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JPS583397

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DESCRIPTION JPS583397
[0001]
The present invention relates to a bonding method using a bonding agent with a vibrating plate
to be produced. The adhesion method between the ceramic piezoelectric element substrate and
the diaphragm in the conventional piezoelectric buzzer or the like will be described with
reference to FIG. First, the ceramic piezoelectric ladder substrate 1 is coated with electrodes 1 *
glb't- on both sides by a screen printing method or the like, and the electrodes are baked at a
temperature of about 800 DEG C. and then subjected to polarization treatment in a high electric
field. Then, an adhesive 4t is applied by a dispenser method or the like to the diaphragm 3 of a
thin sheet metal held by the vacuum suction jig 2, and the ceramic piezoelectric rudder substrate
1 is put on the vacuum suction jig 5 so as to be at the upper position. The vacuum suction jig 5
itself is pressed and held in the direction of the arrow. In this case, a method is also proposed in
which the ceramic piezoelectric element substrate 1 and the diaphragm S are held in the same
manner as described above, and pressure is applied while applying relative rotation, and the
ceramic piezoelectric element substrate 1 is attached to the diaphragm S and t11. . (Japanese
Utility Model Application No. 52-31277). However, in such a conventional method, a ceramic
piezoelectric element as thin as 0, 05 to 0.15 m manufactured by the doctor blade method or the
like is in a state where heat is generated due to heat or electric field at the time of electrode
printing or polarization treatment. Since the ceramic piezoelectric elements are bonded by
pressure contact or rotation by a large mechanical force of movement, the ceramic piezoelectric
elements are bonded by rotation or the like, so that the yield bt is reduced in the extreme case
where the ceramic piezoelectric elements are worn around during bonding. In the case of the
ceramic piezoelectric element and the substrate in which t.sub.9 is produced, an air layer is
formed between the ceramic built-in piezoelectric element substrate and the diaphragm to
deteriorate the adhesion. Furthermore, in the case of pressure contact or rotation due to a large
mechanical force, the electrode surface and diaphragm provided on the main surface of the
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ceramic piezoelectric element which is not covered by the ceramic piezoelectric element
substrate or is not broken On the surface, friction between the ceramic piezoelectric element and
the adhesive and between the adhesive and the diaphragm increase, and the unbalance of the
adsorptive power of the ceramic piezoelectric element and the diaphragm causes a scratch and
the sound of the piezoelectric buzzer It had low characteristics and reliability. These drawbacks
are also due to the fact that the vacuum suction force is strong in the direction of suction but
weak to the force from the 90 ░ direction (rotation enters this) and that the viscosity coefficient
of the adhesive used is large . The present invention has been made in view of the abovementioned point, and improves the reliability of the piezoelectric vibrator by improving the
adhesion t--adhesion between the piezoelectric element substrate and the diaphragm without
applying external pressure contact or rotational force or the like. It provides a measure. That is,
according to the present invention, the diaphragm is diverted so that, for example, the central
portion of IIIK which holds the vacuum suction is projected outward, and is bonded to the
piezoelectric element substrate using its restoring force and from the diaphragm side The
compressed gas can be blown to prevent adhesion of air between the piezoelectric element
substrate and the diaphragm so as to prevent air from forming between the piezoelectric element
substrate and the diaphragm, and can not apply a pressure contact force or the like from the
outside during bonding. From this, it is possible to improve the quality characteristics and the
pace.
Hereinafter, the present invention will be described in detail with reference to the drawings. FIG.
