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JPS559155

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This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
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DESCRIPTION JPS559155
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 shows an embodiment of the present invention,
FIG. 1 is a longitudinal sectional view of a mechanical-1 electrical converter, and FIG. 2 is a
longitudinal sectional view of a mechanical-electrical converter in another embodiment. FIG. 3 is
an electrical equivalent circuit diagram in a static equilibrium state of the microphone shown in
FIG. 1 and FIG. 1.11: vibrating membrane 2, 15: electret, 3.13: metal-deposited layer, 4, 14: load
electrode, 5 ° 8.16, 19: through hole, 6 , 9, 17, 20 ... spacer, 7, 18 ... front electrode.
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to microphones, and
in particular to electret condenser microphones. In the conventional electret condenser
microphone, when the diaphragm vibrates, the capacitance of the effective portion changes, but
the stray capacitance (ineffective capacitance) changes (! 2.) Hair to hair --- The mechanicalelectrical conversion system is distorted in order not to nitride. In particular, when the sound of
high sound pressure is reciprocated, a large distortion occurs, so that the distortion between the
moving film and the front electrode is increased or decreased in order to reduce the distortion. A
push-pull type electret condenser microphone is proposed in which the electrostatic capacitance
between the imaging film and the front electrode is shown as an inverse change, and even-order
harmonic distortions cancel each other. This push-pull electret condenser microphone has a
drawback that its structure is complicated and expensive. An object of the present invention is to
provide a microphone which can reduce distortion of a mechanical-electrical conversion system
and which can be manufactured easily and at low cost, and an embodiment thereof will be
described below with reference to the drawings. In 11111, a +1 1 film like electret! A vibrating
membrane formed by forming a metal-deposited layer (3) on one side of (a), (41 is a front
electrode facing the metallized layer (3) of the electret (2) with a gap on the other side. Yes, one
end of the front electrode (4) is an electret reconnaissance)? A plurality of through holes (6) are
provided, which are open on the surface facing opposite to the surface area and the other end is
in contact with the external world. (6) is a spacer made of an insulator interposed between the
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vibrating membrane (1) and the front electrode (4) at the peripheral portion of the vibrating
membrane fil. & Ffl # i is a front electrode facing the open side of the electret (2) with a gap on
the surface formed by the fully open deposition layer (3), and one end of the nuclear front
electrode (7) is the metal deposition layer (3 And a plurality of through holes (8) which are open
on the surface facing the other end and on the surface where the other end is in contact with the
outside world. (9) is a spacer made of an insulator interposed between the vibrating membrane
(1) and the front electrode (1) at the peripheral portion of the vibrating membrane +11. In
addition, the output is led from the front electrode (4) p and the front electrode (1), the
impedance rewrite 4 such as FBT, etc. 0 before e shooting filto is an electret (t The equivalent
gap, expressed by the dielectric constant of air, between the imaging part of the vibrating
membrane (1) and the electrostatic chargetel in the equilibrium state after the static
displacement, although it is drawn toward the 肇 (4) ), And assuming that the equal tooth gap
represented by the dielectric constant of air between the imaging portion of the diaphragm (1)
and the front electrode (4) is (4) j 41 −, the relationship of @) = 1 holds It is configured to
In addition, the effective capacitance formed by the vibrating portion of the vibrating membrane
i11 and the front electrode (1) in the static equilibrium state is represented by (OeffJ, and the
vibrating membrane (the vibrating portion of the membrane and the front electrode (4)
Assuming that effective electrostatic capacity 1Yt (0 @ ff−), the relationship of (OeffJ = (Oeff,) is
established. The ineffective capacitance t − − → formed by the fixed portion of the vibrating
film (11 and the front electrode (7)) and the ineffective formed by the fixed portion of the
vibrating film i 11 and the front electrode (4) Assuming that the electrostatic capacitance is
(OaJ), a relationship of (Os 璽) = (Osa3) is established. Figure 2 is another 011 of the present
invention! An example is shown, (A river is formed by forming a metal deposition layer axis on
one side of the polymer film a2 [6 M 1! + 4 # i said polymer film +1! + Metal vapor deposition
layer (a front electrode facing to a surface where I3 is not formed, with a gap, a surface KFi film
electret 4 opposite to the polymer film (12) with a front electrode α gradient There is a surface
K110 at one end of the electret flit opposite to the polymer film of the electret flit, and the
electret II and the back electric line Wt axis 1ll) 111, an even cloud and a total penetration. The
other end is a through hole of a count number VC740 in contact with the external world, (+7) is a
peripheral portion of the vibrating membrane (11) and is interposed between the vibrating
membrane (l) and the front electrode Q4. It is a spacer which consists of an insulating material.
