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JPS63226199

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DESCRIPTION JPS63226199
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a
diaphragm for a speaker, and more particularly to an acoustic diaphragm most suitable as a
diaphragm of a tweeter or a speaker for a squawker. (B) Conventional technology As an acoustic
diaphragm conventionally used conventionally, for example, a cellulose fiber and a thermosetting
resin are mixed to form a sheet-like green sheet, which is heated to a diaphragm shape by a
mold. An acoustic diaphragm having a graphite structure in which carbon atoms are arranged in
a six-ring cyclic arrangement by primary carbonization of several hundreds of dust and main
baking after several hundred degrees after forming is known. This graphite diaphragm is
effective in increasing the specific elastic modulus, which is the ratio (E / ρ) of Young's modulus
E to density ρ, and can increase the frequency at which the piston vibrates and expand the high
frequency reproduction limit. . (C) Problems to be Solved by the Invention However, in the abovementioned prior art, the arrangement structure of atoms is limited in order to replace carbon
atoms by heating, and as a speaker diaphragm, its internal loss tan δ And the ratio (E / .rho.) Of
the Young's modulus E to the density .rho. Is not sufficient, so that there is a problem that the
resonance in the high range is remarkable. In addition, since the surface of the diaphragm
becomes rough due to the firing, there is a problem in that mass productivity is lacking such as
the need for polishing finish. This invention is made in view of the above-mentioned point, and
forms a surface layer in glassy carbon which created a diaphragm base material by calcination,
and it is ratio (E / rho) of Young's modulus E and density rho, It is an object of the present
invention to provide an acoustic diaphragm in which the performance of the internal loss (tan δ)
is improved and the appearance defects are also eliminated. (D) Means for Solving the Problem
The acoustic diaphragm according to the present invention comprises boron nitride (BN)
including titanium nitride (TIN) on one side or both sides of a glassy carbon diaphragm substrate.
A surface layer composed of a nitrogen compound of silicon nitride (Si 31 L) and aluminum
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nitride (eight ff 1 N) is formed using a reactive ion plating method. (E) Function A surface layer
made of a nitrogen compound such as titanium nitride is formed on the surface of a diaphragm
substrate made of crowbar-like carbon, and a diaphragm for a loudspeaker such as a dome shape
is molded. The diaphragm thus obtained has a density of, for example, 1.57 × 10 3 Kg / m 3 and
sufficient effects can be obtained even if the surface layer is extremely thin, so the weight is
increased and the internal loss is also increased. It is possible to obtain a diaphragm having
extremely excellent range characteristics.
(F) Embodiment An embodiment of the acoustic diaphragm according to the present invention
will be described based on FIGS. 1 to 4. FIG. FIG. 1 shows a cross-sectional view of a domeshaped acoustic diaphragm and shows an embodiment in which surface layers 1a and Ib are
formed on both sides of a glassy carbon diaphragm 1, respectively. FIG. 2 is a cross-sectional
view of a dome-shaped acoustic diaphragm showing another embodiment, in which a surface
layer 1a is formed on one side of a diaphragm 1 made of glassy carbon. FIG. 3 shows a schematic
block diagram of a reactive ion plating apparatus used when forming the acoustic diaphragm of
the present invention. FIG. 4 is a frequency characteristic diagram comparing an acoustic
diaphragm according to the present invention with a conventional acoustic diaphragm. The
embodiment shown in FIGS. 1 and 2 is a dome-shaped diaphragm, which is made of titanium
nitride on both sides (FIG. 1) or one side (FIG. 2) of a glassy carbon diaphragm substrate l. First,
surface layers 1a and 1b made of nitride compounds of boron nitride, silicon nitride and
aluminum nitride are formed by a reactive ion plating method. Hereinafter, an example in which
titanium nitride is used as a material for forming the surface layers 1a and 1b will be described.
It is a well-known method to use the glassy car-phone-made diaphragm base 1 as a base of the
diaphragm. However, since the acoustic characteristics differ depending on the material and the
conditions for firing, the implementation was performed under the following conditions. ■
Cellulose fiber; Melt Kraft paper ■ Fiber length; 5 to 10 m / In ■ Thermosetting resin: Phenolic
resin ■ Compounding ratio; Cellulose fiber carbide / Thermosetting resin carbide = 30/100 ■
Material shape; Sheet thickness 50 μm ■ form; dome shape 150 'c, 50 kg, heating for 10
minutes ■ primary firing: 350 ° C heating rate 1.5 ° C / hour ■ secondary firing; troo ° C
heating rate 50 ° C / Time n Zero atmosphere; Argon Under the above conditions, the glassy
carbon diaphragm base 1 is prepared, and a reactive ion plating apparatus as shown in FIG. 3 is
used on both sides or one side of the substrate 1. , And titanium nitride surface layer 1a, lb were
formed. The reactive ion plating apparatus shown in FIG. A probe 6, a filament 7, a shutter 8 and
the like are provided, and a gas such as nitrogen or argon is fed from an inlet 9. Reference
numeral 1 denotes a glassy carbon diaphragm base material which forms the surface layers 1a
and Ib, and 5 denotes an evaporation material (in this case, titanium) for the surface layer la and
lb set in the crucible 4. The conditions for producing the surface layers 1a and 1b using the
reactive ion plating apparatus shown in FIG. 3 are as follows.
