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JPS4933779

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DESCRIPTION JPS4933779
■ Vibrator plate for self-polarizing electrostatic type electroacoustic transducer ■ Special
condylar space 43-52682 De-Oh intercondylar space 43 (1968) July 25 @ for the inventor 1 in
Okuracho, Setagaya-ku, Tokyo Large-scale housing 2518 ■ Applicant Sony Corporation Tokyo
parts for 6 wards north goods for 35 [Fa] agent patent attorney Atsushi Ito
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view for explaining a
polarization treatment method when manufacturing the diaphragm of the present invention, and
FIG. 2 is a cross-sectional view showing the diaphragm of the present invention.
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a diaphragm for a
self-polarizing electrostatic type electroacoustic transducer suitable for use, for example, in a
condenser microphone, and in particular to obtain a stable surface-generated charge with
extremely small variation. It is a thing. For example, in an electrostatic electroacoustic transducer
such as a condenser microphone, a dielectric material to which a permanent charge effect is
applied in advance is used as a diaphragm constituting an electrostatic conversion element,
whereby a high polarization voltage is externally applied. A so-called self-polarizing type which
does not need to be supplied has been proposed. In the polarization treatment of the diaphragm
used in such a self-polarizing electrostatic electroacoustic transducer, for example, both sides of a
dielectric made of a polymer film such as Mylar (trade name) are rubbed with an electrode plate,
A direct current electric field of, for example, about 300 KV / cIn is applied for a certain time
between two equal electrodes in a high temperature atmosphere, and the charge density σ is
gradually cooled on the surface of the dielectric while keeping the direct current electric field
applied. Surface generated charge of 2 × 10 −8 C / Cd or more is obtained. In this case, a
conductive thin film such as aluminum is deposited on one surface of the dielectric, and a
laminated diaphragm is formed of both the second dielectric and the conductive thin film, and
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the conductive thin film of the [111111] dielectric is coated. A polarization treatment electrode is
crimped on one side not to be attached, and a direct current voltage is applied between the
second conductive film and the polarization treatment electrode. Conventionally, the polarization
treatment electrode is applied when a direct current voltage is applied. A positive surface charge
is generated on one surface of the dielectric processing electrode side by applying a voltage so as
to be a positive electrode on the side and a negative electrode on the conductive thin film side.
However, to obtain a positive surface-generated charge on the side of the polarization processing
electrode opposite to the conductive thin film in this way, the dielectric plate and the conductive
thin film are removed from the polarization processing electrode after the polarization
processing. Heterocharges or negative charges often occur on the surface of the body where the
positive surface charge opposite to the conductive film is generated. As a result, part of the
positive surface charge generated by the polarization treatment and this negative charge are
neutralized and the surface charge density is reduced. However, hetero charge, that is, negative
charge appears extremely nonuniformly in each product, so in this type of conventional
diaphragm, the surface charge density of each product has a large variation, which makes it
difficult to keep pace. There was a bad drawback. In view of the foregoing, the present invention
is to generate negative surface charge as homo-charge on one surface on which a dielectric
conductive thin film is not deposited. The diaphragm according to the invention will now be
described with reference to the drawings along with its polarization process. In FIG. 1, reference
numeral 1 denotes a polymer dielectric (for example, referred to simply as a dielectric in the
following description) consisting of a polymer film having a thickness of about 12 mm, such as
polyester polypropylene or polycarbonate. Corona conductive processing is performed in
advance.
A conductive thin film 2 made of aluminum is deposited on one surface 1a of the dielectric 1 by,
for example, vacuum evaporation (The conductive thin film 2 is not limited to a metal thin film.
For example, a polymer compound contains carbon etc. to give conductivity) The laminated
diaphragm 3 is formed of the second derivative 1 and the conductive thin film 2. When the
diaphragm 3 is polarized, the polarization processing electrode [111111] EndPage: 1 plate 4
between the dielectric 1 and the surface 1b on which the conductive thin film 2 of the dielectric
1 is not deposited. Crimp to prevent formation of layers. In such a state, for example, in a high
temperature atmosphere of 90 ° to 120 ° C., a DC power supply 5 is connected to be a
negative electrode on the polarization processing electrode plate 4 side and a positive electrode
on the conductive thin film 2 side as shown. A negative DC electric field of, for example, {circle
over (1)} is applied to the surface 1 b side, for example, and after about 1 hour, it is gradually
cooled with the DC electric field still applied. The diaphragm of the present invention obtained by
removing the electrode plate 4 for polarization after polarization treatment as described above
generates negative surface charge on the surface 1b on which the conductive thin film 2 of the
dielectric 1 is not attached as shown in FIG. It is Thus, when the surface 1b side on which the
conductive thin film 2 of the dielectric 1 is not formed is negatively charged, the polarization
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electrode plate 4 is removed immediately after the polarization electrode plate 4 is removed as
described above. In this case, there is no possibility that positive charges will occur, and therefore
the surface charge density on this surface 1b will not decrease and the stability of the table
[111111] charge density will be extremely small and the yield will be greatly improved. There is.
Incidentally, in the case of the diaphragm of the present invention in which the conductive thin
film of the dielectric is not deposited on the one surface side is negatively charged, the surface
charge density of the homo charge, ie, the negative charge is the same as the homo charge in the
conventional case. It has been confirmed by experiments that the charge, that is, the positive
charge is one digit larger than that of the charge, and according to the vibration plate of the
present invention, the yield is as high as 90% or more and the productivity is remarkably
improved.
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