close

Вход

Забыли?

вход по аккаунту

?

JP2009300233

код для вставкиСкачать
Patent Translate
Powered by EPO and Google
Notice
This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
financial decisions, should not be based on machine-translation output.
DESCRIPTION JP2009300233
An ultrasonic transducer capable of achieving defect inspection with excellent inspection
accuracy. An oscillator having a function of transmitting an ultrasonic wave (S5) to a subject (12)
and a function of receiving a reflected wave (S5 ') and converting it into an electric signal (S3)
and outputting the electric signal (S3) 24), a pulser substrate (51) for generating a drive pulse
(S2) for transmitting the ultrasonic wave (S5) by the oscillator (24), and an electric signal (S3)
output from the oscillator (24) An ultrasonic transducer (1) comprising a receiver substrate (52)
for amplification, wherein the pulsar substrate (51) and the receiver substrate (52) are disposed
so as to face each other and in proximity, the pulsar substrate (51) and the receiver substrate An
electromagnetic wave shielding member (53a) for shielding an electromagnetic wave is
interposed between (52) and (52). [Selected figure] Figure 1
Ultrasonic transducer
[0001]
The present invention relates to ultrasound transducers. More particularly, the present invention
relates to a transmission source of ultrasonic waves to an object and an apparatus serving as a
reception source of reflected waves from the object.
[0002]
The ultrasonic flaw detector transmits ultrasonic waves through the water to a subject immersed
04-05-2019
1
in water, and immediately thereafter receives a reflected wave of ultrasonic waves from the
subject, and based on the waveform of its echo signal It is an apparatus for nondestructively
detecting defects such as scratches and peeling inside the subject. Ultrasonic flaw detectors
generally incorporate an ultrasonic transducer.
[0003]
FIG. 7 is an exploded perspective view schematically showing the construction of a conventional
ultrasonic transducer 50, and FIG. 8 is a structural schematic view showing an ultrasonic flaw
detector 100 incorporating the conventional ultrasonic transducer 50. As shown in FIG. In FIGS.
7 and 8, the same components as those of the embodiment of the present invention described
later are denoted by the same reference numerals.
[0004]
As shown in FIG. 7, a conventional ultrasonic transducer 50 includes a transducer body 2 and a
signal transmitting / receiving unit 3a. The transducer body 2 includes an oscillator 24 at its tip.
The signal transmission / reception unit 3 a includes a housing 4 and a transmission / reception
circuit board 5. The transmission / reception circuit board 5 includes a pulsar board 51 and a
receiver board 52. In order to miniaturize the housing 4, the two substrates 51 and 52 are
provided in the housing 4 so as to face each other and approach each other.
[0005]
The ultrasonic transducer 50 is used by being incorporated into the ultrasonic flaw detector 100
shown in FIG. As shown in FIG. 8, the ultrasonic flaw detection apparatus 100 includes a water
tank 11 filled with water W, a holding unit 16 for holding the subject 12 in the water tank 11, a
transmission source of ultrasonic waves to the subject 12 and the subject 12, an ultrasonic
transducer 50 serving as a receiving source of the reflected wave from the scanner 12, a
scanning unit 13 capable of driving the ultrasonic transducer 50 in horizontal and vertical
directions, a power supply 14 for supplying power to each component, and appropriate
comparison processing A determination device (computer) 15 having a unit.
[0006]
04-05-2019
2
The operation of the ultrasonic flaw detection apparatus 100 will be described. The oscillator 24
in the transducer body 2 transmits an ultrasonic wave S5 having a high frequency component of
about 10 MHz to 200 MHz by the driving pulse generated by the pulser substrate 51. The
ultrasound S5 travels to the subject 12 via the water W. The transmitted ultrasonic wave S <b> 5
is reflected by the subject 12, and the reflected wave S <b> 5 ′ is received by the oscillator 24 in
the transducer main body 2. The oscillator 24 converts the vibration obtained by reception into
an electrical signal (hereinafter referred to as an echo signal). The echo signal is taken into the
receiver substrate 52 and amplified. The determination device 15 determines the presence or
absence of a defect of the object 12 based on the waveform of the amplified echo signal. The
above-mentioned transmission / reception and determination processing are performed while the
scanning unit 13 drives the ultrasonic transducer 50 in the horizontal and vertical directions,
thereby flaw detection is performed on the entire object 12 (see, for example, Patent Documents
1 and 2).
