structure of a spectrum analyzer 100 according to one embodiment. 2A and 2B are cross-sectional views detailing the structure of one of the resonators R provided in the spectrum analyzer 100 of FIG. 1 in different cross-sections, and FIG. 2C shows the frequency response of one resonator R. It is the graph which showed the characteristic illustratively. [0040] 04-05-2019 10 Referring to FIG. 1, a spectrum analyzer 100 includes a support substrate 110 and a resonator array 120. The resonator array 120 is arranged such that one end thereof is fixed to the support substrate 110, and includes a plurality of resonators R having different center frequencies. [0041] As illustrated in FIGS. 2A and 2B, the resonator R senses the movement of the fixed unit 10 fixed to the support substrate 110, the movable unit 30 movable in response to a signal, and the movable unit 30. And a sensing unit 20. The resonator R may also further include a mass 40 for providing the movable part 30 with a predetermined mass m. [0042] A through hole TH may be formed in the support substrate 110, and the plurality of resonators R may be arranged such that the movable portions 30 of the plurality of resonators R face the through hole TH. The through hole TH provides a space in which the movable portion 30 vibrates due to an external force, and the shape and the size of the through hole TH are not particularly limited as long as the space is satisfied. The support substrate 110 may be formed of various materials such as a silicon substrate. [0043] The plurality of resonators R do not overlap each other, and are arranged in a planar manner, that is, arranged so as to be totally simultaneously exposed to the input path of the physical signal. A locus on which the fixed portions 10 of the plurality of resonators R are disposed may be formed along the cross-sectional shape of the through hole TH. The through holes TH are illustrated as being circular, but are not limited thereto, and may have a polygonal shape or various other shapes of closed curves. [0044] The movable portion 30 is made of an elastic film. The elastic film can have a length L and a width W, which are factors determining the resonance characteristics of the resonator R, 04-05-2019 11 together with the mass m of the mass body 40. As the elastic film, materials such as silicon, metal, polymer and the like are used. [0045] The sensing unit 20 may include a sensor layer that senses the movement of the movable unit 30. The sensing unit 20 may include, for example, a piezoelectric element. In this case, the sensing unit 20 can have a structure in which an electrode layer, a piezoelectric material layer, and an electrode layer are stacked. As the piezoelectric material, ZnO, SnO, PZT, ZnSnO3, PVDF (polyvinylidene fluoride, P (VDF-TrFE), poly (vinylidene fluoride-trifluoroethylene), AlN, PMN-PT or the like is used. As the electrode layer, metal substances and various other conductive materials are used. [0046] The resonator R has a width of about several μm or less, a thickness of several μm or less, and a length of about several mm or less. Such fine-sized resonators R may also be manufactured by a micro electro mechanical systems (MEMS) process. [0047] The resonator R responds to external signals and vibrates up and down along the Z direction, the displacement z value being determined by the following equation of motion. [0048] [0049] Here, c is a damping coefficient, k is an elastic coefficient, and F0 cos ωt is a driving force, which indicates an action by a signal input to the resonator R. The k value is determined by the physical properties and the shape of the movable portion 30. 04-05-2019 12 [0050] According to the equation of motion, as shown in FIG. 2C, the resonator R exhibits a frequency response characteristic having a center frequency f0 and a bandwidth BW. [0051] The center frequency f0 is as follows. [0052] [0053] The bandwidth BW means a frequency bandwidth showing half of the frequency response value (z-magnitude) at the center frequency f0. [0054] As such, the resonator R included in the spectrum analyzer 100 has a designed center frequency different from each other, and can sense a predetermined frequency band centered on the center frequency. [0055] FIG. 3 conceptually illustrates where the frequency components of the acoustic signal are analyzed by the spectrum analyzer 100 of FIG. [0056] When an acoustic signal Wi having various frequency components is input to the spectrum analyzer 100, each of the resonators vibrates in response to the sensing frequency band of each of the frequency components included in the acoustic signal Wi. Do. The center frequency of each resonator is set so that the entire resonator can receive audio signals in an audio frequency