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JP2002176697

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Notice
This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
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DESCRIPTION JP2002176697
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
acoustoelectric conversion device such as a microphone device, and more particularly to
acoustoelectric conversion which converts vibration displacement of a diaphragm due to sound
into an electrical signal corresponding to a change in light reception amount. It relates to the
device.
[0002]
2. Description of the Related Art FIG. 2 is a schematic view of a conventional acoustoelectric
converter. As shown in FIG. 2A, a thin thin film diaphragm 1 such as aluminum foil is stretched
on a circular ring-shaped support member 2 having an opening at the center, and the diaphragm
1 shown in FIG. The light emitting element 3 and the light receiving element are disposed at
opposite positions as shown in Fig. 4), and light is emitted from the light emitting element 3 to
the diaphragm 1 and reflected light of this light is received by the light receiving element 4 and
taken out as an electric signal. Thus, the vibration displacement due to the sound of the
diaphragm 1 is detected.
[0003]
In the acoustoelectric conversion device using such light, in order to efficiently reflect the light
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from the diaphragm 1 or to make the diaphragm 1 easily amplitude due to the sound, the
material of the diaphragm 1 is extremely about 0.2 μm. The diaphragm 1 was made by forming
a thin aluminum foil in a planar shape. The diaphragm is configured by sticking such a thin filmlike diaphragm 1 on the support member 2.
[0004]
Although such a diaphragm such as an aluminum foil can obtain high reflectance, it reacts
sensitively to environmental changes, particularly humidity, and the surface of the diaphragm is
corroded (hereinafter referred to as rust). There is a problem that the reflectance is degraded by
doing so. That is, if the surface of the diaphragm is corroded and rusted, the light reaction may
be degraded or no reflected light may be obtained, and in such a case, the acoustoelectric
converter exhibits a fatal defect. That is, as shown in FIG. 2C, when the corrosive diaphragm 1
such as an aluminum foil is rusted, the reflected light 6 for the incident light 5 can not be
obtained at all or extremely weak. .
[0005]
In general, in an acoustoelectric conversion device using light, the weight of diaphragm 1 itself is
reduced and the thickness of diaphragm 1 is as thin as possible in order to increase sensitivity to
air vibration due to minute acoustics, that is, to facilitate amplitude. As a matter of course, such a
metal foil is less flexible than a resin or the like, and the strength originally possessed by the
metal is extremely weak. Therefore, if the handling is not careful, the diaphragm 1 made of metal
foil is broken. That is, in the process of forming the diaphragm 1, the yield is extremely
deteriorated. The present invention has been made to solve the problems associated with
diaphragms using such conventional metal foils, and is extremely resistant to humidity, and does
not lose sensitivity even when rusted. It aims at providing an electric converter.
[0006]
SUMMARY OF THE INVENTION According to the present invention, a light emitting element and
a light receiving element are disposed opposite to a thin film-like diaphragm tensioned on a
support member, and the light emitting element emits light to the diaphragm. In the
acoustoelectric conversion device for detecting the vibration displacement due to the sound of
the diaphragm by receiving the reflected light of light by the light receiving element and
extracting it as an electric signal, the diaphragm is a substrate made of a resin film or a resin film
molded product And a metal coating coated on one surface of the substrate.
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[0007]
The substrate may be a polyimide, polyetherimide or polyparaphenylene terephthalamide resin,
and the metal coating may be a rust resistant metal.
Further, the substrate can be made of polyimide, polyether imide or polyparaphenylene
terephthalamide resin, and the metal coating can be made of a metal having a high reflectance to
light. Nickel or gold can be used as the rust resistant metal. Aluminum or nickel can be used as
the highly reflective metal. A highly reflective metal coating can also be coated with a rust
resistant metal. In the acoustoelectric converter, the diaphragm may be formed in a dome shape
or a cone shape. In the acoustoelectric converter, the light emitting element and the light
receiving element can be disposed to face the surface of the base on the side coated with the
metal coating. . In the acoustoelectric conversion device, the light emitting element and the light
receiving element can be disposed to face the surface of the base opposite to the side coated with
the metal coating.
