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JPS5672598

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This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
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DESCRIPTION JPS5672598
Description of the Invention A sound wave probe 1, a sound wave propagation medium having a
concave hole formed at one end, a first failure at the other end of the sound wave propagation
medium, a piezoelectric material, and a second electrode And a means for supporting one end of
the second 'WIt pole in a self-rotation manner, and the other end of the second electrode is A
sound wave probe having a flat portion in contact with the piezoelectric material at a
predetermined cross-sectional area, and a non-soft insulating shield provided on the flat portion.
In the sound wave probe according to claim 1, wherein the second 'iit misery is a metal ball
having a notch of a predetermined cross-sectional area as the flat portion. Tentacle.
Claims
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sonic probe, a
sonic probe suitable for use in a microscope that utilizes high frequency sonic energy. In recent
years, the generation and ratio of 1f13 rotation sound waves that extend to IGH 2 have become
possible, so f11 microns can be obtained as the sound number wavelength in water, and thus S **
utilizing sound energy is considered The In such a device, it is important how to create a thin
focused sound beam, and it is strongly desired to improve the performance of the sound probe. A
conventional acoustic wave probe will be described with reference to FIG. That is, the sound
wave probe has a cylindrical crystal (sound wave propagation medium) 1 made of a sound wave
propagation medium such as sapphire with one end face polished to a flat surface and another m
plane having a concave hole. The lower electrode 2 made of titanium, gold, chromium, aluminum,
etc. is provided on the ? end face by means of evaporation or the like, and is limited to the lower
surface! Between the upper part t & 4 and the lower part of the probe 6 consisting of a
piezoelectric element 3 provided with a piezoelectric material 3 such as a button by sputtering
etc. and further having an end page 1 with a piezoelectric element provided with a crucible 4 by
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vapor deposition etc. When an RF electric signal is applied to the piezoelectric substance 3, the
piezoelectric substance 3 radiates an RF sound wave of a plane wave in the crystal 1. This plane
wave is focused to a predetermined focal point S by a positive spherical lens formed at the
interface between the crystal 1 and the medium 5 formed in the concave portion. As is well
known, if the ratio of the focal distance to the aperture, i.e., the f-number of the lens, is
sufficiently small, the above-described signal can produce a narrow acoustic beam. Since the
focused sound wave is subjected to disturbances such as reflection, scattering and transmission
attenuation by the sample 6 placed near its focal point, the elastic properties of the sample are
detected by detecting such irregular sound energy. It is possible to hear the reflected electrical
signal. In addition, the above-mentioned sound wave probe may be used again for the detection
of the said sound wave energy, or the same sound wave probe metal arrange | positioned facing
a confocal may be used. As is clear from the above description, the conventional example uses a
positive spherical lens utilizing the speed difference between the crystal and the medium as its
focusing principle. Therefore, in order to form a spherical lens having a good focusing property,
it is important to form a [lJ1 plane hole with excellent specularity and sphericity in the crystal.
Moreover, since the attenuation of the sound wave in the vk quality at the focal point St from the
lens surface is extremely large, for example, a low f-number lens is created by forming a concave
hole with a minute aperture such as 0.2 m. It is necessary to reduce the distance at the focusing
housing to avoid sound attenuation.
On the other hand, it is desirable that the pressure '11 iL element portion that emits RF sound
waves also has a small area as the lens spherical surface becomes smaller. That is, as shown in
FIG. 1, it is desirable that the diameter d of the concave hole and the diameter of the upper
electrode 4 be equal. This is due to the following reasons. ?? For example, as shown in FIG. 2,
when an RF sound wave is emitted under the condition of d <D, transmission of a plane wave in
the crystal follows a path shown by a dotted line. Accordingly, the plane wave transmitted to the
portion outside the concave hole and diffused is irregularly reflected in the crystal and causes an
unwanted signal (noise) to enter the piezoelectric material 3. Also, contrary to the above
conditions, in the case of d> D, since the f-number of the lens becomes large, the focusing
property becomes worse and no resolution dragon is obtained. Here, the relationship between
the f-number of the lens and the resolution will be described with reference to FIG. In the
drawing, assuming that the wavelength of the flat plate is ? and the F number of the lens is Sin 0
m, the resolution ?? is X 1 according to the following equation. ??? = ? 4Stn?m Here, ?m
is an opening angle of the sound beam. Therefore, the resolution ?? is better as the opening
angle ?m of the acoustic beam is larger. As described above, in a copying mirror device or the
like using sound wave energy, in order to obtain a high resolution image with a high resolution,
the diameter of the focusing spherical lens in the sound wave probe is reduced and the sound
wave is emitted. The piezoelectric element also needs to have a small area. The present inventors
have found that air bubbles existing or generated inside are extremely useful as spherical lenses
when producing glass of quartz glass crucible or when using natural quartz, quartz crystal, etc.
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By polishing quartz containing large bubbles to the equatorial plane of the bubbles, and making
quartz with the hemisphere of the bubbles as a spherical lens, a minute aperture (0, 2 m not
possible with conventional polishing methods) ) And @ [I [Ii, it became possible to obtain a
spherical lens with Odoruka. However, as described above, when the diameter of the concave
hole becomes as small as 0, 2 mg, it is extremely difficult to attach the upper electrode having
the same diameter as this on the shelf of the concave hole by evaporation etc. It was a good job.