band of about 20 Hz to 20 kHz, an ultrasonic band of 20 kHz or more, or an ultra low frequency band of 20 Hz or less It may be done. 04-05-2019 13 [0057] The input acoustic signal causes the resonator to vibrate, and the resonators vibrate corresponding to the acoustic frequencies in different bands, so that different frequency bands are sensed. [0058] As exemplarily illustrated, in a resonator whose center frequency is f1, f2, and f3, respectively, a signal responsive to the frequency component is output. That is, since the output of each resonator becomes the corresponding frequency information as it is, the frequency resolution is independently determined by the number of resonators. The time resolution is the same as the instantaneous output rate from each resonator. [0059] FIG. 4 is a graph illustrating frequency resolution and time resolution implemented by the spectrum analyzer 100 of FIG. 1 in comparison with the case of using a Fourier transform method. [0060] According to the STFT (short time Fourier tansform) method, in order to know changes in frequency distribution over time, an input signal is divided into frames, which are fixed time intervals, and fast Fourier transform (FFT) is performed for each frame. Do. If the frame is cut small, temporal change can be easily observed, but the intraframe information is small, the frequency information is dulled, and if the frame is widely cut, the frequency information becomes clear, instead of being temporally Be insensitive to change. It is called Gabor uncertainty or Fourier uncertainty, and the value of (ΔT) (ΔF) is limited to the 04-05-2019 14 dotted line shown in the graph. In one embodiment, without such limitations, frequency resolution and time resolution can be independently ensured, and selective design is possible with any value within the shaded area. [0061] Although the spectrum analyzer 100 of FIG. 1 exemplifies a plurality of resonators R arranged in order of the size of the center frequency, the present invention is not limited thereto, and other output characteristics can be improved. It is possible to arrange in an arrangement manner. [0062] As illustrated in FIG. 2C, the frequency response graph of the resonator R has a predetermined band width, so the Q value defined as f0 / BW is finite. As the Q value is larger, the frequency response characteristic is more sensitive, and as the Q value is smaller, the frequency response characteristic is also responsive to the frequency in the adjacent band besides the center frequency. Since the plurality of resonators R are collectively disposed in a limited space, coupling between the resonators R occurs. The coupling effect involves both the spatial distance between the resonators R and the center frequency difference between adjacent resonators R, so some points have to be taken into account to reduce the coupling. It does not. [0063] FIG. 5 conceptually shows that the coupling effect is different due to the center frequency difference between the resonators arranged to be spatially adjacent. [0064] FIG. 5 shows the frequency response characteristics of two resonators in three cases where the 04-05-2019 15 spatial separation distance is the same at d and the center frequency differences are (.DELTA.f) 1, (.DELTA.f) 2, and (.DELTA.f) 3, respectively. It shows. [0065] Referring to FIG. 5, the smaller the center frequency difference, the stronger the coupling. When the center frequency difference is (Δf) 1, the resonator having the center frequency of fi also shows a peak in response to the frequency fi + 1, and the resonator having the center frequency of fi + 1 also has the frequency fi The peak which reacted is shown. [0066] When the center frequency difference is increased to (Δf) 2, the resonator having the center frequency of fi does not show a peak responsive to the frequency fi + 1, but the resonator having the center frequency of fi + 1 responds to the frequency fi It shows a peak. [0067] When the center frequency difference is further increased to (Δf) 3, the resonator having the center frequency of fi does not show a peak responsive to the frequency fi + 1, and the resonator having the center frequency of fi + 1 also responds to the frequency fi It does not show a peak. That is, the coupling between the two resonators is not shown. [0068] From such analysis, it is possible to make the center frequency difference of the closely spaced resonators equal to or greater than a predetermined value, for example, larger than the bandwidth of each adjacent resonator and to reduce the coupling. I understand. [0069] FIG. 6 conceptually shows that the coupling effect is different depending on the separation distance between adjacent resonators having center frequencies. 