close

Вход

Забыли?

вход по аккаунту

?

JPS5724998

код для вставкиСкачать
Patent Translate
Powered by EPO and Google
Notice
This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
financial decisions, should not be based on machine-translation output.
DESCRIPTION JPS5724998
Description 1, title of the invention
Ultrasonic focusing lens
3. Detailed description of the invention 杢 The invention relates to the structure of an ultrasonic
focusing lens used in an ultrasonic microscope, the purpose of which is to obtain accurate
information of the sample and to increase the intensity of the ultrasonic beam. To provide an
acoustic focusing lens. In principle, an ultrasonic microscope mechanically scans a sample
surface with a finely narrowed ultra-high frequency ultrasonic beam, collects ultrasonic waves
conflated by the sample and converts the ultrasonic waves into electrical signals, and the signals
Is two-dimensionally displayed on the display surface of a cathode ray tube, and one microscope
is to be read, and the structure is divided into a transmission type and a reflection type. FIG. 1 is
a principle diagram of a reflection type ultrasonic microscope. The signal from the oscillator (1)
is supplied by the directivity f: a basin (2) to a dual purpose transducer (3) comprising upper and
lower electrodes (3a), (3b) and a piezoelectric body (3C). This signal is converted into an
ultrasonic wave, which is stuck and emitted to the inside from a planar surface of an ultrasonic
focusing lens made of an ultrasonic wave propagation medium material such as sapphire with
dual-speed reception wave combination. The other surface of the ultrasonic focusing lens, (4), is
spherically shaped to form a spherical lens portion (4a), and the ultrasonic wave is disposed on
the sample holding plate (5) opposite to the spherical lens portion (4a) A sound field medium (6)
such as water is interposed between the focusing lens (4) and the holding plate (5), and at the
focal point of the spherical lens portion (4a), the holding force is applied to the holding plate (5)
It is settled. The holding plate (5) is moved in the X and Y directions by scanning & placing 1, 8).
A) It is also possible to greet the ultrasonic lens f4JtX and the Y direction instead of the holding
plate (5). The device (8) is controlled by a scanning circuit (9). Therefore, f: a flat ultrasonic wave
03-05-2019
1
is incident on the ultrasonic focusing lens (4) from the transducer (3) and propagates to the end
page (1 a), and the spherical lens portion (4 a) Focused to reach the sample (7). The reflected
wave is again collected by the ultrasonic focusing lens ′ ′ (4), converted into an electrical
signal by the transducer 3), and supplied to the display unit u1 weekly for the directional coupler
+ 21f. By the way, in the structure of the ultrasonic focusing lens (4) shown in FIG. 1, an
ultrasonic wave as a plane wave is incident from the transducer (3) into the focusing lens (4).
When the central part (4b) and the peripheral part (4C) are softened, a difference (i.e., phase
difference) occurs in the ultrasonic wave propagation time. This phase difference is focused in
the sound field medium (6) and maintained until it reaches the sample 17), and it approaches the
focusing lens (4) again as a signal mixed with the phase difference caused by the reflection from
the force, the transducer 13) to be transmitted.
Therefore, it is difficult to clearly measure the phase difference caused by the sample (7) in the
information obtained by the ultrasonic microscope. F: Due to the structure of the focusing lens
(4), spherical aberration can not be prevented, and high resolution can not be obtained.
Furthermore, the area of the lower electrode (3a) and (3b) of the transducer (3) is determined
from the diameter of the spherical lens portion (4a) and the area of the electrode (3a) and (3b) is
Even if the diameter is larger than the aperture diameter, the ultrasonic wave reaching the
outside of the spherical lens portion (4a) is focused and the frequency of the ultrasonic wave is
usually 200 to 400 MHz. The power is about 3.5 M, which is small, and the ability to hit a strong
ultrasonic beam "can have an entry point, etc. The present invention is a solution to the abovementioned mermaid. Drawing an example! In FIG. 2 ta + and (0), an ultrasonic focusing lens made
of an ultrasonic wave propagation medium material such as sapphire is shown in FIG. 2 ta +, (0),
