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JPS55157223

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DESCRIPTION JPS55157223
Specification 1, Title of the Invention Method of manufacturing electret
2, the scope of claims
3. Detailed Description of the Invention The present invention relates to a method of
manufacturing an electret. Electret is defined as a substance characterized by having a
spontaneous polarization and an electric polarization permanently connected to a dielectric
substance. As well known, electrets include an electret that can use piezoelectricity or
pyroelectricity, and an electret that can use an electrostatic field, and in particular, an electret
that can use an electrostatic field includes electrostatic microphones and electrostatic
headphones. Besides being used as a polarization voltage source, electrostatic electro-mechanical
conversion. It can be used for most devices that require mechanical-electrical conversion
operation, and can be of high value. The conversion efficiency of the electrostatic type electromechanical converter and the electrostatic type mechanical-electrical converter can be obtained
as the polarization voltage is higher, and the electret of the electret used for these devices Higher
voltages and equal voltage values for each electret were required to improve the performance
and quality uniformity of the equipment. Furthermore, since the life of the electret voltage
directly determines the service life of the device using the electret, it is also an important
requirement to have a uniform long life. Conventionally, (1) heat electretization method, (2)
electro electretization method, (3) mechano electretization method, (4) photo electretization
method, 5) Radio electretization methods, (6) Magnetoton EndPage: 1 Electretization methods
such as basic electretization methods, and many electretization methods combining these
methods have been attempted. For example, the thermal electretization method and the electroelectretization method are industrially used because it is easy to control the degree of
polarization or the amount of charge, and hence to control the electret voltage value, but they are
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practically used in terms of stability, life, etc. JP-B-51-15599, etc. have attempted to electretize
the dielectric surface having an uneven surface to improve stability, life, etc. even if it is not
sufficient. Performance was not obtained. Furthermore, in these electretization methods, since
the electret surface includes an unstable charged component on the surface of the electret, a
process in which a stabilization treatment is indispensable as disclosed in, for example, JP-A-4743999 and JP-B-50-19360 It had become.
An object of the present invention is to provide a manufacturing method capable of easily
obtaining an electret having uniform electret voltage value and electret voltage life without
performing a stabilization treatment process. The method according to the present invention is a
method of producing an electret in which plastic deformation is applied to the surface of the
dielectric material for electret formation to form a stretched region and a compressed region, and
as a step of forming the stretched region and the compressed region, This is a method of
manufacturing an electret in which a pressure deformation jig is brought into pressure contact
with and peeled off from the surface of the dielectric material for electretization. In the method of
the present invention, as shown in cross section in FIG. 1 (a) and (b), for example, a pressure
having a large number of irregularities as shown in (2) on the surface of the dielectric material
for electretization (1). The deformation jig is pressed and peeled to form a stretched area (A) and
a compressed area (B) in a dispersed manner. At this time, it has been found that stable electric
charges are held in the stretching area (A) and the compression area (B) at the very best. Note
that the charging mechanism that generates this stable charge is the friction between the electret
dielectric material (1) and the pressure deformation jig (2) when forming the extension area (A)
and the compression area (B). It is considered that the alignment state of the molecular structure
of the peeling and electretizing dielectric substance is locally changed. Examples of the dielectric
material for electretization used in the method of the present invention include
tetrafluoroethylene-hexafluoropropylene copolymer (hereinafter referred to as FEP Teflon),
polytetrafluoroethylene, polyper 70 roalkoxy and the like, and It is also possible to use a laminate
in which the surface of polyethylene terephthalate, polyimide, polyvinyl chloride, polyvinylidene
fluoride or the like is coated with FEP Teflon, polytetrafluoroethylene or the like. Further, the
pressure deformation jig may be made of a material different from the dielectric material for
electretization and the charge sequence, and in practical use, it is preferable to use a mold whose
surface is covered with plating or the like. The electret voltage can be easily controlled by
appropriately selecting the forming material of the surface of the pressure deformation jig.
Furthermore, as the large number of irregularities provided on the surface of the pressure
forming jig, for example, trapezoidal projections (3) as shown in the bottom view and side view in
FIG. 2 or conical projections as shown in FIG. 3 (a) (3 ') etc. can be mentioned, and plastic
deformation having a stretched region and a compressed region by pressure contact can be
suitably selected (Fig. 3 (e)), concentric circle (Fig. 3 (f)), etc. Next, the influence of the dispersion
density of asperities, the pressure applied to pressure contact, and the change in thickness of the
dielectric material for electretization on the electret surface potential in the method of the
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present invention is examined.
