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JP2018085695

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This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
financial decisions, should not be based on machine-translation output.
DESCRIPTION JP2018085695
Abstract: The present invention provides a vibrating element having a diaphragm and a magnet
having a coil portion including a plurality of conductive patterns, and the occurrence of
delamination of the coil portion being suppressed. A diaphragm includes a coil portion on which
a coil is formed and a plurality of support portions, a housing to which the support portion is
joined, and a magnet disposed in a coil axial direction of the coil portion and housed in the
housing The vibration plate includes a plurality of laminated resin substrates, the coil is formed
including a conductor pattern disposed on the resin substrate, and the support is A width is
drawn narrower than the coil portion in a direction parallel to the surface of the resin base, and
the support portion has a first support portion having a conductor pattern electrically connected
to the coil and the conductor pattern The second support portion is not formed, and at least two
of the support portions are formed on different resin substrates. [Selected figure] Figure 2
Vibrating element and diaphragm
[0001]
The present invention relates to a vibration element and a diaphragm.
[0002]
The diaphragm that vibrates by an electromagnetic force usually includes a coil portion in which
a coil is formed, and a support portion that supports the coil portion in a vibratable state.
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The support portion is formed with a conductor pattern electrically connected to the coil.
[0003]
For example, Patent Document 1 discloses conducting connection with a coil formed in a coil
portion of a diaphragm, and forming a lead wire integrally formed with the coil portion to be
thinner than the coil portion.
[0004]
WO 2006/098243
[0005]
In a diaphragm having a coil in which a coil is formed of a conductor pattern, when the number
of laminated layers of the coil portion on which the conductor pattern is formed is increased in
order to enhance the electromagnetic force, the coil is integrally formed with the coil and
conductively connected. The thickness of the support portion is increased, and the support
portion is not easily deformed.
If the width of the support portion is made smaller to cope with this, the coil portion is likely to
be twisted during vibration.
Moreover, when the number of laminated layers of the support portion is reduced to form the
support portion, there is a problem that delamination easily occurs between the layer in which
the support portion is formed and the layer in which the support portion is not formed.
[0006]
An object of the present invention is to provide a vibrating element having a diaphragm having a
coil portion including a plurality of conductive patterns and a magnet, and in which occurrence
of delamination of the coil portion is suppressed.
[0007]
According to a first aspect of the present invention, there is provided a diaphragm including a
coil portion on which a coil is formed and a plurality of support portions, a casing to which the
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support portion is joined, and a coil axial direction of the coil portion And the vibration plate
includes a plurality of laminated resin substrates, and the coil includes a conductor pattern
disposed on the resin substrate. The supporting portion is formed to be drawn narrower than the
coil portion in a direction parallel to the surface of the resin base, and the supporting portion is a
first supporting portion having a conductor pattern electrically connected to the coil. And a
second support portion not having the conductor pattern, wherein at least two of the support
portions are vibration elements formed on different resin substrates.
[0008]
A second aspect of the present invention is a diaphragm including a plurality of laminated resin
substrates, each having a coil portion on which a coil is formed and a plurality of supporting
portions, wherein the coil is formed on the resin substrate. The support portion is formed
including a conductor pattern to be disposed, the support portion is formed to be drawn
narrower than the coil portion in a direction parallel to the surface of the resin base, and the
support portion is electrically connected to the coil. And a second support portion not having the
conductor pattern, at least two of the support portions being diaphragms formed on different
resin substrates.
[0009]
According to the present invention, it is possible to provide a vibrating element having a
diaphragm having a coil portion including a plurality of conductor patterns and a magnet, and in
which occurrence of delamination of the coil portion is suppressed.
[0010]
It is a disassembled perspective view which shows the diaphragm which comprises the vibrating
element of 1st Embodiment.
It is the schematic which shows the structure of the vibration element of 1st Embodiment.
It is the top view which looked at an example of the vibration element of 1st Embodiment from
the thickness direction of the diaphragm.
It is sectional drawing which looked at an example of the vibration element of 1st Embodiment
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from the direction parallel to the surface of a diaphragm.