04-05-2019 16 [0070] FIG. 6 shows frequency response characteristics by two resonators in three cases where the separation distance between the two resonators having the center frequency difference Δf is increased to d1, d2, and d3. [0071] Referring to FIG. 6, the smaller the separation between the resonators, the larger the coupling. If the separation between the two resonators is d1, the resonator with the center frequency of fi is also responsive to the frequency fi + 1 and shows a peak, and the resonator with the center frequency of fi + 1 also responds to the frequency fi Indicates a peak that has [0072] When the separation distance between the resonators is increased to d2, the size of the peak in which the resonator having the center frequency of fi responds to the frequency fi + 1, and the size of the peak in which the resonator having the center frequency of fi + 1 responds to the frequency fi Is smaller than in the case where the separation distance between the resonators is d1. [0073] When the separation distance between the resonators is further increased to d3, the resonator having the center frequency of fi does not show a peak responsive to the frequency fi + 1, and the resonator having the center frequency fi + 1 is also a peak responsive to the frequency fi Not shown. That is, the coupling between the two resonators is not shown. [0074] From such analysis, it can be seen that a resonator with a small center frequency difference can 04-05-2019 17 achieve a spatial separation of more than a predetermined value and reduce coupling between each other. [0075] In view of the above, the array configuration of the resonators R of the resonator array 120 illustrated in the spectrum analyzer 100 of FIG. 1 is transformed into a configuration that can reduce coupling. [0076] For example, in the plurality of resonators R, the plurality of resonators are arranged such that the separation distance between the two resonators R immediately adjacent to each other in center frequency is longer than the shortest distance among the separation distances between the plurality of resonators R. R may be arranged. [0077] Alternatively, the plurality of resonators R may be arranged such that the separation distance between two resonators R immediately adjacent to each other in center frequency is larger than the bandwidth of each of the two resonators R. [0078] Alternatively, the plurality of resonators R may be arranged such that the center frequency difference between two resonators R immediately adjacent in space is larger than the smallest value of the center frequency differences between the plurality of resonators R. It is also good. [0079] 7 and 8 are flowcharts schematically illustrating a resonator arrangement method of a spectrum analyzer according to one embodiment. [0080] Referring to FIG. 7, first, the range of frequency f to be analyzed (F1 ≦ f ≦ F2), and the number N of a plurality of resonators Rk (k is a natural number from 1 to N) used for analysis Is set (S100). [0081] 04-05-2019 18 Next, the center frequency of each of the plurality of resonators and the arrangement period p of the resonators are set (S200). The arrangement period p is the distance between adjacent resonator centers, and when the resonator width is w and the separation distance is d, it is a value corresponding to (d + w). The center frequencies of the plurality of resonators Rk are set to different values within the set frequency range (F1 ≦ f ≦ F2). The index k for naming the plurality of resonators Rk can be determined in descending order of the center frequency. The rules for setting the center frequency can be determined in various ways. For example, the center frequency may be set at equal intervals or equal ratio intervals, or may be set at arbitrary intervals. For example, the center frequency intervals are narrowed in a specific frequency interval, and in other frequency intervals. Center frequency intervals can also be provided. [0082] Next, a plurality of resonators Rk whose center frequency is designed are arranged. The plurality of resonators Rk are arranged such that the distance between the centers of the resonators Rk immediately adjacent to each other is twice or more than p so that coupling does not occur as much as possible (S300). [0083] Further, or alternatively, the plurality of resonators Rk can be arranged such that the center frequency difference between the resonators Rk immediately adjacent in space is equal to or 04-05-2019 19 greater than a predetermined value. [0084] For example, the center frequencies of the plurality of resonators Rk are set at equal intervals, that is, the center frequencies are respectively F1 + (k-1) (F2-F1) / (N-1) (k is 1 to N) Array the plurality of resonators Rk such that the