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JP2003305739

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Notice
This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
financial decisions, should not be based on machine-translation output.
DESCRIPTION JP2003305739
[0001]
The present invention relates to a method for producing a polymer film for a vibrating
membrane and a method for producing a vibrating membrane unit, and more specifically, the
thickness used as a vibrating membrane of an electroacoustic transducer is 1.0 μm or less The
present invention relates to a manufacturing method for manufacturing a very thin polymer film
which is a thin film and a method for manufacturing a vibrating membrane unit having the
polymer film attached to a support ring.
[0002]
2. Description of the Related Art An electroacoustic transducer such as a microphone or a
speaker is provided with a diaphragm unit formed by stretching a diaphragm on a support ring
in order to convert a sound wave into an audio signal or an audio signal into a sound wave. There
is.
[0003]
In many cases, a polymer film is used for the vibrating film, and generally, its material is PET
(polyethylene terephthalate), and its thickness is as thin as 1.2 μm.
With such a thickness, the film produced in the form of a sheet can be carried from the film
manufacturer into the assembly line of the diaphragm unit in a state of being wound up in a roll,
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for example.
[0004]
As one of the factors for obtaining high fidelity reproduced sound, it is preferable that the
vibrating film be as thin as possible and have a small mass. The polyimide resin makes this
possible, and recently, application of a polymer film made of a polyimide resin having a thickness
of 1.0 μm or less (about 0.5 μm as an ultrathin film) to a vibrating film has been attempted.
[0005]
However, with such a thinness, for example, wrinkles and tears may occur even when exposed to
wind, so that not only can it be wound into a roll, but it can not be substantially handled even in a
sheet state. This makes it difficult to apply ultra-thin films to vibrating membranes.
[0006]
Therefore, an object of the present invention is to make it possible to handle an ultra-thin film
having a thickness of 1.0 μm or less, which is considered difficult to handle, without causing
wrinkles or breakage.
[0007]
[Means for Solving the Problems] In order to solve the above problems, according to the first
aspect of the present invention, there is provided a vibrating film for producing a polymer film
having a thickness of 1.0 μm or less which is used as a vibrating film. A method for producing a
polymer film, comprising: a first step of applying a predetermined resin on a film formation
substrate to form a polymer film having a thickness of 1.0 μm or less; and the polymer film is
the film formation substrate. A second step of bonding a transport frame of a predetermined
diameter to the polymer film with an adhesive in an upper state, and peeling off the polymer film
to which the transport frame is bonded from the film formation substrate And a third step,
wherein the polymer film can be transported in a state of being supported by the transport
frame.
[0008]
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In order to separate the polymer film from the film formation substrate in the third step, the
whole film formation substrate is immersed in water.
Thus, the polymer film can be favorably peeled off from the film formation substrate.
[0009]
In this case, since the polymer film is peeled from the film formation substrate while being
supported by the transport frame, it can be transported without causing wrinkles or breakage
even if the polymer film is ultrathin.
[0010]
In the case of application to a vibrating film, drying is performed after peeling, and a metal film is
vapor-deposited on at least one surface of a polymer film as a fourth step.
This fourth step may be performed on either the film manufacturer side or the assembly line side
of the diaphragm unit.
[0011]
The second invention of the present application relates to a method of producing a diaphragm
unit, wherein a polymer film formed by vapor deposition of a metal film on at least one surface of
the polymer film peeled off in the third step is used as a mother film In order to produce a
diaphragm unit having a polymer film attached to the support ring, the mother film is placed on
a pedestal smaller in diameter than the carrier frame, and at least the load of the carrier frame on
the mother film. The support ring is adhered to the mother film through an adhesive in a state
where a predetermined tension is applied to the mother film, and the support ring to which the
polymer film is attached is attached to the mother film from the mother film. It is characterized
by being separated.
[0012]
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, referring to FIGS. 1 to 6, an
embodiment of the present invention will be described according to the order of steps.
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[0013]
First, as shown in FIG. 1, a resin is applied onto a film formation substrate 10 to form a polymer
film 20.
The film formation substrate 10 may be a commonly used silicon wafer or glass substrate.
[0014]
The resin used is preferably polyimide.
Depending on the thickness of the film to be formed, the concentration of the solvent, the
varnish, and the coating conditions are selected, but in the present invention, the thickness is 1.0
μm or less.
The film forming method is preferably a spin coater method, but another method such as a roll
coater method may be employed. After the film formation, for example, it is preferable to dry at
60 ° C. for about 3 minutes.
[0015]
Next, as shown in FIG. 2, in a state where the polymer film 20 is formed on the film forming
substrate 10, the transport frame 30 is adhered onto the polymer film 20 with an adhesive.
There is no particular limitation on the adhesive used.
