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JPS5288016

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DESCRIPTION JPS5288016
Description 1 Title of Invention
Electroacoustic transducer diaphragm
Next, the present invention will be described in detail. A mold formed into a desired diaphragm
shape is placed in EndPage: 1 in a furnace, and a gas containing silicon and a gas containing
nitrogen are injected, and vapor phase decomposition is performed in the furnace, and the mold
top Silicon nitride (SlIN 4) was deposited on the Next, a comparison of the silicon nitride (SL, N4)
diaphragm obtained according to the present invention and the main high-elasticity diaphragms
currently used according to the present invention is shown in the following table. Indicated. As is
apparent from the above table, a silicon nitride vibrator was found.
4, a simplified illustration of the drawing is a cross-sectional view (1) · · · · · · · silicon nitride
diaphragm patent applicant Foster Electric Co., Ltd. EndPage:2
10-05-2019
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