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Terra talent 5 names Teraoka Katsumi C other one person) 3! ?? l Permit applicant! i (+) Ii
Osaka Prefecture Kadoma City Ogata Kadoma Address 100 B; (1975) The '9.30 internal
reference number (4-6'; S ';) is also susceptible to the influence of the disadvantage. Further, the
diaphragm 3 for a metal foil speaker, which is a detailed description of the present invention,
provides a diaphragm for a speaker having a low light intensity, a large specific elastic modulus
and a suitable internal loss. Conventionally, as a diaphragm material for speakers, a paper-made
molded product of fiber material such as pulp, a polymer foam, a polymer film, a metal foil, etc.
are used, but each has merits and demerits and is sufficiently satisfactory as a diaphragm
material. It can not be done. That is, although the fiber diaphragm has mechanical internal loss
due to friction between fibers, 2 sharp resonance does not occur, but since the specific elastic
modulus is small and humidity is small, sharp resonance appears and the nonlinearity at the time
of large amplitude There is a drawback such as the generation of distortion from motion f.
Generally, as the diaphragm material, it is preferable to have high rigidity, high elasticity, light
weight, and appropriate loss and damping rate, but these characteristics have mutually
contradictory elements, so existing Satisfying everything with materials is almost impossible. In
addition, titanium, aluminum, etc., which are usually used as metal diaphragm materials, are
mechanically strong and have a relatively high elastic modulus of 'ft, but when viewed as a
speaker diaphragm It is not sufficient, and still higher specific modulus and internal loss are
required. The present invention eliminates the above-mentioned conventional drawbacks. In
general, boron is very light and obtained with other materials. Although it has an extremely high
elastic modulus, it is impossible to use it mechanically (? weakly as a single 11 diaphragm. On
the other hand, tungsten, which has been used as an ultra-high alloy material and EndPage: 1
conventionally, has high tensile strength and elastic modulus and very high mechanical
sensitivity, but it has a sufficient elastic modulus as a speaker diaphragm. is not. The diaphragm
for a speaker according to the present invention is formed by forming a boron layer on one side
or both sides of a tungsten thin film using physical vapor deposition or chemical vapor
deposition, and then performing interdiffusion by heat treatment to form an intermetallic
compound. According to the present invention, it is possible to obtain a high performance
diaphragm material having a combination of high specific modulus of boron and mechanical
strength of tungsten.
That is, it is necessary to obtain specific modulus and mechanical strength far beyond
conventional materials and to obtain large internal loss and damping factor. An embodiment of
the present invention will be described below with reference to the attached drawings. 1 and 2
show cross-sectional views of an embodiment of a diaphragm material according to the present
invention. In this diaphragm, a boron layer 2 with a thickness of 26 to 30 ? is formed on one
side and both sides of a tungsten thin film 10 with a thickness of 6 to 10 ? using chemical vapor
deposition. It is formed, it is t. lJ3 @ is a tungsten thin film 1 processed into a dome shape, and
then a boron layer 2 is formed on only one side (surface) K and heat treatment is performed to
form a tungsten bovid layer 3 (f, V). In these cases, the thickness of the tungsten thin film 1 and
the boron layer 2, the heat treatment temperature, etc. depend on the difference. It is needless to
say that diaphragms having different characteristics are obtained first. Example 1 A surface of a
tungsten thin film 1 having a thickness of 6 ? held for about 1300 'CK by electric heating
method is treated with water and hydrogen for 30 minutes, and then hydrogen gas and carrier
12 are used. BCn 3 vaporized at 30 ░ C. is flowed for 30 seconds to form a 30 ?m thick, 2 ? ft
thick layer on one surface of tungsten # pattern 1. Furthermore IK, 1. 'The heat treatment is
performed for 10 minutes at 900 "GK, and the tungsten-boron interdiffusion is performed to
form the tangestin polide layer 3 which is an intermetallic compound. Example 2 Example 311
and IWl-like (/ + setting method 6 ?q) tungste 6 ba. A heat treatment is carried out by forming
boron 1-2 on the both sides of the thin film 1 (C: thickness 26 ?m each). A 30 ?m thick yf an
layer 2 is formed on one side of a 10 ?m thick tongue plate 6 base 1 by the method of Example
3 and Example 1 and the like, and a heat treatment is applied. EXAMPLE 4 The same method as
in Example 1 is carried out using the same method as in Example 1 to form boron iiQ having a
thickness of 26 .mu.m on both sides of a tungsten thin film 1 having a thickness of 10 .mu.m and
subject it to heat treatment. Upside-up embodiment ?) Each characteristic is below! Show IK. As
described above, after forming a boron layer on one side or both sides of a thin tungsten film,
heat treatment is performed, and the specific modulus and internal loss are much higher than
those of conventional materials. It is possible to obtain a high-performance shooting board that
4. Brief description of the drawings. FIG. 1, FIG. 2 and FIG. 3 are respectively a broken lii view of
the speaker diaphragm according to the present invention. ??? ? ? ? ? ? ? ? thin film, 2
fist * e @ ? boron layer. 3 иииииииииииииииииии Name of agent Attorney Nakao et al. 1 person EndPage: 2
2nd ? 12 / 2nd mouth 3 Fig. 6 Inventors and agents other than the above (1) inventor (2) agent
109EndPage: ?
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