center frequency difference between the resonators Rk immediately adjacent in space is twice or more of (F2−F1) / (N−1). can do. [0085] Alternatively, if the center frequencies of the plurality of resonators Rk are set to equal ratio r, that is, if the ratio of the center frequencies of two resonators immediately adjacent to each other has a constant value r, the center frequency is spatial The plurality of resonators Rk can be arranged such that the ratio between the center frequencies between the resonators Rk immediately adjacent to each other is twice or more of r. [0086] Such an arrangement of resonators, as explained in FIGS. 5 and 6, makes the spacing between the resonators immediately adjacent to the center frequency as large as possible, together therewith or optionally, spatially This is to increase the center frequency difference between adjacent resonators as much as possible. That is, an optimal combination of two requirements, or a resonator arrangement that emphasizes one requirement, is selectively used. [0087] A method of grouping a plurality of resonators Rk into sub groups will be described with reference to FIG. [0088] The plurality of resonators Rk are grouped into m subgroups SG_j (j is a natural number from 1 to m), and at this time, the plurality of resonators Rk are grouped based on a modulus related to m. (S310). 04-05-2019 20 [0089] The subgroup SG_j may be defined by the value of the remainder which divided k which shows the center frequency order of a resonator by the number m of subgroups. That is, SG_j (j ≠ m) is composed of a resonator Rk satisfying (k mod m) = j, and SG_j (j = m) is composed of a resonator Rk satisfying (k mod m) = 0 Be done. [0090] The number m of subgroups may be a divisor of N, and may be any one of N divisors excluding 1 and N. When m is a divisor of N, the number of resonators included in each sub-group can be the same, but m is not necessarily limited to a divisor of N. [0091] Resonators Rk belonging to the same sub group SG_j are arranged adjacent to each other, and arranged in order of center frequency (S320). Also, each subgroup SG_j may be arranged in the order of the index j defining the subgroup. [0092] FIGS. 9A to 9E show an example of a resonator arrangement in which the number of subgroups is 1, 2, 3, 4, and 6, respectively, when the number of resonators is twelve. [0093] 04-05-2019 21 FIG. 9A shows an example in which the number of subgroups is one, that is, a plurality of resonators are arranged in order of center frequency without grouping. The arrangement is in the form of the smallest center frequency difference between spatially adjacent resonators. That is, the resonators have a constant alignment period p, and the center frequency separation between adjacent resonators is Δf. [0094] Δf can have different definitions depending on the center frequency setting method of the resonator. For example, when the center frequency is set to equidistant interval, Δf is defined as (F2−F1) / (N−1). If the center frequency is set by the isometric r-rule, Δf is defined as r. [0095] FIG. 9B shows the case where two subgroups are formed, and the subgroup SG_1 includes Rk (k = 1, 3, 5, 7, 9, 11), and the subgroup SG_2 includes Rk (k = 2, 4, 6, 8, 10, 12). As a result of arranging the resonators Rk in the subgroups SG_1 and SG_2 in order of center frequency and arranging the subgroups SG_1 and SG_2 in order, the frequency separation between the resonators R1 and R3 immediately adjacent in space is 2Δf, and the center frequency The spatial separation between the resonators R1 and R2 immediately adjacent to each other is 6p. [0096] 04-05-2019 22 FIG. 9C shows the case where three subgroups are formed, and the subgroup SG_1 includes Rk (k = 1, 4, 7, 10), and the subgroup SG_2 includes Rk (k = 2, 5, 8, 10). 11), and the subgroup SG_3 includes Rk (k = 3, 6, 9, 12). As a result of arranging the resonators Rk in the subgroups SG_1, SG_2, SG_3 in order of center frequency and arranging the subgroups SG_1, SG_2, SG_3 in order, the frequency separation between the resonators R1, R4 immediately adjacent in space is 3Δf The spatial separation between the resonators R1 and R2 immediately adjacent to the center frequency is 4p. [0097] FIG. 9D shows the case where four subgroups are formed, subgroup SG_1 includes Rk (k = 1, 5, 9), and subgroup SG_2 includes Rk (k = 2, 6, 10). , Subgroup SG_3 includes Rk (k = 3, 7, 11), and subgroup SG_4 includes Rk (k = 4, 8, 12). As a result of arranging the resonators Rk in the subgroups SG_1, SG_2, SG_3, SG_4 in the order of center frequency and arranging the subgroups SG_1, SG_2, SG_3, SG_4 in order, the resonators R1, R5 immediately adjacent in space are adjacent to each other. The frequency separation is 4Δf, and the spatial