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JPS5854939

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DESCRIPTION JPS5854939
[0001]
The present invention relates to an ultrasonic probe used in an ultrasonic diagnostic apparatus
and a method of manufacturing the same. In general, an ultrasonic probe used in a linear
electronic scanning ultrasonic diagnostic apparatus is one in which a plurality of ultrasonic
transducers are linearly arranged, and by performing linear scanning 1) a tomographic image of
Xt shape can be obtained It is a thing. On the other hand, it is known to scan the ultrasonic beam
in a fan shape in order to further expand the field of view to be detected. In order to fan scan this
ultrasonic beam, it is known how to drive and scan the ultrasonic transducer array while
performing purely electrical phase control, and how to drive and scan the ultrasonic transducer
array with an appropriate curvature. It is done. In the former pure electric method, the electric
circuit system becomes extremely complicated and expensive, which is not very practical. On the
other hand, in the latter method of bending the ultrasonic transducer array and simply driving
and scanning it, the electric circuit system can be simplified and the apparatus can be
inexpensively manufactured, which is practical. The present invention relates to an ultrasonic
probe having this curved ultrasonic transducer array and a method of manufacturing the same,
and a probe capable of arranging ultrasonic transducer arrays simply and inexpensively and
uniformly in a curvilinear shape at low cost 6 It provides a manufacturing method. Heretofore, as
a method of manufacturing a probe in which ultrasonic transducer arrays are arranged in a
curved shape, the manufacturing method shown in FIG. 1a, b, a or FIG. 2a, b is used. In the
method shown in FIGS. 1a, 1b and 1c, first, as shown in FIG. 1a, a plurality of elements are
provided at desired intervals on the piezoelectric vibrator 1 fixed on the cutting table 2 with a
removable adhesive. 3a, 3b, 3c... 3n, and then the sheet 4 is adhered on the surface of the
piezoelectric vibrator 1 and separated from the cutting table 2. Then, as shown in FIG. 1, the
sheet 4 is adhered to the weir 5 having a desired curvature, then the piezoelectric vibrator 1 is
adhered to the sound absorber 6, and then the mold 6 and the sheet 4 are separated. As shown
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in FIG. C, an ultrasonic transducer array having a desired curvature is completed. However, in
this manufacturing method, the operation procedure is extremely complicated, and furthermore,
the same operation is required when adding an acoustic matching layer to the surface of the
piezoelectric vibrator, and the manufacturing process can be further complicated and
homogeneous. It has the disadvantage of being difficult. On the other hand, in another
conventional method, in FIG. 2A, first, one of the electrodes or the like of the piezoelectric
vibrator 1 provided with electrodes on both surfaces is used, and an epoxy resin or the like is
used as the second matching layer 8. Next, the piezoelectric vibrator 1 and the first matching
layer 7 are cut into a plurality of elements 3a to 3n. After that, as shown in FIG. 2, the flexibility
of the epoxy resin of the second matching layer 8 is used to fix it to a frame 9 having a desired
curvature 2 to form a convex or concave ultrasonic transducer array. Form.
However, in the manufacturing method of this probe, it is necessary to cut the piezoelectric
transducer 1 and the first matching layer 7 of a non-flexible hard material to make the ultrasonic
transducer array have a desired curvature. . For this reason, at the time of cutting, the reduction
of the blade becomes extremely large, it is difficult to perform uniform cutting, and there is a
problem such as the characteristic deterioration of the ultrasonic probe. The present invention
has been made in view of the above circumstances. That is, the first acoustic matching layer and
the second acoustic matching layer having flexibility are provided on one surface of the
piezoelectric vibrator, and only the piezoelectric vibrator is cut into plural pieces to obtain the
first and second acoustic matching By utilizing the flexibility of the layer, the ultrasonic
transducer array is bent to construct an ultrasonic probe having a desired curved surface.
Hereinafter, an embodiment of the present invention will be described. Figures 3a, b, c show an
embodiment of the present invention. First, as shown in FIG. 3a, electrodes 10a are provided on
both sides. The first matching layer 7 having flexibility and appropriate acoustic matching to the
electrode 10b of the piezoelectric vibrator 1 provided with 1ob, for example, mixing the epoxy
resin 1 with tungsten metal powder 7 to 8 in weight ratio The resulting material is bonded to a
sheet of a quarter wave thickness of radiated ultrasonic waves. Next, on the first matching layer
7, a second matching layer 8, for example, an epoxy resin plate having a quarter wavelength
formed into a sheet, is adhered. It may be natural. Of course, the piezoelectric vibrator 1 and the
first matching layer 7 and the second matching layer 8 may be bonded or bonded
simultaneously. After that, as shown in FIG. 3, only a plurality of piezoelectric vibrators 1 are
arranged at arbitrary intervals with a plurality of elements 3a. .. 3n to form an ultrasonic
transducer array. Next, when a frame 9a having a desired curvature, for example, an ultrasonic
beam is scanned in a fan shape, the convex shape shown in FIG. The flexibility of the second
matching layer 7 ° 8 is used to bond to a curved surface to create an ultrasonic transducer
having an arbitrary curvature. Next, if an ultrasonic transducer array arranged like a curve is put
in a suitable case and a cable to connect with the main unit is attached, an ultrasonic probe that
can easily scan the ultrasonic beam can be obtained. It is obtained. In addition, when forming the
1st and 2nd acoustic matching layer 7.8 on a piezoelectric vibrator, you may form by pouring in
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the matching layer material using the spacer of appropriate thickness. The shape of the
ultrasonic transducer array is not limited to the embodiment of FIG. 3, and various modifications
are possible. For example, a curve reverse to that in FIG. 3C, that is, one in which the sound wave
emitting surface is made concave to converge the sound wave, or an ultrasonic transducer is twodimensionally arranged and made convex or concave with respect to the sound wave emitting
surface. It can also be in the form of a curved surface.
As described above, according to the present invention, electrodes are attached to both sides of
the piezoelectric vibrator, an acoustic matching layer made of at least one flexible material is
formed on one side thereof, and a plurality of piezoelectric vibrator parts are formed. The
piezoelectric vibrator portions are fixed along a frame having an arbitrary curvature. According
to the present invention, since the piezoelectric vibrator can be formed into a curved or curved
surface by cutting only, the reduction of the blade at the time of manufacture is small and the
precision at the time of cutting is high. Therefore, it is possible to easily form a uniform curved
ultrasonic transducer array without any dimensional accuracy, and it is possible to obtain a highperformance ultrasonic probe extremely inexpensively.
[0002]
Brief description of the drawings
[0003]
1a is a perspective view showing a method of manufacturing a conventional ultrasonic probe,
FIG. 1c is a sectional view of the same, and FIG. 2d is a perspective view explaining a method of
manufacturing a conventional ultrasonic probe, The same cross-sectional view, and FIGS. 3 (a)
and 3 (b) are perspective views for explaining one embodiment of the ultrasonic probe and the
manufacturing method according to the present invention.
1 ...... ultrasonic transducer, 2 ...... cutting bench, 3a · · · · 3n ...... cutting groove, 4 ...... sheet, 5 ... · · ·
· · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · 1st
matching layer material, 8 · · · · 2nd matching layer material, 9 · · · ... A frame having a desired
curved surface. Name of Agent Attorney Nakao Toshio and 1 other person Figure 1 Figure 2
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