[0007]
Japanese Utility Model Application Publication No. 6-80169 Patent No. 4047366
[0008]
In the above-described ultrasonic transducer 50, the drive pulse sent from the pulser substrate
51 to the transducer body 2 is a strong signal having a voltage of, for example, 100 V or more
and a pulse width of 8 ns or less.
On the other hand, the echo signal taken into the receiver substrate 52 from the oscillator 24 is a
weak voltage of about several millivolts. Since the pulsar substrate 51 and the receiver substrate
52 are provided so as to face each other and approach each other, the electromagnetic noise
resulting from the drive pulse output from the pulsar substrate 51 may be superimposed on the
echo signal taken into the receiver substrate 52 . As a result, there is a problem that the receiver
substrate 52 does not operate stably, and the inspection accuracy is degraded.
[0009]
The present invention has been made in view of such circumstances, and an object thereof is to
provide an ultrasonic transducer capable of achieving defect inspection with excellent inspection
accuracy.
04-05-2019
3
[0010]
The above object is achieved by the present invention described below.
Reference numerals in parentheses attached to the respective components in the “claims” and
the “means for solving the problems” indicate correspondences with specific means described
in the embodiments to be described later. It is a thing.
[0011]
The invention of claim 1 has a function of transmitting an ultrasonic wave (S5) to a subject (12)
and a function of receiving the reflected wave (S5 ') and converting it into an electric signal (S3)
and outputting it. An oscillator (24), a pulser substrate (51) for generating a drive pulse (S2) for
transmitting the ultrasonic wave (S5) by the oscillator (24), and an electric signal (24) output
from the oscillator (24) An ultrasonic transducer (1) comprising a receiver substrate (52) for
amplifying S3), wherein the pulsar substrate (51) and the receiver substrate (52) are disposed so
as to face each other and in proximity to each other, the pulsar substrate (51) An electromagnetic
shielding member (53a) for shielding an electromagnetic wave is interposed between the receiver
substrate (52) and the receiver substrate (52).
[0012]
In the second aspect of the present invention, the electromagnetic wave shielding member (53a)
is provided on the surface of the receiver substrate (52) facing the pulsar substrate (51).
[0013]
In the invention of claim 3, the electromagnetic wave shielding member (53b) is provided on the
surface of the receiver substrate (52) not facing the pulsar substrate (51).
[0014]
In the invention of claim 4, the pulser substrate (51) and the receiver substrate (52) are
electrically connected to the transmitter (24) through the matching circuit substrate (9).
[0015]
04-05-2019
4
According to the ultrasonic transducer (1) of the present invention, the oscillator (24), the pulsar
substrate (51) and the receiver substrate (52) are provided.
The pulser substrate (51) and the receiver substrate (52) are disposed to face each other and in
proximity to each other in order to miniaturize the device.
On the premise of this configuration, an electromagnetic wave shielding member (53a) for
shielding an electromagnetic wave is interposed between the pulsar substrate (51) and the
receiver substrate (52).
The electromagnetic wave shielding member (53a) prevents electromagnetic noise caused by the
drive pulse (S2) output from the pulsar substrate (51) from leaking out of the pulsar substrate
(51), and at the same time, outputs it from the pulsar substrate (51) Electromagnetic noise
caused by the drive pulse (S2) is prevented from being taken into the receiver substrate (52).
Further, an electromagnetic wave shielding member (53b) is provided on the surface of the
receiver substrate (52) not facing the pulsar substrate (51). The electromagnetic wave shielding
member (53b) prevents the electromagnetic noise caused by the drive pulse (S2) output from the
pulser substrate (51) from being taken into the receiver substrate (52). That is, it is prevented
that the electromagnetic noise caused by the drive pulse (S2) output from the pulser substrate
(51) is superimposed on the electric signal (S3) output from the oscillator (24) and taken into the
receiver substrate (52) Ru. Thus, the S / N ratio can be improved, and defect inspection can be
achieved with excellent inspection accuracy.
[0016]
In addition, since the pulser substrate (51) and the receiver substrate (52) are electrically
connected to the transmitter (24) through the matching circuit substrate (9), the transducer main
body (2) has gain characteristics. Even if they are replaced with different ones, they can be easily
adapted, reduce reflection of the transmission path, and improve the S / N ratio.
[0017]
According to the present invention, an ultrasonic transducer is provided that can achieve defect
inspection with excellent inspection accuracy.
04-05-2019
5
[0018]
FIG. 1 is an exploded perspective view showing an outline of the configuration of an ultrasonic
transducer 1 according to the present invention, FIG. 2 is a front partial sectional view of the
ultrasonic transducer 1 according to the present invention, and FIG. is there.