separation between the resonators R1 and R2 immediately adjacent to the center frequency is 3p. [0098] FIG. 9E shows the case where six subgroups are formed. As a result of arranging the resonators as described above, the frequency separation between the immediately adjacent resonators R1 and R7 is 6Δf, and the space separation between the resonators R1 and R2 immediately adjacent to the center frequency is 2p. become. [0099] As described above, the number of subgroups is appropriately combined with various viewpoints 04-05-2019 23 such as securing the distance between resonators with adjacent center frequencies or securing the center frequency difference between spatially adjacent resonators. Can be selected. In the case of FIG. 9B, the aspect of securing the distance between adjacent resonators at the center frequency is further emphasized, and in the case of FIG. 9E, the aspect of securing the center frequency difference between spatially adjacent resonators is further emphasized. Seems to be there. [0100] The number m of subgroups can be determined to be an intermediate value when the divisors of N are arranged in order, such that the two aspects are properly combined. For example, N divisors may be arranged in order, and one of the middle one or one of the middle binary may be determined as the number of subgroups. [0101] As such, when sub-grouping resonators is arranged, not only the effect of reducing the coupling between the resonators can be obtained, but it is also possible to drive only some of the subgroups if necessary. is there. Since the frequency band ranges covered by each sub-group are similar, by driving only a part of the sub-group, it is possible to drive slightly reducing resolution and reducing power consumption. [0102] FIG. 10 shows an example in which a plurality of resonators Rk are divided into m sub-groups and each sub-group is arranged in a circle, and FIG. 11 shows an array of resonators in each subgroup of FIG. An example is shown. [0103] The plurality of subgroups SG_j (j = 1 to a natural number from m) are constituted by a collection of resonators Rk having the same remainder after dividing an index k naming each resonator Rk by m. 04-05-2019 24 The plurality of subgroups SG_j occupy a fan-shaped area and may be sequentially arranged along the circumferential direction. [0104] In each subgroup SG_j, the resonators Rk are arranged along the circumferential direction in the order of center frequency. The resonator Rk in each subgroup SG_j satisfies k = i * m + j (i is an integer from 0 to (N / m) -1). The frequency separation of two resonators spatially adjacent, ie, with an angular distance of 2π / N radian, eg, R2 and Rm + 2, is m * Δf. Here, Δf is a frequency separation value determined by the method of setting the center frequency of the resonator Rk, and as described above, when it is set to the equal interval, the tolerance corresponds to that and the equal ratio interval If it is set to, the common rule falls there. The physical separation of two resonators, eg, R1 and R2, or Rm + 1 and Rm + 2, whose center frequency spacings are adjacent, ie, Δf, becomes 2π / m radian in angular distance. [0105] FIG. 12 is a perspective view showing a schematic structure of a spectrum analyzer 200 according to another embodiment. [0106] Spectrum analyzer 200 includes a support substrate 210 in which through holes TH are formed, and a resonator array 220. Resonator array 220 is grouped into four subgroups SG_1, SG_2, SG_3, SG_4, They are arranged along the circumferential direction by the arrangement method. The locus on which the fixed portion of the resonator Rk is disposed is circular. [0107] FIG. 13 is a graph showing frequency response characteristics of three resonators arranged to be spatially adjacent in the spectrum analyzer 200 of FIG. [0108] 04-05-2019 25 The resonators R1, R5 and R9 belong to the same subgroup SG_1, and the center frequency separation is 4Δf. Spatially, although in the most adjacent arrangement, the coupling is shown to be very weak by ensuring the center frequency separation. [0109] FIG. 14 is a graph showing frequency response characteristics of three resonators whose center frequencies are adjacent to each other in the spectrum analyzer 200 of FIG. [0110] The resonators R1, R2 and R3 belong to the subgroup SG_1, the subgroup SG_2 and the subgroup SG_3, respectively, and the spatially separated angular distance is 2π / 4 radians. The separation of the center frequencies is in the closest relationship to Δf, but with the separation of the spatial distances ensured, the coupling is hardly indicated. [0111] FIG. 15 is an example in which a plurality of resonators Rk are divided into m subgroups and the subgroup SG_j (j is a natural number from 1 to