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JPS57147397

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DESCRIPTION JPS57147397
Patent application title Ultrasonic probe 1, backing material, plural piezoelectric transducer
elements provided at predetermined intervals on one surface of the backing material, matching
layers provided on the transducer elements An ultrasonic probe characterized in that elements
provided at both ends of the backing material among the transducer elements are exposed from
the matching layer. A spacer is provided on the vibrating element at the end of the backing
material, and a predetermined pressing plate is further provided on the spacer, and a substance
to be a matching layer is filled between the pressing plate and the vibrating element. A method of
manufacturing an ultrasonic probe, wherein the spacer and the pressing plate are removed after
forming the matching layer.
Claims
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic
probe that transmits and receives ultrasonic waves, in particular, an ultrasonic probe suitable for
easily manufacturing its matching layer, and a method of manufacturing the same.
Conventionally, the manufacture of the matching layer of the ultrasonic probe is performed as
shown in FIG. That is, as shown in FIG. 1, a PAT or PbTi 0. The piezoelectric vibrator 1a like this
is adhered on the sound wave absorber 1b called a backing material. Next, it is cut at a
predetermined width (usually 10 μm to 100 μm) to form a cut groove IC. Next, the matching
layer 1d is bonded to a thickness greater than the desired thickness. Then, by polishing to a
predetermined thickness K, a matching layer is formed as shown in FIG. However, this
manufacturing method has the following disadvantages. (1) Since the matching layer is polished
based on the lower surface of the backing material, the vibrator must be bonded parallel to the
lower surface of the backing material in order to improve the thickness accuracy of the matching
layer. Need. (2) Since the backing material is usually made of a rubber table with large sound
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absorption, the processing accuracy is not good. EndPage: 1 (3) Due to the deformation of the
matching layer and backing material during polishing, the accuracy of the thickness of the
matching layer is not good. Irregularities remain on the polished surface. (4) The matching layer
may peel off from the electrode during polishing. (5) The matching layer should be made of a
material that can be polished. (6) It is very difficult to form a matching layer in a transducer
having a concave or convex shape. (7) When an acoustic lens is provided on the matching layer,
the alignment of the acoustic lens is very difficult because the transducer portion can not be seen
from above the matching layer. In view of the above, it is an object of the present invention to
provide a probe having a structure suitable for producing an ultrasonic probe and a method for
producing the same. In order to achieve the above object, the present invention is characterized
in that a piezoelectric transducer element for providing a matching layer to an ultrasonic probe is
exposed from the matching layer. Hereinafter, the ultrasonic probe according to the present
invention will be described with reference to the drawings along with a method of manufacturing
the same. FIGS. 2 (2) and 2 are diagrams for explaining the structure of the ultrasonic probe
together with its manufacturing method. In particular, FIG. 2 shows the structure of the probe on
which the matching layer 2h is formed. The piezoelectric vibrator elements 2g provided at both
ends of the backing material 2b are exposed. Thus, as shown in FIG. 2, the thickness of the
matching layer 2h is determined based on the transducer element 2g. FIG. 3 (2) shows a method
of forming a matching layer by using a pressing plate 3d and a spacer 3C of the same shape in
the concave-shaped vibrator 3a.
The third drawing is a three-dimensional view showing the mounting state. In FIGS. 3 (4) and 3
(B), 3a, 3b, 3c and 3g are transducer elements for forming a reference surface which determines
the thickness of the transducer element, the chopping material, the cutting groove and the
matching layer . FIGS. 2 (4) and 2 (b) are diagrams for explaining the method of forming the
matching layer by the presser plate and the spacer. In FIG. 2 (d), as in FIG. 1, the transducer
element 2a is attached to the backing material 2b and cut at a predetermined width. At this time,
on the backing material 2b, together with the transducer element 2a, the transducer element 2g
having the same height and length and different widths (or the same width) may be used as a
backing material. It is provided at both ends of 2b, and the upper spacer e on the transducer
element 2g is provided. Next, the filler material is poured into the cutting crucible 2c, and after a
predetermined time has passed, the vibrator element 2 heat and the filler material on 2 g are
cleaned (the filler material is omitted in the figure). The same applies to the following. ).