[0019]
As shown in FIG. 1, an ultrasonic transducer 1 according to the present invention includes a
transducer body 2 and a signal transmitting / receiving unit 3.
[0020]
As shown in FIG. 2, the transducer main body 2 includes an anode 21, a side wall 22, an
insulating member 23, an oscillator 24 and a cathode 25, and signals in a state where the
oscillator 24 is located on the opposite side to the signal transmitting / receiving unit 3. It is
integrated with the transmission / reception unit 3.
[0021]
The anode 21 is formed of a cylindrical body made of brass.
The side wall portion 22 is a substantially cylindrical body made of stainless steel and having a
diameter that allows the anode 21 to be inserted.
The insulating member 23 is made of polybutylene terephthalate (PBT) and is provided so as to
seal a space between the outer peripheral surface of the anode 21 and the inner peripheral
surface of the side wall portion 22.
The oscillator 24 is made of polyvinylidene fluoride / trifluoroethylene (PVDF / TrFE), and is
deposited on one end face of the anode 21 to a thickness of about 3 μm to 60 μm.
[0022]
04-05-2019
6
The cathode 25 is made of gold and is deposited to cover the surface of the oscillator 24.
The thickness is about 0.1 μm to 0.2 μm.
A copper foil 26 is formed on the outer circumferential side of the insulating member 23, and the
copper foil 26 is electrically connected to the cathode 25. By interposing the insulating member
23 between the copper foil 26 and the anode 21, a capacitor body having the insulating member
23 as a dielectric is formed. An insulating tape 27 for insulating the copper foil 26 and the side
wall 22 is interposed on the inner peripheral surface of the side wall 22.
[0023]
Referring back to FIG. 1, the signal transmission / reception unit 3 includes a housing 4 and a
transmission / reception circuit board 5.
[0024]
The housing 4 is made of a substantially cylindrical stainless steel with a bottom, and includes a
housing body 41 and a housing cover 42.
The housing cover 42 is detachably attached to the housing body 41 by a screw 43. At the end
face of the housing 4 opposite to the attachment side of the transducer body 2, the power cable
6 for supplying drive power to the transmission / reception circuit board 5 and the RF
(reference) signal S4 from the transmission / reception circuit board 5 are taken out. The
connector attached cable 7 is attached.
[0025]
The transmission / reception circuit board 5 is composed of a pulsar board 51 and a receiver
board 52. The two substrates 51 and 52 are provided to face each other in the housing 4 so as to
be opposed to each other, and fixed to the housing main body 41 by a mounting member such as
a bracket. The facing distance is about 8 mm to 12 mm. The housing 4 can be miniaturized by
bringing them into close proximity.
04-05-2019
7
[0026]
The pulsar substrate 51 is a circuit board configured to generate the following drive pulse S2.
The drive pulse S2 is an electrical signal that gives the oscillator 24 energy for transmitting the
ultrasonic wave S5. The specific configuration of the pulser substrate 51 is such that the drive
pulse S2 is output at a constant cycle by discharging the charge stored in the capacitor at the
application timing of the trigger signal S1. The constant cycle value is a value selected from the
range of 100 μs to 5 ms (see FIG. 6). Then, the oscillator 24 transmits the ultrasonic wave S5 by
the drive pulse S2 of a fixed cycle generated by the discharge of the capacitor. The frequency
component of the ultrasonic wave S5 transmitted from the oscillator 24 is designed based on the
thickness of the oscillator 24 and the like.
[0027]
The pulser substrate 51 includes signal input / output terminals 51a and 51b as shown in FIG.
The signal input / output terminals 51a and 51b function as an output terminal for outputting
the drive pulse S2 to the transducer main body 2 and as an input terminal for capturing the echo
signal S3 output from the transducer main body 2.
[0028]
Electrical connection between the signal input / output terminal 51a in the pulser substrate 51
and the anode 21 in the transducer main body 2, and a portion of the signal input / output
terminal 51b in the pulser substrate 51 and the copper foil 26 opposite to the cathode 25
Electrical connection is made through the matching circuit board 9 and the connector 56.
[0029]
The matching circuit board 9 is, for example, an attenuator circuit, and as shown in FIG. 3, two
switches 91 for selecting an attenuator to make the received signal (output signal from the
transducer main body 2) have a desired attenuation amount. 92, an attenuator 93 for through (0
dB) of the received signal, an attenuator 94 for 10 dB attenuation of the received signal, an
attenuator 95 for 20 dB attenuation of the received signal, and a switch 96 for connection of the
received signal attenuated by the selected attenuator. , 97.