[0008]
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a view showing a schematic
configuration of an acoustoelectric converter according to an embodiment of the present
invention. In the present invention, as a material of the diaphragm, the diaphragm 1 is
constituted by a laminate of a substrate made of a resin film or a resin film molded product and a
metal film coated on one surface of the substrate.
[0009]
As the substrate, a resin film such as polyimide, polyetherimide or polyparaphenylene
terephthalamide resin can be used. As the metal film, a metal film 12 resistant to rust, such as
nickel or gold, can be used, and the metal film 12 is coated on the surface of the resin film 11 as
a substrate by means such as vapor deposition. As shown in FIG. 1C, the light emitting element 3
and the light receiving element 4 are disposed on the side of the metal film 12 of the diaphragm
1 configured as a laminate in this manner, and light is emitted from the light emitting element 3
to the diaphragm 1. The light from the diaphragm 1 is received by the light receiving element 4,
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and the vibration displacement of the diaphragm 1 at the time of the amplitude of the diaphragm
1 is detected by the amount of light received.
[0010]
Alternatively, the surface of the substrate made of the resin film 11 may be coated with a metal
film 12 having good reflectance such as aluminum or nickel by means such as vapor deposition,
and the diaphragm 1 may be configured as a laminate. . In the case of a diaphragm having such a
structure, as shown in FIG. 1B, the opposite surface coated with the metal coating, ie, the
substrate side is disposed to face the light emitting element 3 and the light receiving element 4
Construct an electrical converter. In this case, the light emitted from the light emitting element 3
reaches the metal film 12 through the resin film 11, and the reflected light from the metal film
12 is emitted through the resin film 11, but the reflectance of aluminum or nickel is extremely
high. Therefore, the intensity of the reflected light does not deteriorate.
[0011]
In a diaphragm in which a resin film 11 as shown in FIG. 1B is coated with a metal film 12 made
of a metal having a high reflectance, such as aluminum or nickel, the resin film 11 as a base is
extremely resistant to humidity. Even if the metal coating 12 which is resistant and coated on the
surface is rusted under the influence of humidity, only the surface of the diaphragm 1 is rusted,
so the reflectance from the back side does not change. Therefore, the device can be operated
without any problem.
[0012]
As described above, in the present invention, a rust resistant metal such as nickel or gold can be
used as the metal film to be coated on the substrate, or aluminum which has no rust resistance
but has high reflectance to light is used. It can also be done. Further, in the case of a metal having
little rust resistance against rust, such as aluminum, the surface may be coated with rust-resistant
gold or the like. In this way, a more reliable diaphragm can be constructed. Further, the shape of
the diaphragm is not limited to a planar shape, and may be configured three-dimensionally, for
example, in a dome shape or a cone shape.
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[0013]
As described above, in the present invention, the diaphragm is formed of a laminate using a
metal film on one surface of a resin film or a resin film molded product as a substrate, so that the
strength of the diaphragm is obtained. And a highly reliable acoustoelectric converter. In
addition, by selecting the type of metal coating, it is possible to make the diaphragm extremely
resistant to rusting and resistant to humidity.
[0014]
Furthermore, even if the rust resistance is not very high, if a metal coating with a good
reflectance is used, the reflectance from the back side does not change even if the surface may be
rusted due to the influence of humidity, and a good acoustic light is obtained. Conversion
characteristics can be obtained. Furthermore, when a metal having rust resistance is used as the
metal film, if the film thickness of this metal is thinly formed in angstrom units, the sensitivity to
acoustic vibration is hardly affected, and a substrate made of a resin film or a resin film molded
article Even if the plate thickness is increased, the sensitivity is not reduced and a flexible
diaphragm can be formed. Therefore, compared to the conventional diaphragm using only metal
foil, the handling during mass production is much easier, the yield rate is improved, and the
productivity is improved.
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