m) is arranged in a rectangle in the spectrum analyzer 300 according to another embodiment. FIG. 16 shows an example in which the resonators Rk are arranged in order of center frequency in each subgroup SG_j of FIG. [0112] The number m of subgroups SG_j may be set to an even number. Among the subgroups SG_j, the subgroup SG_j in which j is 1 to m / 2 is sequentially arranged in the vertical direction along one side of the rectangle, and the subgroup SG_j in which j is from m / 2 + 1 to m is They are sequentially arranged in the longitudinal direction along the other side. 04-05-2019 26 [0113] Such an arrangement may, for example, also be applied to a support substrate provided with rectangular through holes. That is, the fixed parts of the plurality of resonators may be arranged along two sides parallel to each other of the rectangle. That is, a locus of the fixed part of the resonator belonging to the subgroup SG_j in which j is 1 to m / 2 in the subgroup SG_j is a first straight line, and in the subgroup SG_j, The locus on which the fixed portion of the resonator belonging to the subgroup SG_j where j is from (m / 2) +1 to m may be arranged in a parallel second straight line facing the first straight line . [0114] The resonator Rk in each subgroup SG_j satisfies k = i * m + j (i is an integer from 0 to (N / m) -1). In each subgroup SG_j, the resonators Rk are arranged in the order of k values, and resonators belonging to different subgroups and facing each other have the same size order in the subgroups. For example, R1 and Rm / 2 + 1 face each other, and Rm + 1 and R3m / 2 + 1 face each other. As illustrated in FIG. 16, the smallest value of the separation distance between mutually opposing resonators belonging to different groups is S1. The above-described rectangular horizontal length A can be set in consideration of the S1 value. [0115] FIG. 17 shows a resonator arrangement employed in the spectrum analyzer 400 of the variation of FIG. [0116] The spectrum analyzer 400 is identical to the spectrum analyzer 300 of FIGS. 15 and 16 in the form in which each subgroup SG_j is arranged, and the order concerning the center frequencies of the resonators of the subgroup SG_j facing each other is as shown in FIG. Unlike 16, they are arranged opposite to each other. [0117] 04-05-2019 27 The resonator Rk in each subgroup SG_j satisfies k = i * m + j (i is an integer from 0 to (N / m) -1). In the subgroup SG_j in which j is from 1 to m / 2, the resonators Rk are arranged in the order of increasing the k value, and in the subgroup SG_j in which j is from m / 2 + 1 to m, in the order of decreasing k value , Resonators Rk are arranged. That is, in the subgroup SG_1, the resonator R1 having the smallest k and the resonator RN-m / 2 + 1 having the largest k face each other in the subgroup SG_m / 2 + 1. [0118] By such an arrangement, the area occupied by the resonator Rk can be made smaller than in the case of FIG. 16, and a more compact structure is realized. The smallest value of the separation distance between mutually opposing resonators belonging to different groups is S2, and when the rectangular long A is the same as in FIG. 16, S2 is shown in FIG. It will be a value greater than S1. [0119] Therefore, in other words, when S2 is S1 as in the case of FIG. 16, the sum of the lengths occupied by the resonator R1 and the resonator RN-m / 2 + 1 facing each other is R1 facing each other in FIG. And Rm / 2 + 1 are smaller than the sum of the distances occupied by Rm / 2 + 1, the horizontal length A of the rectangle for the arrangement of the resonator Rk can be set smaller than in the case of FIG. [0120] FIG. 18 is a perspective view showing a schematic structure of a spectrum analyzer 500 according to another embodiment. [0121] Spectrum analyzer 500 includes a support substrate 510 in which a rectangular through hole TH is formed, and a resonator array 520. 04-05-2019 28 The resonator array 520 includes two subgroups SG_1 and SG_2. The resonator arrangement order of the opposing subgroups SG_1 and SG_2 is such that the order related to the center frequency is reversed, and the space occupied by the plurality of resonators R is minimized. [0122] FIG. 19 is a graph showing frequency response characteristics with three resonators arranged to be spatially adjacent in the spectrum analyzer 500 of FIG. [0123] The resonators R1, R3 and R5 belong to the same subgroup SG_1, and the center frequency separation is 2Δf. Spatially, although in the most adjacent arrangement, the coupling is shown to be very weak by ensuring the center frequency separation. [0124] FIG. 20 is a graph showing frequency response characteristics of two resonators whose center frequencies are adjacent to each other in the spectrum analyzer 500 of FIG. [0125] The resonators R3 and R4 belong to the subgroup SG_1 and the subgroup SG_2, respectively, and the separation of the center frequencies is the closest to the Δf, but by securing the separation of the spatial distance, the coupling Not shown. [0126] FIG. 21 is a plan view showing an example of the resonator arrangement in the spectrum analyzer 600 according to another embodiment. 