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TECHNICAL FIELD OF THE INVENTION The present invention relates to a speaker diaphragm
and a method of manufacturing the same. [Technical background of the invention and its
problems] In the speaker unit, it is common to use a metal diaphragm for the mid-range, highrange, stalkers and tweeters. In this case, the Young's modulus is large and the density A material
having a small)), ie, a material having a high sound velocity (hole 1) is ideal. However, aluminum
(AJJ and other processable single-piece metals do not have such a high sound velocity, and in
order to improve this, conventionally, various coatings are applied to the substrate to form a
multilayer structure, It has been practiced to improve these physical properties. In the case of
improving the physical properties of AA or A1 alloy and using it as a diaphragm as an example, it
is generally a method of forming a skin layer of muon J20s on the surface of a substrate such as
AJ by thermal spraying by high temperature plasma. It is taken. AJ 20! When it is formed on the
substrate of the skin layer of l, although the improvement of the physical property value is
theoretically performed, it is difficult to control the film thickness of the skin layer, and it adheres
unevenly and thickly. There is a drawback that the efficiency (output sound pressure) of the
speaker unit decreases due to the increase. In addition, the sprayed thermal skin layer generally
has pores of several tens of percent, and its Young's modulus decreases in proportion to the
fourth power of the porosity. For this reason, in the case of high-temperature plasma spraying,
the improvement of the physical properties is hardly achieved when the high temperature
plasma spraying is performed. In addition, as another example, CVD (chemical vapor deposition),
PVD (physical vapor deposition, sputtering, etc.) or diffusion permeation on both sides of a
substrate of titanium (TL), for example, boron (B) Generally, a method of forming a skin layer
having a high Young's modulus and forming a sand-inch structure to improve the physical
properties of titanium is generally employed. However, the Young's modulus (T) of TL itself is 1.1
x 10 dyne / cm 2, despite the relatively large K, but the density (I 4 is as high as 4.541 ′ ′), so
Even if a skin layer of high Young's modulus such as T, B, etc. is formed on T = substrate, the
improvement in the speed of sound (E / ρ) is only slight. Although the speed of sound is
comparable to or lower than that of AJ, the reason why TL is used for the substrate is simply that
TL can withstand considerably severe processing conditions in terms of physical and chemical
terms. It is not. And as a material of the substrate of the diaphragm of such a structure, it is
necessary that the density be smaller than the large Young's modulus, and in this respect,
magnesium (M), aluminum (AJ), etc. are titanium. Compared with (TA), the speed of sound is
comparable, the density is much smaller, and it is suitable as the material of the substrate, and
the material of the skin layer is larger in Young's modulus than the small density. is important.
Among the materials currently available, one of the largest Young's modulus materials is titanium
carbide (titanium carbide, TLC). The Young's modulus of this TAC is 4, 96 × 10 6 dyne / cIIL,
which is about 7.7 times as large as Aj. However, since M and Aj have lower heat resistance than
TA, when forming a surface layer of TAC on a substrate of M and AJ, the substrate temperature
rises in the usual PVD method (sputtering etc.) There is a problem that melting and deformation
occur, and since the skin layer of TLC is not compatible except when the substrate is TL, even if
the skin layer of TLC is formed on the substrate of AJ or Mt, both are strong. There is a problem
that the physical property values can not be improved slightly. [Object of the Invention] The
present invention is regarded as the point Km as described above, for example, a high density
substrate utilizing a property of titanium carbide (TAC) for a low density substrate such as
aluminum (AA) or magnesium (M). An object of the present invention is to provide a speaker
diaphragm in which a skin layer of Young's modulus is firmly formed. [Summary of the
Invention] The speaker diaphragm according to the present invention comprises at least one of a
substrate formed of a surface layer of a carbide, a nitride and a carbonitride of titanium formed
on at least one surface of a substrate made of a light metal. The surface of the substrate is
subjected to ion plating of titanium in an atmosphere containing carbon and nitrogen to form a
skin layer of carbide, nitride and carbonitride of titanium on the substrate. . DETAILED
DESCRIPTION OF THE PREFERRED EMBODIMENTS The speaker diaphragm of the present
invention and the method of manufacturing the same will be described in detail based on the
embodiments shown in the drawings. Fig. 1 shows a high frequency ion plating apparatus for
manufacturing a speaker diaphragm, 11) is a bell jar, and the bell jar (1) has an exhaust pipe (2),
a pair of gas supply valves (31 (4 ), A vacuum gauge (5), and a substrate support (9) provided
with a crucible (6), a high frequency coil (7), a heater (not shown) and a temperature detector (8)
inside the bell jar (11) Is installed in the crucible (6), the high frequency power supply 1B is in
the high frequency coil (7), and the acceleration DC power supply Q2 is in the crucible (6) and
the substrate support (9). Are connected respectively. In addition, + t3 (141 (151 is a cylindrical
shielding plate, respectively). Then, while the titanium (TA) fk is put into (6), the abovementioned rubber is made of aluminum CA1.
