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TECHNICAL FIELD The present invention relates to a method of manufacturing a diaphragm for
an electroacoustic transducer. 2. Description of the Related Art Generally, in order to obtain a
high-fidelity reproduced sound in a speaker, it is required that the diaphragm does not perform
divided imaging over a wide frequency band as much as possible and sustains piston vibration.
Since the frequency at which this split vibration occurs 1-2 depends on the specific modulus CB
//, which is the ratio of Young's modulus (E) to density (ρ) of the diaphragm material, select a
material with a large specific modulus Is a factor that enhances the playback fidelity of the
speaker. However, the specific elastic modulus is not sufficient with natural fibers or synthetic
resin fibers, synthetic resin films, metal foils and the like that have been conventionally used as
diaphragm materials. Therefore, in recent years, various attempts have been made to increase the
specific elastic modulus by layering a ceramic material layer on a metal foil surface, nitriding and
carbonizing the surface, and layering a high elastic modulus layer on the surface. However, the
surface treatment in this way: The overall specific elastic modulus of the diaphragm is
significantly lower than that of the high elastic layer itself of the surface. てしまう。 In order to
eliminate this defect, a diaphragm made of high rigidity material such as nitride or carbide is
developed as a whole, and it is used for a speaker and contributes to its performance
improvement. Its manufacturing method is gas nitriding method or It was merely an application
of surface treatment techniques such as ion plating. [Problems to be Solved] In the abovementioned conventionally used surface treatment techniques, for example, chemical methods
release toxic substances to cause pollution problems, or vacuum evaporation, which is used as a
means for layering surface layers, In physical vapor deposition methods such as sputtering and
ion plating, and thermal spraying methods, it can not be said that the uniformity of nitride
formation rate, layer thickness, layer quality, etc. is sufficiently solved. [Means for Solving the
Problems] The present invention has titanium nitride alone or titanium nitride and other metal
vacancies having extremely high specific elastic modulus and eliminating the disadvantages of
the above-mentioned prior art moving plate. In order to obtain a diaphragm made of a mixture of
the above, an ion nitriding method by direct current claw discharge in a nitrogen atmosphere is
used 1-7. [Example] Fig. 1 shows a base 1 of an imaging plate in which a titanium standard of 20
μ thick is formed into a dome shape. Hold the holder 2a in the vacuum vessel 2 of the ion
nitriding apparatus (7, evacuate the inside of the vacuum vessel 2 to 10 -3 Torr or more by the
pump 7 and introduce nitrogen gas from the gas vessel 3 and pressure 3 Next, the temperature
of the substrate 1 is maintained at 800 ° C. [7] With the substrate 1 as a negative electrode,
direct current glow discharge is generated and treatment is performed for 1 hour to obtain a
diaphragm made of titanium nitride alone.
4 is a power source, 5 is a control device, and 6 is a quality meter. Under the processing
conditions described above, the substrate height is suitably 700 ° C. or more and 880 ° C. or
less. At 700 ° C. or less, the surface is oxidized by residual oxygen, and it becomes impossible to
nitride or trap. At 880 ° C. or higher, nitriding progresses rapidly, resulting in deformation 1 or
craters. The treatment time required for nitriding is about 2 hours at 700 ° C. and about 10
minutes at 880 ° C. Furthermore, in the case where the substrate 1 is an alloy containing
titanium as a main component, the obtained diaphragm has a composition in which titanium
nitride is used as a main component and nitrides of component metals forming the alloy are
mixed. [Effects] The method for manufacturing a diaphragm for an electroacoustic transducer
according to the present invention has the following features. (1) Unlike salt baths and gas
nitriding methods, since they are not chemical reactions, they do not use toxic chemicals and are
therefore non-polluting. (2) Since the nitrogen potential is high, nitriding progresses in a short
time (about 172 of gas nitriding). (3) There is no thermal deformation since processing at a low
7B below the transformation point (885 ° C. in the case of titanium) is possible. Next, the
physical property values of the diaphragm obtained according to the example of the present
invention are shown in the following table in comparison with the conventional diaphragm. The
specific strength of the diaphragm of the embodiment of the present invention is approximately
twice that of the prior art as shown in the above table, and the defects of the prior art diaphragm
are eliminated. Moreover, the manufacturing method has excellent characteristics which were
not found in the conventional method in terms of non-pollution, shortening of the time required
for manufacturing, and reliability of product quality.
Brief description of the drawings
FIG. 1 is a schematic view of a method of manufacturing a diaphragm according to the present
1 is a base of a diaphragm, 2 is a vacuum vessel.
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