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JPS6315159

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DESCRIPTION JPS6315159
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a
immersion probe for immersion using a vertical probe, and is particularly suitable for making the
focus alignment and the focal length variable. [Background Art] A focus probe has hitherto been
mainly used in the water immersion method, and various usages utilizing characteristics have
been devised in accordance with the size, shape, etc. of the subject to be the target. This is mainly
due to the fact that the ultrasonic waves emitted from the focusing probe to the subject use the
property of focusing within the subject, and the increase in sound pressure at the focus enhances
flaw detection sensitivity, and the accuracy of fine defects is also high. It is because it makes it
possible to measure well. A conventional focusing probe generally has a configuration in which
the flat side of a plano-concave lens is directly bonded to a disk-shaped transducer, and a sound
wave emitted from the transducer is brought into one point by a lens (hereinafter referred to as
an acoustic lens). A so-called point-focusing type of focusing probe, the focal length of the
focusing probe is constant, and the depth from the surface of the subject to the focal point differs
depending on the material of the subject. Otherwise, the depth of focus is also different, so it was
not possible to detect the desired depth without adjusting the focus each time. However,
although the ultrasonic wave that has passed through the acoustic lens has differences
depending on the transducer diameter, focal length and frequency due to the wave nature of the
acoustic wave, the focal point is not a single point but a fixed finite size and formed near the focal
point Since the thin beam to be focused is within a certain length range before and after the focal
point, the focal point position adjustment will be performed within that range, but since the focal
probe itself is moved, the pointing angle It is difficult to adjust the position more than it is
because it is difficult to stabilize the echo. Further, as described above, since the focal length of
the conventional focusing probe is constant, when the material, thickness, etc. of the subject are
different and out of the range of the focusing, another focusing probe having a different focusing
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distance each time There is no choice but to prepare many kinds of focus probes in advance.
However, it is a fact that this preparation can not be easily carried out in terms of the cost of the
focus probe, and usually the focus probe with the required characteristics is designed or
manufactured each time as needed, or purchased from a manufacturer In many cases, it takes a
long time and many costs to obtain it, and it can not be easily measured. [Problems to be Solved
by the Invention] As described above, the conventional immersion immersion focus probe is
difficult to adjust because the focus adjustment with respect to the object is performed by the
movement of the focus probe itself In addition, since the focal length is constant, the flaw
detection range such as the material and thickness of the subject that can be measured by one
focal probe is limited, and different focal lengths are used for subjects other than this range.
Need a focused probe.
For this reason, even when designing and manufacturing the required focus probe. Even when
purchasing from a manufacturer, it takes a long time to obtain it, and there is a problem that it
requires more cost. The present invention is to solve the problems of the prior art, and it is an
object of the present invention to provide a focusing probe capable of facilitating the adjustment
of focusing position and changing the focal length. [Means for Solving the Problems] In the
present invention, the bottom surface of a cylindrical case having a bottom surface on one end
side and having a mirror-like surface roughness inside is formed into a single fish nest bundle
acoustic lens. And a sleeve in which a vertical probe is fitted in a case, the sleeve is movably and
removably fitted to the acoustic lens, and a focusing is performed to a position where liquid is
injected to a position where the vertical probe is immersed. By using a feeler, it is possible to
make it easy to adjust the position of the focal point and to make the focal length variable.
[Operation] As described above, the focusing probe according to the present invention moves the
sleeve in which the vertical probe is fitted, into the cylindrical case in which the acoustic lens is
formed on the bottom, with respect to the bottom (acoustic lens) And, since it is detachably fitted,
the distance between the acoustic lens and the subject can be changed by moving only the case
without displacing the sleeve. Since the movement of this case is a direction in which the distance
between the acoustic lens and the subject is expanded and contracted, the focus can be aligned
without moving the vertical probe fitted in the sleeve. Also, since the sleeve and the case are
detachable, the size and shape of the inner peripheral surface are machined into the sleeve so as
to be fittable, and when it is fitted to another case having an acoustic lens having a different
radius of curvature. The focal length of the acoustic lens is obtained, and the same focal
alignment as described above enables flaw detection with different focal lengths. An embodiment
of the present invention will be described with reference to FIGS. 1 and 2. FIG. FIG. 2 is a crosssectional view taken along line 1-- of FIG. In the figure, 1 is a case, and the case 1 has a
cylindrical shape with a bottom 2 or 1 and an open end, and the inside has an inner
circumferential surface 3 a perpendicular to the bottom 2. A screw 3b is machined on the inner
peripheral surface 3a, and can be screwed in a state where there is no backlash with the screw 6
provided on the outer periphery of the sleeve 4, and can be locked at any position in the case 1
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Removal is also free. A step 8 is provided on the inner peripheral surface 7 of the sleeve 4 and is
mounted on the step 8 when the vertical probe 5 having a diameter substantially the same as the
diameter of the inner peripheral surface 7 is inserted.
