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JPS62193400

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This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
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DESCRIPTION JPS62193400
[0001]
The present invention relates to a film fixing structure to which a relatively thin polymer film is
fixed effectively, and a vibration sensor using the film fixing structure. Attempts have been made
to construct a vibration sensor using the excellent dit (piezoelectric coefficient of elongation) of a
piezoelectric polymer film. However, these attempts do not always produce satisfactory results
because, in order to perform vibration detection with high sensitivity using d and 1, constant
tension is previously applied to the piezoelectric polymer film It is necessary to be in a situation
where tension change caused by vibration occurs. However, depending on the tension application
means by weight etc. conventionally attempted, the inertia caused by the weight causes the
polymer film to creep and the tension is lost in a relatively short time, resulting in accurate
vibration detection. There were a lot of runs out. The present inventors have attempted to use a
spring metal sheet as a method of applying tension to a piezoelectric polymer film, and as shown
in FIG. 1, electrode films are provided on both sides of the piezoelectric polymer film. The both
ends of the piezoelectric film element 10 are fixed to the pair of springy thin metal sheets 2a and
2b using the insulating plate 5 and the bolt 3 and the nut 4, respectively, and tension is applied
to the piezoelectric film element 10 to lead wires 5a and 5b. The vibration sensor of the form
which takes out the piezoelectricity of the elongation which arises on both surfaces of the
piezoelectric film element 10 from it was made as an experiment. However, even in this case,
although the initial sensitivity is excellent, the momentary change of the output due to the creep
of the polymer film can not be avoided because the inertial force by the bolt 3 and the nut 4 can
not be ignored. Difficulties such as the difficulty of controlling the tension and the difficulty of
controlling the tension were included. In view of the problems described above, it is an object of
the present invention to make it easy to fix while applying tension to a polymer film susceptible
to creep deformation and to control the tension easily. An object of the present invention is to
provide a film fixing structure which can be fixed while stably applying tension to a polymer film.
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1
Another object of the present invention is to provide a vibration sensor capable of detecting
vibration with high sensitivity and stability by using dit by adopting the above-described film
fixing structure. The film fixing structure of the present invention is developed to achieve the
above-mentioned object, and more specifically, a polymer film is wound around a solid core and
further grasped by a metal sheet. It is characterized by The vibration sensor of the present
invention is a high sensitivity vibration sensor utilizing d 31 incorporating the above-described
film fixing structure, and more specifically, a piezoelectric film element having electrode films
provided on both sides of a piezoelectric polymer film. The ends of both sides are wound around
each of a pair of solid core members on opposite sides, and further gripped and fixed by the ends
of a pair of thin metal plates, while applying stress to the piezoelectric polymer film It is
characterized in that an electrical output can be taken out from both sides of the piezoelectric
polymer film from the both sides of the piezoelectric polymer film through a pair of gold arXl
plates.
Hereinafter, the present invention will be described in more detail with reference to the
accompanying drawings. FIG. 2 is a partial sectional view in the thickness direction of the film
showing a preferred embodiment of the film fixing structure of the present invention. This film
fixing structure is formed by winding one end of the polymer film 1 around the solid core 6 and
further holding it by one end of the thin metal plate 2. As the polymer film 1, although nonpiezoelectric films such as polyethylene, polypropylene, polyethylene terephthalate,
polyvinylidene fluoride, polyvinyl chloride and the like are also used, piezoelectric polymer films
such as a polyvinylidene fluoride film subjected to polarization treatment are preferable. In
particular, in order to form a vibration sensor, as shown in FIG. 3, such a piezoelectric polymer
film la (for example, a single layer having a thickness of 2 to 100 μm, 4 to 200 pm in a form
laminated via an adhesive) A1) having a thickness of about 0.01 to 5 Bm by vapor deposition,
coating of a conductive paint, etc. on both sides of It is preferable to use in the form of a
piezoelectric film element lO provided with an electrode Mlb made of Ni, Cu, Cr or the like, and
basically as the solid core 6. It consists of various solid materials such as various plastics and
metals. The form of a round bar is preferable, and in order to give particularly good fixability of a
polymer film, it is preferable to use a flexible or elastic material preferably made of various
rubbers or plastics etc. The piezoelectric film having the dimensions as described above is
preferable. When used in combination with the element, one having a diameter of about 1 to 20
mm is preferably used. The metal thin plate 2 is preferably made of a material such as phosphor
bronze having spring elasticity, copper, nickel, stainless steel, etc., and when using the
piezoelectric film element having the above dimensions in combination, the thickness is 0. 0. The
thing of about 05-2 mm is used preferably. Further, in order to provide a film fixing structure as
shown in FIG. 2, one end of the thin metal plate 2 is formed in a ring or a cylindrical shape in
which a part is opened, and the polymer film 1 ( Or the piezoelectric film element lO) is inscribed
and the diameter of the metal sheet 2 is slightly expanded by utilizing the elasticity of the thin
metal plate 2. The method of inserting is preferably used. Next, the above-described film fixing
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structure of the present invention will be described by taking a vibration sensor as a preferred
mode of use thereof as an example. Such a vibration sensor. For example, as shown in FIG. 4, the
above-mentioned film fixing structure of the present invention is adopted only at one end (left
end in the figure) of the strip-shaped piezoelectric film element 10 to be fixed, The elastic or rigid
metal support piece 8 fixed upright on the support base 7 may be attached, for example, with an
epoxy-based conductive adhesive, in which case the upper surface of the piezoelectric film
element 10 is held in contact with it. The elastic metal thin plate 12a is fixed at the other end to
the support 7 using the port 31, and the lead wire 5a is further connected to take out the electric
output from the upper surface of the piezoelectric film element 10.
