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JPS63217800

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DESCRIPTION JPS63217800
[0001]
FIELD OF THE INVENTION This invention relates to a condenser microphone (= a diaphragm
used and a method of manufacturing the same. "Prior art" A conventional condenser microphone
is shown in FIG. The peripheral portion of the vibrating membrane 15 is held by the hook 13.14.
The cylindrical push-up tool 16 is pressed against the back surface of the vibrating membrane 15
toward the nI direction. A mother screw 17 is formed on the inner peripheral surface of the
housing 11, and a ring screw 18 is screwed to the mother screw 17 to press and fix the
membrane holding ring 13 ° 14 forward, and further a ring screw 19 ° 21 Is screw-connected
to the mother screw 17, and the push-up tool 16 is pressed against the vibrating membrane 15
by the ring-shaped screw 19 ° 21. A desired tension is given to the vibrating membrane 15 by
this pressing. Vibrating membrane 15. A back electrode 22 is disposed between the back surface
of the back plate and a close pair, the back of the back electrode 22 is held by a ring-shaped
holder 23 made of insulating material, and the holder 23 is held by a ring screw 24 screwed with
a mother screw 17 Be done. A terminal 25 is attached to the back electrode 22. A grid 26 is
covered on the front of the housing 11. An electret film 27 is deposited on the back electrode 22
so as to face the vibrating film 15. [Problems to be Solved by the Invention] The diaphragm 15 of
the conventional condenser microphone is pushed by the push-up tool 16 to obtain a
predetermined tension, and the push-up tool is built in the capacitor micro-bon. Therefore, there
is a disadvantage that the shape of the condenser microphone is large, which makes the
assembly troublesome and expensive. In addition, since the vibrating membrane 15 is fitted
between and bonded to the retaining ring 13.14, the tension of the vibrating membrane 15 is
easily relaxed. Since the push-up tool 16 is held by the casing 11, the vibrating membrane 15
does not fluctuate in tension of the vibrating membrane 15 due to the fluctuation of the ambient
temperature. The push-up tool 16 and the housing 11 have to be made of the same material. In
addition, even if fixed by two screws 19.21, the push-up state of the push-up tool 16 changes.
12-05-2019
1
There was a possibility that the tension of the vibrating membrane 15 might change. [Means for
Solving the Problems] According to the present invention, a vibrating membrane is provided
between the first ring and the second ring, and tension is applied to the vibrating membrane, and
the first ring and the second ring are provided. And the vibrating membrane are electron beam
welded. Because of such a configuration, it is not necessary to use a push-up tool for applying
tension to the vibrating membrane, and the number of parts can be reduced and the size can be
reduced. In particular, the first ring can also be used as the housing of the microphone, in which
case the size can be further reduced.
Further, according to the present invention, the jig wood (the peripheral portion of the X-ray
vibrating film is held, and the first ring is pushed by the push-up tool engaged with the jig body
to apply tension to the vibrating film. In this state, the vibrating membrane is crimped by the first
ring and the second ring, and then the first ring and the second ′ ′ ring are electron beam
welded to the vibrating membrane. In this way, a vibrating membrane is encased in the first ring
and the second ring, and a vibrating plate is obtained without tensioning using a push-up tool.