Moreover, even if the upper electrode is attached with the upper electrode aligned with the
geometric axis of the concave hole, there is a case where the both do not necessarily coincide
with each other. In addition, it is extremely difficult to connect a lead for applying an RF1jL gas
signal to the upper electrode. The present invention has been made in view of the above points,
and provides an acoustic probe capable of attaching the upper electrode to a single substance
with pressure at a cross-sectional area of the whole and accurately. The purpose is
In order to achieve the above object, according to the sound wave probe of the present invention,
a sound wave propagation medium having a concave hole formed at one end thereof, and a first
electrode (lower electrode) at the other end of the sound wave propagation medium A sound
wave probe comprising a piezoelectric element in which a piezoelectric material and a second
electrode (upper electrode) are formed in this order, comprising means for rotatably supporting
one end 3 of the second electrode The other end portion of the second electrode has a flat
portion in contact with the piezoelectric material with a predetermined cross-sectional area, and
a flexible conductive layer is provided on the flat portion. Hereinafter, the present invention will
be described in detail with reference to the drawings. FIG. 4 is a view showing an embodiment of
the present invention. In the figure, a crystal 1 which is a sound wave propagation medium
having a concave hole formed at one end is supported by a case 7 and a dark space with a
sample 6 is maintained by a gap of holding. At the top of the case 7 there is mounted a connector
8 for connection to an RF oscillation circuit (not shown). Further, the connector 8 can be moved
on the XY plane by four knobs 9. A flexible bellows 10 is attached to the end of the connector 8,
and further, an RJ 'signal is transmitted to the piezoelectric substance 2 by a hole (gold ball) 12
through a ball bearing 11. That is, in the probe of the present embodiment, the ball 12 acts as
the upper electrode. According to this count, the ball 12 can be arbitrarily moved on the
piezoelectric material 3 by adjusting the knob 9. Therefore, an electric signal is applied between
the hole 12 and the lower electrode 2, the piezoelectric substance 3 radiates a plane wave into
the crystal l, and the ball 9 is adjusted by adjusting the knob 9 while detecting the reflected wave.
Acoustic alignment with one concave hole can easily be performed. FIG. 5 is an enlarged view of
the vicinity of the ball bearing 11. The upper portion of the hole 12 is rotatably supported by a
ball bearing 11 having a concave hole substantially coinciding with the spherical surface. Also,
the lower part of the ball 12 is processed flat so as to have a diameter equal to the diameter d of
the concave hole (lens ball th) of the crystal 1, and the flat surface has a flexible conductor layer
13 such as gold and mercury. An amalgam layer is provided. Therefore, in assembling the device,
as shown in FIG. 6 (a), the angle ? is such that the upper surface of the piezoelectric material 3
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and the conductive layer 13 provided on the flat surface under the ball 12 are not completely
parallel. In the state where both are gradually brought close to each other even in the state of
being supported in the case where one portion of the conductor layer 13 contacts one point of
the piezoelectric material 3 (FIG. 6 (b)) As it rotates, the conductor layer 13 completely contacts
the surface of the piezoelectric material 30 (FIG. 6 (C)).
Also, even if there are minute bumps and dips or bumps on the flat surface of the ball 12 or the
upper surface of the piezoelectric substance 3, the flexible conductor layer 13 may be interposed
on the contact surface between the ball 12 and the piezoelectric substance 3. The ball 12 and the
piezoelectric substance 3 are very light and electrically in contact with each other. The abovedescribed ball 12 can be easily manufactured by the following method. As shown in FIG. 7 (a), the
notch length L of the hole 12 is appropriately selected, and the diameter of the notch portion of
the ring 12 is equal to the diameter d of the concave hole of the crystal 1. As described above,
the hole 12 is notched, and the notched portion is polished. Next, gold 14 is deposited on the
polished surface by plating or evaporation. When mercury 15 is further applied to the surface of
the gold 14, the gold 14 and the mercury 15 are combined on the polished surface to form an
amalgam layer. The above describes the case of using the hole provided with the notched portion
as the upper part 1iI, but instead of the ball, as shown in FIG. 8, the portion of the apex of the
cone is cut by the length L and the cut The same effect can be obtained by polishing so that the
diameter of the surface is equal to the diameter d of the concave hole and forming an amalgam
layer of gold and mercury on the above and the above mentioned IKI. However, in this case, if the
parallelism of the upper surface of the piezoelectric material 3 is not maintained as described in
FIG. 6 unless the support of the cone is made flexible, the notched portion of the cone is a point
contact A perfect contact is impossible. In the above embodiment, the sound having two
electrodes (10) EndPage: a three-wave probe has been described, but the sound wave
propagation medium is a material having electrical conductivity (for example, glassy carbon such
as glass carbon) As a matter of course, the present invention can be applied to an acoustic wave
probe in which the multi-sound propagation medium itself is the lower electrode by forming the
above. As described above, according to the present invention, the upper electrode deposition
process and the lead wire connection process which were extremely difficult to break can be
omitted, and at the same time, the area of the sound focusing portion and the area of the sound
emitting portion are easily equalized. can do. Furthermore, it has the advantage that complete
electrical contact can be achieved, and a great effect is expected in the production of devices
using imaging frequency focusing sound waves, ie, acoustic microscopy, micro nondestructive
testing, ultrasonic spectroscopy, etc. can do.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view for explaining the structure of a
conventional sound wave probe, FIG. 2 is a view for explaining the disadvantages of the
conventional sound wave probe, and FIG. FIG. 4 is a view for explaining the relationship with the
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resolution, FIG. 4 is a view showing the configuration of an embodiment of the present invention,
and FIG. 5 is a view showing the configuration of the main part of the embodiment shown in FIG.
6 and 7 illustrate the contact between the upper electrode and the piezoelectric material in the
embodiment shown in FIG. 4, FIG. 7 shows the upper electrode, and FIG. 8 shows another
embodiment of the present invention. In the embodiment of the present invention, the upper
electrode 4, иии (12) Fig. 2 Fig. 3 О 4 (2) EndPage: 4 yr J 5 Fig. 6 (0-) (b-CC)) l '57 (0 -) (B)
Shoulder ? figure EndPage:?
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