Support the inclined substrate, and exhaust the inside of the bell jar (11) through the exhaust
pipe (2) to make the inside of the bell jar (1) 1 × 10 torr or less. Next, the substrate crucible is
heated to 500 C by a heater (not shown), and in this state, the crucible (6) is heated by the
evaporation power supply unit to evaporate TA and the high frequency coil (7) is energized by
the high frequency power supply a. It ionizes with the vapor high frequency (15, 56 MHz) of Tj /,
and acetylene (C, H,) gas from one gas supply valve (3), nitrogen (N2) gas from the other gas
supply valve (4) or Ammonia (NH,) gas is simultaneously supplied into the bell jar (1) to be
reacted with the TL, and further, by means of an accelerating DC power supply a rasp (6) and the
substrate support (9), ie, the substrate aQ A DC power supply is applied between them to
accelerate and deposit on the surface of the substrate ae. The deposit obtained by reactive ion
plating is a mixture of titanium carbide (TAC), titanium nitride (TAN) and titanium carbonitride
(TL, C, Nj) to form a skin layer. . And in this case, since the skin layer can be deposited by
maintaining the temperature of the substrate at a relatively low temperature of about 200 to 600
C, the substrate made of Aj (161 does not melt or deform, and has a predetermined shape It is
possible to form a skin layer composed of carbides, borides and carbonitrides of titanium (TL) on
the surface of the substrate abl. (The same applies to the case where the substrate is M. Fig. 2
shows a dome-shaped loudspeaker diaphragm 4 in which a skin layer αunv formed by mixing
carbide, nitride and carbide of TL is formed on both sides of a substrate α-port made of AJ. In
the implementation, the substrate Qe may be M, and the shape may also be a shape other than
the dome shape. Next, physical properties of the speaker diaphragm of the present invention will
be described. Fig. 3 shows test pieces for measuring physical properties and adding theoretical
considerations, (21) is an AJ substrate with a thickness of 80 P, and (2) is a thickness of 2 P In
the case of TbC, the case of TAN, the case of the present invention, that is, the case where the
carbide, nitride and carbonitride of T 炭化 物 are mixed, let us consider three K. The rigidity of
such a test piece can be calculated by the following equation clυ. ----------------------------------------------------------------------------------------------------------------- / C + a) tA; thickness of substrate QυcIL) t; total
thickness of test piece cILL) ν.
Surface layer; Poisson's ratio bb of the material; substrate (Boann's ratio of 2D material: The
above formula Gυ is a plate, and when it is regarded as a beam, Poisson's ratio can be ignored.