On the other hand, from the lower surface of the piezoelectric film element 10, an electrical
output is taken out via the support piece 8 and the lead wire 5b in contact therewith. The
support base 7 is bonded and fixed to a vibration detection object (not shown), for example, and
transmits the vibration to the piezoelectric film element 10 through the thin metal plate 12a or
the metal support piece 8, and the vibration is detected by piezoelectricity due to its expansion
and contraction. It will be done. However, in order to provide more stable tension, ease of
fixation, and good detection sensitivity, the vibration sensor of the present invention in which the
above-described film fixing structure of the present invention is applied to both sides of the
piezoelectric film element lO Preferably, FIG. 5 shows an example thereof. In this example, a strip
of piezoelectric film! The element 10 is wound around a pair of flexible core members 6a and 6b
on opposite surfaces of both ends, and these wound portions are further held so as to be wound
by one end of each of the pair of elastic metal thin plates 12a and 12b. Be done. The other ends
of the thin metal plates 12a and 12b are fixed to the support 7 by a pole 31 in a state of being
electrically insulated from each other. At the time of vibration detection, this vibration sensor is
fixed to a detection target (not shown) via the support base 7, and the vibration is transmitted to
the piezoelectric film element 10 through the thin metal plates 12a and 12b. Piezoelectricity
produced by expansion and contraction of the piezoelectric film element lO is taken out from the
upper surface thereof through the thin metal plate 12a and the lead wire 5a connected thereto
and from the lower surface of the piezoelectric film element 10 through the thin metal plate L2b
and the lead wire 5b Vibration is detected. The tension applied to the strip-shaped piezoelectric
film element 10 is suitably about 10 to 1000 g / m m '. In an example in which the configuration
of FIG. 5 is adopted, polyethylene terephthalate core materials 6a and 6b of PL 2 mm are used.
The piezoelectric film element lO is a strip having a width of about 2 mm and an Al electrode film
of 0.08 lm provided on both sides of a polyvinylidene fluoride film having a thickness of 9 gm.
The above-mentioned core materials 6a and 6b were wound to form a vibration detection unit
having an effective length of 2.0 mm. These wound portions are gripped by phosphor bronze
metal thin plates 12a and 12b having a thickness of 60 JLm and a width of 3 mm, and fixed to
the support base 7 so that a tension of about 200 g / m 2 is applied to the piezoelectric film
element 10. The vibration sensor was configured. When vibration with an amplitude of 0.8 gm at
600 Hz and an amplitude of 0.2 pm with 1000 Hz were applied in the longitudinal direction
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through the support 7 to the vibration sensor, 180 mV and 180 mV (7) outputs were obtained,
respectively.
Although the film fixing structure of the present invention is mainly described in the abovementioned example about the vibration sensor which is a preferable embodiment thereof, the
film fixing structure of the present invention is also applicable to, for example, a creep test and a
torsional elastic modulus. In the case of supporting and fixing while applying a minute tension to
a relatively thin polymer film, it can be widely used suitably. 11) As described above, according
to the present invention, a film fixing structure capable of stably applying tension to a polymer
film susceptible to creep deformation and controlling the tension while controlling the tension,
and the same are incorporated. A highly sensitive vibration sensor is provided that utilizes the
d31 piezoelectric coefficient.
[0002]
Brief description of the drawings
[0003]
FIG. 1 is a schematic positive cross-sectional view of a vibration sensor previously developed by
the present inventors, FIG. 2 is a sectional view in the film thickness direction of one embodiment
of the film fixing structure of the present invention, and FIG. 4 and 5 are front sectional views of
a vibration sensor adopting the film fixing structure according to the present invention and a
vibration sensor according to the present invention, respectively.
1: Polymer film (la: piezoelectric polymer film). tb: electrode film. 2a, 2b, 12a, 12b...-Sheet metal,
5a, 5b-Lead wire, 6.6a, 6b-Solid core material. 7 ・ ・ ・ Support. 8 ・ ・ ・ metal stubs. lO:
Piezoelectric film element. ΩJ: Fig. 5 Fig. 1 Fig. 1 Fig. 2 Fig. 3 Fig. 4 Fig. 5
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