It is a disassembled perspective view which shows the diaphragm which comprises the vibration
element of 2nd Embodiment. It is the top view which looked at an example of the vibration
element of 2nd Embodiment from the thickness direction of the diaphragm. It is a disassembled
perspective view which shows the diaphragm which comprises the vibrating element of 3rd
Embodiment. It is the top view which looked at an example of the vibration element of 3rd
Embodiment from the thickness direction of the diaphragm. It is sectional drawing which looked
at an example of the vibrating element of 3rd Embodiment from the direction parallel to the
surface of a diaphragm.
[0011]
According to a first aspect of the present invention, there is provided a diaphragm including a
coil portion on which a coil is formed and a plurality of support portions, a casing to which the
support portion is joined, and a coil axial direction of the coil. A vibrating element including: a
magnet to be accommodated, wherein the diaphragm includes a plurality of laminated resin
substrates, and the coil is formed to include a conductor pattern disposed on the resin substrate
The support portion is formed to be drawn narrower than the coil portion in a direction parallel
to the surface of the resin base material, and the support portion is a first support portion having
a conductor pattern electrically connected to the coil. And at least two of the support portions are
vibration elements formed on different resin substrates.
[0012]
According to the above configuration, by providing a plurality of support portions drawn from
different resin substrates, stress concentration between the layer having the support portion and
the layer adjacent thereto is relaxed while the thickness of the support portion is suppressed, and
delamination is caused. Occurrence is suppressed.
Further, since the plurality of support portions are respectively joined to the housing, the torsion
of the diaphragm accompanying the motion is suppressed.
[0013]
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It is preferable that the support portions be disposed symmetrically with reference to the center
of gravity of the diaphragm. Thereby, the torsion of the diaphragm can be suppressed more
effectively.
[0014]
Preferably, the first support portion is disposed between two of the second support portions in a
direction parallel to the plane of the diaphragm. Thereby, the stress applied to the joint portion
between the first support portion and the housing is alleviated, and the occurrence of connection
failure can be suppressed.
[0015]
It is preferable that the support portion has an overlapping portion when viewed in the stacking
direction. As a result, the balance between the strength and flexibility of the support portion is
excellent, and the durability is further improved.
[0016]
It is preferable that the diaphragm is formed by directly laminating the resin base material.
Thereby, the adhesive strength between the resin substrates can be further enhanced, and the
occurrence of delamination can be further suppressed.
[0017]
It is preferable that the said diaphragm contains the direct lamination | stacking part of the resin
base material which has the said lead-out part, and the resin base material which does not have a
lead-out part. Thereby, the stress concentration is alleviated and the occurrence of delamination
is further suppressed as compared with the case where the resin substrates having the lead
portions are directly laminated.
[0018]
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The second aspect is formed from a multilayer substrate having a coil portion and a plurality of
supporting portions and including a plurality of resin base materials stacked on one another, and
the coil portion includes a conductor pattern disposed on the resin base material. The supporting
portion is drawn with a width smaller than that of the coil portion in a direction parallel to the
surface of the resin base material, and the supporting portion has a conductor pattern electrically
connected to the coil portion. 1 is a diaphragm including a first support portion and a second
support portion not having the conductor pattern.
[0019]
It is preferable that the support portions be disposed symmetrically with reference to the center
of gravity of the diaphragm.
Thereby, the twist of a coil part can be suppressed more effectively.
[0020]
It is preferable that the first support portion be disposed between the two second support
portions in a direction parallel to the plane of the diaphragm. As a result, when the first support
portion is electrically joined to the housing, the stress applied to the joint portion between the
first support portion and the housing can be alleviated, and the occurrence of connection failure
can be suppressed.
[0021]
It is preferable that a plurality of the lead portions be stacked on the support portion. As a result,
the balance between the strength of the support portion and the ease of deformation is excellent,
and the durability is further improved.
[0022]
The diaphragm is preferably formed by laminating the resin base material directly. Thereby, the
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adhesive strength between the resin substrates can be further enhanced, and the occurrence of
delamination can be further suppressed.