First, as shown in FIG. 4 (a), an electret forming material (1) made of FEP Teflon is provided on
the surface of an aluminum substrate (4), and then as shown in FIG. 4 (L,) The pressure
deformation jig (2) of the shape as shown in the figure is pressed against and peeled off from the
surface of the electretizing antistatic material (1) to produce an electret having a stretched area
and a compressed area as shown in FIG. 4 (c). Do. Then, when the electret surface recumbence
position with respect to the change of the dispersion density of the projections provided on the
surface of the pressure deformation jig (2) was examined, the results as shown in FIG. 5 were
obtained. Pressure and deformation jig pressure EndPage: The relationship between the applied
pressure at the 2-contact and the change in the thickness of the electret forming dielectric
material is shown in FIGS. 6 and 7. In the measurement of FIG. 5, the conditions other than the
dispersion density of the irregularities are the same, in the measurement of FIG. 6, the conditions
other than the applied pressure are the same, and in the measurement of FIG. 7, the thickness of
the electret dielectric material The other conditions were the same. As a result, as long as the
dispersion density of the asperities is higher (the stretching area and the compression area
increase, t0 application increases as the dispersion density of the concavo-convex increases, in a
range where the plastic deformation having the stretching area and the compression area can be
formed on the surface It is clear that the surface potential of the electret is improved as the
pressure is higher and the thickness of the electretized layer d is larger. The dispersion density of
the irregularities, the applied pressure, and the thickness of the dielectric material for
electretization are appropriately selected depending on the required electret surface potential,
the type of dielectric material for electretification, etc. When manufacturing the elm (7) cretette
(for electret surface potential 12001 to 115001 V) for electro-acoustic transducer using EP
Teflon, the dispersion density of unevenness is 2000 to 7500 pcs / crIt practically, the applied
pressure is 10 to 75 kg / d It is preferable that the thickness of the electricity-useable substance
for electretization be in the range of μm to 150 μm, and the above conditions be appropriately
combined and selected as needed. For example, in the case of a headphone electret with a surface
potential of 500 to 1000 V, using a pressure deformation jig as shown in FIG. 2, the dispersion
density of the unevenness is 5500 to 6000 pieces / crl and the applied pressure is 30 to 60 9 /
crIt, electretized For a microphone electret with a surface potential of 200 to 600 V and a
thickness of 50 to 100 μm for a dielectric material (FEP Teflon), the dispersion density 5500 to
6000 / m, the applied pressure 10 to 30 / cIft, the dielectric for electretization The material (FEP
Teflon) has a thickness of 50 to 100 μm, and in the case of a cartridge electret having a surface
potential of 300 to soov, a dispersion density of 2000 to 3000 pieces / d, an applied pressure of
20 to 60 # I / cdt, a dielectric material for electretization (PEP Teflon) thickness should be 100 to
150μ door Masui.
