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The present invention relates to a method of manufacturing a concave transducer used to focus
ultrasound. Conventionally, as a method of manufacturing a seed concave transducer of the
present invention, for example, as shown in FIG. 1A, a gold plate 2 having stretchability is
mounted on a mold base IF having a concave portion 1a having an I convex shape. In step 3, the
surface of the gold plate 2 is pushed into the recess 1a to obtain the concave substrate 4 shown
in FIG. 2. Thereafter, a piezoelectric film of ZnO or the like is deposited on the convex portion of
the substrate 4 by sputtering. ! A method of forming a concave transducer by depositing gold or
aluminum as the upper surface l electrode is proposed. That is, in such a method, the most
important concave substrate 4 in the transducer is obtained by using a new open press process
in which the metal plate 2 is pressed into the wedge-shaped concave portion 1a by the spherical
pressure JL3. It is difficult to obtain a concave substrate 4 of uniform thickness by the above
method, and therefore, it is not possible to make a concave surface of 46 degrees with good
repeatability-and there is a defect that the characteristic as a concave transducer is dispersed.
The present invention has been made to eliminate the above-mentioned drawbacks, and a
concave surface with high accuracy can be obtained with high reproducibility by using an acidsoluble glass optically polished in a convex shape as a substrate, and a concave surface where
stable characteristics can be expected as a transducer. The purpose is to provide a method of
manufacturing a transducer. An embodiment of the present invention will be described below
with reference to the drawings. First, as shown in FIG. 3A, an acid-ablative glass (acid-soluble
glass) optically polished to a convex shape is prepared as a casing 11. In this case, as acid-soluble
glass, for example, B, 0.45 wt%, Ba045 It 6%, La, 0.8 to 10 tt attack, which is often used for
making of optical fiber, dragon, etc., is used. Next, a lower mold 1112 is formed on the convex
portion of such a base 11 by, for example, attaching four gold layers with a uniform thickness as
shown in FIG. 3 (bl). For example, Z'nO is deposited by sputtering on the pole 12 to form a
piezoelectric film 13, and then, for example, gold is again deposited thereon to form an E portion
electrode 14 with a shape + tl. Thereafter, the acid-soluble glass of the curtain 11 is dissolved
with hydrochloric acid or the like and neutralized with NaOH and then washed with water to
complete the concave transducer shown in FIG. Therefore, in this case, a convex acid-polished
acid-soluble glass is used as a substrate, and a concave transducer is obtained by using the
convex portion of the glass, so that a concave substrate obtained by the conventional press plate
is used. The concave surface with high accuracy can be obtained with high reproducibility as
compared with the above, so that stable characteristics as a transducer can be expected.
The present invention is not limited to the above-described embodiment, and various
modifications can be made without departing from the scope of the present invention. For
example, in the above description, the concave transducer is formed on the base 11) made of
convex acid-soluble glass and then the base 11 is dissolved. However, in order to protect the
piezoelectric film 13 from acid, the convex portion of the base of acid-soluble glass is used. After
the lower 11C pole is formed, the substrate is dissolved, and the remaining concave C electrode
lower electrode is held by a treatment having a sphere FM of the same curvature, and then the
pressure -μ, F portion electrode electrode formation Alternatively, a concave transducer may be
obtained. As described above, according to the present invention, the convex surface is optically
sharpened and t = acid dissolution-raw is used as a substrate of the lath to obtain the concave
face of the high ridge 11 reproducibly with good reproducibility, as a transformer, If stable
characteristics can be expected, a method of manufacturing a concave transducer can be
Brief description of the drawings
Fig. LlAg and @ 2 are explanatory views showing a process of producing a concave substrate
used in a conventional method of manufacturing a concave transducer, and "43 Fig. 1 al (bl tel is
an explanatory view for explaining one embodiment of the present invention)" It is.
1: Mold stand 1a: Four parts 2: Gold plate 3: Pressure pile 4: Recessed substrate 11: Base 12:
lower 1 pole 13: pressure d1′4 # ! . 14 ・ ・ ・ Lower part (愼
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