[0023]
It is preferable that the said diaphragm contains the direct lamination | stacking part of the resin
base material which has the said support part, and the resin base material which does not have a
support part. Thereby, the stress concentration is alleviated and the occurrence of delamination
is further suppressed as compared with the case where the resin base materials having the
support portions are directly laminated.
[0024]
Hereinafter, several specific examples will be described with reference to the drawings to show a
plurality of embodiments for carrying out the present invention. The same reference numerals
are given to the same parts in each drawing. Although the embodiments are shown separately for
convenience in consideration of the description of the main points or the ease of understanding,
partial replacement or combination of the configurations shown in the different embodiments is
possible. In the second and subsequent embodiments, descriptions of matters in common with
the first embodiment will be omitted, and only different points will be described. In particular, the
same operation and effect by the same configuration will not be sequentially referred to in each
embodiment.
[0025]
First Embodiment FIG. 1 is an exploded perspective view of a diaphragm 100 used for a vibration
element according to a first embodiment. In FIG. 1, in order from the bottom, three layers of the
resin base 15 on which the conductor pattern 40 forming the coil is disposed on the surface, and
a resin on which the conductor pattern 30 forming the first support 20A is disposed on the
surface A total of four layers consisting of one layer of the base material 15 are laminated in the
thickness direction of the resin base material to form the diaphragm 100 having the coil part 10
and a plurality of supporting parts. The diaphragm 100 has a thickness direction parallel to the
laminating direction of the resin base material and a direction parallel to the plane orthogonal to
the laminating direction, and is configured to be able to move in the thickness direction by an
electromagnetic force.
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[0026]
In FIG. 1, each resin base 15 is drawn out on both sides in the longitudinal direction at a width
narrower than the width of the coil portion 10 where the coil is formed, ie, the width of the resin
base 15 in the short direction. And supporting portions 20A and 20B. Moreover, when the resin
base material 15 is laminated | stacked, the lead-out part of each resin base material 15 is
formed in the position which does not mutually overlap. Therefore, when the resin base 15 is
laminated to form the diaphragm 100, each of the support portions 20A and 20B is one of the
lead-out portions of the resin base 15, and the thickness direction of the diaphragm 100 for one
side in the longitudinal direction Placed at different locations along the Further, the respective
support portions 20A and 20B are arranged so as not to overlap with each other when viewed
from the thickness direction of the diaphragm 100.
[0027]
In FIG. 1, the support portions 20A and 20B are drawn out in the longitudinal direction of the
resin base material 15, but may be drawn out in the lateral direction, or may be drawn out in
both the longitudinal direction and the lateral direction . Further, in FIG. 1, although each of the
support portions 20A and 20B is formed of the lead portion of the resin base material 15 of one
layer, the lead portions of a plurality of resin base materials are stacked to form the support
portions 20A and 20B. The lead portion to be laminated may be one that the adjacent resin base
material 15 may have, or may be one that the resin base material 15 that is laminated via
another resin base material 15 has. Good. Further, the lead-out portions of the respective resin
base materials 15 may all be drawn with the same length, or may be drawn with different
lengths. For example, the lead-out portion of the resin base 15 far from the housing when joined
to the housing is drawn longer according to the thickness or the like of the resin base 15 than
the lead-out portion of the resin base 15 closer to the housing It may be
[0028]
In the coil portion 10, conductor patterns 40 disposed on the respective resin base members 15
are connected in series via the interlayer connection conductor 50 to form a coil. In FIG. 1,
conductor patterns 40 of three layers are connected in series through interlayer connection
conductors 50 to form a coil extending to three layers. The number of layers of the conductor
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patterns 40 connected in series, the width, the shape, and the like of the conductor patterns can
be appropriately selected as necessary. Both ends of the coil are connected to the conductor
pattern 30 disposed in the first support 20A via the interlayer connection conductor 50,
respectively. The conductor patterns 30 and 40 are formed, for example, by patterning a copper
foil laminated on the resin base 15 into a desired shape by a method such as photolithography.
