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,-0 · Specification 1, title of the invention
Speaker diaphragm and method of manufacturing the same
3. Detailed Description of the Invention The present invention relates to a speaker diaphragm,
and in particular to improve the high frequency characteristics and transient characteristics of
the speaker by enhancing the strength and rigidity of the diaphragm. In general, it is desirable
that a diaphragm of a speaker used for high frequency range reproduction has a small mass and
a large strength and rigidity. In order to satisfy these conditions, various studies and
developments have been made, and various speaker diaphragms have been proposed. There are
conventional speaker diaphragms using an aluminum (A4) alloy plate or a titanium (Ti) plate, but
to obtain strength, the material thickness must be increased, and when the material thickness is
increased, the mass is increased. It was not possible to satisfy the above condition by enlarging it.
Therefore, even if the material thickness is made thinner and lighter, satisfactory strength can be
obtained, and EndPage: 1, IJIJium diaphragm has been developed, but this diaphragm has an
adverse effect on the human body at the time of manufacture, and there is a problem of
pollution. There were difficult problems in production, such as problems, and they could not be
easily produced. Therefore, the present invention makes it possible to easily manufacture a
diaphragm that satisfies all the conditions required for the speaker diaphragm, and the most
characteristic feature of the present invention is a method of performing chemical vapor
deposition using plasma discharge, so-called plasma chemical vapor deposition Method (Plasma
Chemical Vapor De-position) to make it possible to easily obtain a speaker diaphragm having a
high specific elastic modulus material layer such as boron (B), and a speaker diaphragm having
excellent characteristics at low cost. It is intended to be provided. An embodiment of the present
invention will be described above with reference to the drawings. First, FIG. 1 shows the speaker
force using the speaker diaphragm of this embodiment, 1 is a speaker frame, 2 is a speaker
diaphragm formed in a conical shape, and roll processing is performed around this. The edge 3
that has been applied and shaped so that the cross section has a camabot shape is continuous,
and the dust cap 4 is attached at the center. Voice koinope 7, 8 is a plate, 9 is a magnet clamped
between both plates, 1 o Is a gasket. FIG. 2 shows the speaker diaphragm 2 alone, and FIG. 3
shows a part of its cross section. In FIG. 3, reference numeral 11 denotes a diaphragm base made
of, for example, aluminum (or an alloy thereof), and reference numeral 12 denotes a boron (B)
layer uniformly formed on the surface of the base 11. Next, FIG. 4 shows a schematic
configuration of a plasma chemical vapor deposition apparatus for producing the abovementioned speaker diaphragm 2. Reference numeral 13 denotes a hollow reactor made of quartz
and 14 denotes 400 KHz for heating the atmosphere in the reactor 13. A high frequency power
source for heating, 15.16 are a gas supply port and an exhaust port provided in the reaction
furnace 13.
Next, 17 is a valve / cylinder of (Ar) gas used as a carrier gas, and 18.19 is a cylinder of boron
trichloride (BCl 2) gas and a cylinder of hydrogen (Hz) gas used as a gas for producing boron. A
needle valve 2o and a flow meter-: -21 are connected in series to these cylinders 17 to 19
respectively, and the ends of these three flow meters 21 are put together into one, and the
reaction furnace 13 is It is connected to the gas supply port 16. However, if the needle valve 2 o
of each cylinder is operated at 9 and the flow rate of gas from each cylinder is adjusted while
looking at the flow meter 21, a gas with a desired mixing ratio can be sent to the reaction furnace
13 It has become. Next, an oil diffusion pump having a function to burn out impurities in the
reaction furnace 13 to clean the inside of the reaction furnace before generating the plasma and
an exhaust function to evacuate the inside of the reaction furnace 13 for generating plasma. An
oil rotary pump 24 is a motor for driving the pump. Reference numeral 25.26 is a trap using
liquid nitrogen which absorbs harmful gases contained in the exhaust gas from the reactor 13.