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{Circle over (2)} The glassy carbon diaphragm base 1 is washed and set so that the surface layer
is formed on both sides of the base 1. ■ Evacuated exhaust; 1 0-6 Torr or less ■ Ion
bombardment; Argon ambient air 5 x 1 0-2 Torr ■ Reactive ion plating; Evaporation source
titanium (Ti) electron gun 10 Kw reaction residue -'Torr evaporation rate 0.5 g / min ■ Surface
layer: titanium nitride 8000 (person) ■ Cooling; natural cooling for 30 minutes Leaving the
acoustic physical constants according to the above example for 30 minutes Next, the vibration
diaphragm The specific manufacturing process will be described. First, reactive ion plating on the
glass substrate 1 made of glass like carbon cleans the glass substrate made of glassy carbon 50
having a thickness of 50 μm, and the vacuum of the reactive ion plating apparatus shown in FIG.
After depressurizing the inside of the tank 2 to 10 -6 Torr, argon ion irradiation is performed at a
direct current of 500 ■ in a 1-2 Torr argon atmosphere. The deposition is performed at a
vacuum degree of 5.times.10@- Torr (argon + nitrogen; mixed residue), the evaporation rate of
titanium is 0.5 g / min, and the deposition rate of titanium nitride (TiN) is 400 (person) 7 min. In
this way, the surface layers 1a and Ib of titanium nitride are formed on the surface of the glassy
carbon diaphragm substrate 1, and after natural cooling, the dome-shaped diaphragm is
completed. In addition, in the case of a cone type, a planar type, etc., it can form similarly. The
dome-shaped diaphragm thus obtained has a density of 57 × 103 Kg / [[13], and the surface
layers 1a and Ib are thin and lightweight, and the internal loss is also increased, as shown in FIG.
It is possible to obtain a diaphragm having an extremely superior high-frequency characteristic,
such as the high-frequency characteristic ◎ of the dome-shaped diaphragm according to the
present invention, compared to the high-frequency characteristic 2 of the speaker. As a method
of forming the surface layers 1a and Ib, the following method can be considered in addition to
the above-described embodiment. (2) A method of forming a surface layer composed of a
nitrogen compound by vacuum evaporation. (2) A method of forming a surface layer composed
of a nitrogen compound using a chemical vapor deposition (C, V, D) method. (2) A method of
forming a surface layer comprising a nitrogen compound using electroless plating. (2) A method
of measuring the crystallization in glassy carbon by raising the firing temperature of the
diaphragm substrate. (G) Effects of the Invention According to the acoustic diaphragm of the
present invention, the surface layer made of a nitrided inorganic material such as titanium nitride
is formed on the low density glassy carbon diaphragm base material. By the significant
improvement of the constant, it is possible to improve the frequency characteristic in the high
range.
As a result, the diaphragm exerts an excellent effect particularly as a diaphragm for tweeter and
squawker speakers. In addition, since the surface of the diaphragm substrate is covered with the
inorganic nitride material, it is possible to prevent pinholes in the diaphragm substrate without
special treatment, and to simplify the manufacturing process of the diaphragm. it can. As
described above, since the mass productivity is also good, it is possible to provide a diaphragm
having an excellent effect without increasing the cost.
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[0002]
Brief description of the drawings
[0003]
1 to 4 show an embodiment of the present invention, and FIGS. 1 and 2 are cross-sectional views
of a dome-shaped diaphragm, and FIG. 3 is a reactivity used in forming a surface layer. It is a
schematic block diagram of an ion plating apparatus.
FIG. 4 is a characteristic diagram comparing the acoustic diaphragm according to the present
invention with the conventional acoustic diaphragm and high frequency characteristics. l Glasslike carbon diaphragm base material la, lb; surface layer 2: vacuum chamber 3: electron beam 4
cantilever 5: evaporation material (example: titanium) 6: probe 7: filament 8: shutter 9: inlet
patent application Person Kenwood Corporation Figure 1 113 Figure 4
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