[0016]
In this example, an aluminum frame is used for the transport frame 30, but another metal frame
may be used, and in some cases a plastic frame may be used. The shape of the frame is also not
particularly limited, and may be circular, square or the like. However, since the polymer film 20
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is extremely thin, it is necessary to be careful not to have protrusions such as burrs.
[0017]
Next, the polymer film 20 is peeled off from the film formation substrate 10. This peeling can be
easily and satisfactorily performed by preparing the water tank 40 as shown in FIG. 3 and
immersing the film forming substrate 10 therein. The water used may be either cold water or hot
water.
[0018]
By this peeling, as shown in FIG. 4, the polymer film 20 supported by the transport frame 30 is
obtained. Therefore, even an ultra-thin film having a thickness of 1.0 μm or less can be easily
handled (carried). In addition, in order to remove the adhering water, for example, it is preferable
to dry in a heating atmosphere at 250 ° C. However, if there is no time restriction, it may be
normal temperature drying.
[0019]
After drying, as shown in FIG. 5, the metal film 50 is vapor-deposited on the polymer film 20
while being supported by the transport frame 30. The metal film 50 is preferably a vacuum
evaporation film of gold (Au). In this example, the metal film 50 is formed on one side of the
polymer film 20, but in some cases, the metal film 50 may be formed on both sides.
[0020]
Next, with reference to FIG. 6, the case of producing a diaphragm unit in which the polymer film
20 is stretched on the support ring 70 with the polymer film 20 as the mother film 20M will be
described.
[0021]
First, the mother film 20M is placed on the pedestal 60 having a diameter smaller than that of
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the transfer frame 30.
At this time, since the transport frame 30 is detached from the pedestal 60, the mother film 20M
is pulled by the weight of the transport frame 30, and a predetermined tension (tension) is
applied.
[0022]
If the necessary tension can not be applied only by the weight of the transfer frame 30, a weight
(not shown) may be added to the transfer frame 30 to apply a predetermined tension. As
described above, the transfer frame 30 is also used as a locking jig for the weight.
[0023]
In this state, the support ring 70 of the vibrating membrane unit is adhered to the mother film
20M with an adhesive. Then, the adhesive is cured to cut out the support ring 70 from the
mother film 20M. As a result, a diaphragm unit is obtained in which the polymer film
(diaphragm) is stretched on the support ring 70 with a predetermined tension.
[0024]
According to this, although depending on the ratio of the size of the transport frame 30 and the
support ring 70, it is possible to take out a large number of vibrating membrane units in which
the tension of the vibrating membrane is uniform from one mother film 20M.
[0025]
In addition, by using a frame having a weight corresponding to the tension applied to the
vibrating film in advance for the conveying frame 30, the tension for the vibrating film is
adjusted as well as the handling of the thin film polymer film 20. It can also be used as a means.
[0026]
As described above, according to the first invention of the present application, when producing a
polymer film having a film thickness of 1.0 μm or less used as a vibrating film, a predetermined
resin is formed on a film forming substrate. By applying and forming a polymer film having a
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thickness of 1.0 μm or less, and bonding a transport frame of a predetermined diameter to the
polymer film through an adhesive, the film is peeled from the film formation substrate. An ultrathin film with a thickness of 1.0 μm or less, which is considered difficult to handle, can be
transported, for example, to the assembly line of a vibrating membrane unit without causing
wrinkles or tears.
[0027]
Further, according to the second invention of the present application, a diaphragm unit is
manufactured using a polymer film formed by vapor deposition of a metal film on at least one
side of the polymer film supported by the transport frame in the first invention. In this case, the
mother film is placed on a pedestal having a diameter smaller than that of the transfer frame, and
at least a load of the transfer frame is applied to the mother film to apply a predetermined
tension to the mother film. By bonding the support ring through the adhesive and separating the
support ring from the mother film, it is possible to take a large number of vibrating membrane
units in which the tension of the vibrating membrane is uniform.
[0028]
Brief description of the drawings
[0029]
1 is an explanatory view of a film forming process in the present invention.
[0030]
2 is an explanatory view of a transfer frame bonding step in the present invention.
[0031]
3 is an explanatory view of the peeling step in the present invention.
[0032]
4 is a schematic cross-sectional view showing a polymer film peeled from the film formation
substrate in the peeling step.
[0033]
5 is a schematic cross-sectional view showing a state in which a metal deposition film is formed
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on the polymer film.
[0034]
6 is an explanatory view of a vibrating membrane unit manufacturing process in the present
invention.
[0035]
Explanation of sign
[0036]
DESCRIPTION OF SYMBOLS 10 Film-forming board | substrate 20 Polymer film 20M Mother
film 30 Frame for conveyance 40 Water tank 50 Metal vapor deposition film 60 Base 70 Support
ring
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