04-05-2019
8
That is, this attenuator circuit is provided with attenuators 93, 94, 95 having three types of
attenuation amounts of through (0 dB), 10 dB, and 20 dB. Each switch 91, 92, 96, 97 is
appropriately switched and controlled by a switching signal S6 sent from the control unit 141
(see FIG. 5).
[0030]
The receiver board 52 is a circuit board configured to amplify the echo signal S3 from the
oscillator 24 in the transducer main body 2. Specifically, an appropriate amplifier circuit such as
an operational amplifier is provided. The pulser substrate 51 and the receiver substrate 52 are
electrically connected to each other in a detachable manner by the connector 58 (see FIG. 1).
[0031]
Electromagnetic wave shielding members 53a and 53b are provided on the front and back sides
of the receiver substrate 52, respectively. The electromagnetic wave shielding members 53a and
53b are formed by covering a metal base material with another metal layer having high surface
conductivity. The electromagnetic shielding members 53 a and 53 b themselves are signal
grounds of the pulsar substrate 51 and the receiver substrate 52.
[0032]
In the ultrasonic transducer 1, the inside of the housing 4 is mounted with the transmission /
reception circuit board 5 and is electrically connected as described above, and the resin mold 8 is
formed to flood the transmission / reception circuit board 5 or the connection portion. It has a
waterproof structure that completely prevents it. The resin mold 8 is formed, for example, by
injection / filling with a urethane resin, an epoxy resin, a silicon resin, or the like. In particular,
silicone resin is very effective as a waterproof means because it has water repellency. In addition,
the confidentiality of the transmission / reception circuit board 5 inside can also be ensured by
using non-transparent silicon resin. In addition, a separate resin mold 8 ′ that can be separated
from the resin mold 8 is formed around the connector 56 on the transducer body 2 side.
04-05-2019
9
[0033]
The ultrasonic transducer 1 configured as described above is used by being incorporated into the
ultrasonic flaw detection apparatus 10 shown in FIG. FIG. 4 is a schematic structural view of an
ultrasonic flaw detector 10 incorporating the ultrasonic transducer 1 according to the present
invention, FIG. 5 is a functional block diagram of the ultrasonic flaw detector 10 incorporating
the ultrasonic transducer 1 according to the present invention, FIG. These are time charts which
show the output timing of trigger signal S1, drive pulse S2, and echo signal S3 in the ultrasonic
transducer 1 which concerns on this invention.
[0034]
4 and 5, the ultrasonic flaw detection apparatus 10 includes a water tank 11 filled with water W,
an object 12 provided to be submerged in the water tank 11, an ultrasonic transducer 1
according to the present invention, and an ultrasonic transducer 1 based on the scanning unit 13
capable of driving in the horizontal and vertical directions, the power supply 14 for generating
the trigger signal S1 and supplying DC power to the transmission / reception circuit board 5, and
the RF signal S4 output from the ultrasonic transducer 1 It has a determination device 15
configured to determine the presence or absence of a defect of the sample 12. Specifically, in the
power supply 14, the control unit 141 generates a trigger signal S1, and the DC power supply
unit 142 supplies DC power.
[0035]
Next, the operation of the ultrasonic flaw detector 10 will be described. The control unit 141 in
the power supply 14 transmits the trigger signal S 1 to the pulser substrate 51. The pulser
substrate 51 generates a drive pulse S2 at a timing determined by the trigger signal S1 and
transmits it to the transducer main body 2. The oscillator 24 transmits an ultrasonic wave S5
having a frequency component determined by the electrical and mechanical design of the
transducer body 2 by the drive pulse S2. The frequency of the ultrasonic wave S5 is, for example,
about 10 MHz to 200 MHz. In the present embodiment, the upper limit is 90 MHz. Of course, it
is also possible to use a configuration exceeding 200 MHz. The ultrasonic wave S5 emitted from
the oscillator 24 propagates in water as shown in FIG. 4 and reaches the surface of the subject
12 after a lapse of time t1. Then, the ultrasonic wave S5 is reflected on the surface of the subject
12, and returns to the oscillator 24 after the time t2 and vibrates the oscillator 24.
