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Description 1 Title of Invention
Method of manufacturing speaker diaphragm
3. Detailed Description of the Invention The present invention relates to a method of
manufacturing a speaker diaphragm suitable for, for example, dome-shaped splay force for
middle and high frequency range. As is well known, what is required as a tremorinator of middle
and high range speakers is that the scene is / JS and rich in strength and rigidity. For this reason,
light metals of aluminum, titanium, and so on) have been widely used as diaphragms for speakers
in the past, but recently they have been replaced with them to further increase the ratio V? of
Young's modulus (E) to density [?]. In some cases, there is a tendency to use a berylliumcontaining coating, a boron-containing coating layer, or an alloy thereof. However, when
beryllium is used, it tends to give an adverse effect to the human body in the manufacturing
process, so it was necessary to put heavy efforts on its preventive measures and it had many
difficulties in manufacturing. . The conventional chemical vapor deposition method used to
obtain a coating layer such as Matapolon has the disadvantage that it is easy to deform the
diaphragm formed by any means, since it takes a long time at the local temperature. It has the
disadvantages of low power efficiency and low mass productivity and high cost. Furthermore, in
this case, since the deposition is performed, the surface is rough and there is a problem on
removal. Therefore, the present invention has been made to the point as described above, and it
can be efficiently processed in short EndPage: 1 hour at a low temperature by microwave plasma
nitriding or carbonization by a heat treatment. It is an object of the present invention to provide a
manufacturing method capable of obtaining an extremely good speaker diaphragm which is
inexpensive, has excellent characteristics, and has a dense surface and a preferable appearance
while avoiding occurrence of undesired deformation. There is. That is, the method of
manufacturing a speaker diaphragm according to the present invention includes transmitting
microwaves to a processing chamber accommodating a base such as metal foil previously formed
into a predetermined diaphragm shape, for example, N2 and N2 or Ar and CN3 are Ar, l! A first
step of applying so-called microwave plasma nitriding or carbonization or hatching treatment
such as sputtering nitrogen or carbon or a purple component into the surface layer of the
substrate by a discharge plasma which makes the mixed gas of BCl3 larger than four; And a
second step of removing the metal substrate after the first step to obtain a diaphragm made of a
nitride layer or a carbon layer only or a boride layer. An embodiment of the present invention
will now be described in detail with reference to the drawings. That is, FIG. 1 shows a schematic
example of a medium to high range dome dous beaker to which the speaker vibration and
vibration diaphragm according to the present invention is applied, and in the figure (in the figure,
the diaphragm has a dome shaped diaphragm, (2) The voice coil, (S) or the suspension, (P) is
edge banking, (F) is a flange, (Y) is a yoke, and [present] is a magnet.
As shown in FIG. 3, after the dome-shaped vibration and motion plate (1) in the above is made
into a predetermined shape as a dome-shaped substrate 17 made of, for example, titanium foil as
shown in FIG. A plurality of quartz plasma display panels are installed on the inner wall of the
quartz cylindrical body 16 in the container 5 which is the processing chamber of the microwave
plasma metallization processing apparatus. That is, in FIG. 3, 1 is a microwave generation source,
from which microwaves having a frequency of, for example, 2450 MHz are generated, and this is
2.1 j wave 2 (JIS power rating between WRJ-2 and 109 X 55. Transmitted by The waveguide 2 is
provided with a matching section or plunger 3 and a sleeper tuner 4 to match the transmission
of the microwaves. 5 is a plasma generation chamber having a linear size larger than that of the
waveguide 2, that is, a stainless steel sealed container (inner diameter 3 Qon, length 50 cl, t),
which is a microwave non-conductive body for preventing microwave leakage. As well as having
good energy injection efficiency, it is possible to prevent external influences such as a change in
external impedance. Further, the storage capacity 2: the crucible 5 may be made of such gold, a
nonmetal coated with a conductive film other than an attribute, or a water reno on the outer wall
(a nonmetal made of L-provided). Here, the sealed container 5 has an exhaust port 6, a gasno,
and a 4-person lower member J, ?, an exhaust Qj port 6 (a pump 9a via a pump 9 and a rotary
bosonico 8b cold trasono 8c company "]": Nobility two eights are in a row and good luck! ???