Thereafter, a spacer 2e having a predetermined thickness is provided on the transducer element
2g, and a pressing plate 2d is provided on the spacer 2e. Thus, the space 2f for forming the
matching layer is formed by the spacer 2e and the pressing plate 2d. The second drawing shows
a three-dimensional view showing the mounted state. Next, after the space 2ti is cured, a mixture
of a material such as tungsten powder and an adhesive such as an epoxy resin which becomes a
matching layer having predetermined acoustic characteristics is poured and cured. The curing
time depends on the adhesive, but is usually about 24 hours at normal temperature. After that,
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removing the presser plate and the spacer completes the matching layer. At this time, the
matching layer is hardened by making the holding plate and the spacer from a releasable
material such as Teflon, or applying a release agent such as silicone oil, or using a release paper.
Of course, sometimes the holding plate and the spacer are easy to come off. Furthermore,
according to the present invention, it is also effective in bonding an acoustic lens on the
matching layer. Regarding the directivity, sensitivity, etc. of each element of the probe, it is
necessary to bond the transducer and the acoustic lens with high positional accuracy in order to
reduce the characteristic variation due to the adhesion of the acoustic lens. However, the
matching layer is opaque because the adhesive is mixed with tungsten powder or the like. In the
case of the conventional matching layer, since the transducer is covered with the matching layer,
the transducer can not be seen directly, so it is necessary to bond the acoustic lens while
predicting the position of the transducer under the matching layer. It is difficult to improve the
positional accuracy of the acoustic lens EndPage: 2.
According to the invention, as shown in FIG. 2, the reference oscillators at both ends are exposed.
However, the acoustic lens can be easily provided with high positional accuracy by using the
exposed vibrators at both ends as a reference. FIG. 4 shows a method of preparing a sheet-like
matching layer in advance and attaching it to the transducer electrode surface to form a
matching layer. That is, as in FIG. 1, the transducer 4a is bonded to the backing material 4b, cut
at a predetermined width, and then the sheet-like matching layer 4h is bonded to produce the
matching layer of the probe. ing. At this time, the matching layers are bonded so that the
vibrators 4g at both ends are exposed. In this method, when the sheet-like aligning layer is
wrinkled when adhering the sheet-like aligning layer, accurate adhesion can be achieved by using
the pressing plate and the spacer. FIG. 5 is an embodiment thereof. A sheet-like matching layer
5h is attached in advance to the holding plate 5d with a heat-softening material (for example,
wax), and is adhered to the vibrator using a spacer 5 @ provided on the vibrator 5g as a
reference. Next is the spacer. Removing the presser plate completes the matching layer. The
holding plate can be easily removed by heating the multi-heat softening substance to soften it.
Also in the case of a concave-shaped vibrator as shown in FIG. 3, it is possible to form a matching
layer of a probe using a sheet-like matching layer. The accuracy of these methods is the
transducer electrode, spacer. Although it depends on the unevenness of the holding plate, the
matching layer can be made with high accuracy as compared with the conventional polishing
method. Even when using a material that can not be polished to form a matching layer, this
method can simplify the process. In the probe in which the matching layer is formed in this
manner, as shown in FIG. 2 (O, the vibrator serving as the reference of both ends is in the
exposed state. Therefore, the acoustic lens can be provided with high positional accuracy by
using the exposed vibrators at both ends as a reference.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 (Ro) and [F] show the structure of the
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conventional probe together with its manufacture, FIG. 2 CA) to 0 and FIG. Fig. 4 illustrates the
structure of the probe of the present invention and the manufacturing method thereof together
with the method of manufacturing the probe of the present invention. Figs. 4 and 5 illustrate the
structure of the probe of the present invention. Of the vi1 (A) Figure 1 (B) EndPage: 3 Figure Z
(A) YJ2 邑 (f32 洒 Z 邑 (C) Figure 3 (A) lv53 Tj J <b> 34 邑 Figure 5 EndPage: 4 Figure
Continuation of page 1 0 Inventor Toshibe Sophie, Shimichi Shimbun, New Twelve 2nd, 1st. 5
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