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[Object of the Invention] (Industrial field of application) The present invention relates to a
diaphragm for an ultrasonic transducer. (Prior art and its problems) In an ultrasonic vibration
utilizing apparatus such as a cleaning apparatus, for example, as shown in FIG. 1, a diaphragm (2)
in which an ultrasonic transducer (1) is bonded to the-surface is used. Water-tightly attached to
the bottom plate (3α) of the cleaning tank (6) via the buffer material (3b) to radiate ultrasonic
waves to the cleaning liquid (4) in the tank (6). In this case, in view of the fact that the cleaning
liquid (4) is an acid or alkaline liquid, it is generally practiced to use stainless steel having high
chemical resistance as the material of the tank (3) and the imaging plate (2). In the diaphragm
(21, where the cleaning liquid (4) is neutral in the case of city water with the imaging moving
element (1) attached, erosion progress due to vibration is remarkable and active especially in the
case of acid and alkaline liquids. is there. For this reason, a so-called number of holes is
generated on the surface of the diaphragm early and can not be used. In the prior art, therefore,
the surface of the diaphragm (2) is, for example, chrome-plated or thickened. However, the
method by plating extends the time until erosion occurs due to erosion. Not only that, once the
lotion is generated, the effect of the plating is lost to cause rapid erosion. Further, the method of
thickening the plate thickness only extends the time until the holes are formed by the erosion,
and none of these conventional methods is a fundamental solution of the erosion. Therefore, in
the conventional case, in the case of strong acidity, a vibrator is attached to the bottom of the
outer tank using the washing tank as the inner and outer two monks, and a vibrator is attached
to the bottom of the inner tank. For example, a method of transmitting sonic vibrations is taken.
However, this has a disadvantage that the structure of the cleaning tank becomes complicated as
well as the radiation efficiency of the ultrasonic waves decreases, and the cost becomes high.
Therefore, there has been a demand for a diaphragm which exhibits excellent erosion resistance
while satisfying required acoustic parameters such as acoustic intensity transmission even under
severe conditions such as acidic and alkaline liquids, and is particularly desired. The demand is
strong as the opportunities for cleaning increase greatly with the recent development of various
precision industries. The present invention was made for the purpose of providing an ultrasonic
diaphragm that greatly satisfies the above-mentioned requirements, and the details will be
described next. SUMMARY OF THE INVENTION Means and Action for Solving the Problems In
solving the problem of erosion in an ultrasonic diaphragm, it is easy to obtain and has excellent
chemical resistance, and at the same time, it has acoustic strength. It is necessary to use a
material having a transmittance as high as possible, that is, a ratio of acoustic vibration energy
transmitted into the liquid from the diaphragm in contact with the liquid.
Therefore, the inventor of the present invention has already found that resin materials such as
vinyl chloride and polyethylene, which are generally known to have better chemical resistance
than metals, have an erosion attenuation factor 1 which is significantly smaller than that of metal
diaphragms. B / AX + OO (A), A: Weight of diaphragm before test, B: Weight of diaphragm after
test), and also the acoustic intensity transmittance is about 80% to 90% of that of metal The
ultrasonic diaphragm was proposed to be excellent in the erosion resistance by showing that the
value in the range practically usable as a sonic diaphragm is sufficiently shown. The inventor of
the present invention continues to study the use of the resin material for the diaphragm, and as a
result, it is excellent in the availability, the processability and the chemical resistance that are the
necessary conditions for the above-mentioned ultrasonic diaphragm as vinylidene fluoride resin
(PVDF). While meeting the above conditions and at the same time as the above-mentioned resin
in the acoustic strength transmission rate, which is sufficiently practical for use as an ultrasonic
diaphragm, and further has an erosion resistance superior to that of the conventional resin. The
sound wave diaphragm has been realized based on the fact that it is obvious to realize. Table 1
shows the results of experiments on the erosion attenuation rate of fluorinated resin / resin and
other resin materials, and this experiment is an ultrasonic horn (frequency 19.5 KHz) with 20
diameters in order as shown in FIG. Bond a test piece (6) with a thickness of 1 μm to the tip of
+57 (7) and immerse it in city water (18 ° G constant) (9) in container (8), vibration normally
used It is a result obtained by operating for 20 hours at 10 μp = p which is about 10 times of
the amplitude. As is clear from this result, it is shown that the vinylidene fluoride resin is very
excellent in the erosion resistance as compared with other polyethylene and A B S resin
mentioned as an example in comparison with Table 1. In the ultrasonic cleaning apparatus
shown in FIG. 1, the diaphragm (2) is made of vinylidene fluoride resin having a thickness of 3 u
and ABS f1 B oil to a size of 180 M 11 × 240, and the frequency most frequently used is actually
19. According to an experiment that was operated over a period of 2000 hours with a vibration
amplitude of about 1μ using a city water (41 (18 ° C constant) with a 5 KHz ultrasonic
transducer (1), about 10 points with A B S resin Erosion was observed in the case of vinylidene
fluoride resin, while it was not observed at all. Moreover, as described above, since this
experiment is performed at 1 μP-P, which is larger than the vibration amplitude usually used, it
can be said that even if it is operated for a longer time, it hardly causes erosion. In addition, it is
easily suggested that vinylidene fluoride resin exhibits superior erosion resistance to
conventional metals as well as conventional greases from the above experimental results of
municipal water when the cleaning liquid is an acid or alkaline liquid.
(Effects) As is apparent from the above, the vinylidene fluoride resin has high availability, high
processability, and excellent acoustic transmittance, while satisfying various practical conditions
with excellent sound transmittance, and high erosion resistance. Since it is provided, not only
constant corrosion of the ultrasonic vibration plate such as acid but also corrosion resistance by
erosion can be made higher than that of the conventional one. Therefore, not only the ultrasonic
cleaning apparatus but also the ultrasonic vibration can be radiated into the liquid to greatly
contribute to the extension of the life of the apparatus used.
Brief description of the drawings
FIG. 1 is a cross-sectional view showing an example of the ultrasonic cleaning apparatus, and FIG.
2 is a schematic view of an experimental apparatus for obtaining basic data on erosion
(1) ... ultrasonic transducer, (21 ... diaphragm, (51 ... tank, (3cL) ... bottom plate, (4) ... cleaning
liquid, (5) ... ultrasonic Horn, (6) ... test piece, (7) ... bonded part, (8) ... container, (9) ... test
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