? For example, through the valve 13 and the flow meter 14, for example, through the valve 13
and the flow meter 14, Hydrogen gas fr: A monthly cylinder 15 is connected. The sealed
container 5 is a direct wave L of 172 or more of microwave wavelength, f ", in which a quartz
cylinder 16 (diameter 25 tv, length 30 tln) is disposed, and a circle [Yl] 16 is on the inner wall By
being an insulator, the above-described j-li in the electrically floating state with respect to the
container 5! 5 и и 1 Dono и like substrate 17 iE <b? ???????????? Further, 18 is an
ionization vacuum gauge for observing the degree of vacuum of the closed vessel 5 at the time of
evacuation, and 19 is a film pressure gauge for giving the pressure in the closed vessel 5 during
processing. A cooling pipe 2? is provided around the closed vessel 5, and cooling water is
allowed to flow therethrough to cool the closed vessel 5 from the outside. 1, the microwave
transmitted through the ?q-wave tube 2 is a part inserted in the waveguide 2 'with the pipe split
antenna 21 (outer diameter 60, internal part 40) taken out, and the valley' It will be introduced
in the 5th.
The antenna 21 is surrounded on the one side by microwaves f'1a'- "" by quartz E (22 in order of
thickness, 2?11 thickness) and is surrounded by the central portion of dense h1 volume To э 5.
The space between the quartz cylinder 22 and the closed vessel 50 is hermetically sealed by an
O-ring 23. In addition, as the cooling gas 24 inside the antenna 21, for example, non-oxidized
EndPage: 2 of inert gas or nitrogen gas 45 'can be added to the cooling gas 24? 1) to cool the
antenna 2 and the cylinder 22 surrounding it. Thus, by exhausting the inside of the closed vessel
5 and introducing W bed gas and hydrogen at an appropriate mixing ratio into this and
introducing the microwave power, the plasma 25 is generated. The surface trialization process is
performed. At this time, a circle 1) provided with the respective substrates 17 has a role to
prevent the diffusion of the plasma 25 to the surface of the closed container 5 easily. The
dimensioned quartz cylinder 22 will prevent the antenna 21 from being exposed to the plasma
25. Next, the plasma nitriding process using this apparatus will be specifically described below
including the order of three j1. The first 1 'base: 17 is prepared, and is stored in the dense oneperson j j device 5 while being held on the wall surface of the quartz split circle 16 as shown.
Then, the diffusion pump 8a employed in the exhaust system 8 evacuates it by pIX10'Torrage I
degree, and then the pulp of the diffusion pump 8a is removed and the valve 10.13 is closed to
form a soot gas. And hydrogen gas was introduced into the "IP '" container 5 at a pressure of 1 +
5 Torr. In this case, the mixing ratio of nitrogen and gas and hydrogen gas varies depending on
the purpose of the nitriding treatment, but in this experiment was 1: 1. This mixed gas is
constantly communicated at the valve 9 so as to be replaced by the liquid nitrogen cooled cold
trap 8C by the rotary pump 8b in the exhaust system 8 at a flow rate of about 20 cc / min. On
the other hand, argon gas was used as a cooling gas flowing to the copper pipe antenna 21. In
such a state, the mixed gas is discharged by microwave power with a frequency of 2450 RII Hz
from the microwave generation source 1 and a power of 850 W to generate plasma 25. The
microwave discharge plasma 25 generates active species such as nitrogen ions, nitrogenhydrogen molecular ions and various radicals, which react with the respective substrates 17 to
nucleate in their surface layers. Become. After waiting for such plasma reaction for a
predetermined time of several tens of minutes to several hours, the discharge is stopped, and
while the nitrogen gas is filled in the closed container 5, each substrate 17 fr: taken out, the
surface of each substrate A very hard nitrided layer is formed over a thickness of about 100 ?m
by about 100 ?m according to a metal image, fl'r '= ? J' ? according to metal appearance. It
turned out that it was.
