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JPS56169123

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DESCRIPTION JPS56169123
Description 1, title of the invention
Method of manufacturing boron structural material
3. Detailed Description of the Invention The present invention relates to a method for producing
a boron structural material, which is intended to improve the film quality and mechanical
properties of the boron constituting the boron structural material and the yield in manufacturing,
and for acoustic materials, particularly for cartridges. A boron structure material is suitably
provided as a cantilever. Boron has a hardness next to diamond and is very thick in wear
resistance, so it is a useful material for cutting tools, sliding machine parts, bearings, etc. Elastic
modulus / density) has the outstanding feature of being the largest among the presently known
materials. This property means that the propagation velocity of the sound wave is the largest in
the existing materials, and is useful as an acoustic material, particularly as a cantilever for a
cartridge. Conventionally, as the cantilever for a cartridge, EndPage: 13 иии if a metal such as an
aluminum alloy or a titanium alloy is used, but the specific elastic modulus is smaller than that of
boron in any case, and its high frequency resonance In the 2 kHz и 10 kHz (7) range below the
frequency fo (usually 10 kH2 to 40 kH2), a drop in response, so-called sag phenomenon tends to
occur, and it has been difficult to obtain flat frequency characteristics. Furthermore, there is a
disadvantage that transient characteristics that affect the followability of the pickup cartridge can
not be obtained. The appearance of cantilevers (-for cartridges using boron as a solution to all the
drawbacks in these known materials) has been awaited. Above all, the contribution to the
flattening of the frequency characteristic in the high region of 40 kHz or more is considered to
be thicker, and the appearance is longed for, as compared to the cartridge for the flat boron pipe
cartridge- However, it is not easy to obtain boron applied products in a compact structure state
by methods such as casting and rolling, and for this reason, to produce products for various
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boron applied products 56-i69123 (2) In most cases, it is used as a composite in which a boron
coating is formed on a substrate made of a material other than boron by vapor deposition,
sputtering or chemical vapor deposition (cvn). Among the above-mentioned conventional boron
film forming methods, it is considered that the CVD method can obtain the best film. In the CVD
method, crystalline (?-rhombedral, ?-rhombedral, tetragonal) boron or amorphous (amorphous)
boron or a mixture of these can be obtained by changing the forming conditions, but in general It
is evaluated that boron, which is mainly composed of amorphous, is excellent in terms of
mechanical properties such as tensile strength.
However, in general, the cvn method for producing boron uses a thermal decomposition reaction
to provide pyramidal and conical tapers on a substrate, and when heating is performed by
energization, the heat generation of the substrate becomes uneven, and precipitation occurs on
the substrate. In the formed film, films having different properties are deposited in proportion or
in inverse proportion to the heat generation unevenness, and the appearance and mechanical
strength are significantly impaired. Also, boron generally deposited on a substrate in a
conventional manner generally causes internal strain, microcracks, etc .: the mechanical
properties are often inferior. However, when the inventors removed the substrate in an
appropriate manner, these conventional borons were exceptionally destroyed in the process of
removing the substrate. This tells the magnitude of the inherent distortion. The inventors apply
the appropriate processing to the substrate and mold them into two pyramids or cones facing
each other and sharing the apex, and providing a heat sink near the apex, and the problems of
these conventional examples Solution. According to the method of the present invention, there is
provided a tapered pipe structure made of boron alone, which exhibits excellent mechanical
properties without breakage of the boron structure as in the prior art and has a good
appearance. Further, the tapered pipe structure material made of boron QL alone was excellent
as a cantilever for a cartridge. The method of the present invention is specifically described
below. First of all, two pyramids or cones 6, 6 with knees, -S- which are formed into a conical
shape, facing each other and sharing a vertex with a substrate made of an alloy of tantalum,
niobium, titanium, tungsten, molybdenum and nickel. As a method, for example, a strong acid or
the like may be used to form a chew by chemical etching, or alternatively, a mold having a
desired shape may be formed, and may be formed by weight or punching, or by grinding. There
are various ways of forming the desired shape. Next, the base obtained by the above method is
coated with chromium, a boride of chromium, an alloy of chromium and iron, or a boride of this
alloy. The thickness of the boride film is preferably 0.2 to 10 ?m. The coating method may be
various methods such as plating, dipping, sputtering, vapor deposition, and CVD, but sputtering is
the best in terms of controllability. Next, as shown in FIG. 1, a heat sink Bf made of a metal
having a melting point of at least 650'G is installed near the apex of the tapered substrate A
coated, and this is used as a support substrate and no cvn. .