Furthermore, according to another aspect of the present invention, the vibrating membrane is
drawn by the first ring and the second ring, and the first ring and the second ring and the
vibrating membrane are welded by an electron beam, and then the first ring and the first ring 2
Expand the diameter of the ring and apply tension to the vibrating membrane. Also in this case,
the obtained diaphragm is tensioned without providing a push-up tool. Also, the first ring may
double as the microphone housing. [First Embodiment] A first embodiment of the diaphragm
manufacturing method according to the present invention will be described with reference to
FIG. First, a vibrating film 15 of a metal such as titanium, a titanium alloy, a nickel alloy or the
like having a thickness of about 1 to 6 μm is first held by the jig main body 31 at its peripheral
portion. In this example, the jig main body 31 has a cylindrical shape, and a flange 32 is
integrally formed on the inner peripheral surface of the front surface thereof, and the peripheral
portion of the vibrating film 15 is suppressed by the film holding ring 33 on the back surface of
the flange 32. A mother screw 34 is formed on the inner peripheral surface of the jig body 31, a
screw on the outer peripheral surface of the fixing ring 35 is screwed to the mother screw 34,
and the film holding ring 33 is held by the collar 32 by the fixing ring 35. Thus, the vibrating film
15 is held and fixed to the jig body 31. Next, the first ring 37 is pressed against the vibrating
membrane 15 by the push-up tool 36 engaged with the jig body 31 to apply tension to the
vibrating membrane 15. The push-up tool 36 has a tubular shape, the first ring 37 is positioned
and disposed on the front end face, the screw collar 38 is integrally formed on the rear end outer
peripheral surface, and the outer peripheral surface screw of the screw 38 is a mother screw
Screw connection with 34. The first ring 37 can be pushed forward by pivoting the push-up tool
36. Thus, the first ring 37 is pushed forward until the tension limit of the vibrating membrane
15. In this state, as shown in FIG. 1C, the second ring 39 is disposed opposite to the first ring 37
with the vibrating film 15 in between, that is, the vibrating film 15 is pinched by the first ring 37
and the second ring 39. Well. The second ring 39 is held to the first ring 37 side by the aid 41.
12-05-2019
2
As shown in the first [JC] state, as shown in FIG. 1 ((1 vacuum chamber 42, a vacuum atmosphere
of about 1 × 10 ′ ′ Torr is provided, and in this state the boundary between the diaphragm
15 and the second ring 39 'The electron beam (spot diameter is less than 0.3 words) 43 is
irradiated, and the whole of the jig body 31, the auxiliary tool 41, etc. is rotated about its axis to
form the vibrating film 15, the first ring 37 and The second ring 39 is electron beam welded
around its entire circumference.
The irradiation time of the electron beam at one point may be about 1 second. Vibration II so that
this welding is done well. It is desirable that 15 and the first ring 37 and the second ring 39 be
the same material. Thus, the vibrating membrane 15 is integrated with the first ring 37 and the
second ring 39 without changing the tension of the vibrating membrane 15 with the tension
applied before welding. The vibrating membrane 15 held by the first ring 37 and the second ring
39 is given a desired tension without using other tension applying means such as a push-up tool.
Second Embodiment FIG. 2 shows an example in which the first ring 37 doubles as a micro pump
body and is a diagram corresponding to the first embodiment. That is, the first ring 37 has a
cylindrical shape in this example. The example which comprised capacitor | condenser microbon
using the 1st ring which doubles as this housing is shown later. Third Embodiment As shown in
FIG. 3A, the first ring 37 is disposed on the first fixing jig 45, the vibrating film 15 is disposed on
the first ring 37, and the vibrating film 15 is interposed. The second ring 39 is disposed on the
first ring, and the @ 2 fixing jig 46 is disposed on the second ring 39. Thus, the vibrating
membrane 15 is held between the first ring 37 and the second ring 39 in a state where no
tension is applied. In this state, it is placed in a vacuum chamber 42 of about 1 × 10 2 Torr, and
the electron beam 43 is irradiated to the contact point with the first ring 37 or the second ring
39 and the fixing jigs 45 and 46 are rotated. Thus, the vibrating film 15 and the first ring 37 and
the second ring 39 are electron beam welded. Thereafter, the first ring 37. The diameter of the
second ring 39 is pushed and spread to apply a predetermined tension to the vibrating
membrane 15. For example, as shown in FIG. 3B, auxiliary jigs 47 and 48 each having a
cylindrical shape and having a small diameter portion whose end diameter is made small are
prepared. The small diameter portion is the first ring 37. In the second ring 39, the expansion jig
51.degree. 52, which is fitted and inserted into the second ring 39 and has an end portion C1 in
the auxiliary jig 47.degree. 48, is pushed in, and the circumferential surface of the truncated cone
portion The first ring is pushed through the auxiliary jig 51 ° 52 by being pushed into the
boundary edge between the large diameter portion and the small diameter portion in the
auxiliary jig 47. 48 and pushing the expansion jig 51. 52 closer to each other. 37, the valley
diameter of the second ring 39 is enlarged, and the vibrating membrane 15 is tensioned. In order
to enlarge the diameter and apply tension as described above, the vibrating film 15 and the first
ring 37. A titanium alloy β-type crystal structure is suitable as the second ring 39 in that it is
easy to expand.