04-05-2019 29 [0127] In the resonator R provided in the spectrum analyzer 600, four sub-groups are arranged in each area obtained by equally dividing a square area by two diagonal lines. Resonators R having different lengths may be sequentially arranged in the area divided into four in a triangular shape. [0128] The resonator R may be disposed on a support substrate in which a square through hole is formed as illustrated in FIG. However, the present invention is not limited thereto. For example, the fixing portion may be arranged to be fixed on two diagonal beam structures. [0129] FIG. 22 is a plan view of an example resonator arrangement in a spectrum analyzer 700 according to another embodiment. [0130] The resonators R included in the spectrum analyzer 700 are grouped into m sub-groups, and arranged in a polygonal area having m sides. Each sub-group is assigned to m regions divided by diagonal lines, and resonators of different lengths are sequentially arranged in the sub-group. Although m is illustrated as being 8 in the drawings, it is exemplary and not limiting. 04-05-2019 30 [0131] The resonator R may be disposed on a substrate having an m-square through hole. However, the present invention is not limited to this, and it is also possible to arrange in a beam structure having a shape corresponding to the diagonal of the m-gon. [0132] 23A-23C are graphs illustrating an example of a method of setting the center frequency of a resonator employed in a spectrum analyzer according to one embodiment. [0133] FIG. 23A shows an example in which the frequency range to be analyzed is divided at equal intervals. The values equally divided by equal intervals are assigned to the plurality of resonators together with the ID as the center frequency, and according to the given ID, the plurality of resonators are grouped into four subgroups in the manner described above. . [0134] FIG. 23B shows an example in which the frequency range to be analyzed is divided by equal ratio intervals. The frequency values set at equal intervals are assigned to the plurality of resonators together with the ID as the center frequency, and the given ID groups the plurality of resonators into four subgroups in the manner described above. . [0135] FIG. 23C shows an example in which the frequency range to be analyzed is divided at arbitrary intervals. Arbitrary intervals may be set variously, for example, mixing of equal intervals with different tolerance values, mixing of equal ratios with different common ratio values, or mixing of 04-05-2019 31 equal intervals with equal intervals, etc. Can. The set frequency values are assigned to the plurality of resonators together with the ID as the center frequency, and the given ID groups the plurality of resonators into four subgroups in the manner described above. [0136] FIGS. 23A-23C illustrate center frequency setting methods for dividing the frequency band into four sub-groups, but are not limited thereto. It is possible to divide into various numbers of subgroups, and the method of setting the center frequency may be a combination of the illustrated methods or a modification to other forms. [0137] Although the above description exemplifies and describes the resonator having the movable portion driven by the cantilever method, it is not limited thereto. The resonator arrangement method of the above concept is applied to various resonators that exhibit coupling phenomena by frequency adjacent and spatial adjacent. [0138] Exemplary embodiments have been described and illustrated in the accompanying drawings to assist in understanding the present invention. However, it should be understood that such embodiments are merely to illustrate the present invention and not to limit it. And, it should be understood that the present invention is not limited to the description shown and described. That is because a variety of different variations can be implemented by one skilled in the art. [0139] The acoustic spectrum analyzer of the present invention and the method of arranging resonators provided therein are effectively applicable to, for example, the technical field of acoustics. [0140] 100, 200, 300, 400, 500, 600, 700 Spectrum analyzer 110, 210, 510 Support substrate 120, 220, 520 Resonator array R, Rk resonator SG_j subgroup 04-05-2019 32 04-05-2019 33

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