Next, the manufacture of the speaker diaphragm will be described using such an apparatus. The
base 28 on which the speaker diaphragm base 11 made of aluminum (A, M) is mounted is
disposed in the reaction furnace 13. Next, the gas supply port 15 of the reaction furnace 13 is
closed by closing a valve (not shown). Operate the '77 ° 22 · 23 to fully exhaust the inside of the
reactor '3. Next, the gas supply port 16 of the reaction furnace 13 is opened and the needle valve
20 is operated to make boron trichloride (Be! z) Gas, hydrogen (Hz) gas for 1 and mixed gas of
about 10 are supplied into the reaction furnace 13. At this time, argon (Ar) gas is supplied into
the reactor 13 in order to adjust the concentration of the mixed gas in the reactor 13
appropriately and to satisfy the chemical reaction conditions. Next, the degree of vacuum in the
reaction furnace 13 is adjusted to about 0.1 to 1 Torr and held, and the high frequency power
supply 14 for heating works to make the inside of the reaction furnace 13 have 500 'C, boron
trichloride (Bcj! s) and hydrogen (Hz) mixed gas is 2Bc! 3+3H2→2B−)6HcJ。 In the
speaker diaphragm substrate 11, boron (B) is generated. Due to the generation of the boron (B), a
uniform boron (B) layer 12 is formed on the outer surface (only one side in the embodiment) of
the speaker diaphragm as shown in FIG. Unreacted gas BC13 (boron trichloride) and reaction gas
HcA (hydrogen chloride) accompanying the formation of boron (B) are absorbed and
accumulated in EndPage: 2 τ-trap 25.26 which adversely affects the human body and
discharged into the atmosphere To prevent the occurrence of pollution problems.
Note that titanium (Ti), tantalum (Ta), molybdenum (MO), etc. can be used as the abovementioned speaker diaphragm substrate instead of aluminum (A4), but in this case, a heating
temperature of about 1000'C is suitable. That's right. If the speaker diaphragm is to be
constituted only by the boron layer 12, the multilayer diaphragm shown in FIG. 3 and FIG. 5
(support) is chemically treated with a humic substance (acid or alkali) such as hydrogen chloride
(Hcf). By performing the etching process, the base 11 is removed, and as shown in FIG. 5 (a), a
loudspeaker diaphragm made of only boron (B) is obtained. The speaker diaphragm having the
boron (B) layer thus obtained is aluminum (81), titanium (Ti). The modulus of elasticity E and the
specific modulus of elasticity E / ρ are significantly superior to those of berylam (Be) and
titanium boride (TiB as a single speaker diaphragm, as shown in the table below. Fig. 6 is a
comparison chart of the output sound pressure level characteristics of the speaker. The
characteristic of the speaker having the conventional aluminum (A4) speaker diaphragm is curve
B (20 KJ (the level is significantly Although the high frequency resonance frequency fi is as low
as about 20 K) lz, the characteristics of the speaker having the speaker diaphragm made of boron
(B) of the present embodiment are flat as shown by curve A, and the high frequency resonance
frequency is about 4 oKl (z It is flat and excellent in the audio frequency range. Although
aluminum (AJL) is used as the speaker base in the above embodiment, titanium-;-'(Ti), tantalum
(Ta), tungsten (W), molybde y (Mo)-, iron (Fe) is used instead. ), Copper (Cu), carbon (C), and
further quartz may be used. The substrate may be removed by an appropriate method such as
electrolytic etching or the like without using chemical etching. Furthermore, although boron
trichloride (Bcz3) was used as a reaction gas, if boron (B)... A logen compound gas, reaction with
hydrogen (H.sub.2) gas can produce silicon (B). When titanium tetrachloride (TicA4) is
additionally used as a boron compound, it is also possible to form titanium boride (TtB2)
according to the reaction formula 2BCl, 3+ Ticffi4 + 5H2-) TiB2-1-1 oHcl (7). As described above,
the speaker diaphragm of the present invention and the method for producing the same have
high specific modulus material layers such as boron (B) and boron compounds (TiB 2 etc.) by low
pressure chemical vapor deposition, and their strength A speaker diaphragm having high rigidity
and excellent high-frequency vibration characteristics can be obtained. Furthermore, since the
layer thickness, density, etc. of the high specific modulus material layer can be easily controlled,
it is possible to form an appropriate layer favorably and at the same time, mass production can
be extremely easily performed, and a good speaker diaphragm can be made inexpensively. Can
be provided.
And the speaker provided with such a speaker diaphragm can improve the high frequency
reproduction characteristic remarkably.
4. Brief description of the drawings FIG. 1 is a cross-sectional view of a speaker provided with a
speaker diaphragm according to an embodiment of the present invention, FIG. 2 is a perspective
view of the speaker diaphragm, and FIG. A partial sectional view, FIG. 4 is a schematic
configuration view of a reduced pressure chemical vapor deposition apparatus for manufacturing
the same speaker diaphragm, and FIG. 6 (7). FIG. 6A is a view showing a process of
manufacturing another loudspeaker diaphragm, and FIG. 6 is a characteristic comparison chart of
output sound pressure levels of the loudspeaker. 11 · Speaker diaphragm substrate, 12 · · · boron
layer. Name of Agent Attorney Nakao and 1 other EndPage: 3
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