2 shows the state Im immediately before bonding in the company-example, in which the ceramic
piezoelectric element substrate 11 having electrodes 11 * and 1 lbt- on both principal surfaces is
coated with an adhesive 12 on one side by a screen printing method etc. The opposite side is
suctioned and held by the vacuum suction jig 14. The vacuum suction jig 14 is made of resin
made of resin having a large number of holes 14 * O concentrically and concentrically in order to
make the vacuum suction force uniform, and the vacuum communication tool ISK is closely
inserted. The diaphragm 15 made of a thin metal plate is held by another vacuum suction jig 16
and disposed opposite to the piezoelectric element substrate 11. Here, the tip end central portion
of the vacuum suction jig 16 is protruded by a dimension A from the peripheral portion, and
thereby, when the diaphragm 16 is held by suction, it is deflected to a shape 11 where the
central portion protrudes outward. The vacuum suction jig 16 also has a gas blowing portion
16bff for blowing compressed gas, in addition to the suction portion 161 for performing vacuum
suction. The tip of the diaphragm 15 is lowered to a position where the tip of the diaphragm 15
touches the surface of the adhesive 12, and the vacuum adsorption force on the side of the
vacuum adsorption jig 1d is gradually weakened to stop the diaphragm 15 itself. The
piezoelectric element substrate 11 is bonded from the center to the periphery of IfK by the
restoring force. At this time, the vacuum adsorption jig 1gK compressed gas, for example,
compressed air, is fed through the gas blowing unit 16bt-, and the compressed gas is blown to
the surface of the diaphragm 150. After that, the vacuum adsorption force of the ceramic
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piezoelectric element substrate 11 @ is put into a thermostatic chamber at about 100 DEG C. and
adhesive 12t-hardened. The nine extremely thin seific pressure m * elements manufactured by
the doctor blade method etc. have their own resistance during the manufacturing process, but
their amount (the highest point and center of the peripheral portion of the concavely curved
ceramic piezoelectric element) The difference between the lowest points of the parts) is clear
from the lines of the experiment. From the experimental manufacturing process, the ceramic
piezoelectric ?element thickness 0.05 to 0.15? and the outer diameter of the ceramic element
22 having an outer diameter of 22 When it is less than 0.5 ? most are. In the case of this
amount of holding, ceramic does not cause plastic deformation such that the flat piezoelectric
element substrate is flatly pressed, and even if vacuum suction is carried out flatly by the suction
holder, it is generally brass The diaphragm using a plate or a stainless steel plate is made to
deflect to make its central part project using vacuum adsorption force, but when the thickness of
the diaphragm becomes 0.05 or less, its restoring force is In the case of 1 90, 15-or more, the
resilience is too large, and at the same time, a large adsorptive power is also required, and K is
too large for an extremely thin ceramic piezoelectric element substrate. Will be able to
In this sense, the diaphragm thickness of 0.05 to 0.15 is optimum. In consideration of the elastic
constant of the vibrating plate, the height dimension of the height of the central protrusion of the
adsorption jig 16 should be 1.5 or less, and the adhesive should be outside by the restoring force
of the vibrating plate and the blowing of compressed gas. It is preferable to apply in a range
slightly smaller than the outer diameter of the ceramic piezoelectric element substrate to move
so as to be extruded. According to this embodiment, the diaphragm 15 is deflected in a convex
shape at the time of vacuum adsorption, and the restoring force is utilized, and the soft force by
the compressed gas is used to bond the ceramic piezoelectric element substrate 1 to the
diaphragm 15. Adhesion can be enhanced. That is, the restoring force of the vibrating plate 15 is
sequentially transmitted as a pressure contact force from the central portion of the ceramic
piezoelectric element substrate 11 to the peripheral portion, and the compressed gas flows from
the central portion of the vibrating plate to the peripheral portion. As a result, the air layer does
not remain between the ceramic piezoelectric element substrate 11 and the vibrating plate 15),
and the familiarity between the two is well improved to improve the adhesion outer tube.
Further, the ceramic produced by the pressing force of the rigid body, which has conventionally
occurred, has the effect of improving resistance and quality characteristics without causing
damage to the electrode surface of the ceramic piezoelectric element. FIG. 3 shows the case
where the adhesive 12 is applied to the diaphragm 15 @ in reverse to FIG. This K also provides
the same effect as the case of FIG. FIG. 4 shows the case where the tip of the vacuum suction jig
1g on the side of the diaphragm 15 does not draw a curved surface matched to that of the
diaphragm 15 as shown in FIG. In some cases it may be preferable to leak some vacuum so that
no salt forces are applied to the plate. As described above, according to the present invention, the
diaphragm and the piezoelectric element substrate can be adhered with good adhesion by
utilizing the elasticity of the diaphragm and the soft force of the compressed gas, and the
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reliability is high and the acoustic characteristics are excellent. The piezoelectric vibrator can be
obtained with high yield.
[0002]
Brief description of the drawings
[0003]
FIG. 1 is an explanatory view of a conventional bonding method of a piezoelectric element
substrate and a diaphragm, and FIG. 2 is an explanatory view of a bonding method of a
piezoelectric element substrate and a diaphragm according to one embodiment of the present
invention. These are explanatory drawings of the bonding method by other Example.
11 ... ceramic piezoelectric element substrate, 11 g. 11b иии Electrode, 12 иии Adhesive, 14.16 иии
Vacuum suction jig, 16 иии Diaphragm. Applicant agent Patent attorney Suzue Takehiko Figure 1
Figure 2 Figure 4
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