[0029]
In FIG. 1, the planar shape of the coil portion 10 is formed in a rectangular shape, but the planar
shape of the coil portion 10 is not limited to a rectangular shape, and may be any shape such as
a polygon, a circle, or an ellipse. Further, in FIG. 1, although a multiple coil including a meander
pattern is formed, the shape of the coil is not limited to this, and can be appropriately selected
from commonly used coil shapes.
[0030]
The interlayer connection conductor 50 is formed by penetrating the resin base 15 in the
thickness direction, and conductively connects the conductor patterns 30 and 40 disposed on the
adjacent resin base. The interlayer connection conductor 50 is formed, for example, by
embedding a conductive paste solidified by heating in a through hole (not shown) formed at a
predetermined position of the resin base 15. The interlayer connection conductor may be formed
from a through hole formed at a predetermined position.
[0031]
In the diaphragm 100, the laminate of the plurality of resin base materials 15 on which the
conductor patterns 30 and 40 are disposed and the conductive paste embedded in the through
holes of the resin base material 15 are heated and pressed, for example. The resin substrates 15
are adhered to each other, and the conductive paste is solidified to electrically connect the
conductor patterns, thereby forming a multilayer substrate integrally laminated.
[0032]
The resin base material 15 which comprises a diaphragm is a flexible insulating base material,
for example, comprises thermoplastic resins, such as a liquid crystal polymer (LCP).
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By including the thermoplastic resin, the resin substrates are firmly adhered and integrated, and
the delamination of the diaphragm is more effectively suppressed.
[0033]
In FIG. 1, the plurality of resin substrates 15 are directly laminated without interposing different
types of resin layers such as an adhesive layer. Thereby, an interface between different resin
layers is not formed, and a diaphragm in which delamination is further suppressed is configured.
[0034]
FIG. 2: is schematic which shows an example of the manufacturing method of the vibrating
element 105 of 1st Embodiment. FIG. 2A is a schematic perspective view of the diaphragm 100
having the coil portion 10 and the plurality of support portions 20A and 20B as viewed from the
side of the support portion 20A having the conductor pattern 30. FIG. In FIG. 2A, the support
portions 20A and 20B are disposed at different positions along the thickness direction on one
side of the diaphragm 100 in the longitudinal direction. Further, the respective support portions
20A and 20B are arranged so as not to overlap with each other when viewed from the thickness
direction of the diaphragm 100.
[0035]
In FIG. 2B, the diaphragm 100 is turned around the longitudinal axis so that the conductor
pattern 30 of the support portion 20A faces the housing 60, and the support portions 20A and
20B are joined to the housing 60 respectively. . The housing 60 has a wall portion in which the
coil portion 10 of the diaphragm 100 can be accommodated in the housing, and an opening
portion surrounded by the wall portion. A magnet (not shown) is disposed at the bottom of the
opening. The magnet is disposed in the coil axis direction of the coil, and the direction of the
magnetic field is substantially orthogonal to the conductor pattern forming the coil. A connection
conductor pattern 70 capable of connecting the vibrating element 105 to an external circuit is
disposed on the surface of the wall of the housing 60 facing the diaphragm 100. In FIG. 2, the
conductor pattern 30 of the support portion 20A is joined to the connection conductor pattern
70 of the housing 60 by, for example, solder. Further, the support portion 20B is joined, for
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example, with an adhesive 80 on the surface of the wall portion of the housing 60 facing the
diaphragm 100.
[0036]
FIG. 3 is a schematic plan view of the vibrating element 105 according to the first embodiment as
viewed from the side where the diaphragm 100 is disposed in the housing 60. The diaphragm
100 is disposed so as to be accommodated in an opening in which the coil unit 10 is surrounded
by the wall of the housing 60. Thus, the coil portion 10 of the diaphragm 100 can move in the
thickness direction without interfering with the wall portion of the housing 60. At the bottom of
the housing below the coil unit 10, a magnet is arranged so that the direction of the magnetic
field is in line with the axial direction of the coil (not shown). In FIG. 3, the conductor pattern (not
shown) on the support portion 20A of the diaphragm 100 is joined to the connection conductor
pattern 70 by, for example, solder, and the support portion 20B is attached to the housing 60 via
the adhesive 80. It is joined to the wall. In FIG. 3, the support portions 20A and 20B are disposed
symmetrically with respect to the center of gravity of the diaphragm 100. As a result, when the
diaphragm 100 moves in the thickness direction by the electromagnetic force, generation of
torsion in the diaphragm 100 is suppressed. In FIG. 3, the planar shape of the case 60 and the
opening is formed in a rectangular shape, but the planar shape of the case 60 and the opening is
not limited to a rectangular, and may be polygonal, circular, elliptical, etc. .