Even in the case of a plate, Poisson's ratio of metal or ceramic is small and can be neglected
because it is squared. Therefore, here, the Poisson's ratio is assumed to be 0, and rigidity D9I is
determined, and this rigidity is added, and a homogeneous material of thickness t is assumed,
and the Young's modulus E is calculated from The theoretical value and the equivalent density ρ
can be obtained. 2tO 0 0 + t), L L 2 t Q + t −---------(d) to the thickness cIFL of the skin layer
(company) ;; density (jP / ♂) L L of the material of the skin layer Q 3; From the density (f /
.alpha.) of the soot material and from these, it is possible to easily calculate the value of the
acoustic velocity J.sub .--. The physical property values obtained from the above equation are
established under the assumption that the interface between the substrate QI) and the skin layer
(2) is completely bonded and integrated. In the following table, in the case of a test piece with a
thickness of 2P on each side of an AJ substrate QD having a thickness of 80 p and a TAC skin
layer aa as v installed (indicated as AJ + TbC in the table), a TAN skin layer (2) In the case of the
test piece provided with (2) (referred to as Aj + T1N in the table), in the case of the present
invention, the skin layer (2) (2) in which carbides, silicides and carbonitrides of Tb are mixed The
theoretical values and actual values of Young's modulus and sound velocity value in the case of
the provided test piece (denoted as AJ + T =, C, N in the table), actual values of AJ material, TAC
material and TAN material, carbide of Ti And nitrides and carbonitrides are shown together with
theoretical values of materials (referred to as TA, C, N in the table). In addition, in the above table,
theoretical values of materials (1 b, c, N 2) in which carbides, nitrides and carbonitrides of TA are
mixed use a mixture and the ratio of TCC and TAN is 1 = 1 In the case of the present invention,
that is, using the theoretical value in the case of mixing in the case of using the At substrate (2
side of the carbide side nitride and carbide nitride of TA mixed on both sides of the At substrate)
The theoretical value in the case of the test piece provided was calculated. As shown in the above
table, the measured values of the test piece (ht + Tbc) provided with 21 & TAC skin layers (c) and
c) on both sides of the 80 At substrate (21) are based on theoretical values both in Young's
modulus and sound speed Very small. On the other hand, the measured values of the test piece
(AJ + TLN) in which 2P TbN skin layer (2) is provided on both sides of 80P At substrate 0υ are
quite close to the theoretical value.
This is due to the fact that the nitrides are well compatible with A and l, and the compatibility
between AJ and carbides is poor. As evidence, while AJN is in fact one of the fine ceramic group,
the A-t and C intermetallic compounds are often problematic to embrittle CFRM (metal reinforced
carbon fiber) It can be raised. Now, in the case of the present invention, that is, a test piece (AZ +
T =, C, C, provided with a surface layer Q 邊 (2) in which carbides, nitrides and carbonitrides of
2P TA are mixed on the screen of At substrate 01) of 80P. In N 2), the measured values are
closest to the theoretical values and show the best values for both Young's modulus and sound
velocity. This is due to the following reason. Although the compatibility between aluminum (AJ)
and titanium nitride (TLN) is good, titanium nitride (TLN) has poor physical properties compared
to titanium carbide (T = C). The physical properties of titanium carbide (TAC) itself are superior
to titanium nitride (TAN), but its compatibility with aluminum (AJ) is poor. As titanium carbide
(TAC) and titanium nitride (TAN) form titanium carbonitride (TLz Cy Nz) k with each other, the
compatibility is better. Therefore, titanium carbonitride (TA, C, NZ) has an action to improve
compatibility with titanium carbide (TLC) fk: aluminum (Aj) through the action of titanium nitride
(TLN). In the above test piece, the ratio of carbon 0 to nitrogen (to) in carbides, nitrides and
carbonitrides of TL in the skin layer (3) (2) is 1: 1, and the thickness is 2P. By changing this ratio
or thickness, it is possible to obtain a speaker diaphragm having physical properties superior to
those shown in the above table. EFFECT OF THE INVENTION As described above, the speaker
diaphragm of the present invention. For example, since a skin layer made of a mixture of
carbides, nitrides and carbonitrides of titanium (TA) is provided on a low density substrate such
as aluminum (AJ) or magnesium (M), the skin layer is made higher by titanium carbide. In
addition, the skin layer is strongly bonded to and integrated with the substrate by titanium
carbonitride and titanium nitride, and therefore has excellent physical properties as a speaker
diaphragm. Further, in the method of manufacturing a diaphragm for a speaker according to the
present invention, so-called reactive ion bombardment is carried out by performing ion plating of
titanium (TA) in an atmosphere in which a carbon port and nitrogen are present on a substrate
According to the rating, a surface layer of a mixture of carbides, nitrides and carbonitrides of
titanium (TA) is formed on the surface of the substrate, so that production is easy, and the
temperature of the substrate is relatively low. Since the substrate can be held, a material having
relatively low heat resistance such as aluminum (At) or magnesium (M,) can be used, that is, an
easy-to-form material.
Brief description of the drawings
Fig. 1 is an explanatory view of an example of an apparatus used for manufacturing the speaker
diaphragm of the present invention, Fig. 2 is a cross-sectional view of one embodiment of the
speaker diaphragm of the present invention, and Fig. 3 is a speaker of the present invention. It is
a perspective view of the test piece for investigating the physical property of a diaphragm.
One board of ae, (1? la 'n--skin w.
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