The position of the step 8 is arbitrary. Reference numeral 9 denotes a groove (hereinafter
referred to as a slit) provided in the longitudinal direction of the inner peripheral surface 7 of the
sleeve 4. The bottom surface 2 is formed of a point focusing type acoustic lens having a spherical
surface 10, and the material 9 radius of curvature, lens shape and the like are set so as to be a
predetermined focal length. Each inner peripheral surface 3a, 7 of the case 1 and the sleeve 4 is.
In order to reduce the reflection loss due to the surface roughness, it has a mirror-like surface
roughness, and in order to ensure this surface roughness, the case 1 and the sleeve 4 are made
of homogeneous quartz glass, aluminum alloy or the like. The case 1 and the sleeve 4 have a
thickness of about 1 fff 11 to 2 I in consideration of strength, processability, acoustic properties
and the like. Reference numeral 11 denotes a liquid injected into the case 1 in which one water is
usually used, but different liquids may be injected as a medium depending on the type of the
subject 12. The liquid 11 is used without fouling or air bubbles and is injected to a position
where the vertical probe 5 is immersed. The liquid 11 is injected before the vertical probe S is
fitted to the sleeve 4 with the sleeve 4 fitted to the case 1 or from the slit 9 provided on the
sleeve 4 after fitting. When the focusing probe of the above configuration is made to face the
object 12 immersed in the liquid 13 and a pulse voltage is applied from an ultrasonic flaw
detector (not shown), the vertical probe 5. The ultrasound beam is focused to a focal length
determined by the characteristics of the acoustic lens of case 1 and liquids 11 and 13. The focal
length is set in advance to a suitable length depending on the material, thickness, etc. of the
subject 12, but in order to make the focal point coincide with the desired measurement position
of the subject 12, the predetermined distance of the focus probe by the scanner After moving to
the position, it is necessary to make fine adjustments in the depth of focus. This adjustment is
also necessary when there is a change in the position of the object 12, the relative state between
the object 12 and the focus probe, the degree of contamination of the liquid 13, and the like. In
such a case, if the sleeve 4 to which the vertical probe 5 is fitted is fixed and the case 1 is turned,
the case 1 is screwed with the screw 3 b and the screw 6 of the sleeve 4, so the direction of
changing the depth of focus Linearly displaced. The amount of displacement in this case can be
arbitrarily set by the lead of the screw 3b, and by making the lead smaller, fine adjustment
becomes possible. At the same time, since the screw 3b and the screw 6 can be locked at any
positions, stable flaw detection can be continued after adjustment. The rotation of the case 1 may
be any of the manual use of power, and the movement of the case 1 is not limited to the
configuration of the present embodiment, and may be sliding or other method.
The liquid 7 in the inside moves according to the amount of displacement of the case 1 when the
case 1 rotates, but since the slit 9 is provided, the inside of the case 1 can be freely moved. As
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described above, by moving only the case 1 without displacing the vertical probe 5 at all,
ultrasonic waves can be stably emitted under the same conditions, and the depth of focus can be
easily adjusted. If the material, thickness, etc. of the sample are different, measurement can not
be made without another focus probe with a different focal length. However, in the present
embodiment, as described above, the sleeve 4 and the case 1 are configured to be detachable,
and the inner circumferential surface 3. And, the dimensions and shape of the screw 3I are the
same as those of the case 1 and can be used in place of other cases having acoustic lenses with
different focal lengths. Therefore, by preparing only cases having acoustic lenses of different
radii of curvature, it is possible to easily obtain focal probes of different focal lengths and expand
the range of measurable objects. [Effects of the Invention] As described above, according to the
present invention, the sleeve in which the vertical probe is fitted is moved and detached from the
acoustic lens in a cylindrical case formed in the bottom surface of the point focusing acoustic
lens. Since the focusing probe is configured to be able to be fitted and to inject liquid to a
position where the fitted vertical probe is immersed, it is possible to facilitate the adjustment of
the focus position and to make the focal length variable. It has a noticeable effect on practical
use.
[0002]
Brief description of the drawings
[0003]
FIG. 1 is an explanatory view of an embodiment of a focusing probe according to the present
invention, and FIG. 2 is a cross-sectional view taken along a line 1-- in FIG.
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