[0037]
FIG. 4 is a schematic cross-sectional view of the vibrating element 105 according to the first
embodiment, taken along the section line of FIG. In FIG. 4, the conductor pattern 30 of the
support portion 20 </ b> A is connected to the coil via the interlayer connection conductor 50.
Further, the conductor pattern 30 of the support portion 20A is joined to the connection
conductor pattern 70 disposed on the wall portion 62 of the housing 60 via the solder 75, and
the support portion 20B bonds the adhesive 80 to the wall portion 62 of the housing 60. It is
joined via. At the bottom 66 of the opening surrounded by the wall 62 of the housing 60, the
magnet 90 is disposed such that the direction of the magnetic field is in the axial direction of the
coil. In FIG. 4, the plurality of magnets 90 are arranged such that the directions of the magnetic
fields of the adjacent magnets are opposite to each other. In addition, when viewed from the
thickness direction of the diaphragm 100, the magnet 90 is arranged so as to be partially
surrounded by the conductor pattern 40 that constitutes the coil, corresponding to the coil
shape. That is, the magnet 90 disposed immediately below the conductor pattern 40 in the crosssectional view of FIG. 4 is disposed at the back of the sheet so as not to overlap the conductor
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pattern 40 when viewed from the direction of the diaphragm 100. An air gap larger than the
movement width of the diaphragm 100 is provided between the diaphragm 100 and the magnet
90. In FIG. 4, the wall portion 62 of the housing 60 is illustrated as being integral, but may be
configured to be separable in a plane parallel to the bottom surface of the housing 60.
[0038]
The housing 60 may include a terminal (not shown) electrically connected to the connection
conductor pattern 70. When the vibrating element 105 is incorporated into an electronic device,
this terminal is connected to the circuit of the electronic device. The drive current flows through
the connection conductor pattern 70 to the coil of the diaphragm 100, whereby the diaphragm
100 moves in the directions shown by the double arrows in FIG.
[0039]
According to the first embodiment, for example, the following effects can be obtained. (A) The
support portions 20A and 20B are thinner than the laminated coil portion 10, drawn narrowly,
and have good flexibility, so the movement of the diaphragm 100 by the electromagnetic force is
not inhibited. (B) Since the support portions 20A and 20B are drawn out from different positions
in the thickness direction of the diaphragm 100, stress concentration associated with the
movement is alleviated, and delamination of the diaphragm 100 is suppressed. (C) Since the
support portions 20A and 20B are symmetrically arranged with respect to the center of gravity
of the diaphragm 100, the generation of the twist accompanying the movement of the diaphragm
100 is effectively suppressed. (D) Since the coil unit 10 is a laminate of a plurality of resin base
members 15, the coil unit 10 is provided with a coil including the conductor pattern 40 formed
in a plurality of layers, and a high electromagnetic force can be obtained while being small and
thin. The vibrating plate 100 is configured. (E) The conductor pattern 30 of the first support
portion 20A is connected to the interlayer connection conductor 50 that penetrates the plurality
of resin bases 15 to make an interlayer connection, so the stress concentration portion of the
first support portion 20A is reinforced. Thus, delamination is more effectively suppressed.
[0040]
Second Embodiment FIG. 5 is an exploded perspective view of a diaphragm 200 used for a
vibration element according to a second embodiment. In the second embodiment, the number of
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support portions 220B constituting the diaphragm 200 is smaller than that in the first
embodiment. The diaphragm 200 has the same configuration as the diaphragm of the first
embodiment except that the number of supporting portions is different. That is, in FIG. 5, the
conductor pattern 240 is disposed in order from the bottom, the resin base material 215 from
which the second support portion 220B is pulled out in the longitudinal direction, and the
conductor pattern 240 are disposed respectively, and two layers without a lead portion The resin
base material 215 and the resin base material 215 from which the first support portion 220A on
which the conductor pattern 230 is disposed is drawn in the longitudinal direction are laminated
to constitute the diaphragm 200. The conductor pattern 240 is connected in series through the
interlayer connection conductor 250 to form a coil, and both ends of the coil are connected to
the conductor pattern 230 of the first support 220A through the interlayer connection conductor
250, respectively.