(8)。 In practice, the pressure contact speed at the time of pressure contact p1, the heating
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conditions of the dielectric material for electretization, and the like can be appropriately selected
without departing from the scope of the present invention, depending on the type of dielectric
material for electretization. Next, the stability (lifetime) of the electret obtained by the method of
the present invention is examined. Electrets (Examples) made of FEP Teflon obtained by the
manufacturing method as described above, and irregularities formed on the surface without
forming a stretching region and a pressing region in advance by a method such as partial melting
removal or cutting removal A comparison of the lifetimes of the conventional thermal conductive
material (comparative example) with that of the dielectric material for electretization is shown in
FIG. As an example, a pressure deformation jig as shown in FIG. 2 (concave dispersion density
7000 pieces Zcr at 40 kg / cd was pressed and peeled off to a 75 μm thick electret dielectric
material made of FEP Teflon As a comparative example, FDP Teflon was melted to prepare an
electret having the same shape as the electret obtained in the above example, and an electret
having the same surface potential by corona discharge was used as a comparative example. The
lifetime is indicated by the time (year) until the initial potential attenuates by 3 dB. The curve a in
FIG. 8 represents an example, and the curve a represents a comparative example. As a result, it
was confirmed that the life of the electret obtained by the method of the present invention is
greatly improved and the stability is excellent. Curve C in FIG. 8 indicates the life when the same
surface potential as that of the above embodiment is obtained using FIG. 3 (b) or (c) as the
pressing deformation jig. Since the method of the present invention improves plasticity of the
electret by applying plastic deformation to form n stretching regions and compression regions on
the surface of the dielectric material for electretization as described above, the charges generated
by pressure contact and peeling Besides, it is effective to apply new charge by using other means,
and it is effective to apply new charge by means after the removal of the charge generated by
pressure contact and peeling. The effect of the present invention can be obtained even if a
voltage is applied to the EndPage: 3 metal pressure deformation jig having the above-described
large number of irregularities during the pressure contact peeling process and the electret
conductive substrate. For example, as shown in FIG. 9, after electretizing FEP teflon film <1.0) not
provided with unevenness, a Kapton film (1) upont company (trade name of a polyimide film)
αυ is placed, and an electrode α and an electrode (L The pupils are electrically connected, and
the current flowing through the short circuit is measured while raising the temperature at a
constant speed. A thermally stimulated current spectrum of curve -a shown in Fig. 9 can be
obtained. The heat stimulation current spectrum of the electret according to the method of the
present invention provided with a large number of asperities is a curve-h (5JIh knee, (A, T).
A curve -C can be obtained by measuring 11 intense current spectra on the 1TT γ page as in b.
That is, FIG. 10 shows that the stability of the charge contained is different even in the electret
having the same surface potential. 0 As another important practical effect of the present
invention, it is also possible to improve the flatness of the electret It is to contribute effectively.
At present, electrostatic microphones and electrostatic headphones are mentioned as main
applications of electrets. For example, when used in electrostatic headphones, as shown in FIG.
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11, from the surface of electret 10 to vibrating electrode 14 Although it is possible to reduce the
distance as much as possible in order to enhance the electro-acoustic conversion efficiency, when
the electret 10 and the vibrating electrode 14 come into contact in the use state of the
headphones, the characteristics of the headphones deteriorate significantly and the headphones
Since there is a risk of damage, electrets with uniform flatness are used. In the method of the
present invention, if the flatness of the pressure deformation jig is a pit, it has the same effect as
embossing when pressed at high pressure, and an electret having a high degree of flatness is
obtained, as shown in FIG. A stable electrostatic electro-acoustic transducer can be obtained by
using the method shown in FIG. In the figure, (to) indicates a spacer, αQ indicates a fixed
electrode (conductive substrate), αη indicates a transformer, and α indicates a signal source.
As described above, by using the method of the present invention, it is possible to obtain an
electret having an extremely stable charge without applying the stabilization process which has
conventionally been essential, and it is possible to significantly extend the electret life. In
addition, since the electret requiring Wr can be obtained only by pressing and peeling the
dielectric material for electretization with a pressure deformation jig also in the manufacturing
process, the mass productivity can be improved by simplifying the process. Further, the charge
distribution on the electret surface can also be easily controlled by the dispersion density of the
irregularities on the surface of the pressure deformation jig, and an electret having a uniform
surface potential can be easily obtained. Furthermore, the surface potential itself of the electret
can be easily controlled by the dielectric material for electretization, a pressure deformation jig, a
mark, a pressure, and the like.
4. Brief description of the drawings Fig. 1 is a cross-sectional view showing the method of the
present invention. 3 and 4 are bottom and side views showing a structural example of a pressure
deformation jig used in the method of the present invention, FIG. 4 is a process diagram for
explaining the method of the present invention, and FIGS. 5 to 8 are the present invention. Fig. 9
is a schematic view of the configuration of a thermal stimulation current measuring device of
electret, Fig. 10 is a curve showing a thermal stimulation current spectrum of electret, Fig. 11 a
curve showing a characteristic example of an electret obtained by the method. Fig. 6 is a
schematic diagram of the configuration of a radon on static JLM Ji using an electret. Attorney
Attorney General Attorney Ken Ken (1 person) EndPage: 4 LJ 心 \ ゝ-@!侶 枦 皐 皐 \ X \-− \ @ *
OQ-EndPage: 6 Warning: Page Discontinuity
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