04-05-2019
10
[0036]
The vibration of the oscillator 24 is converted into an electric signal and taken into the pulser
substrate 51 as an echo signal S3. Then, it is taken into the receiver substrate 52 through the
connector 58. In the receiver substrate 52, the echo signal S3 is amplified by the incorporated
amplifier circuit and sent to the determination unit 15 as an RF signal S4. The determination unit
15 determines the presence or absence of a defect of the subject 12 based on the waveform of
the RF signal S4. The determination of the presence or absence of a defect is performed, for
example, by comparing the master signal stored in advance in the determination unit 15 with the
RF signal S4 sent from the receiver substrate 52. Here, the master signal is an RF signal obtained
from a normal object 12 without defects. The scanning unit 13 repeatedly performs the above
operation while moving the ultrasonic transducer 1 in the horizontal direction to determine the
presence or absence of a defect over the entire subject 12.
[0037]
According to the ultrasonic transducer 1 of the present invention, the oscillator 24, the pulsar
substrate 51 and the receiver substrate 52 are provided. The pulsar substrate 51 and the
receiver substrate 52 are disposed so as to face each other and face each other in order to
miniaturize the housing 4. On the premise of this configuration, an electromagnetic wave
shielding member 53 a for shielding an electromagnetic wave is interposed between the pulsar
substrate 51 and the receiver substrate 52. The electromagnetic wave shielding member 53 a
prevents electromagnetic noise caused by the drive pulse S 2 output from the pulsar substrate
51 from leaking to the outside of the pulsar substrate 51, and at the same time, the
electromagnetic noise caused by the drive pulse S 2 output from the pulsar substrate 51 acts as a
receiver It prevents the substrate 52 from being taken in. Further, an electromagnetic wave
shielding member 53 b is provided on the side of the receiver substrate 52 not facing the pulsar
substrate 51. The electromagnetic wave shielding member 53 b prevents the electromagnetic
noise caused by the drive pulse S 2 output from the pulser substrate 51 from being taken into
the receiver substrate 52. That is, the electromagnetic noise caused by the drive pulse S2 output
from the pulser substrate 51 is prevented from being superimposed on the echo signal S3 output
from the oscillator 24 and taken into the receiver substrate 52. Thus, the S / N ratio can be
improved, and defect inspection can be achieved with excellent inspection accuracy.
[0038]
04-05-2019
11
Further, the pulser substrate 51 and the transducer body 2 in the transmission / reception circuit
board 5 are detachably connected by the connector 56. When the transducer body 2 breaks
down, the transducer body 2 can be easily replaced with a new transducer body 2 by detaching
the transducer body 2 and the maintenance property is excellent. Furthermore, since the
transmission / reception circuit board 5 and the transducer main body 2 are connected via the
matching circuit board 9, even when changing to various transducer main bodies 2 having
different gain characteristics, the gain according to the switching signal S6 is selected. It can
respond appropriately by doing. Also, the reflection of the transmission path can be reduced and
the S / N ratio can be improved.
[0039]
As mentioned above, although embodiment of this invention was described, embodiment
disclosed above is an illustration to the last, and the scope of the present invention is not limited
to this embodiment. The scope of the present invention is defined by the description of the
claims, and is intended to include all modifications within the meaning and scope equivalent to
the claims.
[0040]
It is an exploded perspective view showing the composition outline of the ultrasonic transducer
concerning the present invention. It is a front fragmentary sectional view of the ultrasonic
transducer concerning the present invention. It is a structure schematic of a matching circuit
board. FIG. 1 is a schematic configuration view of an ultrasonic flaw detector incorporating an
ultrasonic transducer according to the present invention. It is a functional block diagram of an
ultrasonic flaw detector incorporating an ultrasonic transducer concerning the present invention.
It is a time chart which shows the output timing of the trigger signal in an ultrasonic transducer
concerning the present invention, a drive pulse, and an echo signal. It is structure schematic
which shows an example of the conventional ultrasonic flaw detector. It is an exploded
perspective view showing the composition outline of the conventional ultrasonic transducer.
Explanation of sign
[0041]
04-05-2019
12
DESCRIPTION OF SYMBOLS 1 ultrasonic transducer 9 matching circuit board 12 object 24
oscillator 24 pulser board 52 receiver board 53a electromagnetic wave shielding member 53b
electromagnetic wave shielding member S2 driving pulse S3 echo signal (electric signal) S5
ultrasonic wave S5 'reflected wave
04-05-2019
13
Документ
Категория
Без категории
Просмотров
0
Размер файла
23 Кб
Теги
jp2009300233
1/--страниц
Пожаловаться на содержимое документа