[0041]
In FIG. 5, the two-layer resin base material 215 from which the support parts 220A and 220B are
respectively drawn is laminated via the two-layer resin base material 215 having no support part.
Thereby, the stress concentration associated with the movement of the diaphragm is alleviated
and the delamination is more effectively suppressed, as compared with the case where the resin
base having the support portion is directly laminated.
[0042]
FIG. 6 is a schematic plan view of the vibrating element 205 according to the second
embodiment as viewed from the side where the diaphragm 200 is disposed. The vibrating
element 205 of the second embodiment has the same configuration as that of the vibrating
element of the first embodiment except that the number of support portions constituting the
diaphragm 200 is smaller than that of the first embodiment. There is. That is, in FIG. 6, the
diaphragm 200 is disposed so as to be accommodated in the opening in which the coil portion
210 is surrounded by the wall portion of the housing 260. The conductor pattern (not shown) of
support portion 220A of diaphragm 200 is joined to connection conductor pattern 270 by, for
example, solder, and support portion 220B is joined to the wall portion of housing 260 through
adhesive 280. ing. In FIG. 6, the support portions 220A and 220B are arranged symmetrically
with respect to the center of gravity of the diaphragm 200.
[0043]
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Third Embodiment FIG. 7 is an exploded perspective view of a diaphragm 300 used for a
vibration element according to a third embodiment. The third embodiment is different from the
first embodiment in the number and arrangement of the support portions constituting the
diaphragm 300. The diaphragm 300 has the same configuration as the diaphragm of the first
embodiment except that the number and arrangement of the support portions are different. In
the third embodiment, as shown in FIG. 9, the diaphragm 300 is joined to the housing 360 in a
state of being accommodated in the space portion of the housing 360.
[0044]
In FIG. 7, the resin base material 315 of the 1st to 3rd layer in which the conductor pattern 340
which forms a coil is arranged on the surface and the conductor pattern 330 which constitutes
the 1st support part are on the surface sequentially from the bottom. The resin base material
315 of the fourth layer to be disposed is laminated in the thickness direction of the resin base
material 315. The resin base material 315 of the first layer is drawn out on both sides in the
longitudinal direction with two second support portions 320B pulled out with a width narrower
than that of the coil portion 310 and in both sides in the width direction with a width narrower
than the coil portion 310. And three second supports 320B on one side. The longitudinal second
support portions 320B are drawn out from symmetrical positions with respect to a longitudinal
straight line passing through the center of gravity of the coil portion 310 and a lateral straight
line passing through the center of gravity. In addition, the second support portion 320B in the
short direction is drawn out from a symmetrical position with respect to a straight line in the
longitudinal direction passing through the center of gravity of the coil portion 310 and a straight
line in the short direction passing through the center of gravity. The resin base material 315 of
the second layer and the third layer laminated on the first layer has no lead portion. The resin
base material 315 of the fourth layer is, in addition to the second support 320B drawn to a
position corresponding to the second support 320B of the first layer, between the two second
supports 320B on both sides in the longitudinal direction. It has the 1st support part 320A which
is pulled out and conductor pattern 330 is arranged on the surface. The diaphragm 300 includes
a coil portion 310 in which the first to fourth resin base materials are stacked, and a second
support portion in which the corresponding second support portions 320B of the first and fourth
layers are stacked. 320B and a first support 320A drawn from the fourth layer between the two
second supports 320B.