12-05-2019
3
In any of the above cases, the frequency band of the microphone can be freely selected by
selecting the tension applied to the vibrating membrane 15. [First Example of Microphone] FIG. 4
shows an example of a condenser microphone using the diaphragm obtained in the embodiment
shown in FIG. 1 or FIG. The diaphragm 55 in which the diaphragm 15 is drawn by the first ring
37 and the second ring 39 and welded by electron beam welding is in contact with the inner
surface of the collar 12 of the housing 11. A back electrode 22 is disposed to face the vibrating
membrane 15, and an electret film 27 is attached to the back pole 22 to face the vibrating
membrane 15. The back electrode 22 is fitted and held on the front surface and the inner
circumferential surface of the ring-shaped holder 23 made of an insulating material, and the first
ring 37 is fitted and held on the front surface and the outer circumferential surface of the holder
23 via the spacer 56 . The auxiliary ring 57 is fitted and held on the back surface and the outer
peripheral surface of the holder 23, and the ring-shaped screw 24 is pressed against the back
surface of the auxiliary ring 57. The ring-shaped screw 24 is screwed to the mother screw 17 of
the housing 11. A notch 58 is formed in the first ring 37, and the notch 58 forms a passage 59
between the spacer 56 and the back chamber of the back electrode 22. This passage 59 is
formed of a casing 11 (= vent formed It communicates with the outside through 61. Between the
holder 23 and the terminal 25 (a double washer 62 is interposed. "Second Example of
Microphone" An example of a condenser microphone using the diaphragm obtained from
Example C2 shown in FIG. 2 is shown in FIG. 5 with the same reference numerals as in FIG. . The
first ring 37 is formed in a cylindrical shape, and the first ring 37 doubles as a microphone
housing, and the back electrode 22. A holder 23 for holding this is disposed, and an auxiliary
ring 57 is also accommodated. A mother screw 17 is formed at the rear of the inner
circumferential surface of the first ring 37, and a ring screw 24 is screwed to the mother screw
17, and the back pole 22 is held by the first ring 37. A grid 26 facing the front surface of the
vibrating membrane 15 is covered with the first ring 37. [Effects of the Invention] As described
above, according to the present invention C, as the vibrating membrane is entrained and welded
to the first ring and the second ring in a tension applied state, the vibrating membrane C is given
tension in the microphone Because of this, the number of parts of the microphones is reduced,
and two parts can be easily assembled and made compact and inexpensive (one can be made.
When the microphone ring is used for the first ring, the number of parts is further reduced. It
can be made smaller and cheaper.
Since the vibrating film is entrained between the first ring and the second ring and electron beam
welding is performed, the tension of the vibrating film is not easily relaxed and is maintained at a
predetermined value. In the first embodiment and the third embodiment, it is possible to use
titanium, a titanium alloy as the diaphragm, a stainless steel as the casing, and other suitable
ones having different thermal expansion coefficients.
[0002]
12-05-2019
4
Brief description of the drawings
[0003]
FIG. 1 is a cross sectional view showing the steps of the first embodiment of the manufacturing
method according to the present invention, FIG. 2 is a cross sectional view corresponding to the
first plan in the second embodiment of the present invention, and FIG. FIG. 4 is a cross-sectional
view showing the steps of the three embodiments, FIG. 4 is a cross-sectional view showing an
example of a condenser microphone using the diaphragm obtained by the first or third
embodiment of the present invention, and FIG. FIG. 6 is a cross sectional view showing an
example of a condenser microphone using a diaphragm obtained by the second embodiment of
the present invention, and FIG. 6 is a cross sectional view showing a conventional condenser
microphone.
Patent applicant: Seiji Electric Manufacturing Co., Ltd. Representative: Taku Kusano 1 Fig. A is
"1st, 1st august of 36 moons in 1st year in 1st class.
12-05-2019
5
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