Further, − is a front electrode facing the metal deposition layer of the polymer film # 欝 (with a
gap on the surface on which the I 間隙 is formed, and one end of the front electrode Oa is the
metal deposition layer α 萄A plurality of through holes are provided which are open on opposite
surfaces and whose other end is in contact with the external world. − Is a spacer made of an
insulating material placed between the vibrating membrane (11 and the front and rear electrodes
11 and 12 at the periphery of the vibrating membrane (11: It takes out from the electrode-and
leads to an impedance transmitter (b) such as B and FIT. The vibrating film jlli may be formed of
metal foil. The vibrating membrane (The river is attracted toward the front electrode H by the
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electrostatic force by the electret (& the vibrating membrane in the equilibrium state after its
static displacement (! The equivalent gap 'ktltJ expressed by the dielectric constant of air
between the vibrating part of l) and the front electrode ball, and the equivalent film of the
vibrating membrane (11: represented by dielectric constant of air between the vibrating part and
blue electrode axis + 61 A, Assuming that −1 · − 忌 · t− (au), the crane 5 l) = (Au) is established.
In addition, the effective electrostatic capacitance formed by the vibrating membrane (the
vibrating portion of + a and the front electrode − in the static equilibrium state is (Oeff1θ, and
the effective electrostatic capacitance formed by the vibrating portion of lυ and the front
electrode t14 is Assuming that the capacitance is (cc + rf 1-(Ceff 11) = ((i @ ff-)), the fixed portion
of the diaphragm (11) and the forehead & ridge form a fixed portion of the diaphragm (11) The
invalid capacitance is (C 811), and shake! In the case of an invalid electrostatic capacity lid f: 幀
81-formed by one constant portion of 11 l group (11 j and the front electrode α @, @C is
established so that the relationship of (C 6 − = (C 8 □)) is established I am jealous. FIG. 3 is an
electrical equivalent circuit diagram in the static equilibrium state of the microphone of the
above configuration, showing the effective capacitance formed by the vibrating portion of the
vibrating membrane (1) (11i and the front electrode (71 fl field) Parallel 路 path of the ineffective
capacitance (CsJ (Cs, 1)) formed by the expansion effJ stem · rf, and the fixed part of the vibrating
membrane (1) ll and the front electrode (7) α4, The effective capacitance (Ceff − (Ceff −
formed by the vibrating portion of the vibrating membrane il + (11 and the front electrode (4)
114 and the fixed portion of the vibrating membrane (1101 and the front electrode (4) − The
parallel circuit with the invalid capacitance lsj (Osu) () ↑, ・, j is impedance converter (2) I!
Connected in series to the force. When the microphone tube of the above configuration is
operated, in a static equilibrium state, an equivalent gap It represented by a dielectric constant of
air between the vibrating membrane Ill (the vibrating portion of Ill and the front I electrode 17), I
D, and the vibrating membrane Equivalent gap GiJ company represented by dielectric constant of
air of +11 (Ili vibration part and back electrode +4104! The effective electrostatic capacity tfpeff
J (Ceff x J formed by the vibrating portion of the vibrating film fillli and the front electrode (7)) is
configured to be equal to a and n is equal to the vibrating portion of the vibrating film lit (11 The
effective capacitance stem · t formed by the electrode (4) − and the (carf −) are equal to each
other, and the formed portion by the fixed portion of the diaphragm tlllli and the front electrode i
71 fll + Invalid capacitance (C-0 ('s x J to, Iii II membrane fil (llino fixed m1 min and back N @ f *
+ 94,! Since the invalid capacitance $ + s formed by − is configured to be equal to (Os −), the
capacitance of the capacitance formed by the vibrating membrane (1) lli and the back In contrast
to the increase or decrease, the vibrating membrane (1) Ill and the negative electrode 4111 (n
capacitance formed by III shows the opposite change, even-order harmonic distortion mutually
cancels “il +. Be done.
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Therefore, the structure is simpler and cheaper than the push-pull type electret condenser
microphone, and the distortion can be reduced as in the push-pull type. The present invention is
a book that can be implemented as described above, and can provide a microphone which can
reduce distortion of a mechanical-electrical conversion system and can be manufactured with a
simple structure at low cost.
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