[0045]
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In the diaphragm 300 of FIG. 7, the stress applied to the first support portion 320A is reduced by
providing the first support portion 320A between the two second support portions 320B, and the
occurrence of connection failure is suppressed. Further, the plurality of lead portions drawn from
different positions in the stacking direction are stacked to form the second support portion 320B,
thereby reinforcing the stress concentration portion and dispersing the stress in the plurality of
lead portions. The delamination of the diaphragm 300 is more effectively suppressed.
[0046]
In the diaphragm 300 of FIG. 7, the conductor patterns 340 are connected in series via the
interlayer connection conductor 350 to form a coil, and both ends of the coil are connected to
the conductor pattern 330 of the first support portion 320A via the interlayer connection
conductor 350. Each is connected.
[0047]
FIG. 8 is a schematic plan view of the vibrating element 305 according to the third embodiment
as viewed from the side where the diaphragm 300 is disposed.
Diaphragm 300 is accommodated in a space portion in which coil portion 310 is surrounded by
the wall portion of housing 360 and the overhang portion provided on the wall portion, and
support portions 320A and 320B are joined to the overhang portion provided on the wall portion
It is done. The surfaces to which the support portions 320A and 320B of the overhang portions
are joined face the bottom surface of the housing. The opening portion surrounded by the
overhanging portion of the housing 360 is larger than the coil portion 310, and the coil portion
310 is formed to be able to pass through the opening portion. Thus, the coil portion 310 of the
diaphragm 300 can move in the thickness direction of the diaphragm 300 without interfering
with the housing 360. A connection conductor pattern 370 capable of connecting the vibrating
element 305 to an external circuit is disposed on the surface of the overhang portion facing the
bottom surface of the housing 360. The diaphragm 300 is disposed such that the conductor
pattern 330 of the first support 320A faces the connection conductor pattern 370, and the
conductor pattern 330 and the connection conductor 370 are joined by, for example, solder.
Further, the second support portion 320B is joined to the overhanging portion of the housing
360 via the adhesive 380. A magnet is disposed on the bottom of the space below the coil
portion 310 in the coil axis direction of the coil in correspondence with the coil shape (not
shown).
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15
[0048]
FIG. 9 is a schematic cross-sectional view of the vibrating element 305 of the third embodiment
taken along the section line of FIG. The diaphragm 300 is disposed inside a housing 360 having
an opening, and moves in the direction of the arrow in FIG. 9 by an electromagnetic force. In FIG.
9, the housing 360 is a wall on the side opposite to the bottom 366 of the housing, the wall 362
disposed orthogonal to the bottom 366, and the wall 362 opposite to the bottom 366 side. And
an overhanging portion 364 disposed orthogonal to the portion 362. In the housing 360, a space
surrounded by the bottom 366, the wall 362, and the overhang 364 and an opening surrounded
by the overhang 364 on the opposite side of the bottom 366 of the space are formed. ing. The
support portions 320 A and 320 B of the diaphragm 300 are joined to the surface of the
overhanging portion 364 facing the bottom portion 366, and the diaphragm 300 is
accommodated in the space portion of the housing 360.
[0049]
A magnet 390 is disposed in the axial direction of the coil on the bottom portion 366 of the
space portion of the housing 360. In FIG. 9, the plurality of magnets 390 are arranged such that
the directions of the magnetic fields of the adjacent magnets are opposite to each other and
correspond to the coil shape of the diaphragm 300. An air gap larger than the movement width
of the diaphragm 300 is provided between the diaphragm 300 and the magnet 390. By
arranging the diaphragm 300 inside the housing 360 as described above, a smaller-sized
vibration device can be realized.
[0050]
The vibrating element shown in each of the above embodiments can be applied to a pump, a
vibrating gyroscope, a speaker or the like.
[0051]
The above description of the embodiment is illustrative in all points and not restrictive.
Modifications and variations are possible as appropriate to those skilled in the art. The scope of
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the present invention is indicated not by the embodiments described above but by the claims.
Furthermore, the scope of the present invention includes modifications from the embodiments
within the scope of the claims and equivalents.
[0052]
100, 200, 300 Vibrating plate 105, 205, 305 Vibrating element 10, 210, 310 Coil portion 20A,
220A, 320A First support portion 20B, 220B, 320B Second support portion 60, 260, 360 Case
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