In the plasma processing 4L and PC of this embodiment, the dense 1t 1 ? ?seven unit 5 and the
waveguide 2 are divided into a wide area 1 (11 plasma generation chamber, so 2j process 1 The
base of dog Ding 4 is processed into the same h,) or the large base is LFI! It is easy to do. Also, at
9 o'clock ? 2, the 1 ?7417 o ? shizuma gas pressure is wide ii? ??????? Even if Q is
divisible, it is possible to maintain :: constant. Therefore, it is also possible to apply to each row
Te lr, '/ +', ', 1' plasma reaction "Jflk to J. Z. In particular, the discharge space is wide, and
furthermore, U is stably released even at a low pressure (10 -2 to 10 -3 Torr in the case of f21)
by a single frequency meter of microwaves. Since the mean free path of such as hime, i / y and
radicals becomes large and uniform plasma spread over a wide area can be generated, uniform
treatment can be carried out easily by 'C'. Wow, microwave *? ???????? 4), it is easy to
get along, and because microwave radiation 4 ?and? metallic antenna ?are used for
microwave transmission, 1.4 иииииииииииииииииииииииииииииииии ?1 Also, it is power efficient, and it should be
processed without giving any deformation to the core at a low temperature. On the other hand,
since a large amount of microwave power can be easily injected into the plasma, the processing
speed can be increased and the ? time processing can be performed. The No. 410 shows the
characteristics for the case of distance use for a dome-shaped speaker with a diameter of 25 mm,
and the curve-like one is a structure of a titanium diaphragm not subjected to a nitride layer 1
with a thickness of 20 ?In). The curve (B) shows the characteristics when the same shaking wind
plate (corresponding to the above-mentioned base) is nitrided to a depth of about 5 ?m from the
surface. That is, as is apparent from this comparison, the speaker diaphragm made by the
nitriding treatment according to the present invention can flatten the wave frequency
characteristics of the wave as compared with the case where it is not subjected to the 4
treatment. <It turns out that L load physical property of the vicinity of Hz can be extended more.
The speaker diaphragm formed by the nitriding treatment according to the present invention is
not limited to the above-described embodiment, and various modifications and applications are
possible within EndPage: 3 range which does not deviate from the scope of the present invention.
There is no need to say anything. For example, the base may be a stainless steel foil other than
titanium, an alloy foil containing aluminum, or an alloy foil containing iron, as long as it is a
metal material that can be nitrided. Then, when stainless steel foil is used as the substrate, for
example, with 30 ?m thickness, complete nitriding within 30 minutes?
4) There is one point that the nitriding process can be removed in a very short time as it is. Also,
the above description is given taking microwave plasma nitriding as an example, and if the mixed
gas of Ar and CH 4 from gas cylinder 12.15 in FIG. Similarly, if a mixed gas of Ar and BCl 3 is
introduced, the same characteristics (all treatment and treatment with il'i treatment, and this
carbonization) will also cause the characteristics of the diaphragm obtained by the ?j treatment
to be nitrided. It is equivalent to the processed diaphragm. By the way, according to the present
invention, after the first step of applying microwave plasma nitriding, carbonization or annealing
treatment to the metal base formed into the above-mentioned predetermined recording dynamic
torsion shape, the metal base portion is The second step of dissolving away by etching or the like
is carried out. That is, the diaphragm of the nitrided layer or the carbonized purple '!, Or only the
hatched layer obtained by carrying out the second step is made lighter and stiffer than when the
metal base portion is present. Because it is rich, it has the advantage that the diaphragm
characteristics can be further improved over the curve (B) in FIG. Therefore, as described in detail
above, according to the present invention, microwave plasma nitriding or carbonization or
brazing can be efficiently processed in a short time at a low temperature, thereby avoiding the
occurrence of undesirable deformation Thus, it is possible to provide a manufacturing method
that can provide a very good loudspeaker diaphragm that is inexpensive and has excellent
characteristics, and that has a dense surface and a preferable appearance.
4. Brief description of the drawings FIG. 1 is a cross-sectional view of a dome-shaped ski force to
which the method for manufacturing a speaker diaphragm according to the present invention is
applied, and FIG. 2 is a front two of the speaker diaphragm used in FIG. FIG. 3 is a schematic view
of an apparatus for applying microwave plasma nitriding or carbonization or hatching treatment
to the base of FIG. 2, and FIG. 4 is an invention of the invention obtained by the apparatus of FIG.
FIG. 8 is a curve diagram showing the characteristics of the speaker diaphragm according to an
embodiment of the present invention during the intermediate process, in comparison with those
before hatching and those before carbonization treatment. ?) ... diaphragm, 17 ... substrate. 1] ?
? 1 Applicant Agent Attorney Takehiko Suzue EndPage: 4 Procedure Amendment (Howa Showa
5542. Agency Office 9th Secretary General Patent Office Island 1) Haruki-den 1, -1i display
Japanese Patent Application No. 54-87221 No. 2, title of the invention 2, title of the invention
method of manufacturing a diaphragm for a speaker 3, correction person / 1F (307) Tokyo
Shibaura Shiki Co., Ltd. 11, Agent 7, Ne Shi Shi no Uchi Todo attached sheet drawing (n's second
hand writing show) ? n the first leaf, drawing Correct the number "Figure 3" as "Figure 4".
EndPage: 6 Warning: Page Discontinuity
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