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In the table, the choice of the material of the heat sink is determined from the fact that CVD is
performed at 800 ░ C to EndPage: 272, -7 и 1250 ? ? C, but the shape or size of the heat sink
Because the heat release rate differs depending on the temperature, it is actually measured more
than the standard one, and it can not be concluded that metals below this melting point are also
impossible. Boron-f, a method of forming on a substrate by IGVD method, is heating by a method
of electric heat conduction, and as shown in the following formula, boron is deposited by regiofractionation reaction cell. 28X3 (+) 3H2-2B (+) eHX (Tata L, X is Op, и и и Rogen elements such as
Br, I etc.), and as source gases used for the cvp method, hydrides etc. in addition to BX3 is there.
Next, as described above, the sample having the tapered boron film deposited on the surface of
the supporting substrate in the reaction vessel by the cvn method is taken out from the reaction
vessel, the heat sink is removed, and the substrate is cut to a desired length. It is removed to
produce a tapered pipe structure 4 series consisting of boron alone. The object of the present
invention is to obtain a tapered pipe structure made of boron t) having excellent appearance and
mechanical properties, and the reason for limitation to the CVD method as a method of
precipitating boron in the present invention. In the vacuum JP-A 56-16 ') 123 (3) deposition
method, the deposition rate is slow and there is a problem in cost, and the size is small, even if
the above manufacturing method is CVD under reduced pressure or Even CVD under pressure is
effective. In order to evaluate the mechanical properties of the manufactured tapered pipe
structure itself consisting of boron alone and to evaluate the acoustic properties, the substrate
was often removed, mainly by chemical methods. The Hereinafter, the embodiment of the present
invention will be compared with the conventional method. Maximum diameter 250 ?m,
minimum diameter 150 ?m. Create a tantalum and tungsten substrate that has a tapered shape
that shares the apex as described above, removing the conical shape with a length of 5 battles,
and vertically 3 times. A heat sink of tantalum or aluminum having a thickness of 1 mm and a
thickness of os mm was installed near the apex. The substrate thus produced is as follows: 1
tantalum, 2 tungsten, 3 chromium coated tantalum, 4 chromium coated tungsten 15 iron-1 'rom
alloy coated tantalum, 6 tantalum heat dissipation 9, the board ((. Tantalum installed, Tankul
provided with complete aluminum heat sink, Tantalum coated with chromium, 8 Cuntal Heat
spreader, Chromium coated tandle with 9 aluminum heat spreader, Iron-chromium alloy fitted
with 11 tantalum heat sink A wire made of 11 kinds of chromium-coated tungsten provided with
a coated tantalum and 10 tantalum heat sinks was used.
These are respectively installed in the reaction tank, and a mixed gas of boron chloride (BC, 3)
and hydrogen (H 2) is supplied at a rate of 250 mt'7% for the former and at a rate of 1 ? / min
for the latter. did. Then, the support base is energized and heated to 1150 ░ C. for one heat
generation and held for 60 seconds to deposit boron 20 ?m thick on the surface of the support
base, then this is taken out from the reaction tank and the heat sink is cut and removed. After
cutting to a length of 5711 m, the substrate was removed. "2nd note": With respect to the sample
obtained by making the sample into 4 mm span at both ends supported state, the single point
concentrated load was applied to the center, and the mechanical strength was evaluated by the
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load when the crack was generated. The number of samples is 20 each, and the following table
shows the average value. The following table also shows the yield when removing the substrate
10,..., And the boron tapered pipe structure material. EndPage: 311,-О 1) Trial FIN [The circle
marked in L is according to the present invention, and the other is conventional. As apparent
from the results in the above table, according to the method of the present invention, it is
understood that the mechanical strength, the yield of the boron tapered pipe structure material
and the appearance state are significantly superior to those of the conventional method. . The
material 1 of the boron taper pipe structure obtained to evaluate the acoustic properties of the
boron taper pipe structural material according to the present invention, so-called mid-slack
phenomenon in the frequency characteristics which has been considered as a defect in aluminum
alloy or titanium alloy, etc. The transient characteristics and the like that determine the
followability were also improved with several steps. Also, a high modulus boron coating free of
strain and micro cracks is widely used as a mechanical member.
4. Brief description of the drawings FIG. 1 is a side view showing one step of the manufacturing
method of the present invention, and FIG. 2 is a graph showing frequency characteristics when
the boron tapered pipe structural material according to the present invention is used as a
cartridge cantilever. It is a figure explaining in comparison with the material of. 13,-A, A: Base, B:
Heat sink. Name of agent Attorney Nakao et al. 1 person Figure 1 Figure 2 solution @ (Ih)
EndPage: ?
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