and the − surface of the focusing lens (4) protrudes in the Tat direction f 2 The spherical portion
(4 (1), j color surface is a spherical lens portion (4a) which is spherically rounded. The center
point (0) of the radius r1 of the spherical portion (4C1) and the radius r2 of the spherical lens
portion (4a) are made to coincide in advance. F3J is formed on the spherical portion (4d) of the
focusing lens (4), f: a transducer, the transducer (3) is made of SnO, In2Q34, and the transparent
conductive material 1 is made of opaque conductive such as Au, A7, etc. A lower electrode (3b), a
piezoelectric body (3C) such as ZnO1PVF2, and an upper electrode (3a) made of the same
material as the lower electrode (30), these electrodes (3a), (3b) and the piezoelectric body (3C)
The spherical portion (4d) is sequentially formed by five methods such as sputtering and vapor
deposition. In the case of the ultrasonic focusing lens (4) of the above configuration, the
respective central points)) of the spherical surface portion (4d) and the spherical lens portion
(4a) coincide with each other, so each portion of the transducer (3) To the center point (0) are all
equal, so that the phases of the ultrasonic waves emitted from the respective portions of the
transducer (3) and reaching the f center point (0) coincide with each other. Also, since the
ultrasonic waves reach perpendicularly to all the surfaces of the spherical lens portion (4a) and
converge at the center point 10+, the interface between the spherical lens portion (4a) and the
sound field medium (6) There is no refraction of the ultrasonic wave at 1, so spherical aberration
03-05-2019
2
is also eliminated. Furthermore, the area of the upper and lower electrodes (3a) and (3b) of the
transducer (3) can be set to any size regardless of the aperture diameter of the spherical lens
portion (4a) [released from the transducer (3) The ultrasonic waves all reach the spherical lens
portion (4a)], and the electrodes (3a) and (31) can be expanded to increase the area of high
power ultrasonic waves.
FIG. 3 shows an arrangement in which the optical lens portion αυ of the optical microscope is
disposed on the spherical portion (4d) side of the ultrasonic focusing lens (4), and the sample
(the force is transmitted through the focusing lens (4) f: It is possible to simply observe the
contrast between the ultrasonic lines of force and the optical image. At this time, the spherical
portion (4d) of the focusing lens (4) also functions as a convex lens of the optical system, and the
sample (7) is optically expanded, so that the optical lens portion 0υ can be easily formed.
Become. At that time, it is necessary to use a transparent conductive material for the upper and
lower electrodes (3a) and (3b) of the transducer (3). Like the eyelids, according to the present
invention, the central point (0) of the spherical part (埴) of the ultrasonic focusing lens (4)
coincides with the central point (0) of the spherical lens part (4a) r: For this reason, the phases of
the ultrasonic waves emitted from the respective portions of the transducer (3) to reach the
central point (0) are perfectly matched, and accurate information on the phase difference caused
by the sample (7) can be obtained. In addition, since the ultrasonic waves reach perpendicularly
to the surface of the spherical lens portion (4a) and converge on the central point (0), the
spherical aberration is eliminated and high resolution is achieved. Furthermore, the lower end
electrodes (3a) and (3b) of the transfer EndPage: 2 user (3) can be made larger than the aperture
diameter of the spherical lens portion (4a) to increase the intensity of the ultrasonic beam It
produces remarkable effects such as being able to
4. Brief description of the drawings Fig. 1 shows the principle of the reflection-type acoustic
microscope, Fig. 2 faJ, (b month j relates to the ultrasonic focusing lens of the present invention,
Fig. FIG. 3A is a top view thereof, and FIG. 3 is an explanatory view for explaining a state in which
the optical lens portion and the ultrasonic focusing lens are combined. (3) Transducer (3a) Upper
electrode (3b) Lower electrode (3C) Piezoelectric body (4) Ultrasonic focusing lens (4a) Spherical
lens portion (4d) Spherical portion Patent applicant Alps Nortronics Corporation Representative
company Masaru Kataoka Taibei / Figure 2 (IL) (b) Z 3gEndPage: 3
03-05-2019
3
Документ
Категория
Без категории
Просмотров
0
Размер файла
11 Кб
Теги
jps5724998
1/--страниц
Пожаловаться на содержимое документа